Patents by Inventor Hsih-Yang Chiu

Hsih-Yang Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11749565
    Abstract: A method of manufacturing a semiconductor device includes forming a first recess in a first wafer. The first recess is at a first front-side surface of the first wafer and exposes a first interconnect structure in the first wafer. A second recess is formed in a second wafer. The second recess is at a second front-side surface of the second wafer. The first recess is filled with a first polymer. The second recess is filled with a second polymer. The first front-side surface of the first wafer is bonded with the second front-side surface of the second wafer such that the first polymer is bonded to the second polymer. The first polymer in the first recess and the second polymer in the second recess are removed. A metal is deposited in the first recess and the second recess.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: September 5, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Hsih-Yang Chiu
  • Publication number: 20230268258
    Abstract: An integrated circuit package structure includes a circuit board, an integrated circuit die and a conductive stair structure. The circuit has an upper surface. The integrated circuit die is located on the upper surface of the circuit board. The conductive stair structure is located on the upper surface of the circuit board. The conductive stair structure includes steps along a first direction substantially perpendicular to the upper surface of the circuit board. The steps have different heights relative to the upper surface of the circuit board.
    Type: Application
    Filed: April 23, 2023
    Publication date: August 24, 2023
    Inventors: Chien-Chung WANG, Hsih-Yang CHIU
  • Publication number: 20230269935
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate; an isolation layer positioned in the substrate and defining an active area of the substrate, wherein the active area includes a transistor portion and a programmable portion extending from the transistor portion; a buried gate structure positioned in the transistor portion; a drain region positioned in the programmable portion and the transistor portion, and adjacent to the gate structure; a source region positioned in the transistor portion, adjacent to the gate structure, and opposite to the drain region with the buried gate structure interposed therebetween; a middle insulating layer positioned on the programmable portion; and an upper conductive layer positioned on the middle insulating layer. The drain region in the programmable portion, the middle insulating layer, and the upper conductive layer together configure a programmable structure.
    Type: Application
    Filed: February 23, 2022
    Publication date: August 24, 2023
    Inventors: WEI-ZHONG LI, HSIH-YANG CHIU
  • Publication number: 20230269934
    Abstract: The present application discloses a semiconductor device, including a substrate; an isolation layer positioned in the substrate and defining an active area of the substrate, wherein the active area includes a transistor portion and a programmable portion extending from the transistor portion; a gate structure positioned on the transistor portion; a drain region positioned in the programmable portion and the transistor portion, and adjacent to the gate structure; a source region positioned in the transistor portion, adjacent to the gate structure, and opposite to the drain region with the gate structure interposed therebetween; a middle insulating layer positioned on the programmable portion; and an upper conductive layer positioned on the middle insulating layer. The drain region in the programmable portion, the middle insulating layer, and the upper conductive layer together configure a programmable structure.
    Type: Application
    Filed: February 23, 2022
    Publication date: August 24, 2023
    Inventors: WEI-ZHONG LI, HSIH-YANG CHIU
  • Patent number: 11728425
    Abstract: The semiconductor device includes a first source/drain layer, a dielectric layer, a channel, a gate electrode, a first gate dielectric layer, a seed layer, a conductive layer, and a second source/drain layer. The dielectric layer is disposed on the first source/drain layer, in which the dielectric layer has a hole penetrating the dielectric layer. The channel is disposed in the hole and extends substantially perpendicular to an upper surface of the first source/drain layer. The gate electrode surrounds the channel. The first gate dielectric layer is disposed between the gate electrode and the channel. The seed layer is disposed between the gate electrode and the dielectric layer and on an upper surface of the dielectric layer, in which the seed layer covers a portion of a sidewall of the hole.
    Type: Grant
    Filed: December 2, 2022
    Date of Patent: August 15, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Pei-Jhen Wu, Hsih-Yang Chiu
  • Publication number: 20230245826
    Abstract: A method of manufacturing a capacitor structure includes the following. A first, second, third, fourth, fifth, sixth and seventh portions of a contact layer arrange from periphery to center. A first-conductive layer contacting the first portion forms in an opening. A first-dielectric layer contacting the second portion forms on the first-conductive layer. A second-conductive layer forms on the first-dielectric layer. A second-dielectric layer contacting the third portion forms on the second-conductive layer. A third-conductive layer contacting the fourth portion forms on the second-dielectric layer. A third-dielectric layer contacting the fifth portion forms on the third-conductive layer. A fourth-conductive layer contacting the second-conductive layer forms on the third-dielectric layer. A fourth-dielectric layer contacting the sixth portion forms on the fourth-conductive layer. A fifth-conductive layer contacting the seventh portion forms on the fourth-dielectric layer.
    Type: Application
    Filed: March 31, 2023
    Publication date: August 3, 2023
    Inventors: Chien-Chung WANG, Hsih-Yang CHIU
  • Patent number: 11710696
    Abstract: The present application discloses a semiconductor device with a programmable unit and a method for fabricating the semiconductor device. The semiconductor device including a substrate, a bottom conductive layer positioned in the substrate, a first gate structure including a first gate dielectric layer positioned on the bottom conductive layer, a first work function layer positioned on the first gate dielectric layer, and a first filler layer positioned on the first work function layer, a second gate structure including a second gate dielectric layer positioned on the bottom conductive layer and spaced apart from the first gate dielectric layer, a second work function layer positioned on the second gate dielectric layer, and a second filler layer positioned on the second work function layer, a conductive plug electrically coupled to the bottom conductive layer, and a top conductive layer electrically coupled to the first gate structure and the second gate structure.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: July 25, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Hsih-Yang Chiu, Tse-Yao Huang
  • Patent number: 11676998
    Abstract: The present disclosure provides a method for fabricating a semiconductor device. The method includes providing a substrate, forming a first well layer in the substrate and having a first electrical type, forming an isolation-mask layer on the first well layer, forming mask openings along the isolation-mask layer to expose portions of the first well layer, forming bottom conductive layers in the portions of the first well layer, forming a bias layer in the first well layer and spaced apart from the bottom conductive layers, forming first insulating layers on the bottom conductive layers, forming first conductive lines on the first insulating layers and parallel to each other. The bottom conductive layers have a second electrical type opposite to the first electrical type. The bottom conductive layers, the first insulating layers, the first conductive lines together configure programmable units.
    Type: Grant
    Filed: January 4, 2022
    Date of Patent: June 13, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Hsih-Yang Chiu
  • Patent number: 11676857
    Abstract: A method includes providing a first wafer including a first substrate, a first dielectric layer disposed over the first substrate and a first component formed within the first dielectric layer; providing a second wafer including a second substrate, a second dielectric layer disposed over the second substrate, and a second component formed within the second dielectric layer; removing a first portion of the first dielectric layer to form a first recess; removing a second portion of the second dielectric layer to form a second recess; disposing the second wafer over the first wafer to bond the first dielectric layer to the second dielectric layer; removing a third portion of the second substrate and the second dielectric layer to form a third recess coupled to the second recess; and disposing a conductive material to fill the first recess, the second recess and the third recess to form a conductive structure.
    Type: Grant
    Filed: October 26, 2021
    Date of Patent: June 13, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Hsih-Yang Chiu
  • Patent number: 11676886
    Abstract: An integrated circuit package structure includes a circuit board, an integrated circuit die and a conductive stair structure. The circuit has an upper surface. The integrated circuit die is located on the upper surface of the circuit board. The conductive stair structure is located on the upper surface of the circuit board. The conductive stair structure includes steps along a first direction substantially perpendicular to the upper surface of the circuit board. The steps have different heights relative to the upper surface of the circuit board.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: June 13, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chien-Chung Wang, Hsih-Yang Chiu
  • Publication number: 20230180469
    Abstract: The present application provides a method for manufacturing a semiconductor device including a merged active area (AA). The method includes forming a fuse gate structure over the active area; forming a device gate structure over the active area and adjacent to the fuse gate structure; and forming a contact plug coupled to the active area and extending away from the substrate. The fuse gate structure and the device gate structure are parallel and are formed over the active area.
    Type: Application
    Filed: December 3, 2021
    Publication date: June 8, 2023
    Inventors: WEI-ZHONG LI, HSIH-YANG CHIU
  • Publication number: 20230180470
    Abstract: The present application provides a memory device. The memory device includes a semiconductor substrate including an isolation structure and an active area surrounded by the isolation structure; a fuse gate structure disposed over the active area; a device gate structure disposed over the active area and adjacent to the fuse gate structure; and a contact plug coupled to the active area and extending away from the semiconductor substrate, wherein at least a portion of the active area is disposed under the device gate structure. Further, a method of manufacturing the memory device is also disclosed.
    Type: Application
    Filed: December 7, 2021
    Publication date: June 8, 2023
    Inventors: WEI-ZHONG LI, HSIH-YANG CHIU
  • Publication number: 20230178503
    Abstract: The present disclosure provides a semiconductor structure including a substrate; a redistribution layer (RDL) disposed over the substrate, and including a dielectric layer over the substrate, a conductive plug extending within the dielectric layer, and a bonding pad adjacent to the conductive plug and surrounded by the dielectric layer; and a conductive bump disposed over the conductive plug, wherein the bonding pad is at least partially in contact with the conductive plug and the conductive bump. Further, a method of manufacturing the semiconductor structure is also provided.
    Type: Application
    Filed: December 6, 2021
    Publication date: June 8, 2023
    Inventor: HSIH-YANG CHIU
  • Publication number: 20230178501
    Abstract: The present disclosure provides a method for manufacturing a semiconductor structure. The method includes providing a substrate having a redistribution layer (RDL); disposing an etch stop layer over a RDL; patterning the dielectric layer and the etch stop layer; disposing a first seed layer over the etch stop layer and a portion of the dielectric layer that is exposed through the etch stop layer; disposing a second patterned photoresist over the first seed layer; disposing a conductive material over a portion of the first seed layer that is exposed through the second patterned photoresist; removing the second patterned photoresist; removing the etch stop layer; and removing a portion of the conductive material that protrudes from the dielectric layer to form a bonding pad adjacent to the conductive plug and surrounded by the dielectric layer.
    Type: Application
    Filed: December 3, 2021
    Publication date: June 8, 2023
    Inventor: HSIH-YANG CHIU
  • Patent number: 11664364
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a first semiconductor structure, a second semiconductor structure, a through semiconductor via, and an insulation layer. The first semiconductor structure includes a first circuit layer and a first main bonding layer in the first circuit layer and substantially coplanar with a front face of the first circuit layer. The second semiconductor structure includes a second circuit layer on the first circuit layer and a second main bonding layer in the second circuit layer, and topologically aligned with and contacted to the first main bonding layer. The through semiconductor via is along the second semiconductor structure and the first and second main bonding layer, and extending to the first circuit layer. The insulation layer is positioned on a sidewall of the through semiconductor via.
    Type: Grant
    Filed: March 25, 2021
    Date of Patent: May 30, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Hsih-Yang Chiu
  • Patent number: 11658152
    Abstract: A die bonding structure includes a first die and a second die. The first die includes a first sealing ring and a plurality of first metal contacts, wherein sidewalls of the first metal contacts align a sidewall of the first sealing ring. The second die includes a second sealing ring and a plurality of second metal contacts, wherein sidewalls of the second metal contacts align a sidewall of the second sealing ring. The first metal contacts are directly bonded to the second metal contacts, respectively, and the first sealing ring is directly bonded to the second sealing ring.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: May 23, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Hsih-Yang Chiu
  • Patent number: 11651896
    Abstract: A capacitor structure is provided, which includes a contact layer, an insulating layer, a bottom conductive plate, a dielectric layer and a top conductive plate. The contact layer has first, second, third, fourth and fifth portions arranged from periphery to center. The insulating layer is disposed over the contact layer and has an opening exposing the contact layer. The bottom conductive plate is disposed in the opening and including first, second and third portions extending along a depth direction of the opening and separated from each other and in contact with the first, third and fifth portions of the contact layer, respectively. The dielectric layer is conformally disposed on the bottom conductive plate and in contact with the second and fourth portions of the contact layer. The top conductive plate is disposed on the dielectric layer. A method of manufacturing the capacitor is also provided.
    Type: Grant
    Filed: April 28, 2021
    Date of Patent: May 16, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chien-Chung Wang, Hsih-Yang Chiu
  • Publication number: 20230145744
    Abstract: A semiconductor wafer includes a scribe line and a probe pad. The scribe line extends along a first direction. The probe pad is disposed on the scribe line and is configured to contact a probe needle. The probe pad includes a first metal layer, a dielectric layer, and a second metal layer. The dielectric layer is disposed on the first metal layer, in which the dielectric layer includes a first recess and a second recess. The second metal layer is configured to connect to the first metal layer, in which the second metal layer includes a first portion and a second portion, and the first portion and the second portion are separated by a distance in a second direction perpendicular to the first direction.
    Type: Application
    Filed: November 11, 2021
    Publication date: May 11, 2023
    Inventors: Wei-Zhong LI, Hsih-Yang CHIU
  • Publication number: 20230145518
    Abstract: A die bonding structure includes a first die and a second die. The first die includes a first sealing ring and a plurality of first metal contacts, wherein sidewalls of the first metal contacts align a sidewall of the first sealing ring. The second die includes a second sealing ring and a plurality of second metal contacts, wherein sidewalls of the second metal contacts align a sidewall of the second sealing ring. The first metal contacts are directly bonded to the second metal contacts, respectively, and the first sealing ring is directly bonded to the second sealing ring.
    Type: Application
    Filed: November 5, 2021
    Publication date: May 11, 2023
    Inventor: Hsih-Yang CHIU
  • Patent number: 11646224
    Abstract: The present disclosure provides a method of fabricating a semiconductor structure with a reduced pitch (half-pitch feature) and a method of fabricating the same. The method includes providing a substrate; forming a dielectric layer disposed on the substrate; forming at least one main feature disposed in the dielectric layer and contacting the substrate; forming at least one first conductive feature disposed in the dielectric layer and on the main feature; forming at least one first spacer interposed between the dielectric layer and a portion of the first conductive feature; forming a plurality of second conductive features disposed in the dielectric layer and on either side of the first conductive feature; and forming a plurality of second spacers interposed between the dielectric layer and portions of the second conductive features.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: May 9, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Hsih-Yang Chiu