Patents by Inventor Hau-yan Lu

Hau-yan Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220336684
    Abstract: At least one doped silicon region is formed in a silicon layer of a semiconductor substrate, and a silicon oxide layer is formed over the silicon layer. A germanium-containing material portion is formed in the semiconductor substrate to provide a p-n junction or a p-i-n junction including the germanium-containing material portion and one of the at least one doped silicon region. A capping material layer that is free of germanium is formed over the germanium-containing material portion. A first dielectric material layer is formed over the silicon oxide layer and the capping material layer. The first dielectric material layer includes a mesa region that is raised from the germanium-containing material portion by a thickness of the capping material layer. The capping material layer may be a silicon capping layer, or may be subsequently removed to form a cavity. Dark current is reduced for the germanium-containing material portion.
    Type: Application
    Filed: June 30, 2022
    Publication date: October 20, 2022
    Inventors: Chen-Hao HUANG, Hau-Yan LU, Sui-Ying HSU, YuehYing LEE, Chien-Ying WU, Chia-Ping LAI
  • Publication number: 20220320124
    Abstract: A memory device is disclosed. The memory device includes: a first memory cell, including: a first transistor; a second transistor; and a first capacitor; a second memory cell, including: a third transistor; a fourth transistor; and a second capacitor; a third memory cell, including: a fifth transistor; a sixth transistor; and a third capacitor; and a fourth memory cell, including: a seventh transistor; an eighth transistor; and a fourth capacitor; wherein an electrode of the first capacitor, an electrode of the second capacitor, an electrode of the third capacitor, and an electrode of the fourth capacitor are electrically connected to a conductor. An associated manufacturing method is also disclosed.
    Type: Application
    Filed: June 16, 2022
    Publication date: October 6, 2022
    Inventors: HAU-YAN LU, CHUN-YAO KO, FELIX YING-KIT TSUI
  • Publication number: 20220238730
    Abstract: At least one doped silicon region is formed in a silicon layer of a semiconductor substrate, and a silicon oxide layer is formed over the silicon layer. A germanium-containing material portion is formed in the semiconductor substrate to provide a p-n junction or a p-i-n junction including the germanium-containing material portion and one of the at least one doped silicon region. A capping material layer that is free of germanium is formed over the germanium-containing material portion. A first dielectric material layer is formed over the silicon oxide layer and the capping material layer. The first dielectric material layer includes a mesa region that is raised from the germanium-containing material portion by a thickness of the capping material layer. The capping material layer may be a silicon capping layer, or may be subsequently removed to form a cavity. Dark current is reduced for the germanium-containing material portion.
    Type: Application
    Filed: January 27, 2021
    Publication date: July 28, 2022
    Inventors: Chen-Hao HUANG, Hau-Yan LU, Sui-Ying HSU, Yueh Ying LEE, Chien-Ying WU, Chia-Ping LAI
  • Patent number: 11367731
    Abstract: A memory device is disclosed. The memory device includes: a first memory cell, including: a first transistor; a second transistor; and a first capacitor; a second memory cell, including: a third transistor; a fourth transistor; and a second capacitor; a third memory cell, including: a fifth transistor; a sixth transistor; and a third capacitor; and a fourth memory cell, including: a seventh transistor; an eighth transistor; and a fourth capacitor; wherein an electrode of the first capacitor, an electrode of the second capacitor, an electrode of the third capacitor, and an electrode of the fourth capacitor are electrically connected to a conductor. An associated manufacturing method is also disclosed.
    Type: Grant
    Filed: September 20, 2018
    Date of Patent: June 21, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hau-Yan Lu, Chun-Yao Ko, Felix Ying-Kit Tsui
  • Publication number: 20220093808
    Abstract: A semiconductor device is provided. The semiconductor device includes a waveguide over a first dielectric layer. A first portion of the waveguide has a first width and a second portion of the waveguide has a second width larger than the first width. The semiconductor device includes a first doped semiconductor structure and a second doped semiconductor structure. The second portion of the waveguide is between the first doped semiconductor structure and the second doped semiconductor structure.
    Type: Application
    Filed: March 2, 2021
    Publication date: March 24, 2022
    Inventors: Chih-Tsung SHIH, Hau-Yan LU, Felix TSUI, Stefan RUSU, Chewn-Pu JOU
  • Patent number: 11251314
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: February 15, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Publication number: 20210313259
    Abstract: The present disclosure provides a semiconductor device package. The semiconductor device package includes a semiconductor substrate having a first surface and a first optical coupler disposed on the first surface of the semiconductor substrate. The first optical coupler includes a first surface facing away from the first surface of the semiconductor substrate and a first lateral surface connected to the first surface of the first optical coupler. The first surface of the first optical coupler and the first lateral surface of the optical coupler define an angle greater than 90 degrees. A method of manufacturing a semiconductor device package is also disclosed.
    Type: Application
    Filed: April 1, 2020
    Publication date: October 7, 2021
    Inventors: HAU-YAN LU, FELIX YING-KIT TSUI, JING-HWANG YANG, FENG YUAN
  • Publication number: 20200395487
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Application
    Filed: August 27, 2020
    Publication date: December 17, 2020
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Patent number: 10784276
    Abstract: A semiconductor device is provided. The semiconductor device comprises a first active region, a second active region and a third active region, a first poly region, a second poly region, a third poly region, a first doped region and a second doped region. The first active region, the second active region and the third active region are separated and parallel with each other. The first poly region is arranged over the first and second active regions. The second poly region is arranged over the first and second active regions. The third poly region is arranged over the second and third active regions. The first doped region is in the second active region and between the first poly region and the second poly region. The second doped region is in the second active region and between the second poly region and the third poly region.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: September 22, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hau-Yan Lu, Shih-Hsien Chen, Chun-Yao Ko, Felix Ying-Kit Tsui
  • Patent number: 10770598
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: September 8, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Patent number: 10727222
    Abstract: A memory system is provided. The memory system includes a number of memory cells and a number of bit lines. The memory cells are interlocked with each other in rows and columns. The memory cells include respective capacitors, respective first transistors and respective second transistors. Respective upper plates of the respective capacitors are electrically connected to respective gates of the respective first transistors, and respective drains of the respective second transistors are connected to respective sources of the respective first transistors. The bit lines are arranged along an extending direction of the rows. Respective bit lines are connected to the respective first transistors through respective bit-line contacts, and each of the respective bit-line contacts is shared by two adjacent memory cells of the extending direction of the rows.
    Type: Grant
    Filed: April 20, 2017
    Date of Patent: July 28, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hau-Yan Lu, Shih-Hsien Chen, Chun-Yao Ko, Felix Ying-Kit Tsui
  • Publication number: 20200083381
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Application
    Filed: November 15, 2019
    Publication date: March 12, 2020
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Patent number: 10553597
    Abstract: A memory cell includes a first transistor coupled to a source line, wherein the first transistor is in a first well. The memory cell further includes a second transistor coupled to the first transistor and a bit line, wherein the second transistor is in the first well. The memory cell further includes a first capacitor coupled to a word line and the second transistor, wherein the first capacitor is in a second well. The memory cell further includes a second capacitor coupled to the second transistor and an erase gate, wherein the second capacitor is in the second well. In some embodiments, the first well contacts the second well on a first side of the first well.
    Type: Grant
    Filed: December 24, 2018
    Date of Patent: February 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hsien Chen, Liang-Tai Kuo, Hau-Yan Lu, Chun-Yao Ko
  • Patent number: 10510902
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Publication number: 20190164982
    Abstract: A memory device is disclosed. The memory device includes: a first memory cell, including: a first transistor; a second transistor; and a first capacitor; a second memory cell, including: a third transistor; a fourth transistor; and a second capacitor; a third memory cell, including: a fifth transistor; a sixth transistor; and a third capacitor; and a fourth memory cell, including: a seventh transistor; an eighth transistor; and a fourth capacitor; wherein an electrode of the first capacitor, an electrode of the second capacitor, an electrode of the third capacitor, and an electrode of the fourth capacitor are electrically connected to a conductor. An associated manufacturing method is also disclosed.
    Type: Application
    Filed: September 20, 2018
    Publication date: May 30, 2019
    Inventors: HAU-YAN LU, CHUN-YAO KO, FELIX YING-KIT TSUI
  • Publication number: 20190131312
    Abstract: A memory cell includes a first transistor coupled to a source line, wherein the first transistor is in a first well. The memory cell further includes a second transistor coupled to the first transistor and a bit line, wherein the second transistor is in the first well. The memory cell further includes a first capacitor coupled to a word line and the second transistor, wherein the first capacitor is in a second well. The memory cell further includes a second capacitor coupled to the second transistor and an erase gate, wherein the second capacitor is in the second well. In some embodiments, the first well contacts the second well on a first side of the first well.
    Type: Application
    Filed: December 24, 2018
    Publication date: May 2, 2019
    Inventors: Shih-Hsien CHEN, Liang-Tai KUO, Hau-Yan LU, Chun-Yao KO
  • Publication number: 20190096903
    Abstract: A semiconductor device is provided. The semiconductor device comprises a first active region, a second active region and a third active region, a first poly region, a second poly region, a third poly region, a first doped region and a second doped region. The first active region, the second active region and the third active region are separated and parallel with each other. The first poly region is arranged over the first and second active regions. The second poly region is arranged over the first and second active regions. The third poly region is arranged over the second and third active regions. The first doped region is in the second active region and between the first poly region and the second poly region. The second doped region is in the second active region and between the second poly region and the third poly region.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Inventors: Hau-Yan LU, Shih-Hsien CHEN, Chun-Yao KO, Felix Ying-Kit TSUI
  • Patent number: 10163920
    Abstract: A memory device includes at least one memory cell. The memory cell includes first and second transistors, and first and second capacitors. The first transistor is coupled to a source line. The second transistor is coupled to the first transistor and a bit line. The first capacitor is coupled to a word line and the second transistor. The second capacitor is coupled to the second transistor and an erase gate.
    Type: Grant
    Filed: March 22, 2017
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hsien Chen, Liang-Tai Kuo, Hau-Yan Lu, Chun-Yao Ko
  • Publication number: 20180342624
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Patent number: 10141323
    Abstract: A semiconductor device is provided. The semiconductor device comprises a first active region, a second active region and a third active region, a first poly region, a second poly region, a third poly region, a first doped region and a second doped region. The first active region, the second active region and the third active region are separated and parallel with each other. The first poly region is arranged over the first and second active regions. The second poly region is arranged over the first and second active regions. The third poly region is arranged over the second and third active regions. The first doped region is in the second active region and between the first poly region and the second poly region. The second doped region is in the second active region and between the second poly region and the third poly region.
    Type: Grant
    Filed: January 4, 2016
    Date of Patent: November 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hau-Yan Lu, Shih-Hsien Chen, Chun-Yao Ko, Felix Ying-Kit Tsui