Patents by Inventor Hsu-Yu Chang

Hsu-Yu Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polysilicon thin film fabrication method
    Patent number: 7192818
    Abstract: A polysilicon thin film fabrication method is provided, in which a heat-absorbing layer is used to provide sufficient heat for grain growth of an amorphous silicon thin film, and an insulating layer is used to isolate the heat-absorbing layer and the amorphous silicon thin film. A regular heat-conducting layer is used as a cooling source to control the crystallization position and grain size of the amorphous silicon thin film. Therefore, the amorphous silicon thin film can crystallize into a uniform polysilicon thin film, and the electrical characteristics of the polysilicon thin film can be stably controlled.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: March 20, 2007
    Assignee: National Taiwan University
    Inventors: Si-Chen Lee, Chao-Yu Meng, Hsu-Yu Chang