Patents by Inventor Hideo Wada

Hideo Wada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230354606
    Abstract: A device includes a cell-array above transistors. A first semiconductor layer is above the cell-array and has a first surface on a side on which the cell-array is provided and a second surface opposite to the first surface. A first metal-wire is above the second surface and electrically connected to the first semiconductor layer. A second metal-wire is above the second surface to be present in the same layer as the first metal-wire and is not in contact with the first metal-wire and the first semiconductor layer. A first contact is below the first metal-wire, extends in a first direction from the first surface to the second surface, and electrically connects one of the transistors to the first metal-wire. A second contact is below the second metal-wire, extends in the first direction, and electrically connects another one of the transistors to the second metal-wire.
    Type: Application
    Filed: March 20, 2023
    Publication date: November 2, 2023
    Applicant: Kioxia Corporation
    Inventors: Hideo WADA, Hironobu HAMANAKA
  • Patent number: 11626375
    Abstract: A semiconductor memory device includes: a stack above a peripheral circuit on a first substrate, in which first conductive layers and first insulation layers are alternately stacked in a first direction each; a first pillar through the stack, in which a semiconductor layer and each first conductive layer form a memory cell at their intersection; a second substrate including a first region above the stack and the first pillar, being connected to a semiconductor layer, and a second region juxtaposed with the first region in a second direction; a second insulation layer through the second substrate, insulating the regions from each other; and a second conductive layer including a first portion through the second substrate, and a second portion extending in the second direction above the second substrate and including a part defining a bonding pad. The second portion overlaps with the second insulation layer in the first direction.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: April 11, 2023
    Assignee: Kioxia Corporation
    Inventor: Hideo Wada
  • Publication number: 20230082971
    Abstract: A semiconductor device includes a first substrate, a first insulating film disposed on the first substrate, and a semiconductor layer disposed on the first insulating film. The semiconductor device further includes a metal layer with a first portion and a second portion. The first portion is disposed on the semiconductor layer, and the second portion includes a bonding pad and is disposed on the first insulating film without the semiconductor layer interposed between the second portion and the first insulating film.
    Type: Application
    Filed: March 3, 2022
    Publication date: March 16, 2023
    Inventors: Hideo WADA, Hiroyuki YAMASAKI, Masahisa SONODA, Go OIKE
  • Publication number: 20220270992
    Abstract: A semiconductor memory device includes: a stack above a peripheral circuit on a first substrate, in which first conductive layers and first insulation layers are alternately stacked in a first direction each; a first pillar through the stack, in which a semiconductor layer and each first conductive layer form a memory cell at their intersection; a second substrate including a first region above the stack and the first pillar, being connected to a semiconductor layer, and a second region juxtaposed with the first region in a second direction; a second insulation layer through the second substrate, insulating the regions from each other; and a second conductive layer including a first portion through the second substrate, and a second portion extending in the second direction above the second substrate and including a part defining a bonding pad. The second portion overlaps with the second insulation layer in the first direction.
    Type: Application
    Filed: June 14, 2021
    Publication date: August 25, 2022
    Applicant: Kioxia Corporation
    Inventor: Hideo WADA
  • Patent number: 11411016
    Abstract: A semiconductor memory device includes a first chip and a second chip overlaid on the first chip. The second chip includes a memory cell array provided between a second semiconductor substrate and the first chip in a first direction, and first and second wires between the memory cell array and the first chip. The memory cell array includes three or more stacked bodies regularly arranged in a second direction perpendicular to the first direction and semiconductor layers extending in the stacked bodies in the first direction. Each of the stacked bodies includes gate electrodes stacked in the first direction. The first and second wires are aligned in the second direction with a gap therebetween.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: August 9, 2022
    Assignee: KIOXIA CORPORATION
    Inventors: Tomoya Sanuki, Keisuke Nakatsuka, Hiroshi Maejima, Kenichiro Yoshii, Takashi Maeda, Hideo Wada
  • Publication number: 20210296298
    Abstract: A semiconductor memory device includes a first chip and a second chip overlaid on the first chip. The second chip includes a memory cell array provided between a second semiconductor substrate and the first chip in a first direction, and first and second wires between the memory cell array and the first chip. The memory cell array includes three or more stacked bodies regularly arranged in a second direction perpendicular to the first direction and semiconductor layers extending in the stacked bodies in the first direction. Each of the stacked bodies includes gate electrodes stacked in the first direction. The first and second wires are aligned in the second direction with a gap therebetween.
    Type: Application
    Filed: August 28, 2020
    Publication date: September 23, 2021
    Inventors: Tomoya SANUKI, Keisuke NAKATSUKA, Hiroshi MAEJIMA, Kenichiro YOSHII, Takashi MAEDA, Hideo WADA
  • Patent number: 11056501
    Abstract: According to an embodiment, a memory device comprises a conductive layer containing a metal, a semiconductor layer on the conductive layer, electrode layers stacked on the semiconductor layer in a stacking direction, a semiconductor pillar penetrating the electrode layers in the stacking direction and electrically connected to the semiconductor layer, and a charge trap layer between the electrode layers and the semiconductor pillar. The conductive layer has a recess or a through-hole below the semiconductor pillar.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: July 6, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Hideo Wada, Hideto Takekida
  • Patent number: 10797077
    Abstract: According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N?2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.
    Type: Grant
    Filed: December 3, 2019
    Date of Patent: October 6, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Genki Kawaguchi, Masanari Fujita, Hideki Inokuma, Osamu Matsuura, Takeshi Imamura, Hideo Wada, Makoto Watanabe, Hajime Kaneko, Kenichi Fujii, Takanobu Itoh
  • Publication number: 20200111809
    Abstract: According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N-2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.
    Type: Application
    Filed: December 3, 2019
    Publication date: April 9, 2020
    Applicant: Toshiba Memory Corporation
    Inventors: Genki KAWAGUCHI, Masanari FUJITA, Hideki INOKUMA, Osamu MATSUURA, Takeshi IMAMURA, Hideo WADA, Makoto WATANABE, Hajime KANEKO, Kenichi FUJII, Takanobu ITOH
  • Patent number: 10541251
    Abstract: According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N?2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: January 21, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Genki Kawaguchi, Masanari Fujita, Hideki Inokuma, Osamu Matsuura, Takeshi Imamura, Hideo Wada, Makoto Watanabe, Hajime Kaneko, Kenichi Fujii, Takanobu Itoh
  • Patent number: 10475806
    Abstract: A semiconductor memory device includes a substrate with a first insulating film thereon, a wiring in the first insulating film, a first electrode film on the first insulating film, a stacked body on the first electrode film, made of alternating second insulating films and second electrode films, a first insulating member extending in a direction to penetrate the stacked body, a first semiconductor film around the first insulating member and connected to the first electrode film, a third insulating film around the first semiconductor film, a first conductive member extending in the direction to penetrate the stacked body and the first electrode film, and connected to the wiring, and a fourth insulating film around the first conductive member. The fourth insulating film has the same film structure as the third insulating film.
    Type: Grant
    Filed: February 28, 2018
    Date of Patent: November 12, 2019
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Mikiko Yagi, Hideto Takekida, Takaya Yamanaka, Masaharu Mizutani, Hideo Wada
  • Publication number: 20190081062
    Abstract: According to an embodiment, a memory device comprises a conductive layer containing a metal, a semiconductor layer on the conductive layer, electrode layers stacked on the semiconductor layer in a stacking direction, a semiconductor pillar penetrating the electrode layers in the stacking direction and electrically connected to the semiconductor layer, and a charge trap layer between the electrode layers and the semiconductor pillar. The conductive layer has a recess or a through-hole below the semiconductor pillar.
    Type: Application
    Filed: February 26, 2018
    Publication date: March 14, 2019
    Inventors: Hideo WADA, Hideto TAKEKIDA
  • Publication number: 20190074287
    Abstract: A semiconductor memory device includes a substrate with a first insulating film thereon, a wiring in the first insulating film, a first electrode film on the first insulating film, a stacked body on the first electrode film, made of alternating second insulating films and second electrode films, a first insulating member extending in a direction to penetrate the stacked body, a first semiconductor film around the first insulating member and connected to the first electrode film, a third insulating film around the first semiconductor film, a first conductive member extending in the direction to penetrate the stacked body and the first electrode film, and connected to the wiring, and a fourth insulating film around the first conductive member. The fourth insulating film has the same film structure as the third insulating film.
    Type: Application
    Filed: February 28, 2018
    Publication date: March 7, 2019
    Inventors: Mikiko YAGI, Hideto Takekida, Takaya Yamanaka, Masaharu Mizutani, Hideo Wada
  • Publication number: 20180350834
    Abstract: According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N-2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.
    Type: Application
    Filed: July 23, 2018
    Publication date: December 6, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Genki Kawaguchi, Masanari Fujita, Hideki Inokuma, Osamu Matsuura, Takeshi Imamura, Hideo Wada, Makoto Watanabe, Hajime Kaneko, Kenichi Fujii, Takanobu Itoh
  • Patent number: 10074665
    Abstract: According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N?2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.
    Type: Grant
    Filed: September 6, 2016
    Date of Patent: September 11, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Genki Kawaguchi, Masanori Fujita, Hideki Inokuma, Osamu Matsuura, Takeshi Imamura, Hideo Wada, Makoto Watanabe, Hajime Kaneko, Kenichi Fujii, Takanobu Itoh
  • Publication number: 20170077108
    Abstract: According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N?2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.
    Type: Application
    Filed: September 6, 2016
    Publication date: March 16, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Genki KAWAGUCHI, Masanari FUJITA, Hideki INOKUMA, Osamu MATSUURA, Takeshi IMAMURA, Hideo WADA, Makoto WATANABE, Hajime KANEKO, Kenichi FUJII, Takanobu ITOH
  • Patent number: 9568596
    Abstract: Provided are an optical distance measuring apparatus, which is capable of accurately measuring a distance, whatever the temperature may be, and which can be easily manufactured at low cost, and an electronic apparatus mounted with the optical distance measuring apparatus. A lead frame of the optical measuring apparatus has two or more first reinforcing terminals, each of which has a part extending in a direction substantially orthogonal to a direction in which a connecting part between a light emitting header and a light receiving header extends. The first reinforcing terminals are fixed by a first light blocking resin body and connected to the light receiving header.
    Type: Grant
    Filed: July 1, 2013
    Date of Patent: February 14, 2017
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Hideo Wada
  • Publication number: 20150260829
    Abstract: Provided are an optical distance measuring apparatus, which is capable of accurately measuring a distance, whatever the temperature may be, and which can be easily manufactured at low cost, and an electronic apparatus mounted with the optical distance measuring apparatus. A lead frame of the optical measuring apparatus has two or more first reinforcing terminals, each of which has a part extending in a direction substantially orthogonal to a direction in which a connecting part between a light emitting header and a light receiving header extends. The first reinforcing terminals are fixed by a first light blocking resin body and connected to the light receiving header.
    Type: Application
    Filed: July 1, 2013
    Publication date: September 17, 2015
    Applicant: SHARP KABUSHIKI KAISHA
    Inventor: Hideo Wada
  • Patent number: 9086480
    Abstract: A lens frame, made from metal, retaining a light-emitting lens and a light-receiving lens is retained between a second mold and a third mold both of which are made from light-shielding resins. Anchors are formed by filling light-shielding resin for forming the third mold into fixing slots formed in an upper surface of the second mold and through holes formed in the lens frame. Since the lens frame is made from metal, thermal expansion of the lens frame is hardly caused by ambient temperature changes and self-heating. This causes little difference in the amount of change in difference between the lenses. Further, the lens frame is fixed with anchors between the second mold and the third mold. This suppresses the occurrence of sliding caused by difference in thermal expansion coefficient between the lens frame and the second and third molds.
    Type: Grant
    Filed: June 28, 2012
    Date of Patent: July 21, 2015
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Hideo Wada, Akifumi Yamaguchi, Masaru Kubo
  • Patent number: 8902410
    Abstract: An optical ranging device has a light emitting element, a light receiving element, a light emitting lens, and a light receiving lens. Provided between the light receiving lens and the light receiving element are a first reflection surface and a second reflection surface for changing a direction of an optical axis of a light beam condensed by the light receiving lens and guiding the light beam to the light receiving element. A single medium exists between the first reflection surface and the second reflection surface.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: December 2, 2014
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Hideo Wada