Abstract: A vacuum apparatus according to an embodiment includes a chamber configured air-tightly, a vacuum pump configured to exhaust gas from the chamber, and an exhaustion structure placed between the chamber and an inlet port of the vacuum pump and having a ventilation path surrounded by a wall of the exhaustion structure. The vacuum pump exhausts gas from the chamber through the ventilation path of the exhaustion structure. A layer of thermal energy absorbing material is formed on at least part of an inner surface of the wall of the exhaustion structure to absorb energy of thermal radiation emitted from the inlet port of the vacuum pump.

Abstract: A vacuum apparatus according to an embodiment includes a chamber configured air-tightly, a vacuum pump configured to exhaust gas from the chamber, and an exhaustion structure placed between the chamber and an inlet port of the vacuum pump and having a ventilation path surrounded by a wall of the exhaustion structure. The vacuum pump exhausts gas from the chamber through the ventilation path of the exhaustion structure. A layer of thermal energy absorbing material is formed on at least part of an inner surface of the wall of the exhaustion structure to absorb energy of thermal radiation emitted from the inlet port of the vacuum pump.

Abstract: A charged particle beam drawing apparatus has a vacuum container including a bottom plate, the bottom plate including a curved portion curved externally and a plurality of supporting portions disposed on an outer periphery of the curved portion, a stage provided in the vacuum container and having a target object mounted on the stage, a stage actuator supported by the supporting portions in the vacuum container and to move the stage, a two dimensional scale provided on a lower surface of the stage, a detector disposed under the two dimensional scale and detecting a position of the stage by the two dimensional scale, and a support body including a plurality of end portions individually attached to the supporting portions, and to support the detector across the curved portion.

Abstract: A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.

Abstract: A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.

Abstract: A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.

Abstract: A lithography apparatus includes a stage on which a target object is placed; a chamber in which the stage is arranged and which has one side surface in which an opening having a size which is enough to carry the stage in or out is formed, the opening being closed with an independent lid; an electro-optic lens barrel arranged on the chamber; and a rib portion formed to have a shape that is convex on an upper portion of the side surface of the chamber in which the opening is formed.

Abstract: A lithography apparatus includes a stage on which a target object is placed; a chamber in which the stage is arranged and which has one side surface in which an opening having a size which is enough to carry the stage in or out is formed, the opening being closed with an independent lid; an electro-optic lens barrel arranged on the chamber; and a rib portion formed to have a shape that is convex on an upper portion of the side surface of the chamber in which the opening is formed.

Abstract: Disclosed herein is a novel fire-retardant polyolefin composition comprising a polyolefin, an organohalogenous fire retardant and a carbonic acid ester represented by the formula (I): ##STR1## wherein R and R' respectively represent an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aralkyl group or an aryl group, Z represents a residual group of an aliphatic diol, an alicyclic diol, an aromatic diol, a diphenyl ketone diol, or a diphenylsulfone diol and n is 0 or 1.

Abstract: A novel process for producing D-2-amino-2-(1,4-cyclohexadienyl)-acetic acid useful as an intermediate compound for producing 6-aminopenicillanic acid or 7-aminocephalosporanic acid is disclosed.

Abstract: Disclosed is a pre-copolymer containing diallyl phthalate units and triallyl isocyanurate units.

Abstract: A process for producing tri(allyl isocyanurate) by reacting an alkali cyanate and an allyl halide in an aprotic polar solvent, which comprises distilling off the solvent after the completion of the reaction, adding water or an aqueous solution of hydrogen chloride to a reaction mixture containing tri(allyl isocyanurate), forming a tri(allyl isocyanurate) layer and an aqueous layer and then separating the tri(allyl isocyanurate) layer from the aqueous layer.

Abstract: An adhesive composition comprises (a) a resinous composition produced by mixing an aromatic primary amine with an aqueous solution or emulsion containing a polymer or copolymer of acrylamide and (b) formaldehyde or a derivative thereof as main components.