Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

Abstract: A diode such as a cell string bypass diode or a reverse-current preventive diode exhibiting excellent heat dissipativity and preferably sealed integrally in a solar cell module. An N terminal (11) consists thickness part of 0.8 mm or above, i.e. an N substrate part (12), one thin part, i.e. an N thin part (13), and a P connecting wire receiving part (24). In a state where a diode chip (31) is connected, the thicknesses of the entire lead terminals are substantially the same, the total value of the plane area of the N substrate part and the P substrate part is 200 (mm)2 or above, and the diode with a lead terminal is sealed together with the solar cell between the front surface material and the rear surface material for sealing the solar cell.

Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

Abstract: The object of the present invention is to provide a diode that acts as a cell string bypass diode or a reverse-current preventive diode, has excellent heat dissipativity, and are preferably sealed integrally in a solar cell module. An N terminal 11 has an N substrate part 12 having an even thickness of 0.8 mm or more, an N thin part 13, which is one thin part, and an N connecting wire receiving part 14, which is the other thin part. A P terminal 21 has a P substrate part 22, a P thin part 23, and a P connecting wire receiving part 24. In a state where said diode chip 31 is connected, the thickness of the entire lead terminal is almost the same as that of the substrate part, i.e. the terminal, and the total of plane area of the N substrate part and that of the P substrate part is 200 mm2 or more. Said diode, together with the solar cell, is sealed between a front surface material and a rear surface material where the solar cell is to be sealed.

Abstract: A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.

Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

Abstract: A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.

Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

Abstract: Traffic that can be processed at a cell station is increased without reducing communication quality. When a channel is allocated to every time slot constituting a communication frame and radio control section receives a link channel establishment request from a personal station through a control channel allocated to any of the time slots, a control section notifies the personal station through the traffic channel of an allocation message indicating that the time slot allocated to the control channel will be allocated to a traffic channel. The transmission of the control channel is stopped when a predetermined time (a control channel transmission/reception duration) passes after the notification of the allocation message.

Abstract: A key switch device, wherein the second cam part (24B) of a second link member (4) is supported on a cantilever member (32) extended from the second link member (4) in the form of a cantilever and the cantilever member (32) is energized by a torsion spring (33) in the direction to allow the first cam part (24A) of a first link member (3) to abut mutually on the second cam part (24B), a cam face (25A) is formed on the second cam part (23B), a cam face (25A) abutting on the linear and punctate contact parts of the cam face (25A) of the second cam part (24B) at an acute angle in plan view and having a slanted surface (60) is formed on the first cam part (24A), and a clearance (63) formed from the contact part to the fixed point (64) of the torsion spring (33) is provided between the cam face (25A) of the second cam part (24B) and the slanted surface (60).

Abstract: A key switch device, wherein the second cam part (24B) of a second link member (4) is supported on a cantilever member (32) extended from the second link member (4) in the form of a cantilever and the cantilever member (32) is energized by a torsion spring (33) in the direction to allow the first cam part (24A) of a first link member (3) to abut mutually on the second cam part (24B), a cam face (25A) is formed on the second cam part (23B), a cam face (25A) abutting on the linear and punctate contact parts of the cam face (25A) of the second cam part (24B) at an acute angle in plan view and having a slanted surface (60) is formed on the first cam part (24A), and a clearance (63) formed from the contact part to the fixed point (64) of the torsion spring (33) is provided between the cam face (25A) of the second cam part (24B) and the slanted surface (60).