Chamber of charged particle beam drawing apparatus

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Description

FIG. 1 is a top perspective view of a chamber of charged particle beam drawing apparatus showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a right side view thereof, the left side view being a mirror image;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a cross sectional view taken along line 7-7 in FIG. 3; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 3.

Claims

The ornamental design for a chamber of charged particle beam drawing apparatus, as shown and described.

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Patent History
Patent number: D722298
Type: Grant
Filed: Jan 16, 2014
Date of Patent: Feb 10, 2015
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroyasu Saito (Yokohama), Seiichi Nakazawa (Yokohama), Yoshinori Nakagawa (Numazu)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/479,498