Abstract: Methods of forming MOS transistors include forming lightly and heavily doped source/drain regions adjacent to one another in a substrate and a gate electrode with a sidewall spacer thereon. A salicide process is performed on a surface of the heavily doped source/drain region to provide a first suicide layer self-aligned to the sidewall spacer. At least a portion of the sidewall spacer is removed to expose a portion of the lightly doped source/drain region adjacent to the first silicide layer. A salicide process in performed on the exposed portion of the lightly doped source/drain region to provide a second silicide layer adjacent to the first suicide layer. Related devices are also disclosed.

Abstract: Bonding pads for integrated circuits include first and second spaced apart conductive layers, a third continuous conductive layer between the first and second spaced apart and an array of unaligned spaced apart insulating islands in the third continuous conductive layer and extending therethrough such that sidewalls of the array of insulating islands are surrounded by the third continuous conductive layer, rows of unaligned spaced apart insulating islands. The array can include rows of unaligned spaced apart insulating islands and columns of unaligned spaced apart insulating islands. The array of unaligned spaced apart insulating islands can also include a first insulating island having a first edge in a first direction and a second insulating island, adjacent to the first insulating island in the first direction having a second edge in the first direction that is unaligned with first edge.

Abstract: A semiconductor device having a local interconnection layer and a method for manufacturing the same are provided. A local interconnection layer is formed in an interlayer dielectric (ILD) layer on an isolation layer and a junction layer, for covering a semiconductor substrate, the isolation layer, and a gate pattern. An etch stopper pattern having at least one layer for preventing the etching of the isolation layer is formed under the local interconnection layer. The etch stopper pattern having at least one layer for preventing the etching of the isolation layer can be included when forming the local interconnection layer, thereby preventing leakage current caused by the etching of the isolation layer, improving the electrical characteristics of a semiconductor device, and improving the yield of a process of manufacturing a semiconductor device.

Abstract: A semiconductor device on a SOI and a method for manufacturing the same are provided. The semiconductor device includes a semiconductor wafer having a SOI structure including an insulating layer having a predetermined thickness and a monocrystalline silicon layer formed on the insulating layer, an isolation insulating layer formed on the insulating layer on the semiconductor wafer, a gate comprised of a gate dielectric layer and a gate conductive layer, which are sequentially stacked on the monocrystalline silicon layer, insulating layer spacers formed at the sidewalls of the gate, and a source junction and a drain junction asymmetrically formed at either side of the gate between the isolation insulating layer spacers and the insulating layer. In the semiconductor device formed on a SOI, source and drain junctions are formed at either side of a gate to be asymmetrical, and thus a ground of a transistor is formed on the SOI, and thus the electrical characteristics of the semiconductor device are improved.

Abstract: A semiconductor device and a method of forming thereof include a dummy active region positioned adjacent the device active region. The dummy active region is formed to include an oxide layer of a thickness that is less than the oxide layer of the active region such that excess charge accumulated during etching in the active region is conducted through the dummy active region into the substrate. In this manner, the dummy active region operates as a charge sink during formation of the active region to prevent premature deterioration of the gate oxide layer of the active region.

Abstract: A MOS transistor of the present invention includes a semiconductor substrate of a first conductivity type impurity, a gate insulating layer formed on the semiconductor substrate, gate electrodes formed on the gate insulating layer, and an oxide layer formed by surface oxidation of the gate electrodes. A first spacer is formed on the side wall of the gate electrodes, and a second spacer is formed on the inclined side wall. A first impurity layer of low concentration is formed at a first depth by a second conductivity type impurity implanted in the vicinity of surface of the semiconductor substrate to be self-aligned at the edge of the gate electrode. A second impurity layer of middle concentration is formed at a deeper second depth than the first depth by the second conductivity type impurity implanted in the vicinity of surface of the semiconductor substrate.

Abstract: Integrated circuit devices are provided in which short circuits can be prevented between pads on the surface of an integrated circuit substrate and a first dummy pattern on the surface that is spaced apart from and surrounds the pads, while still allowing planarity of a dielectric layer that is subsequently formed thereon to be retained. A second dummy pattern is provided on the surface between the pads and the first dummy pattern, which is spaced apart from the pads and from the first dummy pattern, and that surrounds the pads. The second dummy pattern preferably comprises rings on the surface, a respective one of which is between a respective one of the pads and the first dummy pattern and surrounds the respective one of the pads. The rings may be of circular, polygonal and/or other shape.

Abstract: A gate electrode structure of a semiconductor device and a manufacturing method thereof are provided. The gate electrode structure includes a first silicon layer pattern formed of a polycrystalline silicon layer and a second silicon layer pattern having surface roughness lower than that of the first silicon layer pattern formed on the first silicon layer pattern.

Abstract: A semiconductor device and a method of forming thereof include a dummy active region positioned adjacent the device active region. The dummy active region is formed to include an oxide layer of a thickness that is less than the oxide layer of the active region such that excess charge accumulated during etching in the active region is conducted through the dummy active region into the substrate. In this manner, the dummy active region operates as a charge sink during formation of the active region to prevent premature deterioration of the gate oxide layer of the active region.

Abstract: A semiconductor device and a method of forming thereof include a dummy active region positioned adjacent the device active region. The dummy active region is formed to include an oxide layer of a thickness that is less than the oxide layer of the active region such that excess charge accumulated during etching in the active region is conducted through the dummy active region into the substrate. In this manner, the dummy active region operates as a charge sink during formation of the active region to prevent premature deterioration of the gate oxide layer of the active region.

Abstract: A MOS transistor of the present invention includes a semiconductor substrate of a first conductivity type impurity, a gate insulating layer formed on the semiconductor substrate, gate electrodes formed on the gate insulating layer, and an oxide layer formed by surface oxidation of the gate electrodes. A first spacer is formed on the side wall of the gate electrodes, and a second spacer is formed on the inclined side wall. A first impurity layer of low concentration is formed at a first depth by a second conductivity type impurity implanted in the vicinity of surface of the semiconductor substrate to be self-aligned at the edge of the gate electrode. A second impurity layer of middle concentration is formed at a deeper second depth than the first depth by the second conductivity type impurity implanted in the vicinity of surface of the semiconductor substrate.

Abstract: A MOS transistor of the present invention includes a semiconductor substrate of a first conductivity type impurity, a gate insulating layer formed on the semiconductor substrate, gate electrodes formed on the gate insulating layer, and an oxide layer formed by surface oxidation of the gate electrodes. A first spacer is formed on the side wall of the gate electrodes, and a second spacer is formed on the inclined side wall. A first impurity layer of low concentration is formed at a first depth by a second conductivity type impurity implanted in the vicinity of surface of the semiconductor substrate to be self-aligned at the edge of the gate electrode. A second impurity layer of middle concentration is formed at a deeper second depth than the first depth by the second conductivity type impurity implanted in the vicinity of surface of the semiconductor substrate.

Abstract: Heavily doped source/drain regions are formed in an integrated circuit substrate prior to forming lightly doped source/drain regions in the integrated circuit substrate. High temperature thermal processing preferably is carried out prior to forming the lightly doped source/drain regions in the integrated circuit substrate. Reduced short channel effects may thereby be obtained while still achieving shallow junctions. More specifically, an insulated gate electrode comprising polysilicon is formed on an integrated circuit substrate. The insulated gate electrode is oxidized. A gate spacer is formed on the oxidized sidewalls of the insulated gate electrode. Heavily doped source/drain regions are formed in the integrated circuit substrate by first implanting ions into the integrated circuit substrate using the insulated gate electrode and the gate spacer on the oxidized sidewalls of the insulated gate electrode as an implantation mask.

Abstract: A MOS transistor for high-speed operation includes a gate insulator formed over a semiconductor substrate and a gate formed over the gate insulator. An insulating layer is formed on both sides of the gate insulator at the edge of the gate and thicker than the gate insulator. The device is also formed with LDD regions which form an LDD structure in the semiconductor substrate at least partially under the gate. The LDD structure defines a channel region under the gate insulator between the LDD regions. In one embodiment, the insulating layer formed on both sides of the gate extends toward the channel region but not beyond the LDD regions. In another embodiment, the insulating layer does extend beyond the LDD region but for a distance of less than 10 nm.

Abstract: Bonding pads for integrated circuits include first and second spaced apart conductive layers, a third continuous conductive layer between the first and second spaced apart and an array of unaligned spaced apart insulating islands in the third continuous conductive layer and extending therethrough such that sidewalls of the array of insulating islands are surrounded by the third continuous conductive layer, rows of unaligned spaced apart insulating islands. The array can include rows of unaligned spaced apart insulating islands and columns of unaligned spaced apart insulating islands. The array of unaligned spaced apart insulating islands can also include a first insulating island having a first edge in a first direction and a second insulating island, adjacent to the first insulating island in the first direction having a second edge in the first direction that is unaligned with first edge.

Abstract: A MOS transistor for high-speed operation includes a gate insulator formed over a semiconductor substrate and a gate formed over the gate insulator. An insulating layer is formed on both sides of the gate insulator at the edge of the gate and thicker than the gate insulator. The device is also formed with LDD regions which form an LDD structure in the semiconductor substrate at least partially under the gate. The LDD structure defines a channel region under the gate insulator between the LDD regions. In one embodiment, the insulating layer formed on both sides of the gate extends toward the channel region but not beyond the LDD regions. In another embodiment, the insulating layer does extend beyond the LDD region but for a distance of less than 10 nm.

Abstract: A semiconductor device having a double spacer and a method of manufacturing the device are provided. The semiconductor device includes a first spacer formed on the sidewall of a gate electrode and a second spacer formed on the slanted sidewall of the first spacer. A first impurity region is formed doped with a first conductivity type impurity at a first concentration and formed at a small junction depth in the substrate to self-align at the edge of the gate electrode. A second impurity region doped with second conductivity type impurity at a second concentration is formed at a large junction depth in the substrate to self-align at the edge of the first spacer. A third impurity region doped with the first conductivity type impurity at a third concentration is formed at a medium junction depth in the second impurity region to self-align at the edge of the second spacer.

Abstract: A contact structure of a semiconductor device includes an impurity-doped region formed in the semiconductor substrate, a trench having a groove in the semiconductor substrate, with the groove being in contact with at least one side face of the impurity-doped region, a conductive layer buried in the trench, and a contact region formed on at least one side face of the impurity-doped region, for connecting the impurity-doped region and the conductive layer. Thus, the area occupied by a unit cell is reduced and integration density can be increased accordingly.

Abstract: A semiconductor device and a fabricating method thereof are provided. In the semiconductor device, active regions of first and second conductivity types are formed on a semiconductor substrate, apart from each other by a predetermined distance, and a silicide layer is formed on the active regions, for connecting the active regions to one another. By forming an offset area between active regions or gates of opposite conductivity types to space them from each other by a predetermined distance, there exists no area having an increased dopant concentration and a reliable silicidation is ensured.

Abstract: Integrated circuit SRAM cells include a semiconductor substrate having a field region and first, second, third and fourth active regions therein. The first and second active regions each include a horizontal leg and a vertical leg and are mirror images of each other about a vertical axis. The third and fourth active regions each also include a horizontal leg and a vertical leg and are mirror images of each other about a vertical axis. The integrated circuit SRAM cells also include first and second vertically extending gate conductive layers on the semiconductor substrate. The first vertically extending conductive layer extends vertically over the first active region horizontal leg and extends vertically over the third active region horizontal leg. The second vertically extending conductive layer extends vertically over the second active region horizontal leg and extends vertically over the fourth active region horizontal leg.