Abstract: With a robot and a control method for it, information is read in from the outside, based on which a particular object is detected, and it is judged upon detecting the object whether or not the object satisfies given conditions, based on the judgment results of which a robot generates predetermined actions. Thus, a robot can be realized that acts naturally like a living thing. Consequently, its entertaining quality for human beings can be increased greatly.

Abstract: With a robot and a control method for it, information is read in from the outside, based on which a particular object is detected, and it is judged upon detecting the object whether or not the object satisfies given conditions, based on the judgment results of which a robot generates predetermined actions. Thus, a robot can be realized that acts naturally like a living thing. Consequently, its entertaining quality for human beings can be increased greatly.

Abstract: An optical disc apparatus includes a turntable. The turntable is first rotated at a low speed in response to turning on of a reproduce switch on the disc apparatus, and the balancer is, in turn, brought to rest at an optimal position for low speed rotation. When the balancer comes to rest, automatic adjustment is effected. When the automatic adjustment is ended, the turntable is decelerated in rotation to release the balancer from resting. When the rotation speed of the turntable reaches a speed at which the balancer is released from resting, the balancer becomes movable relative to the turntable. Thereafter the turntable is brought into high speed rotation to move the balancer to rest at an optimal position for high speed rotation.

Abstract: An X-ray mask includes a holding frame, a membrane held by the holding frame, a pattern formed on a surface of the membrane by an X-ray absorptive material, the surface being disposed opposed to a workpiece to which the pattern is to be transferred when the mask is mounted in an exposure apparatus, a member for reinforcing the holding frame and having a portion placed closer to the workpiece than to the membrane and a pellicle provided at a side where the pattern is formed, the pellicle being attached to the portion of the member so that the pellicle is placed at the workpiece side of the membrane.

Abstract: A device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object include an illumination optical system for illuminating the plurality of diffraction gratings with a light beam, the illumination by the optical system generating a plurality of diffracted light beams from the plurality of diffraction gratings, an interference optical system for forming at least one interference light beam from the plurality of diffracted light beams, a detector for detecting the at least one interference light beam, the result of the detection serving as the basis for measuring the positional deviation between the plurality of diffraction gratings, and a measuring portion for measuring the relative positional relation between the illumination optical system and the plurality of diffraction gratings.

Abstract: A position detecting system and method for detecting the relative positional relationship between first and second objects disposed opposed to each other includes providing first and second marks on first and second objects, respectively, and irradiating one of the first and second marks with light from an irradiating light source. In addition, the other of the first and second marks is placed out of an irradiation region of the irradiating source and first diffraction light diffracted by one of the first and second marks is detected. Next, a first signal corresponding to the light intensity distribution of the first diffraction light is stored in memory. Both the first and second marks are then irradiated with light from the irradiation source and second diffraction light diffracted by both the first and second marks is detected. Next, a second detection signal corresponding to the light intensity distribution of the second diffraction light is stored in memory.

Abstract: A position detection apparatus and method detects the relative positional relationship between first and second objects facing each other in a facing direction. First, second and third marks each serving as a physical optical element are provided on the first object, while a fourth mark serving as a physical optical element is provided on the second object. A light projector projects light onto the first and second objects A light detector detects a first light beam diffracted by the first mark and reflected by the second object, a second light beam diffracted by the second mark and reflected by the second object, and a third light beam diffracted by the third and fourth marks. A first position detector detects the relative positional relationship between the first and second objects in the facing direction based on signals representing the first and second light beams from the light detector.

Abstract: When a charging voltage Vs of a charging capacitor C is judged to exceed a voltage Vth1 through a comparator 8 of a charging voltage monitoring circuit 2, a logical output of the comparator 8 becomes "High" so that a control circuit 3 permits a transistor 4 of a discharging circuit 1 to be conductive, whereby the capacitor C discharges. Through such discharging, the charging voltage Vs decreases. When the voltage Vs is then judged to be less than a voltage Vth2, the logical output of the comparator 8 becomes "Low" so that the control circuit 3 stops the operation of the discharging circuit 1, whereby a power IC 18 permits the capacitor C to charge again. The charging and the discharging operation of the capacitor C are repeatedly conducted in this manner that.

Abstract: A wavelength compensator includes a reference vacuum tube having closed ends, wherein a laser beam enters the reference vacuum tube from one of the ends thereof and is reflected by the other end backwardly, an interference device for causing interference of the laser beam to produce an interference beam, and a light receiving device for receiving the interference beam which bears information related to a change in wavelength of the laser beam. The wavelength compensator further includes a specific arrangement which is effective to reduce vacuum deterioration of the reference vacuum tube.

Abstract: A phase shift device for a laser beam has a circular first area transparent so the laser beam and a second area provided around the first area and transparent to the laser beam. The first and second areas generate a phase difference for example 180.degree. in the passing light beams. The phase shift device is positioned for example at a beam waist of a laser scanning apparatus to form a beam spot of a diameter smaller than that defined by the numerical aperture of the imaging optical system. Structure of a laser apparatus employing such phase shift device is also disclosed.

Abstract: A method and apparatus for measuring the deviation between elements on an object includes the steps of and devices for performing the steps of forming at least a first physicooptical element on the object: forming at least a second physicooptical element on the object, the first and second physicooptical elements having lens functions; projecting light beams onto the first and second physicooptical elements on the object and detecting the incident positions of light beams travelling from the first and second physicooptical elements, having been subjected to the lens functions of the first and second physicooptical elements, on a predetermined surface; and detecting the deviation between the first and second physicooptical elements on the object from the relationship between the detected incident positions of the light beams.

Abstract: A device, usable in proximity exposure wherein a first object having a pattern and a second object to which the pattern is to be transferred are disposed close to each other, for detecting the relative position of the first and second objects, is disclosed. The device includes a light source for projecting light to the first and second objects; a light detecting system for detecting light from one of the first and second objects illuminated by the light source; and a position detecting system for detecting the relative position of the first and second objects, on the basis of the detection by the light detecting system; wherein the light from the light source has a spectrum whose full width of half maximum is between .lambda..sup.2 /200000 nm and 60 nm, where .lambda. is the wavelength of the light.

Abstract: An optical head device comprises a light source, a light splitter for reflecting a light emitted from the light source by a first plane thereof to direct the light to an information carrier and transmitting the light from the information carrier through the first plane, a photo-detector for detecting the light from the information carrier, and a diffraction grating structure arranged on a second plane of the light splitter for diffracting the light transmitted through the first plane and directing it to the photo-detector.

Abstract: An integrated optical head includes a substrate and an optical waveguide formed on a surface of one side of a substrate. Light is directed to the optical waveguide and a grating structure is provided for deflecting light propagating in the optical waveguide toward the substrate. A distributed refractive index lens is formed in the substrate for condensing the light passing through the substrate after the deflection toward an article.

Abstract: An optical head device comprises a light source, condensing optics for condensing a light beam emitted from the light source on an optical recording medium, a photodetector for detecting the light of the light beam reflected from the recording medium, and a beam splitter having a diffraction grating arranged in the optical path of the light beam entering the recording medium from the light source along a plane substantially perpendicular to the optical axis of the incident light beam to cause the light reflected light from the recording medium to be diffracted by the diffraction grating and directed to the photodetector.