Compound charged particle beam device
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The portion shown in broken lines are for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a compound charged particle beam device, as shown and described.
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D639980 | June 14, 2011 | Davis et al. |
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Type: Grant
Filed: Aug 19, 2009
Date of Patent: Nov 27, 2012
Assignee: Sii Nano Technology Inc. (Chiba)
Inventors: Kenichi Akamatsu (Chiba), Hiroto Muto (Chiba)
Primary Examiner: Ian Simmons
Assistant Examiner: Charles Hanson
Attorney: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Application Number: 29/342,164