Patents by Inventor Hideo Aizawa
Hideo Aizawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11529847Abstract: A vehicular air-conditioning device includes an inside air temperature detector, an inside air-conditioning portion, and an air-conditioning controller. The inside air-conditioning portion includes a temperature adjuster and a blower. The air-conditioning controller includes an auto control portion, an open signal detector, a thermal load determiner, and a power saving control portion. The auto control portion is configured to perform an auto control. The open signal detector is configured to detect an open signal. The thermal load determiner is configured to determine whether a thermal load on the passenger compartment exceeds an air-conditioning capacity of the auto control. The power saving control portion is configured to perform a power saving control to limit an increase of a power consumption regardless of the inside air temperature when the open signal is detected and it is determined that the thermal load exceeds the air-conditioning capacity of the auto control.Type: GrantFiled: February 19, 2019Date of Patent: December 20, 2022Assignee: DENSO CORPORATIONInventor: Hideo Aizawa
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Patent number: 11472002Abstract: A substrate polishing apparatus includes a polishing table 30 having a polishing surface 10 in the upper surface, a substrate holding portion 31 that holds a substrate W having a surface to be polished in the lower surface, and a holding portion cover 36 that covers the outer side of the substrate holding portion 31. Between the lower portion of the holding portion cover 36 and the upper surface of the polishing table 30, a gap portion for intake 37 is provided, and in the upper portion of the holding portion cover 36, a pipe for exhaust 39 connected to an exhaust mechanism 38 is provided. By operating the exhaust mechanism 38, a rising air current from the gap portion 37 toward the pipe 39 is formed between the outer surface of the substrate holding portion 31 and the inner surface of the holding portion cover 36.Type: GrantFiled: February 7, 2020Date of Patent: October 18, 2022Assignee: EBARA CORPORATIONInventors: Hiroyuki Shinozaki, Hiroshi Aono, Tadakazu Sone, Kenji Shinkai, Hideo Aizawa
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Publication number: 20220311039Abstract: A fuel cell system comprises a stack case in which there is accommodated a fuel cell stack in which unit cells are stacked. An opening is formed in an end part in the stack case. In this opening, cell voltage detection terminals, which are electrically connected to electrodes of the unit cells, are exposed. The opening is closed by a closing member in which filter bodies are retained. When the opening is viewed from the front, the filter bodies are arranged at positions that do not overlap with the cell voltage detection terminals.Type: ApplicationFiled: February 27, 2022Publication date: September 29, 2022Inventors: Hideharu NAITO, Hideo AIZAWA
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Publication number: 20220293994Abstract: The stack case includes a main body with a rectangular opening and a lid member covering the opening. A single positioning pin and a protrusion protrude outward of the main body from an edge in the opening of the side portion. The positioning pin inserted into the insertion hole of the lid member supports the lid member rotatably about the axis of the positioning pin. In a state where the positioning pin is inserted into the insertion hole, the placement surface of the lid member is placed on the positioning surface of the protrusion, whereby the lid member is positioned with respect to the opening.Type: ApplicationFiled: February 23, 2022Publication date: September 15, 2022Inventors: Hideharu NAITO, Hideo AIZAWA
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Patent number: 11103972Abstract: In-plane uniformity of buff processing is improved. According to a first form, a buff processing device for executing buff processing of a substrate is provided. Such buff processing device has a rotatable shaft, a buff head body, a torque transmission mechanism for transmitting rotation of the shaft to the buff head body, and an elastic member for elastically supporting the buff head body in a longitudinal direction of the shaft.Type: GrantFiled: October 11, 2016Date of Patent: August 31, 2021Assignee: EBARA CORPORATIONInventors: Hideo Aizawa, Junji Kunisawa, Mitsuru Miyazaki, Naoki Toyomura
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Publication number: 20200198093Abstract: A substrate polishing apparatus includes a polishing table 30 having a polishing surface 10 in the upper surface, a substrate holding portion 31 that holds a substrate W having a surface to be polished in the lower surface, and a holding portion cover 36 that covers the outer side of the substrate holding portion 31. Between the lower portion of the holding portion cover 36 and the upper surface of the polishing table 30, a gap portion for intake 37 is provided, and in the upper portion of the holding portion cover 36, a pipe for exhaust 39 connected to an exhaust mechanism 38 is provided. By operating the exhaust mechanism 38, a rising air current from the gap portion 37 toward the pipe 39 is formed between the outer surface of the substrate holding portion 31 and the inner surface of the holding portion cover 36.Type: ApplicationFiled: February 7, 2020Publication date: June 25, 2020Inventors: Hiroyuki SHINOZAKI, Hiroshi AONO, Tadakazu SONE, Kenji SHINKAI, Hideo AIZAWA
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Patent number: 10576604Abstract: A substrate polishing apparatus includes a polishing table 30 having a polishing surface 10 in the upper surface, a substrate holding portion 31 that holds a substrate W having a surface to be polished in the lower surface, and a holding portion cover 36 that covers the outer side of the substrate holding portion 31. Between the lower portion of the holding portion cover 36 and the upper surface of the polishing table 30, a gap portion for intake 37 is provided, and in the upper portion of the holding portion cover 36, a pipe for exhaust 39 connected to an exhaust mechanism 38 is provided. By operating the exhaust mechanism 38, a rising air current from the gap portion 37 toward the pipe 39 is formed between the outer surface of the substrate holding portion 31 and the inner surface of the holding portion cover 36.Type: GrantFiled: April 29, 2015Date of Patent: March 3, 2020Assignee: EBARA CORPORATIONInventors: Hiroyuki Shinozaki, Hiroshi Aono, Tadakazu Sone, Kenji Shinkai, Hideo Aizawa
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Patent number: 10518606Abstract: A vehicle air-conditioning unit includes an air-conditioning case, a heater, and an opening-closing device. The air-conditioning case includes a first air passage, a second air passage and a third air passage provided in parallel with each other. The heater is provided in the third air passage and heating the air flowing in the third air passage. The opening-closing device opens and closes the third air passage on a downstream side of the heater. The third air passage includes an opening hole that is an opening end of the third air passage on an upstream side of the heater, and the air-conditioning case includes a hole separation portion dividing the opening hole of the third air passage into a plurality of separation holes.Type: GrantFiled: December 1, 2015Date of Patent: December 31, 2019Assignee: DENSO CORPORATIONInventor: Hideo Aizawa
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Publication number: 20190299360Abstract: A polishing apparatus includes a polishing table supplied with liquid on a upper surface and rotating around a central axis, a liquid receiver having an annular shape and disposed below a peripheral portion of the polishing table, and a drain member having a tubular shape, attached to a peripheral portion of the polishing table, and including a lower end portion extending toward the liquid receiver.Type: ApplicationFiled: March 27, 2019Publication date: October 3, 2019Inventors: Tadakazu SONE, Ryuichi KOSUGE, Kenji SHINKAI, Hiroshi AONO, Hideo AIZAWA
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Publication number: 20190184789Abstract: A vehicular air-conditioning device includes an inside air temperature detector, an inside air-conditioning portion, and an air-conditioning controller. The inside air-conditioning portion includes a temperature adjuster and a blower. The air-conditioning controller includes an auto control portion, an open signal detector, a thermal load determiner, and a power saving control portion. The auto control portion is configured to perform an auto control. The open signal detector is configured to detect an open signal. The thermal load determiner is configured to determine whether a thermal load on the passenger compartment exceeds an air-conditioning capacity of the auto control. The power saving control portion is configured to perform a power saving control to limit an increase of a power consumption regardless of the inside air temperature when the open signal is detected and it is determined that the thermal load exceeds the air-conditioning capacity of the auto control.Type: ApplicationFiled: February 19, 2019Publication date: June 20, 2019Inventor: Hideo AIZAWA
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Patent number: 10155427Abstract: In a rotary door of a vehicular air conditioner, an outer peripheral portion closes a defroster blowing opening and another outer peripheral portion closes a foot blowing opening in a face mode. A first door opening communicates with an inlet opening and a second door opening communicates with a face blowing opening. A cross-sectional area of a flow path through which the airflow passes through the inlet opening and the first door opening is equal to a cross-sectional area of a flow path through which the airflow passes through the face blowing opening and the second door opening.Type: GrantFiled: November 17, 2015Date of Patent: December 18, 2018Assignee: DENSO CORPORATIONInventor: Hideo Aizawa
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Publication number: 20180345452Abstract: In-plane uniformity of buff processing is improved. According to a first form, a buff processing device for executing buff processing of a substrate is provided. Such buff processing device has a rotatable shaft, a buff head body, a torque transmission mechanism for transmitting rotation of the shaft to the buff head body, and an elastic member for elastically supporting the buff head body in a longitudinal direction of the shaft.Type: ApplicationFiled: October 11, 2016Publication date: December 6, 2018Inventors: Hideo AIZAWA, Junji KUNISAWA, Mitsuru MIYAZAKI, Naoki TOYOMURA
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Publication number: 20180304320Abstract: A substrate processing apparatus includes a substrate processing part 3 and a washing unit 40. The washing unit 40 includes a main body 43 having a liquid supplying port 41 and a liquid jetting port 42, a flow channel 44 formed between the liquid supplying port 41 and the liquid jetting port 42, and a valve 45 provided in the flow channel 44. In the washing unit 40, when the valve 45 is opened, the flow channel 44 is opened, thereby causing the liquid jetting port 42 to jet liquid, and when the valve 45 is closed, the flow channel 44 is closed, thereby causing the liquid jetting port 42 to stop jetting liquid. The flow channel 44 is provided with a water-hammer reducing mechanism 48 that operates to reduce damage to the flow channel 44 caused by a water hammer phenomenon when the valve 45 is closed.Type: ApplicationFiled: June 27, 2018Publication date: October 25, 2018Inventors: Hiroshi Aono, Hideo Aizawa, Tadakazu Sone, Kenji Shinkai, Nobutaka Omata
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Publication number: 20170320372Abstract: In a rotary door of a vehicular air conditioner, an outer peripheral portion closes a defroster blowing opening and another outer peripheral portion closes a foot blowing opening in a face mode. A first door opening communicates with an inlet opening and a second door opening communicates with a face blowing opening. A cross-sectional area of a flow path through which the airflow passes through the inlet opening and the first door opening is equal to a cross-sectional area of a flow path through which the airflow passes through the face blowing opening and the second door opening.Type: ApplicationFiled: November 17, 2015Publication date: November 9, 2017Applicant: DENSO CORPORATIONInventor: Hideo AIZAWA
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Publication number: 20170320370Abstract: A vehicle air-conditioning unit includes an air-conditioning case, a heater, and an opening-closing device. The air-conditioning case includes a first air passage, a second air passage and a third air passage provided in parallel with each other. The heater is provided in the third air passage and heating the air flowing in the third air passage. The opening-closing device opens and closes the third air passage on a downstream side of the heater. The third air passage includes an opening hole that is an opening end of the third air passage on an upstream side of the heater, and the air-conditioning case includes a hole separation portion dividing the opening hole of the third air passage into a plurality of separation holes.Type: ApplicationFiled: December 1, 2015Publication date: November 9, 2017Inventor: Hideo AIZAWA
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Patent number: 9764446Abstract: The invention suppresses generation of noises attributable to rotation of a rotary joint. A rotary joint includes a rotating body that rotates on a rotating axis A, a housing disposed so as to surround the rotating body, and at least one bearing disposed between the rotating body and the housing and adapted to support rotation of the rotating body. The rotary joint supplies fluids through fluid connection ports formed in the housing and fluid passages formed inside the rotating body to a polishing table having attached thereto a polishing pad for polishing a substrate or a holding portion that is adapted to hold the substrate while pressing the substrate against the polishing pad. At least one elastic member is interposed at least either between the rotating body and the at least one bearing or between the housing and the at least one bearing.Type: GrantFiled: April 9, 2015Date of Patent: September 19, 2017Assignee: EBARA CORPORATIONInventors: Hideo Aizawa, Tadakazu Sone, Masao Umemoto, Ryuichi Kosuge
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Patent number: 9724798Abstract: There is provided a cover to which a polishing liquid is less likely to stick and solidify. The cover for a component of a polishing apparatus for polishing substrates is provided with a locking mechanism disposed inside the cover and configured to latch together a main body of the component and the cover. An external surface of the cover exposed to the outside has no recessed portion, and has no horizontal plane, except on the top portion of the cover.Type: GrantFiled: March 27, 2015Date of Patent: August 8, 2017Assignee: EBARA CORPORATIONInventors: Kenji Shinkai, Tadakazu Sone, Hideo Aizawa, Hiroshi Aono
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Patent number: 9666469Abstract: A lifting device 630b includes a lifting mechanism 640 and an adjustment member 660. The lifting mechanism 640 is provided between at least one of a plurality of units of a substrate processing apparatus and an installation surface of the unit, and adjusts height of the at least one unit with respect to the installation surface. The adjustment member 660 is provided with an extended section 664 extended from the lifting mechanism 640, and is capable of operating the lifting mechanism 640 through the extended section 664.Type: GrantFiled: September 23, 2014Date of Patent: May 30, 2017Assignee: EBARA CORPORATIONInventors: Hiroyuki Shinozaki, Kenji Shinkai, Tadakazu Sone, Hideo Aizawa, Hiroshi Aono, Toshio Yokoyama
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Publication number: 20170008144Abstract: There is provided a cover to which a polishing liquid is less likely to stick and solidify. The cover for a component of a polishing apparatus for polishing substrates is provided with a locking mechanism disposed inside the cover and configured to latch together a main body of the component and the cover. An external surface of the cover exposed to the outside has no recessed portion, and has no horizontal plane, except on the top portion of the cover.Type: ApplicationFiled: March 27, 2015Publication date: January 12, 2017Inventors: Kenji SHINKAI, Tadakazu SONE, Hideo AIZAWA, Hiroshi AONO
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Patent number: 9522453Abstract: A polishing apparatus which can continue stable operation of the apparatus without generating torsional vibration in a rotary joint and without generating an abnormal sound at an engagement part between a cooling water pipe and a polishing table is disclosed. The polishing apparatus includes a rotary joint fixed to a rotating part of the polishing table or a rotating part of the top ring to supply a fluid into the polishing table or the top ring and discharge the fluid from the polishing table or the top ring, and a rotation-prevention mechanism which connects the rotary joint with an apparatus frame to prevent the rotary joint from being rotated. The rotation-prevention mechanism includes a link mechanism having at least one spherical plain bearing.Type: GrantFiled: July 6, 2015Date of Patent: December 20, 2016Assignee: EBARA CORPORATIONInventors: Hideo Aizawa, Masao Umemoto, Tadakazu Sone, Ryuichi Kosuge