Patents by Inventor Hideki Iwamoto

Hideki Iwamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230040371
    Abstract: An acoustic wave device includes a piezoelectric substrate and an IDT electrode. The IDT electrode includes a center area and first and second edge areas. Areas including the first and second edge areas and overlapping the areas in an acoustic-wave propagation direction include first and second expansion edge areas. First and second acoustic-velocity adjusters are provided in the first and second expansion edge areas. The first and second acoustic-velocity adjusters respectively includes first and second end portions and third and fourth end portions. The first to fourth end portions are located at outer sides of the first and second edge areas. End portions in at least one of two pairs including a pair of first and third end portions and a pair of second and fourth end portions do not overlap each other in a direction in which electrode fingers extend.
    Type: Application
    Filed: October 20, 2022
    Publication date: February 9, 2023
    Inventors: Munehisa WATANABE, Katsuya DAIMON, Hideki IWAMOTO
  • Publication number: 20230037734
    Abstract: An elastic wave device includes a supporting substrate, a high-acoustic-velocity film stacked on the supporting substrate and in which an acoustic velocity of a bulk wave propagating therein is higher than an acoustic velocity of an elastic wave propagating in a piezoelectric film, a low-acoustic-velocity film stacked on the high-acoustic-velocity film and in which an acoustic velocity of a bulk wave propagating therein is lower than an acoustic velocity of a bulk wave propagating in the piezoelectric film, the piezoelectric film is stacked on the low-acoustic-velocity film, and an IDT electrode stacked on a surface of the piezoelectric film.
    Type: Application
    Filed: October 19, 2022
    Publication date: February 9, 2023
    Inventors: Munehisa WATANABE, Hideki IWAMOTO, Hajime KANDO, Syunsuke KIDO
  • Publication number: 20230019446
    Abstract: An acoustic wave device includes a silicon oxide film, a piezoelectric body, and an interdigital transducer electrode laminated on a support substrate made of silicon. Where a wave length that is determined by an electrode finger pitch of the interdigital transducer electrode is ?, a thickness of the support substrate is greater than or equal to about 3?. An acoustic velocity of the first higher mode that propagates through the piezoelectric body is an acoustic velocity VSi=(V1)1/2 of bulk waves that propagate in the support substrate, which is determined by V1 out of solutions V1, V2, and V3 of x derived from the mathematical expression Ax3+Bx2+Cx+D=0, or higher than VSi.
    Type: Application
    Filed: September 15, 2022
    Publication date: January 19, 2023
    Inventors: Takuya KOYANAGI, Hideki IWAMOTO
  • Patent number: 11552616
    Abstract: An acoustic wave device includes a support substrate, a silicon nitride film stacked on the support substrate, a silicon oxide film stacked on the silicon nitride film, a piezoelectric body stacked on the silicon oxide film and made of lithium tantalite, and an IDT electrode provided on one main surface of the piezoelectric body. For a wavelength normalized film thickness of the piezoelectric body, an Euler angle of the piezoelectric body, a wavelength normalized film thickness of the silicon nitride film, a wavelength normalized film thickness of the silicon oxide film, and a wavelength normalized film thickness of the IDT electrode, values are set so that at least one of a response intensity of a first higher order mode, corresponding to the response intensity of a second higher order mode, and of a response intensity of a third higher mode is greater than about ?2.4.
    Type: Grant
    Filed: February 6, 2020
    Date of Patent: January 10, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Ryo Nakagawa, Shou Nagatomo, Hideki Iwamoto, Tsutomu Takai
  • Publication number: 20230006638
    Abstract: An elastic wave device includes a support substrate made of silicon, a piezoelectric film disposed directly or indirectly on the support substrate, and an interdigital transducer electrode disposed on one surface of the piezoelectric film. A higher-order mode acoustic velocity of propagation through the piezoelectric film is equal or substantially equal to an acoustic velocity Vsi=(V1)1/2 of propagation through silicon or higher than the acoustic velocity Vsi, where Vsi is specified by V1 among solutions V1, V2, and V3 with respect to x derived from Ax3+Bx2+Cx+D=0.
    Type: Application
    Filed: September 14, 2022
    Publication date: January 5, 2023
    Inventor: Hideki IWAMOTO
  • Publication number: 20220407493
    Abstract: An acoustic wave device includes a support substrate, a multilayer body, and an IDT electrode. The multilayer body includes a lithium tantalate piezoelectric layer and a lithium niobate piezoelectric layer that are laminated, and is on the support substrate. The IDT electrode is on the multilayer body, and includes electrode fingers. When a wavelength of an acoustic wave determined by a pitch of the electrode fingers is denoted as ?, a thickness of the multilayer body is about 0.66? or less.
    Type: Application
    Filed: August 24, 2022
    Publication date: December 22, 2022
    Inventors: Hideki IWAMOTO, Katsuya DAIMON
  • Publication number: 20220407497
    Abstract: An acoustic wave device includes a support substrate, first and second piezoelectric layers, and an IDT electrode. The first and second piezoelectric layers are on the support substrate. The IDT electrode is on the first piezoelectric layer and includes electrode fingers. The second piezoelectric layer is between the first piezoelectric layer and the support substrate. The first and second piezoelectric layers are made of lithium tantalate or lithium niobate. Euler angles of the second piezoelectric layer are different from Euler angles of the first piezoelectric layer.
    Type: Application
    Filed: August 24, 2022
    Publication date: December 22, 2022
    Inventor: Hideki IWAMOTO
  • Patent number: 11533040
    Abstract: An elastic wave device includes a piezoelectric film, a high acoustic velocity member, a low acoustic velocity film located between the piezoelectric film and the high acoustic velocity member and through which an elastic wave propagates at a lower acoustic velocity than an elastic wave that propagates through the piezoelectric film, and an interdigital transducer electrode including electrode fingers separated from each other and disposed side by side in a first direction. At least one of the electrode fingers includes a first metal layer including first and second main body portions. A recessed portion is located in a central region in the first direction of the electrode finger and is recessed in the thickness direction of the piezoelectric film. A protrusion portion protrudes from at least a portion of the first main body portion in the first direction.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: December 20, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Masayuki Morita, Hideki Iwamoto
  • Patent number: 11509282
    Abstract: An acoustic wave device includes a support substrate including silicon, a piezoelectric layer provided directly or indirectly on the support substrate, and an interdigital transducer (IDT) electrode provided on the piezoelectric layer. When a wavelength defined by an electrode finger pitch of the IDT electrode is ?, a thickness of the piezoelectric layer is about 1? or less. VL, which is an acoustic velocity of a longitudinal wave component of a bulk wave propagating through the piezoelectric layer, satisfies Unequal Equation (2) below in relation to an acoustic velocity VSi-1 determined by Equation (1) below: VSi-1=(V2)1/2 (m/sec)??Equation (1), VSi-1?VL??Unequal Equation (2), V2 in Equation (1) is a solution of Equation (3), and Ax3+Bx2+Cx+D=0??Equation (3).
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: November 22, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Shou Nagatomo, Hideki Iwamoto
  • Patent number: 11509284
    Abstract: An acoustic wave device includes a piezoelectric layer, an IDT electrode, a high-acoustic-velocity support substrate, and a low-acoustic-velocity film. The high-acoustic-velocity support substrate is located on an opposite side of the piezoelectric layer from the IDT electrode in the thickness direction of the piezoelectric layer. The low-acoustic-velocity film is disposed between the high-acoustic-velocity support substrate and the piezoelectric layer in the thickness direction. The high-acoustic-velocity support substrate includes a base region and a surface region disposed nearer to the low-acoustic-velocity film than the base region in the thickness direction and whose crystal quality is worse than that of the base region. The surface region includes first and second layers disposed nearer to the base region than the first layer in the thickness direction and whose crystal quality is better than that of the first layer.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: November 22, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Hideki Iwamoto
  • Patent number: 11509280
    Abstract: An elastic wave device includes a supporting substrate, a high-acoustic-velocity film stacked on the supporting substrate and in which an acoustic velocity of a bulk wave propagating therein is higher than an acoustic velocity of an elastic wave propagating in a piezoelectric film, a low-acoustic-velocity film stacked on the high-acoustic-velocity film and in which an acoustic velocity of a bulk wave propagating therein is lower than an acoustic velocity of a bulk wave propagating in the piezoelectric film, the piezoelectric film is stacked on the low-acoustic-velocity film, and an IDT electrode stacked on a surface of the piezoelectric film.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: November 22, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Munehisa Watanabe, Hideki Iwamoto, Hajime Kando, Syunsuke Kido
  • Publication number: 20220368305
    Abstract: An acoustic wave device includes a support substrate, a piezoelectric layer, and an IDT electrode. The piezoelectric layer is over the support substrate. The IDT electrode is on the piezoelectric layer, and includes a plurality of electrode fingers. An intersecting width of the plurality of electrode fingers is equal to or smaller than about 5?.
    Type: Application
    Filed: July 28, 2022
    Publication date: November 17, 2022
    Inventors: Hideki IWAMOTO, Katsuya DAIMON, Tetsuya KIMURA
  • Patent number: 11502664
    Abstract: An electronic component includes a support member, a piezoelectric film, and an interdigital transducer. The support member includes silicon as a primary component. The piezoelectric film is provided directly or indirectly on the support member. The interdigital transducer includes a plurality of electrode fingers. The plurality of electrode fingers are provided side by side separately from each other. The interdigital transducer is provided on the principal surface of the piezoelectric film. The film thickness of the piezoelectric film is about 3.5 ? or less, where ? denotes the wavelength of an acoustic wave determined by the electrode finger pitch of the interdigital transducer. In the support member, the high-impurity-concentration region is further from the piezoelectric film than the low-impurity-concentration region.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: November 15, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Takuya Koyanagi, Hideki Iwamoto
  • Patent number: 11496226
    Abstract: In an acoustic wave device, an antenna end resonator that is electrically closest to a first terminal is a first acoustic wave resonator. In each of the first acoustic wave resonator and a second acoustic wave resonator, a thickness of a piezoelectric layer is about 3.5? or less when a wavelength of an acoustic wave is denoted as ?. The first acoustic wave resonator and the second acoustic wave resonator satisfy at least one of a first condition, a second condition, and a third condition. The first condition is a condition that the first acoustic wave resonator further includes a dielectric film provided between the piezoelectric layer and an interdigital transducer electrode, and the second acoustic wave resonator does not include the dielectric film.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: November 8, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Ryo Nakagawa, Hideki Iwamoto, Tsutomu Takai
  • Patent number: 11482983
    Abstract: An elastic wave device includes a support substrate made of silicon, a piezoelectric film disposed directly or indirectly on the support substrate, and an interdigital transducer electrode disposed on one surface of the piezoelectric film. A higher-order mode acoustic velocity of propagation through the piezoelectric film is equal or substantially equal to an acoustic velocity Vsi=(V1)1/2 of propagation through silicon or higher than the acoustic velocity Vsi, where Vsi is specified by V1 among solutions V1, V2, and V3 with respect to x derived from Ax3+Bx2+Cx+D=0.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: October 25, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Hideki Iwamoto
  • Patent number: 11476828
    Abstract: An acoustic wave device includes a silicon oxide film, a piezoelectric body, and an interdigital transducer electrode laminated on a support substrate made of silicon. Where a wave length that is determined by an electrode finger pitch of the interdigital transducer electrode is ?, a thickness of the support substrate is greater than or equal to about 3?. An acoustic velocity of the first higher mode that propagates through the piezoelectric body is an acoustic velocity Vsi=(V1)1/2 of bulk waves that propagate in the support substrate, which is determined by V1 out of solutions V1, V2, and V3 of x derived from the mathematical expression Ax3+Bx2+Cx+D=0, or higher than Vsi.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: October 18, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Takuya Koyanagi, Hideki Iwamoto
  • Patent number: 11469736
    Abstract: In an acoustic wave device, a piezoelectric body is directly or indirectly provided on a high acoustic velocity material layer, an interdigital transducer electrode is directly or indirectly provided on the piezoelectric body, the interdigital transducer electrode includes a first busbar, a second busbar spaced away from the first busbar, a plurality of first electrode fingers, and a plurality of second electrode fingers, and a weighting is applied to the interdigital transducer electrode by providing a floating electrode finger not electrically connected to the first busbar or the second busbar or applied by providing an electrode finger formed by metallizing a gap between the first electrode fingers or a gap between the second electrode fingers to integrate the first electrode fingers or the second electrode fingers.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: October 11, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Munehisa Watanabe, Hideki Iwamoto, Harunobu Horikawa
  • Patent number: 11463067
    Abstract: In a multiplexer, at least one acoustic wave filter includes a piezoelectric body made of lithium tantalate having Euler angles (?LT=0°±5°, ?LT, ?LT=0°±15°), a support substrate, and an interdigital transducer (IDT) electrode. A frequency fh1_t(n) of a first higher-order mode satisfies below Formulas (3) and (4) in all acoustic wave filters (m) having a higher pass band than at least one acoustic wave filter (n) (n<m?N) in at least one acoustic wave resonator among a plurality of acoustic wave resonators. fh1_t(n)>fu(m) Formula (3). fh1_t(n)<fl(m) Formula (4). Here, fu(m) and fl(m) represent the frequencies of the high-frequency end and the low-frequency end of the pass band in the m acoustic wave filters in Formulas (3) and (4).
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: October 4, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Ryo Nakagawa, Hideki Iwamoto, Tsutomu Takai
  • Patent number: 11463068
    Abstract: An acoustic wave device includes a material layer with Euler angles and an elastic constant at the Euler angles represented by Expression 1, a piezoelectric body including opposing first and second principal surfaces, is laminated directly or indirectly on the material layer and has Euler angles, and whose elastic constant at the Euler angles is represented by the Expression 1 below, and an IDT electrode on at least one of first and second principal surfaces of the piezoelectric body, and in which a wave length determined by an electrode finger pitch is ?.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: October 4, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Hideki Iwamoto, Tsutomu Takai, Ryo Nakagawa, Takashi Yamane, Masanori Otagawa
  • Patent number: 11456719
    Abstract: An acoustic wave device includes a high-acoustic-velocity support substrate, a low-acoustic-velocity film provided on the high-acoustic-velocity support substrate, a piezoelectric layer provided on the low-acoustic-velocity film, and an IDT electrode provided on the piezoelectric layer. An acoustic velocity of a bulk wave propagating through the high-acoustic-velocity support substrate is higher than an acoustic velocity of an acoustic wave propagating through the piezoelectric layer. An acoustic velocity of a bulk wave propagating through the low-acoustic-velocity film is lower than an acoustic velocity of a bulk wave propagating through the piezoelectric layer. The low-acoustic-velocity film has a first portion and a second portion that is located closer to the high-acoustic-velocity support substrate than the first portion. The first and second portions include the same or similar materials.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: September 27, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Hideki Iwamoto