Abstract: A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven.

Abstract: A carrier system and method carries a plate-like object to an object mounting member provided with an object mounting section. The system includes an adjustment device that changes a shape of the plate-like object into a predetermined shape before the plate-like object is mounted onto the object mounting section. The plate-like object whose shape is changed into the predetermined shape is mounted onto the object mounting section.

Abstract: A liquid immersion exposure apparatus includes a projection system having a last optical element, a liquid supply system having a first path through which immersion liquid is supplied to a supply opening, and a liquid removal system having a second path connected to the first path. The liquid removal system removes the immersion liquid from the first path using the second path so that the supply flow path becomes a substantially gas filled space.

Abstract: It is an object of the present invention to provide a novel medicament for preventing and/or treating ophthalmologic diseases caused by ocular angiogenesis. According to the present invention, provided is a medicament for preventing and/or treating ophthalmologic diseases caused by ocular angiogenesis, which comprises, as an active ingredient, a pyrazolone derivative such as 3-methyl-1-phenyl-2-pyrazolin-5-one, or a physiologically acceptable salt thereof, or a hydrate thereof or a solvate thereof.

Abstract: A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven.

Abstract: A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven.

Abstract: It is an object of the present invention to provide a novel medicament for preventing and/or treating ophthalmologic diseases caused by ocular angiogenesis. According to the present invention, provided is a medicament for preventing and/or treating ophthalmologic diseases caused by ocular angiogenesis, which comprises, as an active ingredient, a pyrazolone derivative such as 3-methyl-1-phenyl-2-pyrazolin-5-one, or a physiologically acceptable salt thereof, or a hydrate thereof or a solvate thereof.

Abstract: The purpose of this invention is to provide a compound for preventing or treating an ocular disease and a pharmaceutical composition comprising the same. This invention provides a pharmaceutical composition comprising a compound as defined by the formula (I?) or a pharmaceutically acceptable salt thereof. The pharmaceutical composition is useful for preventing or treating an ocular disease such as retinochoroidal degeneration.

Abstract: The object of the present invention is to provide a prophylactic agent for retinal disorder such as ischemic retinal disorder. Specifically, the present invention relates to a prophylactic agent for retinal disorder, which contains, as an active ingredient, a carotenoid mixture containing astaxanthin as a main component.

Abstract: An exposure apparatus includes a projection system having an optical element via which an exposure beam is projected; an immersion area forming member having an opening through which the exposure beam is projected, the immersion area forming member having a liquid supply inlet facing downward, a liquid recovery outlet facing downward, and a liquid supply port disposed between the liquid supply inlet and the liquid recovery outlet; a frame by which the projection system and the immersion area forming member are supported; a first vibration isolator by which transmission of vibration from the frame to the projection system is limited; and a second vibration isolator by which transmission of vibration from the immersion area forming member to the frame is limited. A liquid immersion area is formed, using the immersion area forming member, on a portion of an upper surface of a substrate, which is exposed to the exposure beam.

Abstract: A liquid immersion exposure apparatus includes a projection system having a last optical element, a first member having a liquid supply port, a second member having a liquid recovery port, and a driving system which electromagnetically moves the first member, the second member, or both of the first and second members. A substrate is moved below and relative to the last optical element, the first member and the second member. A liquid supply from the liquid supply port and a liquid recovery from the liquid recovery port are performed to form a liquid immersion area on a portion of an upper surface of the substrate. The substrate is exposed with a beam through liquid in the liquid immersion area.

Abstract: An exposure apparatus exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting the image of a pattern onto the substrate through the projection optical system and the liquid, and includes a liquid removing mechanism that intermittently blows a gas against a reference member, movable mirror, and the like, to which the liquid is adhered in order to remove that liquid.

Abstract: Intended is to provide a new therapeutic or prophylactic means for intraocular angiogenesis. Provided is an intraocular angiogenesis inhibitor including a polypeptide which is a variant of diphtheria toxin, and shows activity inhibiting binding between HB-EGF and an EGF receptor.

Abstract: A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven.

Abstract: The purpose of this invention is to provide a compound for preventing or treating an ocular disease and a pharmaceutical composition comprising the same. This invention provides a pharmaceutical composition comprising a compound as defined by the formula (I?) or a pharmaceutically acceptable salt thereof. The pharmaceutical composition is useful for preventing or treating an ocular disease such as retinochoroidal degeneration.

Abstract: An exposure apparatus exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting the image of a pattern onto the substrate through the projection optical system and the liquid, and includes a liquid removing mechanism that intermittently blows a gas against a reference member, movable mirror, and the like, to which the liquid is adhered in order to remove that liquid.

Abstract: The invention provides a liposome for delivery to the posterior segment of the eye, comprising (A) a phospholipid, (B) a charged substance, and/or (C) a membrane-reinforcing substance; the liposome having a rigidity that provides the liposome with cell membrane permeability, and having a mean particle diameter of 1 ?m or less; and a pharmaceutical composition for a disease in the posterior segment of an eye, comprising a drug encapsulated in the liposome. The liposome is delivered to the posterior segment of the eye by instillation, and is non-cytotoxic; and the pharmaceutical composition for a disease in the posterior segment of the eye comprises the liposome.

Abstract: A liquid immersion exposure apparatus includes a projection system having a last optical element, a liquid supply system having a first path through which immersion liquid is supplied to a supply opening, and a liquid removal system having a second path connected to the first path. The liquid removal system removes the immersion liquid from the first path using the second path so that the supply flow path becomes a substantially gas filled space.

Abstract: A liquid immersion exposure apparatus includes a projection system having a last optical element, a first member having a liquid supply port, a second member having a liquid recovery port, and a driving system which electromagnetically moves the first member, the second member, or both of the first and second members. A substrate is moved below and relative to the last optical element, the first member and the second member. A liquid supply from the liquid supply port and a liquid recovery from the liquid recovery port are performed to form a liquid immersion area on a portion of an upper surface of the substrate. The substrate is exposed with a beam through liquid in the liquid immersion area.

Abstract: An exposure apparatus is provided which can supply and collect a liquid in a prescribed state, and that can suppress degradation of a pattern image projected onto a substrate. The exposure apparatus is provided with a nozzle member having a supply outlet that supplies a liquid and a collection inlet that collects a liquid, and a vibration isolating mechanism that supports the nozzle member and vibrationally isolates the nozzle member from a lower side step part of a main column.