Chamber of charged particle beam drawing apparatus
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Description
The dot-dash lines indicate the boundary between the claimed portion and unclaimed portion.
Claims
The ornamental design for a chamber of charged particle beam drawing apparatus, as shown and described.
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Patent History
Patent number: D759603
Type: Grant
Filed: Jan 16, 2015
Date of Patent: Jun 21, 2016
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroyasu Saito (Yokohama), Yoshinori Nakagawa (Numazu), Seiichi Nakazawa (Yokohama)
Primary Examiner: Elizabeth J. Oswecki
Application Number: 29/514,862
Type: Grant
Filed: Jan 16, 2015
Date of Patent: Jun 21, 2016
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroyasu Saito (Yokohama), Yoshinori Nakagawa (Numazu), Seiichi Nakazawa (Yokohama)
Primary Examiner: Elizabeth J. Oswecki
Application Number: 29/514,862
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)