Abstract: A photostimulation apparatus includes an objective lens arranged to face a biological object, a light source configured to output light to be radiated toward the biological object via the objective lens, a shape acquisition unit configured to acquire information about a shape with a refractive index difference in the biological object, a hologram generation unit configured to generate aberration correction hologram data for correcting aberrations due to the shape with the refractive index difference on the basis of the information acquired by the shape acquisition unit, and a spatial light modulator on which a hologram based on the aberration correction hologram data is presented and which modulates the light output from the light source.

Abstract: A photostimulation apparatus includes an objective lens arranged to face a biological object, a light source configured to output light to be radiated toward the biological object via the objective lens, a shape acquisition unit configured to acquire information about a shape with a refractive index difference in the biological object, a hologram generation unit configured to generate aberration correction hologram data for correcting aberrations due to the shape with the refractive index difference on the basis of the information acquired by the shape acquisition unit, and a spatial light modulator on which a hologram based on the aberration correction hologram data is presented and which modulates the light output from the light source.

Abstract: A microscope apparatus (1A) includes a biological sample table (11) that supports the biological sample (B), an objective lens (12) disposed to face the biological sample table (11), a laser light source (13) that outputs light with which the biological sample (B) is irradiated via the objective lens (12), a shape measurement unit (20) that acquires a surface shape of the biological sample (B), a control unit (40) that generates aberration correction hologram data for correcting an aberration caused by the surface shape of the biological sample (B) on the basis of information acquired in the shape measurement unit (20), a first spatial light modulator (33) to which a hologram based on the aberration correction hologram data is presented and that modulates the light output from the laser light source (31), and a photodetector (37) that detects an intensity of light to be detected (L2) generated in the biological sample (B).

Abstract: A microscope apparatus includes an objective lens; a light source for outputting light with which a biological sample is irradiated via the objective lens; a shape acquisition unit for acquiring information on at least one of a surface shape of the biological sample and a structure directly under the surface of the biological sample; a hologram generation unit for generating aberration correction hologram data for correcting an aberration caused by the at least one on the basis of the information acquired by the shape acquisition unit; a spatial light modulator to which a hologram based on the aberration correction hologram data is presented and for modulating the light output from the light source; a photodetector for detecting an intensity of light generated in the biological sample and outputs a detection signal.

Abstract: An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.

Abstract: An optical module (1A) includes a polarization beam splitter (10A), polarization elements (20 and 40) having nonreciprocal optical activity and respectively arranged on an optical path of a first polarization component (L2) transmitted through a light splitting surface (11) in irradiation light (L1) and an optical path of a second polarization component (L4) reflected in the light splitting surface (11), a first reflective SLM (30) that modulates and reflects a first polarization component (L2) passing through the first polarization element (20), and a second reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the second polarization element (40). First modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.

Abstract: A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three plate members disposed on the objective lens side with respect to the first opening. Each of the three plate members is provided with a protrusion portion capable of contacting the spherical face portion.

Abstract: A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three protrusion portions extending from an inner face of the first opening toward a center of the first opening and configured to be contactable with the spherical face portion.

Abstract: A microscope apparatus includes an objective lens; a light source for outputting light with which a biological sample is irradiated via the objective lens; a shape acquisition unit for acquiring information on at least one of a surface shape of the biological sample and a structure directly under the surface of the biological sample; a hologram generation unit for generating aberration correction hologram data for correcting an aberration caused by the at least one on the basis of the information acquired by the shape acquisition unit; a spatial light modulator to which a hologram based on the aberration correction hologram data is presented and for modulating the light output from the light source; a photodetector for detecting an intensity of light generated in the biological sample and outputs a detection signal.

Abstract: A photostimulation apparatus includes an objective lens arranged to face a biological object, a light source configured to output light to be radiated toward the biological object via the objective lens, a shape acquisition unit configured to acquire information about a shape with a refractive index difference in the biological object, a hologram generation unit configured to generate aberration correction hologram data for correcting aberrations due to the shape with the refractive index difference on the basis of the information acquired by the shape acquisition unit, and a spatial light modulator on which a hologram based on the aberration correction hologram data is presented and which modulates the light output from the light source.

Abstract: An optical module (1A) includes a polarization beam splitter (10A), polarization elements (20 and 40) having nonreciprocal optical activity and respectively arranged on an optical path of a first polarization component (L2) transmitted through a light splitting surface (11) in irradiation light (L1) and an optical path of a second polarization component (L4) reflected in the light splitting surface (11), a first reflective SLM (30) that modulates and reflects a first polarization component (L2) passing through the first polarization element (20), and a second reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the second polarization element (40). First modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.

Abstract: An optical module (1A) includes a polarization beam splitter (10A) having a light splitting surface (11), polarization elements (20, 40), and respectively arranged on an optical path of a first polarization component (L2) transmitted through the light splitting surface (11) and an optical path of a second polarization component (L4) reflected by the light splitting surface (11), a reflective SLM (30) that modulates and reflects the first polarization component (L2) passing through the polarization element (20), and a reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the polarization element (40). The first modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and the second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.

Abstract: A suction unit 10 includes a main body portion having a first surface 13 on which a semiconductor wafer W is arranged and a second surface 14 opposite to the first surface 13, and in which a through-hole 15 that penetrates through the first surface 13 and the second surface 14 is formed and a light transmitting portion having a light incident surface 16 and a light emitting surface 17, and which is fitted to the through-hole 15. Further, in the first surface 13, a first suction groove 13a for vacuum sucking the semiconductor wafer W to fix the semiconductor device D to the light incident surface 16 is formed, and in the second surface 14, a second suction groove 14a for vacuum sucking the solid immersion lens S to fix the solid immersion lens S to the light emitting surface 17 is formed.

Abstract: A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.

Abstract: When it is detected that a solid immersion lens comes into contact with the semiconductor device, the lens is caused to vibrate by a vibration generator unit. Next, a reflected light image from the lens is input to calculate a reflected light quantity of the reflected light image, and it is judged whether a ratio of the reflected light quantity to an incident light quantity is not greater than a threshold value. When the ratio is greater than the threshold value, it is judged that optical close contact between the lens and the semiconductor device is not achieved, and the lens is again caused to vibrate. When the ratio is not greater than the threshold value, it is judged that optical close contact between the lens and the semiconductor device is achieved, and an observed image of the semiconductor device is acquired.

Abstract: An image generation device 1 comprises a laser light source 3, a laser output control unit 11, a laser scanner 5, a modulation pattern control unit 15 for such control as to irradiate the object with illumination light having a plurality of spatial modulation patterns, an electric signal detector 7 for detecting an electric signal issued from the object A, an electric signal imaging unit 17 for generating a two-dimensional characteristic image including characteristic distribution information associating illumination position information with characteristic information, and an image data operation unit 19 for generating a pattern image of the object A according to a plurality of characteristic images generated so as to correspond to the plurality of spatial modulation patterns.

Abstract: An image generation device 1 comprises a laser light source 3, a laser output control unit 11, a laser scanner 5 for scanning an irradiation position of the laser light, a modulation pattern control unit 15 for controlling the laser output control unit 11 and laser scanner 5 so as to irradiate the object A with illumination light having a plurality of spatial modulation patterns, an imaging device 7 for capturing observation light brought from the object A in response to irradiation with the illumination light having the plurality of spatial modulation patterns so as to acquire a plurality of pattern images, and an image data operation unit 19 for generating a high-resolution image of the object A by using the plurality of pattern images acquired by the imaging device 7.

Abstract: A suction unit 10 includes a main body portion having a first surface 13 on which a semiconductor wafer W is arranged and a second surface 14 opposite to the first surface 13, and in which a through-hole 15 that penetrates through the first surface 13 and the second surface 14 is formed and a light transmitting portion having a light incident surface 16 and a light emitting surface 17, and which is fitted to the through-hole 15. Further, in the first surface 13, a first suction groove 13a for vacuum sucking the semiconductor wafer W to fix the semiconductor device D to the light incident surface 16 is formed, and in the second surface 14, a second suction groove 14a for vacuum sucking the solid immersion lens S to fix the solid immersion lens S to the light emitting surface 17 is formed.

Abstract: A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.

Abstract: A solid immersion lens holder 200 includes a holder main body 8 having a lens holding unit 60 that holds a solid immersion lens 6, and an objective lens socket 9 for attaching the holder main body 8 to a front end of an objective lens 21. The solid immersion lens 6 is held in a state of being unfixed to be free with respect to the lens holding unit 60. A vibration generator unit 120 that causes the holder main body 8 to vibrate is attached to the objective lens socket 9. The vibration generator unit 120 has a vibrating motor 140 held by a motor holding member 130, and a weight 142 structured to be eccentric by weight is attached to an output shaft 141 of the vibrating motor 140. A vibration generated in the vibration generator unit 120 is transmitted to the solid immersion lens 6 via the objective lens socket 9 and the holder main body 8. Thereby, achieving the solid immersion lens holder capable of improving the close contact between the solid immersion lens and an observation object.