Abstract: A microcomputer is provided, which can load data of different areas in parallel and transfer the loaded data to a storage circuit. The microcomputer includes a CPU to control a DRIs each of which loads image data of a prescribed area out of image data inputted from a camera and transfers the image data to a memory blocks, and the DRIs each of which transfers image data of respectively different area out of the image data inputted from the camera to the memory blocks. Therefore, it becomes possible to load image data of different areas in parallel and to transfer the loaded image data to the memory blocks.

Abstract: A charged particle beam writing apparatus includes a division/distribution processing unit to divide and distribute processed data into data groups each having an approximately equal data amount respectively, transmitting units to transmit the processed data of the groups such that processed data is transmitted in descending order with respect to order of writing processing for each data group and the groups are transmitted in parallel, memories to store the processed data of the groups such that each of the memories stores processed data of each different one of the groups, a writing order data output unit to output them, regardless of data group and in order of writing processing, and a writing unit to write a pattern on a target workpiece with a charged particle beam, based on the processed data output in the order of writing processing.

Abstract: A multi charged particle beam writing method includes performing ON/OFF switching of a beam by an individual blanking system for the beam concerned, for each beam in multi-beams of charged particle beam, with respect to each time irradiation of irradiation of a plurality of times, by using a plurality of individual blanking systems that respectively perform beam ON/OFF control of a corresponding beam in the multi-beams, and performing blanking control, in addition to the performing ON/OFF switching of the beam for the each beam by the individual blanking system, with respect to the each time irradiation of the irradiation of the plurality of times, so that the beam is in an ON state during an irradiation time corresponding to irradiation concerned, by using a common blanking system that collectively performs beam ON/OFF control for a whole of the multi-beams.

Abstract: A charged particle beam pattern forming apparatus, includes a charge amount distribution calculation unit configured to calculate a charge amount distribution charged by vertical incidence of a charged particle beam on a pattern forming region of a target object; a position correction unit configured to calculate, using the charge amount distribution charged, a corrected position of each pattern forming position corrected for a misregistration amount including a misregistration amount dependent on a deflection position where the charged particle beam is deflected, the misregistration amount caused by an amount of charge; and a pattern generator configured to form a pattern in the corrected position by using the charged particle beam.

Abstract: A belt (shoe press belt) for papermaking machines having good wet paper web water squeezing capability, and wherein damage, cracks, and abrasion of the outer circumferential belt surface during use is small, and due to the reduced abrasion between the cutting chips, the cutter and the groove walls, the cutter life is long and the surface roughness is small. The cross-section in the cross-machine direction of the water draining grooves is provided in the machine direction in the felt-side surface of the shoe press belt and the groove corner parts formed by the groove sidewalls and the groove bottom part of the water draining grooves are chamfered in the shape of a trapezoid or a rectangle.

Abstract: A charged particle beam writing apparatus includes a plurality of tracking calculation units to calculate a deflection amount of the charged particle beam in regard to a movable substrate, a switching unit for each of a plurality of virtual small regions of the substrate, to input an end signal indicating completion of charged particle beam emission to a respective small region, and to switch from output of one of the tracking calculation units to output of another of the tracking calculation units, and a deflector, while a substrate is moving, to deflect the charged particle beam to an n-th small region, based on an output from one of the tracking calculation units before switching and to deflect the charged particle beam to an (n+1)th small region based on an output from another of tracking calculation units after switching the plurality of tracking calculation units.

Abstract: A microcomputer is provided, which can load data of different areas in parallel and transfer the loaded data to a storage circuit. The microcomputer includes a CPU to control a DRIs each of which loads image data of a prescribed area out of image data inputted from a camera and transfers the image data to a memory blocks, and the DRIs each of which transfers image data of respectively different area out of the image data inputted from the camera to the memory blocks. Therefore, it becomes possible to load image data of different areas in parallel and to transfer the loaded image data to the memory blocks.

Abstract: A charged particle beam writing apparatus includes a division/distribution processing unit to divide and distribute processed data into data groups each having an approximately equal data amount respectively, transmitting units to transmit the processed data of the groups such that processed data is transmitted in descending order with respect to order of writing processing for each data group and the groups are transmitted in parallel, memories to store the processed data of the groups such that each of the memories stores processed data of each different one of the groups, a writing order data output unit to output them, regardless of data group and in order of writing processing, and a writing unit to write a pattern on a target workpiece with a charged particle beam, based on the processed data output in the order of writing processing.

Abstract: A charged particle beam writing apparatus includes a plurality of tracking calculation units to calculate a deflection amount of the charged particle beam in regard to a movable substrate, a switching unit for each of a plurality of virtual small regions of the substrate, to input an end signal indicating completion of charged particle beam emission to a respective small region, and to switch from output of one of the tracking calculation units to output of another of the tracking calculation units, and a deflector, while a substrate is moving, to deflect the charged particle beam to an n-th small region, based on an output from one of the tracking calculation units before switching and to deflect the charged particle beam to an (n+1)th small region based on an output from another of tracking calculation units after switching the plurality of tracking calculation units.

Abstract: A microcomputer is provided, which can load data of different areas in parallel and transfer the loaded data to a storage circuit. The microcomputer includes a CPU to control a DRIs each of which loads image data of a prescribed area out of image data inputted from a camera and transfers the image data to a memory blocks, and the DRIs each of which transfers image data of respectively different area out of the image data inputted from the camera to the memory blocks. Therefore, it becomes possible to load image data of different areas in parallel and to transfer the loaded image data to the memory blocks.

Abstract: A belt (shoe press belt) for papermaking machines having good wet paper web water squeezing capability, and wherein damage, cracks, and abrasion of the outer circumferential belt surface during use is small, and due to the reduced abrasion between the cutting chips, the cutter and the groove walls, the cutter life is long and the surface roughness is small. The cross-section in the cross-machine direction of the water draining grooves is provided in the machine direction in the felt-side surface of the shoe press belt and the groove corner parts formed by the groove sidewalls and the groove bottom part of the water draining grooves are chamfered in the shape of a trapezoid or a rectangle.

Abstract: A charged particle beam pattern forming apparatus, includes a charge amount distribution calculation unit configured to calculate a charge amount distribution charged by vertical incidence of a charged particle beam on a pattern forming region of a target object; a position correction unit configured to calculate, using the charge amount distribution charged, a corrected position of each pattern forming position corrected for a misregistration amount including a misregistration amount dependent on a deflection position where the charged particle beam is deflected, the misregistration amount caused by an amount of charge; and a pattern generator configured to form a pattern in the corrected position by using the charged particle beam.

Abstract: Control data for a main deflector is calculated based on position data that specifies the position of a region to be irradiated with the electron beam on the subfield, data on the number of all beam shots on the subfield, data on a time required for all the beam shots, and stage data that specifies the position of the stage. When the number of beam shots on one of the divided subfield sections reaches the obtained number of the beam shots on each of the divided subfield sections, a writing process proceed to a writing operation to be performed on another one of the divided subfield sections based on the direction of the movement of the stage.

Abstract: A data transfer system is provided, in which divided data generated by data generation terminals are randomly transmitted to data transfer apparatuses by a host terminal, a parameter list controlling the order of transfer of divided data is generated by a parameter list generation part, and a transfer processing part transfers divided data transferred in a DMA mode to an electron beam drawing apparatus according to the parameter list through a general-purpose high-speed data transfer bus by bypassing a CPU.

Abstract: The window-frame judgment unit judges that a section to be drawn has entered a window-frame area according to the main deflector data and the stage position information to output judgment signal. The main deflector calculator receives the main deflector data and calculates calculation data for driving a driving unit based on the main deflector data. The transfer controller detects output of the judgment signal and completion of drawing in the section under drawing to receive a transfer of the calculation data from the main deflector calculator and transfer the calculation data to the driving unit.

Abstract: A microcomputer is provided, which can load data of different areas in parallel and transfer the loaded data to a storage circuit. The microcomputer includes a CPU to control a DRIs each of which loads image data of a prescribed area out of image data inputted from a camera and transfers the image data to a memory blocks, and the DRIs each of which transfers image data of respectively different area out of the image data inputted from the camera to the memory blocks. Therefore, it becomes possible to load image data of different areas in parallel and to transfer the loaded image data to the memory blocks.

Abstract: A light shielding mask 24 opposing to an entrance surface of a fly eye lens 23 is provided, and a transparent portion 25 is made open corresponding to each of lens portions 23b, respectively. Each transparent portion 25 is divided to be formed into a first transparent portion 25a allowing light for forming a projected image 101a on an upper stage of an illuminated surface 100a to enter the lens portions 23b and a second transparent portion 25b allowing light for forming a projected image 101b on an lower stage of the illuminated surface 100b to enter the lens portions 23b, and these are individually set, thereby a difference between an irradiation distance to each of the illuminated surface 100a, 100b due to a step can be complemented, individually.

Abstract: A CAN module receives a message from a CAN bus to store the same in a message box unit of a message box. A reception request signal is output from the message box unit to a DMAC/IF. The DMAC/IF outputs a 7-bit encoded address together with a transfer request signal. A DMAC accesses a selected message box unit of the CAN module and a memory based on the transfer request signal and the 7-bit encoded address to transfer the message stored in the selected message box unit to the memory.

Abstract: Control data for a main deflector is calculated based on position data that specifies the position of a region to be irradiated with the electron beam on the subfield, data on the number of all beam shots on the subfield, data on a time required for all the beam shots, and stage data that specifies the position of the stage. When the number of beam shots on one of the divided subfield sections reaches the obtained number of the beam shots on each of the divided subfield sections, a writing process proceed to a writing operation to be performed on another one of the divided subfield sections based on the direction of the movement of the stage.

Abstract: There is provided a lighting system simple in configuration and capable of irradiating an irradiation image with less distortion onto an irradiation surface. For this reason, light shielding masks 24 causing light from an LED 12 to be incident on lens units 23b are arranged oppositely to a fly-eye lens 23. The opening shape of a light shielding unit 24b arranged on the light shielding mask 24 is set according to the state where the fly-eye lens 23 opposes an irradiation surface 100, and the light shielding unit 24b prohibits light in a range distorting the shape of an irradiation image on the irradiation surface 100 from being incident on the lens units 23b.