Abstract: A method and a transistor device are disclosed. The method includes: forming first regions of a first doping type and second regions of a second doping type in an inner region and an edge region of a semiconductor body; and forming body regions and source regions of transistor cells in the inner region of the semiconductor body. Forming the first regions and second regions includes: forming semiconductor layers one on top of the other; and in each of the semiconductor layers and before forming a respective next one of the semiconductor layers, forming trenches in the inner region and the edge region and implanting dopant atoms into a first sidewall and a second sidewall of each trench. Implanting the dopant atoms into at least one of the semiconductor layers includes partly covering the trenches in the edge region during an implantation process.

Abstract: A method includes forming active regions of plurality of transistor cells in an inner region of a semiconductor body, each transistor cell includes a drift region of a first doping type and a compensation region of a second doping type, and forming a field stop region in an edge region of the semiconductor body. Forming the drift and compensation regions includes: forming a plurality of semiconductor layers; in each of the semiconductor layers, before forming a next layer, forming a plurality of first trenches and implanting dopant atoms of the first and/or second doping type into sidewalls of the plurality of first trenches. Forming the field stop region includes: in each semiconductor layer of a selection of the plurality of semiconductor layers, forming at least one second trench and implanting first and/or second type dopant atoms at least into one surface of the at least one second trench.

Abstract: A method for operating a superjunction transistor device and a transistor arrangement are disclosed. The method includes operating the superjunction transistor device in a diode state. Operating the superjunction transistor device in the diode state includes applying a bias voltage different from zero between a drift region of at least one transistor cell of the superjunction transistor device and a compensation region of a doping type complementary to a doping type of the drift region. The compensation region adjoins the drift region, and a polarity of the bias voltage is such that a pn-junction between the drift region and the compensation region is reverse biased.

Abstract: In a method and medical imaging apparatus for determining a feature characterizing intentional breath-holding by an examination object for acquiring medical raw data with breath-holding algorithm, an algorithm, the algorithm being designed to allocate at least one feature characterizing intentional breath-holding to at least one physiological property. The algorithm includes or accesses trained artificial neural network. A physiological property of the examination object is detected during free breathing of the examination object. The feature characterizing intentional breath-holding by the examination object is determined by the computer, by executing the algorithm with the detected physiological property of the examination object, as an input to the algorithm.

Abstract: Disclosed is a method. The method includes forming a trench structure with at least one first trench in a first section of a semiconductor body; forming a second trench that is wider than the first trench in a second section of the semiconductor body; and forming a semiconductor layer on a surface of the semiconductor body in the first section and the second section and in the at least one first trench and the second trench such that the semiconductor layer has a substantially planar surface above the first section and a residual trench remains above the second section. Forming the semiconductor layer includes forming a first epitaxial layer in a first epitaxial growth process and a second epitaxial layer on top of the first epitaxial layer in a second epitaxial growth process.

Abstract: A transistor device is enclosed. The transistor device includes: a semiconductor body; a plurality of drift regions of a first doping type; a plurality of compensation regions of a second doping type adjoining the drift regions; and a plurality of transistor cells each including a body region adjoining a respective one of the plurality of drift regions, a source region adjoining the body region, and a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric. The source regions of the plurality of transistor cells are connected to a source node, the body regions of the plurality of transistor cells are separated from the plurality of compensation regions in the semiconductor body, and the plurality of compensation regions are ohmically connected to the source node.

Abstract: A semiconductor wafer includes an alignment mark contained within in a kerf region of the semiconductor wafer. The alignment mark includes a groove vertically extending from a main surface of the semiconductor wafer to a bottom surface of the groove, and at least one tin protruding from the bottom surface of the groove. The groove has a rectangular shape with four sidewalls and four inside corners, with each of the four inside corners facing the at least one fin. A minimum distance between the at least one fin and a nearest one of the four inside corners is at least 25 ?m.

Abstract: A method for forming a transistor device includes: implanting dopant atoms of a first doping type and dopant atoms of a second doping type into opposite sidewalls of each of a plurality of trenches of a first semiconductor layer having a basic doping of the first doping type, the dopant atoms of the first doping type having a smaller diffusion coefficient than the dopant atoms of the second doping type; filling each trench with a second semiconductor layer of the first doping type; and diffusing the dopant atoms of the first doping type and the dopant atoms of the second doping type such that a plurality of first regions of the first doping type and a plurality of second regions of the second doping type are formed. The second regions are spaced apart from each other. Each first region is at least partially arranged within a respective second region.

Abstract: A transistor device and a method for forming a transistor device are disclosed. The method includes: forming first regions of a first doping type and second regions of a second doping type in inner and edge regions of a semiconductor body; and forming body and source regions of transistor cells in the inner region. Forming the first and second regions includes: forming first and second implanted regions in the inner and edge regions, each first implanted region including at least dopant atoms of a first doping type and each second implanted region including at least dopant atoms of a second doping type; and diffusing the dopant atoms of both doping types in a thermal process such that dopant atoms of at least one of the first and second doping types have at least one of different diffusion rates and diffusion lengths in the inner and edge regions.

Abstract: A semiconductor device includes a semiconductor body having a first surface and second surface opposite to the first surface in a vertical direction, and a plurality of transistor cells at least partly integrated in the semiconductor body. Each transistor cell includes at least two source regions, first and second gate electrodes spaced apart from each other in a first horizontal direction and arranged adjacent to and dielectrically insulated from a continuous body region, a drift region separated from the at least two source regions by the body region, and at least three contact plugs extending from the body region towards a source electrode in the vertical direction. The at least three contact plugs are arranged successively between the first and second gate electrodes. Only the two outermost contact plugs that are arranged closest to the first and second gate electrodes, respectively, directly adjoin at least one of the source regions.

Abstract: A transistor device comprises at least one gate electrode, a gate runner connected to the at least one gate electrode and arranged on top of a semiconductor body, a plurality of gate pads arranged on top of the semiconductor body, and a plurality of resistor arrangements. Each gate pad is electrically connected to the gate runner via a respective one of the plurality of resistor arrangements, and each of the resistor arrangements has an electrical resistance, wherein the resistances of the plurality of resistor arrangements are different.

Abstract: A method for operating a superjunction transistor device and a transistor arrangement are disclosed. The method includes operating the superjunction transistor device in a diode state. Operating the superjunction transistor device in the diode state includes applying a bias voltage different from zero between a drift region of at least one transistor cell of the superjunction transistor device and a compensation region of a doping type complementary to a doping type of the drift region. The compensation region adjoins the drift region, and a polarity of the bias voltage is such that a pn-junction between the drift region and the compensation region is reverse biased.

Abstract: A semiconductor device of an embodiment includes transistor cells in a transistor cell area of a semiconductor body. A super junction structure in the semiconductor body includes a plurality of drift sub-regions and compensation sub-regions of opposite first and second conductivity types, respectively, and alternately arranged along a lateral direction. A termination area outside the transistor cell area between an edge of the semiconductor body and the transistor cell area includes first and third termination sub-regions of the first conductivity type, respectively. A second termination sub-region of the second conductivity type is sandwiched between the first and the third termination sub-regions along a vertical direction perpendicular to a first surface of the semiconductor body.

Abstract: Forming a semiconductor arrangement includes providing a first semiconductor layer having a first surface, forming a first plurality of trenches in the first surface of the first semiconductor layer, each of the trenches in the first plurality having first and second sidewalls that extend from the first surface to a bottom of the respective trench, implanting first type dopant atoms into the first and second sidewalls of each of the trenches in the first plurality, implanting second type dopant atoms into the first and second sidewalls of each of the trenches in the first plurality, and annealing the semiconductor arrangement to simultaneously activate the first type dopant atoms and the second type dopant atoms.

Abstract: A method and a transistor device are disclosed. The method includes: forming first regions of a first doping type and second regions of a second doping type in an inner region and an edge region of a semiconductor body; and forming body regions and source regions of transistor cells in the inner region of the semiconductor body. Forming the first regions and second regions includes: forming semiconductor layers one on top of the other; and in each of the semiconductor layers and before forming a respective next one of the semiconductor layers, forming trenches in the inner region and the edge region and implanting dopant atoms into a first sidewall and a second sidewall of each trench. Implanting the dopant atoms into at least one of the semiconductor layers includes partly covering the trenches in the edge region during an implantation process.

Abstract: A semiconductor wafer includes an alignment mark contained within in a kerf region of the semiconductor wafer. The alignment mark includes a groove vertically extending from a main surface of the semiconductor wafer to a bottom surface of the groove, and at least one tin protruding from the bottom surface of the groove. The groove has a rectangular shape with four sidewalls and four inside corners, with each of the four inside corners facing the at least one fin. A minimum distance between the at least one fin and a nearest one of the four inside corners is at least 25 ?m.

Abstract: Disclosed is a method that includes forming a plurality of semiconductor arrangements one above the other. In this method, forming each of the plurality of semiconductor arrangements includes: forming a semiconductor layer; forming a plurality of trenches in a first surface of the semiconductor layer; and implanting dopant atoms of at least one of a first type and a second type into at least one of a first sidewall and a second sidewall of each of the plurality of trenches of the semiconductor layer.

Abstract: A method includes forming active regions of plurality of transistor cells in an inner region of a semiconductor body, each transistor cell includes a drift region of a first doping type and a compensation region of a second doping type, and forming a field stop region in an edge region of the semiconductor body. Forming the drift and compensation regions includes: forming a plurality of semiconductor layers; in each of the semiconductor layers, before forming a next layer, forming a plurality of first trenches and implanting dopant atoms of the first and/or second doping type into sidewalls of the plurality of first trenches. Forming the field stop region includes: in each semiconductor layer of a selection of the plurality of semiconductor layers, forming at least one second trench and implanting first and/or second type dopant atoms at least into one surface of the at least one second trench.

Abstract: A method and a transistor device are disclosed. The method includes: forming a trench in a first surface in an edge region of a semiconductor body; forming an insulation layer in the trench and on the first surface of the semiconductor body; and planarizing the insulation layer so that a trench insulation layer that fills the trench remains, wherein forming the insulation layer comprises a thermal oxidation process.

Abstract: An alignment mark in a process surface of a semiconductor layer includes a groove with a minimum width of at least 100 ?m and a vertical extension in a range 100 nm to 1 ?m. The alignment mark further includes at least one fin within the groove at a distance of at least 60 ?m to a closest one of inner corners of the groove.