Abstract: Aspects of the disclosed invention provide a semiconductor structure for a semiconductor chip with two layers of semiconductor devices, where the first layer of semiconductor devices directly contacts a semiconductor substrate and connects to a first frontside interconnect wiring. The first layer of semiconductor devices includes at least one trench semiconductor device such as a deep trench capacitor. The first frontside interconnect wiring is electrically connected to the second frontside interconnect wiring by one or more joined metal plugs. The second layer of active devices connects to a backside power delivery network and the second frontside interconnect wiring. The semiconductor chip with two layers of semiconductor devices that are bonded together provides one layer of semiconductor devices capable of being in a portion of the semiconductor substrate and a second layer of semiconductor devices with a backside power delivery network.

Abstract: The present disclosure describes an illustrative semiconductor IC device that includes a integrated logic microdevice and a memory microdevice that share the same vertical channel. By utilizing the same vertical channel, the overall footprint area of the integrated logic microdevice and the memory microdevice is relatively reduced and allows for further scaling of the associated semiconductor IC device.

Abstract: A semiconductor device comprises a stacked structure comprising a plurality of gate structures alternately stacked with a plurality of channel structures. Respective ones of the plurality of channel structures comprise a plurality of stacked semiconductor layers. At least two of the plurality of stacked semiconductor layers in the respective ones of the plurality of channel structures comprise different materials from each other.

Abstract: A semiconductor device comprises a stacked structure comprising a plurality of gate structures alternately stacked with a plurality of dielectric layers. Respective ones of the plurality of gate structures comprise a gate region and a gate dielectric layer disposed around the gate region. Respective ones of the plurality of dielectric layers are disposed between a first two-dimensional semiconductor material layer of a plurality of two-dimensional semiconductor material layers and a second two-dimensional semiconductor material layer of the plurality of two-dimensional semiconductor material layers. The gate dielectric layer of the respective ones of the plurality of gate structures contacts at least one of the plurality of two-dimensional semiconductor material layers.

Abstract: Embodiments are disclosed for a semiconductor structure. The semiconductor structure includes a first nanosheet layer. The first nanosheet layer includes a first channel region, and a heavily doped epitaxial region of a first type. Further, the semiconductor structure includes a second nanosheet layer. The second nanosheet layer includes a second channel region, a heavily doped epitaxial region of a second type disposed above the first nanosheet layer, and a first gate surrounding the first channel region and the second channel region. Additionally, the semiconductor structure includes a protection diode. The protection diode includes a source, a drain, and a second gate. The drain is connected to the first gate, and the second gate is connected to the source.

Abstract: A semiconductor device including a first stacked nanosheet Field Effect Transistor (FET), a second stacked nanosheet, a metal insulator metal (MIM) capacitor between the first stacked nanosheet and the second stacked nanosheet and an insulator separating the MIM capacitor from each of the first stacked nanosheet and the second stacked nanosheet. An embodiment where the first stacked nanosheet and the second stacked nanosheet each include an upper stacked nanosheet and a lower stacked nanosheet, the upper stacked nanosheet and the lower stacked nanosheet each include alternating layers of a sacrificial material and a semiconductor channel material vertically aligned and stacked one on top of another. Forming a first stacked nanosheet, forming a second stacked nanosheet, forming a MIM capacitor between the first stacked nanosheet and the second stacked nanosheet and forming an insulator separating the MIM capacitor from each of the first stacked nanosheet and the second stacked nanosheet.

Abstract: The present disclosure describes an illustrative semiconductor IC device that includes an antenna diode that drains electrical charge build up created during backside BEOL network fabrication processes. The semiconductor IC device includes an active semiconductor IC device upon which the backside BEOL network is to be fabricated and a handler semiconductor device that includes a diode doped region. Charge build up that may occur during the fabrication of the backside BEOL network may be dissipated through the diode doped region. As such, parasitic charge build up that may damage the semiconductor IC device is limited, thereby increasing yield of, and thereby limiting semiconductor IC device failure.

Abstract: An in-situ chip design is provided for self-heating free characterization of a device under test (DUT) with a short time constant. The in-situ chip design includes a pulse generator configured to output a pulse to the DUT and a buffering circuit arranged between the pulse generator and the DUT. The buffering circuit includes a first switch and an adjustable buffer circuit in parallel with the first switch and being controllable to apply one of various degrees of buffering to the pulse.

Abstract: A method of forming stacked vertical field effect devices is provided. The method includes forming a layer stack on a substrate, wherein the layer stack includes a first spacer layer on the substrate, a first protective liner on the first spacer layer, a first gap layer on the first protective liner, a second protective liner on the first gap layer, a second spacer layer on the second protective liner, a sacrificial layer on the second spacer layer, a third spacer layer on the sacrificial layer, a third protective liner on the third spacer layer, a second gap layer on the third protective liner, a fourth protective liner on the second gap layer, and a fourth spacer layer on the fourth protective liner. The method further includes forming channels through the layer stack, a liner layer on the sidewalls of the channels, and a vertical pillar in the channels.

Abstract: A semiconductor device includes first nanosheet structures at an NFET region of a semiconductor substrate and second nanosheet structures at a PFET region. A first gate wraps around the first nanosheet structures and a second gate wraps around the second plurality of nanosheet structures. A dielectric bar is between the first nanosheet structures and the second nanosheet structures. The semiconductor device further includes a first backside contact in the NFET region and a second backside contact in the PFET region. The first backside contact includes a first backside contact extension that extends to a first side of the at least one dielectric bar. The second backside contact includes a second backside contact extension that extends to an opposing second side of the at least one dielectric bar. One or more backside power elements are on one or both of the first backside contact extension and the second contact extension.

Abstract: Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a gate structure with a first portion having a first top surface and a second portion having a second top surface, the first top surface being above the second top surface; a dielectric cap layer on top of the second portion of the gate structure, the first portion of the gate structure being embedded in the dielectric cap layer; and a gate contact being above and substantially aligned with the first portion of the gate structure. A method of forming the same is also provided.

Abstract: A semiconductor device includes a metal-insulator-metal capacitor disposed between a first metallization level and a second metallization level, the metal-insulator-metal capacitor comprising a first electrode, a second electrode and a third electrode. A first via is extended from and contacts a conductive line of the second metallization level, and a second via is extended from and contacts the first via. The second via contacts the first electrode and the third electrode of the metal-insulator-metal capacitor. A slope of a side surface of the first via is different from a slope of a side surface of the second via.

Abstract: Embodiments of present invention provide a test structure. The test structure includes a scribe line area in a semiconductor substrate; a first fin and a second fin in the scribe line area and an insulating region between the first fin and the second fin; a first epitaxial region directly on top of the first fin and a second epitaxial region directly on top of the second fin; and an under-test region on top of the insulating region in the scribe line area and between the first epitaxial region and the second epitaxial region. In one aspect, the under-test region includes a gate and a first and a second sidewall spacer formed at a first and a second sidewall of the gate, the first epitaxial region being in contact with the first sidewall spacer and the second epitaxial region being in contact with the second sidewall spacer.

Abstract: A semiconductor device is provided. The semiconductor device includes a semiconductor device comprising: a first stacked field effect transistor (FET) structure in a first device area, the first stacked FET structure comprising a first pull down (PD) transistor, and a first pull up (PU) transistor disposed over the first PD transistor, a first metal gate that is shared by the first PD transistor and the first PU transistor; and an oxygen blocking layer provided on the first metal gate.

Abstract: A semiconductor test structure includes a first transistor active area comprising at least a first source/drain region, and a second transistor active area stacked on the first transistor active area and comprising at least a second source/drain region. At least one dielectric layer is disposed between the first transistor active area and the second transistor active area. The semiconductor test structure further includes a plurality of contact structures spaced apart from each other and disposed on the second source/drain region, and at least one gate structure extending across the first transistor active area and the second transistor active area. Contact resistance is measured between respective ones of the plurality of contact structures and the second source/drain region, and the second source/drain region is continuous between the plurality of contact structures.

Abstract: A metal insulator metal capacitor (MIM capacitor) between adjacent stacked nanosheet FETs, each include a first nanosheet stack including alternating layers of a first work function metal and a semiconductor channel material vertically aligned and stacked one on top of another and a second nanosheet stack including alternating layers of a second work function metal and the semiconductor channel material vertically aligned and stacked one on top of another, the second nanosheet stack on the first nanosheet stack. Forming adjacent stacked nanosheet FETs, each include a first nanosheet stack and a second nanosheet stack, the second nanosheet stack on the first nanosheet stack, and forming a MIM capacitor between adjacent stacked nanosheet field effect transistors.

Abstract: Embodiments are disclosed for a semiconductor structure. The semiconductor structure includes a protection diode. The protection diode includes a substrate, a gate, a first nanosheet layer, and a second nanosheet layer. The first nanosheet layer includes a heavily doped n-type epitaxial disposed over the substrate. Additionally, the first nanosheet layer is in contact with the gate. Further, the second nanosheet layer includes a heavily doped p-type epitaxial disposed over the substrate. Additionally, the second nanosheet layer is in contact with the gate. Further, the first nanosheet layer and the second nanosheet layer surround the gate.

Abstract: A semiconductor device including a metal insulator metal capacitor (MIM capacitor) within back end of line circuitry of the semiconductor device, where the MIM capacitor surrounds a first Mx metal line. A semiconductor device including a metal insulator metal capacitor (MIM capacitor) within back end of line circuitry of the semiconductor device, where the MIM capacitor surrounds a first Mx metal line, where a lower horizontal surface of the MIM capacitor is vertically adjacent to an upper horizontal surface of an Mx-1 metal line. A method including forming a metal insulator metal capacitor (MIM capacitor) within back end of line circuitry of the semiconductor device, where the MIM capacitor surrounds a first Mx metal line.

Abstract: A semiconductor structure including an array of transistors, a backside power rail, wherein the backside power rail directly contacts a bottommost surface of a shallow trench isolation region, and a metal-insulator-metal (MIM) capacitor embedded in a backside power delivery network beneath the array of transistors, wherein the MIM capacitor directly contacts a bottommost surface of the backside power rail.

Abstract: In one embodiment a semiconductor structure comprises a semiconductor substrate, a trench dielectric layer disposed in a trench of the semiconductor substrate, a first source/drain region disposed in contact with the semiconductor substrate, a gate and a second source/drain region. The gate is disposed between the first source/drain region and the second source/drain region. The semiconductor structure further comprises a dielectric isolation layer disposed between the semiconductor substrate and the second source/drain region.