Patents by Inventor Hsiang-Wei Liu
Hsiang-Wei Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210175119Abstract: Integrated circuit devices and methods of forming the same are provided. A method according to the present disclosure includes providing a workpiece including a first metal feature in a dielectric layer and a capping layer over the first metal feature, selectively depositing a blocking layer over the capping layer, depositing an etch stop layer (ESL) over the workpiece, removing the blocking layer, and depositing a second metal feature over the workpiece such that the first metal feature is electrically coupled to the second metal feature. The blocking layer prevents the ESL from being deposited over the capping layer.Type: ApplicationFiled: February 22, 2021Publication date: June 10, 2021Inventors: Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hsiang-Wei Liu, Tai-I Yang, Chia-Tien Wu, Hai-Ching Chen, Shau-Lin Shue
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Patent number: 10957580Abstract: A method includes forming a hard mask over a target layer, performing a treatment on a first portion of the hard mask to form a treated portion, with a second portion of the hard mask left untreated as an untreated portion. The method further includes subjecting both the treated portion and the untreated portion of the hard mask to etching, in which the untreated portion is removed as a result of the etching, and the treated portion remains after the etching. A layer underlying the hard mask is etched, and the treated portion of the hard mask is used as a part of an etching mask in the etching.Type: GrantFiled: August 3, 2020Date of Patent: March 23, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsiang-Wei Liu, Chia-Tien Wu, Wei-Chen Chu
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Patent number: 10930551Abstract: Integrated circuit devices and methods of forming the same are provided. A method according to the present disclosure includes providing a workpiece including a first metal feature in a dielectric layer and a capping layer over the first metal feature, selectively depositing a blocking layer over the capping layer, depositing an etch stop layer (ESL) over the workpiece, removing the blocking layer, and depositing a second metal feature over the workpiece such that the first metal feature is electrically coupled to the second metal feature. The blocking layer prevents the ESL from being deposited over the capping layer.Type: GrantFiled: June 28, 2019Date of Patent: February 23, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hsiang-Wei Liu, Tai-I Yang, Chia-Tien Wu, Hai-Ching Chen, Shau-Lin Shue
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Publication number: 20210005510Abstract: The present disclosure provides an interconnect structure, including a first metal line, a conductive contact over the first metal line, including a first portion, a second portion over the first portion, wherein a bottom width of the second portion is greater than a top width of the first portion, and a third portion over the second portion, wherein a bottom width of the third portion is greater than a top width of the second portion, a sacrificial bilayer, including a first sacrificial layer, wherein a first portion of the first sacrificial layer is under a coverage of a vertical projection area of the first portion of the conductive contact, and a second sacrificial layer over the first sacrificial layer, and a dielectric layer over a top surface of the second sacrificial layer.Type: ApplicationFiled: September 20, 2020Publication date: January 7, 2021Inventors: HSIANG-WEI LIU, WEI-CHEN CHU, CHIA-TIEN WU, TAI-I YANG
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Publication number: 20200411374Abstract: Integrated circuit devices and methods of forming the same are provided. A method according to the present disclosure includes providing a workpiece including a first metal feature in a dielectric layer and a capping layer over the first metal feature, selectively depositing a blocking layer over the capping layer, depositing an etch stop layer (ESL) over the workpiece, removing the blocking layer, and depositing a second metal feature over the workpiece such that the first metal feature is electrically coupled to the second metal feature. The blocking layer prevents the ESL from being deposited over the capping layer.Type: ApplicationFiled: June 28, 2019Publication date: December 31, 2020Inventors: Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hsiang-Wei Liu, Tai-I Yang, Chia-Tien Wu, Hai-Ching Chen, Shau-Lin Shue
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Publication number: 20200365449Abstract: A method includes forming a hard mask over a target layer, performing a treatment on a first portion of the hard mask to form a treated portion, with a second portion of the hard mask left untreated as an untreated portion. The method further includes subjecting both the treated portion and the untreated portion of the hard mask to etching, in which the untreated portion is removed as a result of the etching, and the treated portion remains after the etching. A layer underlying the hard mask is etched, and the treated portion of the hard mask is used as a part of an etching mask in the etching.Type: ApplicationFiled: August 3, 2020Publication date: November 19, 2020Inventors: Hsiang-Wei Liu, Chia-Tien Wu, Wei-Chen Chu
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Patent number: 10818597Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a dielectric structure over a substrate, and a first interconnect structure arranged within the dielectric structure. A lower interconnect structure is arranged within the dielectric structure. The first interconnect structure and the lower interconnect structure comprise one or more different conductive materials. The first interconnect structure continuously extends from directly over a topmost surface of the lower interconnect structure facing away from the substrate to along opposing outer sidewalls of the lower interconnect structure.Type: GrantFiled: April 15, 2019Date of Patent: October 27, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsiang-Wei Liu, Tai-I Yang, Cheng-Chi Chuang, Tien-Lu Lin
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Patent number: 10784151Abstract: The present disclosure provides a method for forming an interconnect structure, including forming an Nth metal line principally extending in a first direction, forming a sacrificial bilayer over the Nth metal line, forming a dielectric layer over the sacrificial bilayer, removing a portion of the sacrificial bilayer, forming a conductive post in the sacrificial bilayer, wherein the conductive post having a top pattern coplanar with a top surface of the sacrificial bilayer and a bottom pattern in contact with a top surface of the Nth metal line, and forming an Nth metal via over the sacrificial bilayer.Type: GrantFiled: September 11, 2018Date of Patent: September 22, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Hsiang-Wei Liu, Wei-Chen Chu, Chia-Tien Wu, Tai-I Yang
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Patent number: 10734275Abstract: A method includes forming a hard mask over a target layer, performing a treatment on a first portion of the hard mask to form a treated portion, with a second portion of the hard mask left untreated as an untreated portion. The method further includes subjecting both the treated portion and the untreated portion of the hard mask to etching, in which the untreated portion is removed as a result of the etching, and the treated portion remains after the etching. A layer underlying the hard mask is etched, and the treated portion of the hard mask is used as a part of an etching mask in the etching.Type: GrantFiled: December 26, 2019Date of Patent: August 4, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsiang-Wei Liu, Chia-Tien Wu, Wei-Chen Chu
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Publication number: 20200243377Abstract: A method for forming an interconnect structure is provided. The method for an interconnect structure includes forming a first metal material over a semiconductor substrate, and forming a first mask element over the first metal material. The first mask element has an opening through the first mask element. The method for forming the interconnect structure also includes forming a second metal material over the first mask element and the first metal material and in the opening, and forming a second mask element corresponding to the opening and over the second metal material. The method for forming the interconnect structure also includes etching the second metal material and the first metal material using the second mask element and the first mask element to form a via and a first metal line respectively.Type: ApplicationFiled: January 25, 2019Publication date: July 30, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Hsiang-Wei LIU
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Publication number: 20200144104Abstract: A method includes forming a hard mask over a target layer, performing a treatment on a first portion of the hard mask to form a treated portion, with a second portion of the hard mask left untreated as an untreated portion. The method further includes subjecting both the treated portion and the untreated portion of the hard mask to etching, in which the untreated portion is removed as a result of the etching, and the treated portion remains after the etching. A layer underlying the hard mask is etched, and the treated portion of the hard mask is used as a part of an etching mask in the etching.Type: ApplicationFiled: December 26, 2019Publication date: May 7, 2020Inventors: Hsiang-Wei Liu, Chia-Tien Wu, Wei-Chen Chu
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Publication number: 20200124985Abstract: Photolithography overlay errors are a source of patterning defects, which contribute to low wafer yield. An interconnect formation process that employs a patterning photolithography/etch process with self-aligned interconnects is disclosed herein. The interconnection formation process, among other things, improves a photolithography overlay (OVL) margin since alignment is accomplished on a wider pattern. In addition, the patterning photolithography/etch process supports multi-metal gap fill and low-k dielectric formation with voids.Type: ApplicationFiled: December 20, 2019Publication date: April 23, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Shau-Lin Shue, Li-Lin Su, Yung-Hsu Wu
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Publication number: 20200083093Abstract: The present disclosure provides a method for forming an interconnect structure, including forming an Nth metal line principally extending in a first direction, forming a sacrificial bilayer over the Nth metal line, forming a dielectric layer over the sacrificial bilayer, removing a portion of the sacrificial bilayer, forming a conductive post in the sacrificial bilayer, wherein the conductive post having a top pattern coplanar with a top surface of the sacrificial bilayer and a bottom pattern in contact with a top surface of the Nth metal line, and forming an Nth metal via over the sacrificial bilayer.Type: ApplicationFiled: September 11, 2018Publication date: March 12, 2020Inventors: HSIANG-WEI LIU, WEI-CHEN CHU, CHIA-TIEN WU, TAI-I YANG
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Publication number: 20200051914Abstract: A method comprises forming a first conductive line and a second conductive line in a first dielectric layer over a substrate, each having a planar top surface, applying an etch-back process to the first dielectric layer until a dielectric portion between the first conductive line and the second conductive line has been removed, and the first conductive line and the second conductive line have respective cross sectional shapes including a rounded surface and two rounded corners and depositing a second dielectric layer over the substrate, while leaving a first air gap between the first conductive line and the second conductive line.Type: ApplicationFiled: October 2, 2019Publication date: February 13, 2020Inventors: Hsiang-Lun Kao, Hsiang-Wei Liu, Tai-I Yang, Jian-Hua Chen, Yu-Chieh Liao, Yung-Chih Wang, Tien-Lu Lin
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Patent number: 10534273Abstract: Photolithography overlay errors are a source of patterning defects, which contribute to low wafer yield. An interconnect formation process that employs a patterning photolithography/etch process with self-aligned interconnects is disclosed herein. The interconnection formation process, among other things, improves a photolithography overlay (OVL) margin since alignment is accomplished on a wider pattern. In addition, the patterning photolithography/etch process supports multi-metal gap fill and low-k dielectric formation with voids.Type: GrantFiled: May 4, 2017Date of Patent: January 14, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Shau-Lin Shue, Li-Lin Su, Yung-Hsu Wu
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Patent number: 10535560Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a first conductive feature in a first dielectric layer and a second conductive feature over the first dielectric layer. The semiconductor device structure also includes a conductive via between the first conductive feature and the second conductive feature. The conductive via includes an etching stop layer over the first conductive feature, a conductive pillar over the etching stop layer, and a capping layer surrounding the conductive pillar and the etching stop layer. The first conductive feature and the second conductive feature are electrically connected to each other through the capping layer, the conductive pillar, and the etching stop layer. The semiconductor device structure further includes a second dielectric layer over the first dielectric layer and below the second conductive feature. The second dielectric layer surrounds the conductive via.Type: GrantFiled: July 18, 2017Date of Patent: January 14, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Chen Chu, Hsiang-Wei Liu, Tai-I Yang, Chia-Tien Wu
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Patent number: 10529617Abstract: A method includes forming a hard mask over a target layer, performing a treatment on a first portion of the hard mask to form a treated portion, with a second portion of the hard mask left untreated as an untreated portion. The method further includes subjecting both the treated portion and the untreated portion of the hard mask to etching, in which the untreated portion is removed as a result of the etching, and the treated portion remains after the etching. A layer underlying the hard mask is etched, and the treated portion of the hard mask is used as a part of an etching mask in the etching.Type: GrantFiled: November 1, 2017Date of Patent: January 7, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsiang-Wei Liu, Chia-Tien Wu, Wei-Chen Chu
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Patent number: 10522469Abstract: A first metal layer of a semiconductor device includes a plurality of first metal lines that each extend along a first axis, and a first rail structure that extends along the first axis. The first rail structure is physically separated from the first metal lines. A second metal layer is located over the first metal layer. The second metal layer includes a plurality of second metal lines that each extend along a second axis orthogonal to the first axis, and a second rail structure that extends along the first axis. The second rail structure is physically separated from the second metal lines. The second rail structure is located directly over the first rail structure. A plurality of vias is located between the first metal layer and the second metal layer. A subset of the vias electrically interconnects the first rail structure to the second rail structure.Type: GrantFiled: April 15, 2019Date of Patent: December 31, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chia-Tien Wu, Hsiang-Wei Liu, Wei-Chen Chu
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Patent number: 10490500Abstract: A method comprises forming a first conductive line and a second conductive line in a first dielectric layer over a substrate, each having a planar top surface, applying an etch-back process to the first dielectric layer until a dielectric portion between the first conductive line and the second conductive line has been removed, and the first conductive line and the second conductive line have respective cross sectional shapes including a rounded surface and two rounded corners and depositing a second dielectric layer over the substrate, while leaving a first air gap between the first conductive line and the second conductive line.Type: GrantFiled: February 24, 2017Date of Patent: November 26, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsiang-Lun Kao, Hsiang-Wei Liu, Tai-I Yang, Jian-Hua Chen, Yu-Chieh Liao, Yung-Chih Wang, Tien-Lu Lin
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Publication number: 20190244902Abstract: A first metal layer of a semiconductor device includes a plurality of first metal lines that each extend along a first axis, and a first rail structure that extends along the first axis. The first rail structure is physically separated from the first metal lines. A second metal layer is located over the first metal layer. The second metal layer includes a plurality of second metal lines that each extend along a second axis orthogonal to the first axis, and a second rail structure that extends along the first axis. The second rail structure is physically separated from the second metal lines. The second rail structure is located directly over the first rail structure. A plurality of vias is located between the first metal layer and the second metal layer. A subset of the vias electrically interconnects the first rail structure to the second rail structure.Type: ApplicationFiled: April 15, 2019Publication date: August 8, 2019Inventors: Chia-Tien Wu, Hsiang-Wei Liu, Wei-Chen Chu