Patents by Inventor Hiroshi Matsumoto

Hiroshi Matsumoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180061614
    Abstract: A charged particle beam writing apparatus includes an area density calculation unit to calculate a pattern area density weighted using a dose modulation value, which has previously been input from an outside and in which an amount of correction of a dimension variation due to a proximity effect has been included, a fogging correction dose coefficient calculation unit to calculate a fogging correction dose coefficient for correcting a dimension variation due to a fogging effect by using the pattern area density weighted using the dose modulation value having been input from the outside, a dose calculation unit to calculates a dose of a charged particle beam by using the fogging correction dose coefficient and the dose modulation value, and a writing unit to write a pattern on a target object with the charged particle beam of the dose.
    Type: Application
    Filed: October 24, 2017
    Publication date: March 1, 2018
    Applicant: NuFlare Technology, Inc.
    Inventors: Yasuo KATO, Hiroshi Matsumoto
  • Patent number: 9881770
    Abstract: A multi charged particle beam exposing method includes setting, in multiple exposures by a plurality of shots of each beam of multi-beams where the plurality of shots continuously irradiate a same irradiation position, a plurality of clock periods including at least one different clock period where the plurality of clock periods individually control an irradiation time of each beam of the multi-beams such that a clock period of at least one exposure processing differs from clock periods of other exposure processing, and exposing respective corresponding irradiation positions on a target object with the multi-beams by controlling, in each exposure processing of the multiple exposures, the irradiation time in exposure processing concerned using a clock period which has been set in the plurality of clock periods including the at least one different clock period.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: January 30, 2018
    Assignee: NuFlare Technology, Inc.
    Inventor: Hiroshi Matsumoto
  • Publication number: 20180025630
    Abstract: A roadside communication device having a data relay function includes a receiving unit that receives mobile object data whose generator is a mobile object; a relay unit capable of relaying the mobile object data, the relaying involving a thinning process of an amount of data; and a transmitting unit that transmits thinning information about an execution status of the thinning process to an external device.
    Type: Application
    Filed: March 9, 2016
    Publication date: January 25, 2018
    Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventors: Hiroshi MATSUMOTO, Shigeki UMEHARA, Masafumi KOBAYASHI
  • Publication number: 20180004111
    Abstract: An image forming apparatus capable of performing color misregistration correction at image forming speeds while reducing downtime. Image forming units form images of different colors. The formed images are transferred to an intermediate transfer belt. A pattern sensor detects color misregistration amounts of color patterns formed on the intermediate transfer belt. A CPU causes the image forming units to form first color patterns at a first speed and the pattern sensor to detect first color misregistration amounts, and causes the former to form second color patterns at a second speed different from the first speed and the latter to detect second color misregistration amounts. The CPU determines third color misregistration amounts at a third speed based on the first and second color misregistration amounts. The third speed is different from the first and second speeds.
    Type: Application
    Filed: June 22, 2017
    Publication date: January 4, 2018
    Inventors: Kentaro Tamura, Shinichi Takata, Yushi Oka, Hiroshi Matsumoto, Ryou Sakaguchi
  • Patent number: 9852876
    Abstract: In one embodiment, a multi charged particle beam writing apparatus includes processing circuitry that is programmed to perform the function of a data region determination part determining a data region based on boundaries of pixels obtained by dividing a writing area of a substrate into mesh-shaped regions, an irradiation range of multiple charged particle beams, and boundaries of stripe segments obtained by dividing the writing area into segments having a predetermined width such that the segments are arranged in a predetermined direction, a deflection coordinate adjustment part adjusting deflection coordinates of the multiple charged particle beams such that the boundaries of the pixels are mapped to a boundary of the irradiation range, and a correction part calculating a corrected dose of each beam of the multiple charged particle beams by distributing, based on a positional relationship between the beam and pixels in the data region, a dose of the beam corresponding to a pixel in the data region calculate
    Type: Grant
    Filed: February 2, 2017
    Date of Patent: December 26, 2017
    Assignee: NuFlare Technology, Inc.
    Inventors: Yasuo Kato, Hideo Inoue, Hiroshi Matsumoto, Ryoh Kawana
  • Publication number: 20170361059
    Abstract: This invention relates to a method for achieving the balance of the mind of an examinee, the method comprising a first step of showing a set of symbols to an examinee; a second step of applying the symbols to a feeling of the examinee and a state of the examinee's mind; a third step of making the examinee understand a recognition system represented by the set; and a fourth step of resolving a conflict in the examinee's mind to achieve the balance of the examinee's mind; the set including a first to seventh symbols 1 to 7.
    Type: Application
    Filed: June 16, 2016
    Publication date: December 21, 2017
    Applicant: Miross Institute Co., Ltd
    Inventor: Hiroshi Matsumoto
  • Publication number: 20170364118
    Abstract: To provide a highly browsable data processing device or a highly portable data processing device, a data processing device including the following is devised: an input/output unit provided with a display portion which can be folded and unfolded and a sensor portion that can sense the folded and unfolded states of the display portion and can supply data on fold, and an arithmetic unit that stores a program for executing different processing depending on the data on fold.
    Type: Application
    Filed: September 5, 2017
    Publication date: December 21, 2017
    Inventor: Hiroshi MATSUMOTO
  • Publication number: 20170352520
    Abstract: A multi charged particle beams exposure method includes assigning, with respect to plural times of shots of multi-beams using a charged particle beam, each shot to one of plural groups, depending on a total current value of beams becoming in an ON condition in a shot concerned in the multi-beams, changing the order of the plural times of shots so that shots assigned to the same group may be continuously emitted for each of the plural groups, correcting, for each group, a focus position of the multi-beams to a focus correction position for a group concerned corresponding to the total current value, and performing the plural times of shots of the multi-beams such that the shots assigned to the same group are continuously emitted in a state where the focus position of the multi-beams has been corrected to the focus correction position for the group concerned.
    Type: Application
    Filed: May 25, 2017
    Publication date: December 7, 2017
    Applicant: NuFlare Technology, Inc.
    Inventor: Hiroshi MATSUMOTO
  • Publication number: 20170352263
    Abstract: The present invention relates to a device (roadside relay device 2) configured to generate a traffic index used for traffic signal control. This device includes: a storage unit 24 configured to store therein area information on a coordinate system, the area information forming a predetermined area on a road; a communication unit 21 configured to receive probe information S5 including a vehicle position and temporal information of a traveling vehicle 5; and a control unit 23 configured to generate the traffic index on the basis of the area information and the probe information S5.
    Type: Application
    Filed: February 19, 2016
    Publication date: December 7, 2017
    Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventors: Shigeki UMEHARA, Hiroshi MATSUMOTO, Masafumi KOBAYASHI, Osamu HATTORI
  • Patent number: 9837247
    Abstract: A charged particle beam writing apparatus includes an area density calculation unit to calculate a pattern area density weighted using a dose modulation value, which has previously been input from an outside and in which an amount of correction of a dimension variation due to a proximity effect has been included, a fogging correction dose coefficient calculation unit to calculate a fogging correction dose coefficient for correcting a dimension variation due to a fogging effect by using the pattern area density weighted using the dose modulation value having been input from the outside, a dose calculation unit to calculates a dose of a charged particle beam by using the fogging correction dose coefficient and the dose modulation value, and a writing unit to write a pattern on a target object with the charged particle beam of the dose.
    Type: Grant
    Filed: August 4, 2014
    Date of Patent: December 5, 2017
    Assignee: NuFlare Technology Co., Inc.
    Inventors: Yasuo Kato, Hiroshi Matsumoto
  • Publication number: 20170345297
    Abstract: A roadside communication device having a data relay function includes a communication unit that receives mobile object data whose generator is a mobile object; a determining unit that determines whether to perform a thinning process of an amount of the mobile object data received by the communication unit, based on a predetermined determination condition; and a relay unit that relays the mobile object data with the thinning process when a result of the determination by the determining unit is positive, and relays the mobile object data without the thinning process when the result of the determination by the determining unit is negative.
    Type: Application
    Filed: March 9, 2016
    Publication date: November 30, 2017
    Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventors: Shigeki UMEHARA, Hiroshi MATSUMOTO, Masafumi KOBAYASHI
  • Publication number: 20170345612
    Abstract: A blanking device for multi charged particle beams includes a first substrate, in which plural first openings are formed in an array, to form multi-beams, a second substrate in which plural second openings are formed in an array, where a corresponding beam of the multi-beams passes through each of the plural second openings, plural control electrodes, which are on the second substrate and each of which is close to a corresponding one of the plural second openings and arranged not to be directly exposed to other second opening adjacent to the corresponding one of the plural second openings, to be switchably applied with first and second potentials, plural counter electrodes, each of which is facing a corresponding one of the plural control electrodes, to be applied with the second potential, and a shield film provided between the first substrate and the plural control electrodes.
    Type: Application
    Filed: May 10, 2017
    Publication date: November 30, 2017
    Applicant: NuFlare Technology, Inc.
    Inventors: Takanao TOUYA, Hiroshi Matsumoto, Munehiro Ogasawara, Hirofumi Morita
  • Publication number: 20170316914
    Abstract: According to one aspect of the present invention, a stage mechanism includes a movable stage disposed in a vacuum atmosphere and mounting a heat source, a first heat pipe connected to the heat source, a movable mechanism configured to move according to the movement of the first heat pipe caused by the movement of the stage, by using a portion of the first heat pipe, and a cooling mechanism configured to cool the first heat pipe through the movable mechanism.
    Type: Application
    Filed: April 28, 2017
    Publication date: November 2, 2017
    Applicant: NuFlare Technology, Inc.
    Inventors: Hiroshi MATSUMOTO, Shuji Yoshino
  • Patent number: 9805907
    Abstract: A multi charged particle beam writing method includes emitting each corresponding beam in an “on” state while starting and continuing tracking control, shifting a writing position by beam deflection of the multi beams, in addition to tracking control, while continuing tracking control, emitting each corresponding beam in the next “on” state to the next writing position having been shifted while continuing tracking control, and returning the tracking position by resetting tracking control, after emitting each next corresponding beam to the next writing position having been shifted at least once, wherein writing of a predetermined region is completed by repeating the number of preset times a group of performing emitting, shifting, emitting, and returning, wherein the tracking time from start to reset of tracking control in at least one of the repeated groups is longer than the others.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: October 31, 2017
    Assignee: NuFlare Technology, Inc.
    Inventor: Hiroshi Matsumoto
  • Patent number: 9805905
    Abstract: A blanking device for multi-beams includes arrayed plural separate blanking systems, each performing blanking control switching a corresponding beam of multi charged particle beams between a beam ON state and a beam OFF state and each including a first electrode, a first potential applying mechanism applying two different potentials selectively to the first electrode for the blanking control, and a second electrode performing blanking deflection of the corresponding beam, the second electrode being grounded and paired with the first electrode, and a potential change mechanism changing a potential of the second electrode from a ground potential to another potential, wherein when a potential of the first electrode included in one of the separate blanking systems is fixed to the ground potential, the potential change mechanism changes the potential of the second electrode corresponding to the first electrode fixed to the ground potential, from the ground potential to the another potential.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: October 31, 2017
    Assignee: NuFlare Technology, Inc.
    Inventors: Hiroshi Yamashita, Ryoichi Yoshikawa, Kazuhiro Chiba, Hiroshi Matsumoto
  • Publication number: 20170301506
    Abstract: A multi charged particle beam exposure method includes transmitting ON/OFF control signals each being an ON/OFF control signal for a corresponding beam of multi-beams of charged particle beams in a batch to a blanking apparatus in which there are mounted a substrate where a plurality of passage holes are formed to let a corresponding beam of the multi-beams individually pass therethrough, and a plurality of individual blanking mechanisms arranged in the substrate to individually perform blanking deflection of each beam of the multi-beams, and irradiating the substrate with the multi-beams in accordance with the ON/OFF control signals transmitted in a batch, while shifting an irradiation timing for each group obtained by grouping the multi-beams into a plurality of groups by a plurality of individual blanking mechanisms mounted in the blanking apparatus.
    Type: Application
    Filed: March 22, 2017
    Publication date: October 19, 2017
    Applicant: NuFlare Technology, Inc.
    Inventor: Hiroshi MATSUMOTO
  • Publication number: 20170277087
    Abstract: An image forming apparatus includes: an image forming unit configured to perform image formation in a first mode, in which image formation is performed by a plurality of image forming stations, or a second mode, in which image formation is performed by a predetermined image forming station among the plurality of image forming stations; and a controller configured to: control the image forming unit to perform a preparation operation in accordance with color mode information; set a restricted operation state in which the controller prohibits the image formation in the first mode and permits the image formation in the second mode when any one image forming station, except for the predetermined image forming station, is incapable of performing image formation; and prevent the image forming unit from performing the preparation operation when the first mode is set as the color mode information and the restricted operation state is set.
    Type: Application
    Filed: March 23, 2017
    Publication date: September 28, 2017
    Inventors: Ryou Sakaguchi, Hiroshi Matsumoto, Shinnosuke Iwadate, Teruhito Kai, Hiroto Nishihara, Hiromi Shimura, Keita Takahashi
  • Patent number: 9774771
    Abstract: A preparation includes an image sensor, a package, and a transparent plate. The image sensor has an imaging area on a front surface. The package is electrically connected to the image sensor. The transparent plate opposes the front surface of the image sensor with a mounting medium interposed therebetween. On the surface of the transparent plate, first and second grooves are formed. The image sensor is disposed between the first and second grooves.
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: September 26, 2017
    Assignee: PANASONIC CORPORATION
    Inventors: Hideto Motomura, Hiroyuki Mori, Hiroshi Matsumoto, Katsuya Watanabe, Kiminori Mizuuchi, Naoki Matsubara
  • Patent number: 9772805
    Abstract: An information processor includes a display unit configured to display page content of each of a first page and a second page expressed in a page description language, a difference detection unit configured to detect a difference between an object included in the first page and an object included in the second page by analyzing an object structure in page description data of each of the first page and the second page and by comparing the first page and the second page which are each in a state of an object of the page description data, and a display control unit configured to control the display unit to display information on the difference detected by the difference detection unit.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: September 26, 2017
    Assignee: FUJIFILM Corporation
    Inventor: Hiroshi Matsumoto
  • Publication number: 20170271118
    Abstract: A multi charged particle beam blanking apparatus includes a substrate, where a plurality of passage holes are formed, to let multi-beams of charged particle beams individually pass through a passage hole concerned; a plurality of reference electrodes, each arranged close to a corresponding passage hole, to be applied with a reference potential, not a ground potential, not via a transistor circuit, in an irradiation region of the whole multi-beams; and a plurality of switching electrodes, arranged at the substrate such that each of the plurality of switching electrodes and a corresponding paired one of the plurality of reference electrodes are opposite each other across a corresponding passage hole, to be applied with the reference potential and a control potential different from the reference potential in a switchable manner.
    Type: Application
    Filed: March 2, 2017
    Publication date: September 21, 2017
    Applicant: NuFlare Technology, Inc.
    Inventor: Hiroshi MATSUMOTO