Abstract: A gate interconnection portion includes a first gate interconnection portion, a second gate interconnection portion, and a third gate interconnection portion. The first gate interconnection portion is formed in parallel to a Y axis direction toward a power supply interconnection and extends to a prescribed position within an element formation region. The second gate interconnection portion is formed in parallel to a direction obliquely bent with respect to the Y-axis direction from the first gate interconnection portion toward the power supply interconnection, and extends across a boundary between the element formation region and an element isolation insulating film, which is in parallel to an X axis direction. The third gate interconnection portion further extends in parallel to the Y-axis direction from the second gate interconnection portion toward the power supply interconnection.

Abstract: A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.

Abstract: Introduction of sounds outside a vehicle is automatically controlled according to a driving state of the vehicle. In a vehicle, a microphone device that collects sounds outside the vehicle and a speaker device that reproduces the collected sounds are installed. When a gear position for the vehicle is a reverse driving position, and until the vehicle reaches a predetermined speed for the first time after a key position in an ignition key switch is switched from an off position to an accessories position or an on position, the collected sounds are reproduced. The collected sounds are transmitted to a car navigation device or a car audio system via wires or wirelessly. When the sounds outside the vehicle are reproduced, sound reproduction in the car navigation device or the car audio system is stopped and the sounds outside the vehicle are reproduced at a set volume.

Abstract: In an overlay displacement amount measuring method according to an embodiment, a temperature distribution of a substrate during a pattern forming process and a temperature distribution of the substrate during a measuring process for measuring a positional displacement amount between patterns on the substrate by an electron microscope are measured. An expansion/contraction amount of the substrate between two processes is calculated based upon the two temperature distributions, and the positional displacement amount is corrected based upon the expansion/contraction amount. An overlay displacement amount between the pattern and a pattern formed on a layer different from the pattern is measured by an optical measuring apparatus, and the overlay displacement amount is corrected based upon the corrected positional displacement amount.

Abstract: According to one embodiment, an exposure apparatus includes a light blocking unit that blocks an exposure light reflected on a reflective mask at a part other than an aperture; a detection unit that measures a light intensity of the exposure light passed through the light blocking unit; and a calculation unit that calculates, based on the light intensity, a transfer characteristic when a pattern on the reflective mask is transferred to a substrate. In the light blocking unit, a position on an aperture plane and a position in an optical axis direction of the exposure light are adjusted. The calculation unit calculates the transfer characteristic based on the position in the optical axis direction in which the light intensity is maximized.

Abstract: The orientation polarization (positive and negative) of the Si—N bonds and the Si—O bonds is canceled, thereby enabling to minimize the polarization in a capacitive insulating film. As a result, a silicon oxynitride film with a small voltage secondary coefficient is formed, and is applied as a capacitive insulating film for use in a MIM capacitor. Specifically, the refractive index “n” of the silicon oxynitride film satisfies 1.47?n?1.53, for light with a wavelength of 633 nm.

Abstract: According to one embodiment, provided is a template including a first pattern that is to be transferred to a processing target and is arranged on a transfer region defined on a first principal surface of a template substrate. The template includes a second pattern that is used to measure a position and arranged on a second principal surface of the template substrate opposite to the first principal surface.

Abstract: According to one embodiment, provided is a template in which a transfer region on which a first pattern to be transferred to a processing target is arranged and a non-transfer region surrounding the transfer region are formed on a principal surface of a template substrate. The template includes a second pattern used to measure deviation of a pattern formed on the template substrate from a design position in at least the transfer region. The second pattern arranged on the transfer region is not transferred to the processing target when a transfer to the processing target is performed through an imprint material.

Abstract: According to one embodiment, a photomask includes a substrate, a film portion, a pattern, and a plurality of detection marks. The film portion is provided on a surface of the substrate. The film portion has a light transmittance lower than light transmittance of the substrate. The pattern is provided in a surface of the film portion. The pattern is configured to be transferred to a transfer target. The plurality of detection marks is provided in the film portion, with intensity of light transmitted through the detection marks being suppressed so as to suppress transfer the detection marks to the transfer target.

Abstract: A method of changing a transporting configuration of a workpiece of an absorbent article includes: for the workpiece having a shape in which a longitudinal central section is narrower in the lateral direction than longitudinal end sections, transporting a plurality of workpieces in longitudinal-direction flowing, the plurality of workpieces being transported in a state where the longitudinal end sections of each workpiece are adjacent to the central section of another workpiece and the plurality of workpieces form N workpiece lines (N is an integer of 2 or more) arranged in a lateral direction; forming each workpiece group including N workpieces by correlating, based on a predetermined correlation pattern; and changing a transporting configuration of the workpieces of the workpiece group from the longitudinal-direction flowing to the lateral-direction flowing. The forming of the workpiece group is performed by correlating workpieces arranged side by side in the lateral direction.

Abstract: A gate interconnection portion includes a first gate interconnection portion, a second gate interconnection portion, and a third gate interconnection portion. The first gate interconnection portion is formed in parallel to a Y axis direction toward a power supply interconnection and extends to a prescribed position within an element formation region. The second gate interconnection portion is formed in parallel to a direction obliquely bent with respect to the Y-axis direction from the first gate interconnection portion toward the power supply interconnection, and extends across a boundary between the element formation region and an element isolation insulating film, which is in parallel to an X axis direction. The third gate interconnection portion further extends in parallel to the Y-axis direction from the second gate interconnection portion toward the power supply interconnection.

Abstract: To facilitate discrimination of a curb, a gutter or the like by using an infrared illuminating device and an infrared-sensitive image pickup device mounted on an exterior mirror of a vehicle when the vehicle is pulled over to a shoulder at night. Two illuminating devices having optical axes oriented downward are mounted on a housing of a side mirror at a distance from each other in the lateral direction of a vehicle. The illuminating devices alternately emit infrared light downwardly. An image pickup device sensitive to infrared light having an optical axis oriented downward is mounted on the housing at a middle position between the left and right illuminating devices. An image taken by the image pickup device is displayed on an image monitor disposed at a position where the monitor can be viewed from the driver seat.

Abstract: A main spindle device has a main spindle (1) having a hollow hole, and a chuck unit (10) for grasping a work (W). A pipe unit (71) is inserted into the hollow hole of the main spindle (1) and receives insertion of the work (W) to thereby prevent the work (W) from vibrating when rotated together with the rotation of the main spindle. A support unit (72) supports the pipe unit (71) at one end of the main spindle (1) such that the axial line of the pipe unit (71) coincides with the axial line of the main spindle (1) and such that one end of the pipe unit (71) projects from the one end of the main spindle (1) to be positioned inside the chuck unit (10).

Abstract: A method and an apparatus are provided for making a disposable bodily fluid handling composite pad having thickness-reduced regions on longitudinally opposite ends. The disposable bodily fluid absorbing composite pad includes a bodily fluid absorbing first pad and a bodily fluid absorbing second pad seperably attached to the first pad. A continuous web having continuous bodily fluid absorbing layer and bodily fluid impervious layer permanently attached together is fed to pass through paired compression rolls to obtain a worked web formed in regions which will become ends of the first pad with thickness-reduced regions. A bodily fluid absorbing web is seperably attached to the worked web to obtain a first composite web. A bodily fluid impervious web, pressure-sensitive adhesive and a separator are placed on the bodily fluid absorbing web of the first composite web to obtain a second composite web from which the composite pad is cut out.

Abstract: A bodily fluid absorbent pad has a shape symmetric in a longitudinal direction as well as in a transverse direction. A dimension of the pad in the transverse direction is larger in opposite end regions than in an intermediate region. The pad is formed along opposite side edges with first and second compressed lines. Paired compression rolls are used to form the first and second compressed lines, and at least one roll constituting the paired compression rolls is formed on a peripheral surface thereof with compressing units projecting from the peripheral surface. The compressing units are arranged in a circumferential direction to form one row and at least one additional row adjacent to the one row in an axial direction of the roll. There is an offset between the compressing unit in the one row and the compressing units in the other row in the circumferential direction.

Abstract: A structure obtaining a desired integrated circuit by sticking together a plurality of semiconductor substrates and electrically connecting integrated circuits formed on semiconductor chips of the respective semiconductor substrates is provided, and a penetrating electrode penetrating between a main surface and a rear surface of each of the semiconductor substrates and a penetrating separation portion separating the penetrating electrode are separately arranged. Thereby, after forming an insulation trench portion for formation of the penetrating separation portion on the semiconductor substrate, a MIS•FET is formed, and then, a conductive trench portion for formation of the penetrating electrode can be formed. Therefore, element characteristics of a semiconductor device having a three-dimensional structure can be improved.

Abstract: A display device comprises a display panel, a cooling unit cooling air in a casing containing the display panel, a fan unit generating an air flow in the casing, and a control unit controlling the cooling unit and the fan unit, and when the control unit deactivates the cooling unit, the control unit also deactivates the fan unit.

Abstract: A vehicle travel support device determines presence of a recognition inhibiting factor of a lane mark on a road on which a vehicle is traveling with high accuracy irrespective of an imaging history by a vehicular camera from the same position. The vehicle travel support system generates an edge image by extracting an edge or actualizing an edge in an image obtained through the vehicular camera. When Hough transform of the edge image is performed, votes for a specified vote value of a linear component is evaluated in a ?-? space (Hough space). Presence of a recognition inhibiting factor of a lane mark on a road is determined by determining whether or not the votes of a specified vote value in a specified region denoting a standard travel lane of a vehicle in the real space is ?a threshold in the ?-? space.

Abstract: In making bodily fluid absorbent pads quantity of scrapped material is reduced. A bodily fluid absorbent pad (liner) 10 has a shape symmetric in a longitudinal direction P as well as in a transverse direction Q. A dimension of the pad 10 in the transverse direction Q is larger in opposite end regions 31, 32 than in an intermediate region 33. The pad 10 is formed along opposite side edges 11a, 11b with first and second compressed lines 21, 22. Paired compression rolls 302 are used to form the first and second compressed lines 21, 22, and at least one roll constituting the paired compression rolls 302 is formed on a peripheral surface thereof with compressing units projecting from the peripheral surface. The compressing units are arranged in a circumferential direction to form one row and at least one additional row, which is adjacent to the one row in an axial direction of the roll.

Abstract: According to one embodiment, a photomask includes a substrate, a film portion, a pattern, and a plurality of detection marks. The film portion is provided on a surface of the substrate. The film portion has a light transmittance lower than light transmittance of the substrate. The pattern is provided in a surface of the film portion. The pattern is configured to be transferred to a transfer target. The plurality of detection marks is provided in the film portion, with intensity of light transmitted through the detection marks being suppressed so as to suppress transfer the detection marks to the transfer target.