Patents by Inventor Haiting Wang

Haiting Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12648171
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a wraparound gate structure and methods of manufacture. The structure includes: a channel region comprising semiconductor material; an isolation structure surrounding the channel region; a divot within the isolation structure; and a gate structure comprising gate material within the divot and surrounding the channel region.
    Type: Grant
    Filed: May 23, 2023
    Date of Patent: June 2, 2026
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: John L. Lemon, Hong Yu, Haiting Wang, Hui Zhan
  • Publication number: 20260150331
    Abstract: A laterally diffused field effect transistor (LDFET) and a related method are disclosed. The LDFET includes a substrate having a fin region and a planar region adjacent to the fin region. The LDFET also includes a source region in the fin region, a drain region in the planar region, a channel gate over the fin region and the planar region, and a drain extension region in the planar region between the source region and the drain region. The use of a substrate with a fin region for the source region and the channel of the channel gate and a planar region for the drain region and the drain extension region provides many of the benefits of both types of substrates for the LDFET.
    Type: Application
    Filed: November 26, 2024
    Publication date: May 28, 2026
    Inventors: Rahul Ghattamaneni, Haiting Wang
  • Patent number: 12495575
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a multi-channel replacement metal gate device and methods of manufacture. The structure includes: a fully depleted semiconductor on insulator substrate; a plurality of fin structures over the fully depleted semiconductor on insulator substrate; and a metal gate structure spanning over the plurality of fin structures and the fully depleted semiconductor on insulator substrate.
    Type: Grant
    Filed: June 2, 2022
    Date of Patent: December 9, 2025
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu
  • Patent number: 12389627
    Abstract: A structure is provided, the structure comprising a substrate and a first silicon germanium fin over the substrate. A first silicon germanium layer may be arranged in the substrate, whereby the first silicon germanium layer may be coupled to the first silicon germanium fin. A second silicon germanium layer may be arranged in the substrate, whereby the second silicon germanium layer may be coupled to the first silicon germanium fin.
    Type: Grant
    Filed: December 16, 2021
    Date of Patent: August 12, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Hong Yu, Haiting Wang, Zhenyu Hu
  • Patent number: 12389616
    Abstract: Structures for a transistor and methods of forming a structure for a transistor. The structure includes a first dielectric spacer, a second dielectric spacer, and a gate laterally between the first dielectric spacer and the second dielectric spacer. The gate includes a first silicide layer extending from the first dielectric spacer to the second dielectric spacer. The structure further includes a second silicide layer within the first silicide layer, and a contact that is aligned to the second silicide layer.
    Type: Grant
    Filed: February 11, 2022
    Date of Patent: August 12, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Man Gu, Hong Yu, Jianwei Peng, Haiting Wang
  • Patent number: 12349459
    Abstract: Device structures for a high-voltage semiconductor device and methods of forming such device structures. The structure comprises a semiconductor substrate including a trench, and a field-effect transistor including a first and second source/drain regions in the semiconductor substrate, a gate dielectric inside the trench, and a gate on the gate dielectric. The gate and the gate dielectric are disposed laterally between the first and second source/drain regions.
    Type: Grant
    Filed: October 7, 2024
    Date of Patent: July 1, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Man Gu, Haiting Wang
  • Patent number: 12295161
    Abstract: An IC structure that includes a trench isolation (TI) in a substrate having three portions of different dielectric materials. The portions may also have different widths. The TI may include a lower portion including a first dielectric material and having a first width, a middle portion including the first dielectric material and an outer second dielectric material, and an upper portion including a third dielectric material and having a second width greater than the first width. The first, second and third dielectric materials are different.
    Type: Grant
    Filed: January 24, 2022
    Date of Patent: May 6, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Rong-Ting Liou, Man Gu, Jeffrey B. Johnson, Wang Zheng, Jagar Singh, Haiting Wang
  • Patent number: 12272740
    Abstract: Structures for a bipolar junction transistor and methods of fabricating a structure for a bipolar junction transistor. The structure includes a collector having a first semiconductor layer, an emitter having a second semiconductor layer, an intrinsic base including nanosheet channel layers positioned with a spaced arrangement in a layer stack, and a base contact laterally positioned between the first and second semiconductor layers. Each nanosheet channel layer extends laterally from the first semiconductor layer to the second semiconductor layer. Sections of the base contact are respectively positioned in spaces between the nanosheet channel layers. The structure further includes first spacers laterally positioned between the sections of the base contact and the first semiconductor layer, and second spacers laterally positioned between the sections of the base contact and the second semiconductor layer.
    Type: Grant
    Filed: December 15, 2021
    Date of Patent: April 8, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu
  • Patent number: 12261215
    Abstract: A structure is provided, the structure may include an active layer arranged over a buried oxide layer, the active layer having a top surface. The top surface of the active layer may have a first portion and a second portion. A barrier stack may be arranged over the first portion of the top surface of the active layer. The barrier stack may include a barrier layer. The second portion of the top surface of the active layer may be adjacent to the barrier stack. A fin may be spaced from the first portion of the top surface of the active layer by the barrier stack, the fin having a first side surface, a second side surface opposite to the first side surface and a top surface. A dielectric layer may be arranged on the first side surface, the second side surface and the top surface of the fin, and the second portion of the top surface of the active layer. A metal layer may be arranged over the dielectric layer.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: March 25, 2025
    Assignee: GlobalFoundaries U.S. Inc.
    Inventors: Hong Yu, Haiting Wang, Zhenyu Hu
  • Patent number: 12205949
    Abstract: Device structures for a high-voltage semiconductor device and methods of forming such device structures. The structure comprises a semiconductor substrate and a layer stack including a first dielectric layer and a second dielectric layer. The first dielectric layer is positioned between the second dielectric layer and the semiconductor substrate. The structure further comprises a field-effect transistor including a first source/drain region in the semiconductor substrate, a second source/drain region in the semiconductor substrate, and a metal gate on the layer stack laterally between the first source/drain region and the second source/drain region. The second dielectric layer is positioned between the metal gate and the first dielectric layer. A contact extends through the layer stack to the first source/drain region.
    Type: Grant
    Filed: June 28, 2024
    Date of Patent: January 21, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Zhenyu Hu, Hong Yu, Haiting Wang
  • Publication number: 20250022915
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a device with a vertical nanowire channel region and methods of manufacture. The structure includes: a bottom source/drain region; a top source/drain region; a gate structure extending between the bottom source/drain region and the top source/drain region; and a vertical nanowire in a channel region of the gate structure.
    Type: Application
    Filed: September 27, 2024
    Publication date: January 16, 2025
    Inventors: Ali RAZAVIEH, Haiting WANG
  • Patent number: 12170315
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a device with a vertical nanowire channel region and methods of manufacture. The structure includes: a bottom source/drain region; a top source/drain region; a gate structure extending between the bottom source/drain region and the top source/drain region; and a vertical nanowire in a channel region of the gate structure.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: December 17, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Ali Razavieh, Haiting Wang
  • Patent number: 12159926
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.
    Type: Grant
    Filed: September 27, 2023
    Date of Patent: December 3, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Haiting Wang, Alexander Derrickson, Jagar Singh, Vibhor Jain, Andreas Knorr, Alexander Martin, Judson R. Holt, Zhenyu Hu
  • Publication number: 20240395932
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a wraparound gate structure and methods of manufacture. The structure includes: a channel region comprising semiconductor material; an isolation structure surrounding the channel region; a divot within the isolation structure; and a gate structure comprising gate material within the divot and surrounding the channel region.
    Type: Application
    Filed: May 23, 2023
    Publication date: November 28, 2024
    Inventors: John L. LEMON, Hong YU, Haiting WANG, Hui ZHAN
  • Patent number: 12107154
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to single fin structures and methods of manufacture. The structure includes: an active single fin structure; a plurality of dummy fin structures on opposing sides of the active single fin structure; source and drain regions formed on the active single fin structure and the dummy fin structures; recessed shallow trench isolation (STI) regions between the dummy fin structures and the active single fin structure and below a surface of the dummy fin structures; and contacts formed on the source and drain regions of the active single fin structure with a spacing of at least two dummy fin structures on opposing sides of the contacts.
    Type: Grant
    Filed: May 26, 2023
    Date of Patent: October 1, 2024
    Assignee: GlobalFoundries Inc.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu
  • Patent number: 11990535
    Abstract: Disclosed is a semiconductor structure including a lateral heterojunction bipolar transistor (HBT). The structure includes a substrate (e.g., a silicon substrate), an insulator layer on the substrate, and a semiconductor layer (e.g., a silicon germanium layer) on the insulator layer. The structure includes a lateral HBT with three terminals including a collector, an emitter, and a base, which is positioned laterally between the collector and the emitter and which can include a silicon germanium intrinsic base region for improved performance. Additionally, the collector and/or the emitter includes: a first region, which is epitaxially grown within a trench that extends through the semiconductor layer and the insulator layer to the substrate; and a second region, which is epitaxially grown on the first region. The connection(s) of the collector and/or the emitter to the substrate effectively form thermal exit path(s) and minimize self-heating. Also disclosed is a method for forming the structure.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: May 21, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Alexander M. Derrickson, Haiting Wang, Judson R. Holt, Vibhor Jain, Richard F. Taylor, III
  • Patent number: 11967637
    Abstract: A disclosed structure includes a fin-based bipolar junction transistor (BJT) with reduced base resistance. The BJT includes one or more semiconductor fins. Each semiconductor fin has opposing sidewalls, a first width, and a base recess, which extends across the first width through the opposing sidewalls. The BJT includes a base region positioned laterally between collector and emitter regions. The base region includes a base semiconductor layer (e.g., an intrinsic base layer), which fills the base recess and which has a second width greater than the first width such that the base semiconductor layer extends laterally beyond the opposing sidewalls. In a BJT with multiple semiconductor fins, the base recess on each semiconductor fin is filled with a discrete base semiconductor layer. The base region further includes an additional base semiconductor layer (e.g., an extrinsic base layer) covering the base semiconductor layer(s). Also disclosed is a method of forming the structure.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ali Razavieh, Jagar Singh, Haiting Wang
  • Patent number: 11908898
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor with a base layer of varying horizontal thickness, and related methods to form the same. A lateral bipolar transistor may include an emitter/collector (E/C) layer on a semiconductor layer. A first base layer is on the semiconductor layer and horizontally adjacent the E/C layer. The first base layer has a lower portion having a first horizontal width from the E/C layer. The first base layer also has an upper portion on the lower portion, with a second horizontal width from the E/C layer greater than the first horizontal width. A second base layer is on the first base layer and adjacent a spacer. The upper portion of the first base layer separates a lower surface of the second base layer from the E/C layer.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: February 20, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu, Alexander M. Derrickson
  • Patent number: 11908857
    Abstract: Structures for a semiconductor device that include dielectric isolation and methods of forming a structure for a semiconductor device that includes dielectric isolation. A semiconductor body includes a cavity, first and second gate structures extending over the semiconductor body, and a semiconductor layer including first and second sections on the semiconductor body. The first section of the semiconductor layer is laterally positioned between the cavity and the first gate structure, and the second section on the semiconductor layer is laterally positioned between the cavity and the second gate structure. An isolation structure is laterally positioned between the first and second sections of the semiconductor layer. The isolation structure includes a dielectric layer and a sidewall spacer having first and second sections. The dielectric layer includes a first portion in the cavity and a second portion between the first and second sections of the sidewall spacer.
    Type: Grant
    Filed: June 15, 2020
    Date of Patent: February 20, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yanping Shen, Haiting Wang, Sipeng Gu
  • Patent number: D1089322
    Type: Grant
    Filed: June 28, 2023
    Date of Patent: August 19, 2025
    Assignee: Discovery Energy, LLC
    Inventors: Weidong Li, Jinhong Li, Jacky Zhang, Vania Galvan, Vaibhav Prabhakar Wagh, Haiting Wang, Mark J. Huibregtse