Patents by Inventor Huimei Zhou

Huimei Zhou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10170593
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: January 1, 2019
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Patent number: 10056382
    Abstract: A method of forming an improved field-effect transistor device is provided. The method includes forming a tensile stressor near a first semiconductor fin. The first semiconductor fin is a fin of an n-channel field-effect transistor. The n-channel field-effect transistor is formed on a substrate. The method also includes forming a compressive stressor near a second semiconductor fin. The second semiconductor fin is a fin of a p-channel field effect transistor. The p-channel field-effect transistor is formed on the substrate. The method can also include forming neutral material over the at least one n-channel and p-channel field effect transistor. The method can also include achieving different device performance by configuring a stressor distance to fin and/or by configuring a stressor volume.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: August 21, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dechao Guo, Juntao Li, Sanjay C. Mehta, Robert R. Robison, Huimei Zhou
  • Publication number: 20180122813
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: December 20, 2017
    Publication date: May 3, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180108661
    Abstract: A method of forming an improved field-effect transistor device is provided. The method includes forming a tensile stressor near a first semiconductor fin. The first semiconductor fin is a fin of an n-channel field-effect transistor. The n-channel field-effect transistor is formed on a substrate. The method also includes forming a compressive stressor near a second semiconductor fin. The second semiconductor fin is a fin of a p-channel field effect transistor. The p-channel field-effect transistor is formed on the substrate. The method can also include forming neutral material over the at least one n-channel and p-channel field effect transistor. The method can also include achieving different device performance by configuring a stressor distance to fin and/or by configuring a stressor volume.
    Type: Application
    Filed: October 19, 2016
    Publication date: April 19, 2018
    Inventors: Dechao Guo, Juntao Li, Sanjay C. Mehta, Robert R. Robison, Huimei Zhou
  • Publication number: 20180083017
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: November 27, 2017
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180083016
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: October 19, 2017
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180083015
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: June 7, 2017
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180083013
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: September 22, 2016
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Patent number: 9922983
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: March 20, 2018
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Patent number: 9922984
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: March 20, 2018
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Patent number: 9721848
    Abstract: A semiconductor device includes a first fin and a second fin arranged on a substrate, a gate stack arranged over a channel region of the first fin, and spacers arranged along sidewalls of the gate stack. A cavity is arranged adjacent to a distal end of the gate stack. The cavity is defined by the substrate, a distal end of the second fin, and the spacers. A dielectric fill material is arranged in the cavity such that the dielectric fill material contacts the substrate, the distal end of the second fin, and the spacers.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: August 1, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Huiming Bu, Kangguo Cheng, Andrew M. Greene, Dechao Guo, Sivananda K. Kanakasabapathy, Gauri Karve, Balasubramanian S. Pranatharthiharan, Stuart A. Sieg, John R. Sporre, Gen Tsutsui, Rajasekhar Venigalla, Huimei Zhou