Chamber of charged particle beam drawing apparatus
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Description
Claims
The ornamental design for a chamber of charged particle beam drawing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D722298
Type: Grant
Filed: Jan 16, 2014
Date of Patent: Feb 10, 2015
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroyasu Saito (Yokohama), Seiichi Nakazawa (Yokohama), Yoshinori Nakagawa (Numazu)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/479,498
Type: Grant
Filed: Jan 16, 2014
Date of Patent: Feb 10, 2015
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroyasu Saito (Yokohama), Seiichi Nakazawa (Yokohama), Yoshinori Nakagawa (Numazu)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/479,498
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)