Abstract: An apparatus suitable for providing near-field measurements of a workpiece. The apparatus comprises a source of electromagnetic radiation for generating an incident wave; means for directing at least a portion of the incident wave to the workpiece; a probe tip acting as an antenna and capable of re-radiating a signal wave, said signal wave developing as an interactive coupling between said workpiece and said probe tip; means for creating an interference signal based on the signal wave and a reference wave; and a detector for interrogating at least one of the phase and amplitude of the interference signal.

Abstract: An assembly suitable for identifying a code sequence of at least a portion of a biomolecule in a gel embodiment. The assembly comprises first means for migrating and separating a portion of a biomolecule in a gel; second means comprising a near-field probe for generating a super-resolution chemical analysis of a portion of a biomolecule; and, third means for correlating the super-resolution chemical analysis of the portion of the biomolecule with a broad spectral content of a referent biomolecule, for generating a code sequencing of the portion of the biomolecule.

Abstract: An assembly suitable for identifying a code sequence of at least a portion of a biomolecule in a free-solution embodiment. The assembly comprises first means for migrating and separating a portion of a biomolecule in a free-solution; second means comprising a near-field probe for generating a super-resolution chemical analysis of a portion of a biomolecule; and, third means for correlating the super-resolution chemical analysis of the portion of the biomolecule with a broad spectral content of a referent biomolecule, for generating a code sequencing of the portion of the biomolecule.

Abstract: The present invention discloses apparatus and method for decoding high density data encoded in a digital recording media as a series of tags comprising an information bit pattern including a tracking bit pattern. To this end, the invention preferably accesses the data by way of an interferometric near field microscope.

Abstract: A method suitable for identifying a code sequence of a biomolecule. The method comprises the steps of using a near-field probe technique for generating a super-resolution chemical analysis of at least a portion of the biomolecule; and, correlating the chemical analysis with a broad spectral content of a referent biomolecule for generating code sequencing.

Abstract: A method and apparatus for mapping the character and location of small surface variations on a planar surface. Energy is supplied to an object in close proximity to the planar surface to thereby raise the temperature of the object. The object is moved with respect to the planer surface substantially constant. A decrease in temperature of the object is detected when it is in proximity to the variation to define the location and character of the variation. The energy supply may be thermal energy or optical energy but preferably is electrical energy which heats a resistive element. Preferably, the object is the magnetoresistive head of a disk drive assembly. The surface may be that of a magnetic recording material. The change in temperature is detected by monitoring the resistance of the magnetoresistive coil of the head. The energy may be supplied in pulses to obtain higher peek temperatures while avoiding mechanical distortion of the object.

Abstract: A method suitable for measuring a trench depth parameter of a material. The method comprises the steps of propagating source radiation around a trench and through the material; and analyzing a characteristic variation of an interference signal as a determinant of the trench depth parameter; the interference signal developing as radiation from a base of the trench interferes with radiation propagated from a top surface of the material.

Abstract: An optical measurement system uses a laser beam to measure the depth of high aspect ratio structures disposed in a workpiece. The wavelength of the laser beam is selected so that the workpiece is transparent to the incident radiation and is greater than the lateral dimension of the structure to be measured. The angle of incidence of the laser beam at the workpiece surface or the wavelength of the laser beam is made to vary. The maxima backscatter signals from the top and from the bottom of the structure are detected along with the corresponding angle of incidence or wavelength at such maxima backscatter signals. The depth of the structure is commensurate with the detected angles of incidence or wavelengths at which the maxima backscatter signals are detected.

Abstract: An ultrafine tip for AFM and STM profilometry of trenches having sidewalls. The tip includes a lateral circumferential edge protrusion to allow profilometry of the sidewalls of a trench located in a semiconductor or insulator substrate.

Abstract: Two dimensional profiling of samples, such as integrated circuits containing trenches or lines, is accomplished using contact force atomic force microscopy by controlling the tip position responsive to the real-time measured local slope of the surface in contact with the tip.

Abstract: An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench.

Abstract: A method and apparatus for profiling surfaces, such as sidewalls of a trench or line, using a scanning force microscope provides improved measurement accuracy by controlling the position of the tip responsive to the real-time measured local slope of the surface.

Abstract: A differential fiber interferometer includes first and second optical fibers that pass through a coupler which has both input and output ends. A laser optically energizes a first one of the fibers and, via the coupler, the second fiber. A telescope lens system focuses optical beams from the first and second fibers onto an object and receives reflections therefrom for retrotransmission. The object is caused to oscillate at a first frequency so as to modulate the phase of the reflected optical beams. An optical sensor, positioned on the input side of the coupler, converts to electrical signals the reflected optical energy that appears on the second fiber. The reflected energy includes optical energies from both the first and second fibers. A first detector is responsive to the sensor's electrical outputs to produce a signal that is proportional to the differential phase between the reflected optical energies.

Abstract: Multi-wavelength optical thermometry provides for non-contact measurement of the temperature of a sample where the front surface and the back surface of the sample are used in a interferometer to measure changes in optical path length. Laser beams at two different wavelengths are used and the beam phase of the two resultant interference signals is used to unambiguously measure the path length change over a broad temperature range.

Abstract: A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.

Abstract: A method is described for producing ultrafine silicon tips for the AFM/STM profilometry comprising:1. providing a silicon substrate and applying a silicon dioxide layer thereto;2. producing a mask in said silicon dioxide layer by photolithography and wet or dry etching;3. producing a tip shaft by transferring the mask pattern, produced in step 2, by reactive ion etching into the silicon substrate;4. thinning the shaft and forming a base by isotropic wet etching; and5. removing the mask by etching.The resulting tip shaft with a rectangular end may be pointed by argon ion milling.In a second embodiment there is an anisotropic wet etching step, prior to step 5, through the intact silicon dioxide mask, producing a negative profile of the shaft immediately below the mask. After this etching step the mask is removed by etching.

Abstract: An apparatus and method for generating microscopic scan data of C-V and/or dC/dV over a scan area. A scanning microscope, for example a scanning force microscope, is provided with a voltage biased tip, for example, of tungsten, which is scanned across an area to derive the data. The data can be used to derive a plot of semiconductor dopant level across the scan area. Other material properties can be derived, for example, carrier generation and recombination rates and subsurface defects.

Abstract: An Atomic Photo-Absorption Force Microscope 1 includes an Atomic Force Microscope 10 and a radiation source 20 having an output radiation 22 wavelength selected to be preferentially absorbed by atoms or molecules associated with a sample surface 24a under investigation. Absorption of the radiation raises at least one outer shell electron to a higher energy level, resulting in an increase in radius of the atom or molecule. A tip 12 coupled through a lever 14 to the Atomic Force Microscope 10 is scanned over the surface and operates in conjunction with a laser heterodyne interferometer 18 to directly measure the resulting atomic or molecular increase of size, thereby detecting both the presence and location of the atoms or molecules under investingation. Operation in an a.c. mode by chopping the incident radiation 22 and measuring the corresponding a.c. induced tip movement beneficially increases the sensitivity of the technique, particularly if the a.c.

Abstract: Magnetic structures of a sample are imaged by measuring Lorentz force-induced deflection of the tip of a scanning tunneling microscope. While scanning the sample, an a.c. voltage signal at a first predetermined frequency equal to the resonance frequency of the tip is applied to the tip for generating a current between the tip and the surface of the sample for causing the tip to undergo vibratory motion relative to the sample. The tip motion, indicative of the presence of a magnetic field, is optically detected. In an alternative embodiment for providing improved resolution the tip is made to undergo motion at a second predetermined frequency in a direction parallel to the longitudinal axis of the tip and normal to the surface of the sample. The tip motion is optically detected at the sum or difference frequency of the first and second predetermined frequencies for providing improved lateral resolution of the magnetic field measurements using a scanning tunneling microscope.

Abstract: A near field optical microscopy method and apparatus eliminates the necessity of an aperture for scanning a sample surface and greatly reduces the detected background signal. A small dimension tip, on the order of atomic dimension, is disposed in close proximity to the sample surface. A dither motion is applied to the tip at a first frequency in a direction substantially normal to the plane of the sample surface. Dither motion is simultaneously applied to the sample at a second frequency in a direction substantially parallel to the plane of the sample surface. The amplitude of the motions are chosen to be comparable to the desired measurement resolution. The end of the tip is illuminated by optical energy. The scattered light from the tip and surface is detected at the difference frequency for imaging the sample surface at sub-wavelength resolution without the use of an aperture. Alternatively, the tip is maintained stationary and the sample undergoes motion in the two directions.