Abstract: Cyclical methods of depositing a ruthenium layer on a substrate are provided. In one process, initial or incubation cycles include supplying alternately and/or simultaneously a ruthenium precursor and an oxygen-source gas to deposit ruthenium oxide on the substrate. The ruthenium oxide deposited on the substrate is reduced to ruthenium, thereby forming a ruthenium layer. The oxygen-source gas may be oxygen gas (O2). The ruthenium oxide may be reduced by supplying a reducing agent, such as ammonia (NH3) gas. The methods provide a ruthenium layer having good adherence to an underlying high dielectric layer while providing good step coverage over structures on the substrate. After nucleation, subsequent deposition cycles can be altered to optimize speed and/or conformality rather than adherence.

Abstract: A deposition apparatus for depositing a thin film on a substrate according to an embodiment of the present invention includes a substrate support, a reaction chamber wall formed above the substrate support and defining a reaction chamber, a gas inflow tube having a plurality of gas inlets connected to respective process gas sources and communicating with the reaction chamber, a volume adjusting horn for supplying a process gas to the reaction chamber, which defines a reaction space together with the substrate support, a micro-feeding tube assembly disposed between the gas inflow tube and the volume adjusting horn and having a plurality of fine tubules, and a helical flow inducing plate disposed between the micro-feeding tube assembly and the volume adjusting horn, and the process gas passing through the volume adjusting horn is directly supplied to the substrate without passing any other device.

Abstract: Methods of depositing a silicon oxide film are disclosed. One embodiment is a plasma enhanced atomic layer deposition (PEALD) process that includes supplying a vapor phase silicon precursor, such as a diaminosilane compound, to a substrate, and supplying oxygen plasma to the substrate. Another embodiment is a pulsed hybrid method between atomic layer deposition (ALD) and chemical vapor deposition (CVD). In the other embodiment, a vapor phase silicon precursor, such as a diaminosilane compound, is supplied to a substrate while ozone gas is continuously or discontinuously supplied to the substrate.

Abstract: A cup holder includes: a support housing; an elevator housing, movable within the support housing; a cup bearing tray, movable within the elevator housing; and an elevator unit that moves the elevator housing and the cup bearing tray in opposite directions. The elevator unit includes: a main gear that is linked with the cup bearing tray and is pivotably installed on the support housing, a rack gear that is linked with the elevator housing, and a driven gear that is engaged between the main gear and the rack gear.

Abstract: A method for filling defect-free conductive material in deep vias or cavities in semiconductor wafers in 3-D integration structures is provided. The process may be performed in at least two steps for depositing the conductive material, including a first deposition step that partially fills the cavity with the conductive material and forms a conformal layer, which may also reduce the depth and width of the cavity, and a second deposition step that completely fills the same conductive material into the space defined by the conformal layer.

Abstract: A deposition apparatus and deposition method for forming a film on a substrate are disclosed. A film is deposited on a substrate by exposing the substrate to different flow directions of reactant gases. In one embodiment, the substrate is rotated in the reaction chamber after a film having an intermediate thickness is formed on the substrate. In other embodiments, the substrate is transferred from one reaction chamber to another after a film having an intermediate thickness is formed on the substrate. Accordingly, a film having a uniform thickness is deposited, averaging out depletion effect.

Abstract: A reactor configured to subject a substrate to alternately repeated surface reactions of vapor-phase reactants is disclosed. The reactor includes a reaction chamber, one or more inlets, and an exhaust outlet. The reaction chamber includes a reaction space. The reactor also includes a gas flow control guide structure within the reaction chamber. The gas flow control guide structure resides over the reaction space and is interposed between the inlets and the reaction space such that a laminar flow is generated in the reaction space. The gas flow control guide structure includes one or more channels. Each of the channels extends from a respective one of the inlets to a first portion of a periphery of the reaction space. Each of the channels defines a flow path extending from the respective one of the inlets to the reaction space.

Abstract: The present invention relates to an ALD apparatus, and particularly relates to an ALD apparatus that is suitable for rapidly depositing a thin film on a substrate having an actual area that is larger than a planar substrate. In the reaction chamber of the ALD apparatus according to an exemplary embodiment of the present invention, more gas is supplied to a portion where more gas is required by having differences in the space for gas to flow rather than supplying the gas in a constant flux and a constant flow velocity such that the time required for supplying reactant gases and waste of reactant gases may be minimized to increase productivity of the ALD apparatus. The ceiling of the reaction space is shaped to provide a nonuniform gap over the substrate.

Abstract: An apparatus for depositing thin film on a processing target includes: a reaction space; a susceptor movable up and down and rotatable around its center axis; and isolation walls that divide the reaction space into multiple compartments including source gas compartments and purge gas compartments, wherein when the susceptor is raised for film deposition, a small gap is created between the susceptor and the isolation walls, thereby establishing gaseous separation between the respective compartments, wherein each source gas compartment and each purge gas compartment are provided alternately in a susceptor-rotating direction of the susceptor.

Abstract: Space and time co-divided atomic layer deposition (ALD) apparatuses and methods are provided. Substrates are moved (e.g., rotated) among multiple reaction zones, each of which is exposed to only one ALD reactant. At the same time, reactants are pulsed in each reaction zone, with purging or other gas removal methods between pulses. Separate exhaust passages for each reactant and purging during wafer movement minimizes particle contamination. Additionally, preferred embodiments permit different pulsing times in each reaction space, thus permitting flexibility in pulsing.

Abstract: An apparatus for depositing thin film on a processing target includes: a reaction space; a susceptor movable up and down and rotatable around its center axis; and isolation walls that divide the reaction space into multiple compartments including source gas compartments and purge gas compartments, wherein when the susceptor is raised for film deposition, a small gap is created between the susceptor and the isolation walls, thereby establishing gaseous separation between the respective compartments, wherein each source gas compartment and each purge gas compartment are provided alternately in a susceptor-rotating direction of the susceptor.

Abstract: A ruthenium film deposition method is disclosed. In one embodiment of the method, a first ruthenium film is deposited by using a PEALD process until a substrate is substantially entirely covered with the first ruthenium film. Then, a second ruthenium film is deposited on the first ruthenium film by using a thermal ALD process having a higher deposition speed than that of the PEALD process. In the method, a ruthenium metal film having a high density is formed in a short time by combining a PEALD process of depositing a ruthenium film at a low deposition speed and a deposition process of depositing a ruthenium film at a higher deposition speed. Accordingly, it is possible to form a ruthenium film having high density, a smooth surface, good adhesiveness, and a short incubation period.

Abstract: A plasma enhanced atomic layer deposition (PEALD) apparatus and a method of forming a conductive thin film using the same are disclosed. According to the present invention of a PEALD apparatus and a method, a process gas inlet tube and a process gas outlet tube are installed symmetrically and concentrically with respect to a substrate, thereby allowing the process gas to flow uniformly, evenly and smoothly over the substrate, thereby forming a thin film uniformly over the substrate. A uniquely designed showerhead assembly provides not only reduces the volume of the reactor space, but also allows the process gases to flow uniformly, evenly and smoothly throughout the reation space area and reduces the volume of the reaction space, and the smaller volume makes it easier and fast to change the process gases for sequential and repeated process operation.

Abstract: A method of depositing a ruthenium(Ru) thin film by using readily available ruthenium precursors such as Ru(CP)2 and Ru(EtCP)2, ammonia gas(NH3) as a reactant gas or a purge gas or both, and a plasma enhanced atomic layer deposition(PEALD) apparatus and the method thereof, according to the present invention, is disclosed. Also a gas mixture of nitrogen gas(N2) and hydrogen(H2) is used as a reactant gas or a purge gas or both in addition to ammonia gas in depositing a ruthenium thin film according to the present invention. A ruthenium(Ru) thin film of high density, very pure, very smooth on the film surface and uniform is deposited even at the temperature of the reaction chamber below 400° C. using ammonia gas and a gas mixture of nitrogen gas and hydrogen gas, respectively, as a reactant gas under plasma.

Abstract: An expandable interfusion cage comprising a cage body and a spacer. The cage body includes a seat part which is pierced by an orifice and a branch part which defines therein an inside space and has a plurality of elongate branches integrally formed at their proximal ends with the seat part. An opening is defined between two adjoining branches to communicate with the inside space. The spacer is movably assembled in the inside space of the cage body to expand the cage body radially outward. Inward projections are formed at distal ends, respectively, of the branches to project radially inward toward an axis of the cage body. The inside space of the cage body has substantially a circular or polygonal sectional shape. The spacer is engaged with the inward projections of the branches while expanding the cage body.

Abstract: A method for forming copper interconnection conductors for interconnecting integrated circuits on a substrate by forming a barrier layer or an adhesion layer or both having excellent adhesion property is disclosed. Ruthenium (Ru) and ruthenium alloys, and rhenium (Re) and rhenium alloys are proposed to use according to the present invention. Other metals proposed to use include nickel (Ni), platinum (Pt), osmium (Os), iridium (Ir) and their alloys, respectively.

Abstract: An expandable interfusion cage comprising a cage body and a spacer. The cage body includes a seat part which is pierced by an orifice and a branch part which defines therein an inside space and has a plurality of elongate branches integrally formed at their proximal ends with the seat part. An opening is defined between two adjoining branches to communicate with the inside space. The spacer is movably assembled in the inside space of the cage body to expand the cage body radially outward. Inward projections are formed at distal ends, respectively, of the branches to project radially inward toward an axis of the cage body. The inside space of the cage body has substantially a circular or polygonal sectional shape. The spacer is engaged with the inward projections of the branches while expanding the cage body.

Abstract: A plasma enhanced atomic layer deposition (PEALD) apparatus and a method of forming a conductive thin film using the same are disclosed. According to the present invention of a PEALD apparatus and a method, a process gas inlet lube and a process gas outlet tube are installed symmetrically and concentrically with respect to a substrate, thereby allowing the process gas to flow uniformly, evenly and smoothly over the substrate, thereby forming a thin film uniformly over the substrate. A uniquely designed showerhead assembly provides not only reduces the volume of the reactor space, but also allows the process gases to flow uniformly, evenly and smoothly throughout the reation space area and reduces the volume of the reaction space, and the smaller volume makes it easier and fast to change the process gases for sequential and repeated process operation.

Abstract: The present invention relates to a super water-repellent organic/inorganic composite material, more particularly to a new-concept super water-repellent organic/inorganic composite material with superior separation property having skin layer chemically immobilized with functional polymer on the porous inorganic support surface with fractal surface structure and pores of nanometers to micrometers, using grafting-from surface polymerization method.

Abstract: A damper system of a glove box includes fastening holes formed at side walls of the glove box, plates provided with through holes to be aligned with the fastening holes, a binding groove formed at one side of each plate, a fixing groove formed at the other side of each plate, a plate spring joined with the binding groove and the fixing groove, and protrusions provided at both sides of the glove box so that the plate spring can be fixed when the glove box pivots by the hinge, such that when the glove box pivots, the plate springs contact the protrusions, whereby the weight of the glove box can be reduced.