Abstract: Disclosed is a multilayer printed circuit board. The multilayer printed circuit board includes a power source surface to provide power to each component disposed on the power source surface, a ground surface having a reference voltage, a strip line which passes through the power source surface and/or the ground surface so as to transmit signals between components, an antenna installed in proximity to a sectional region of the power source surface and the ground surface, and an electromagnetic wave reduction member which is provided between the power source surface and the ground surface to effectively reduce an electromagnetic wave generated from the strip line.

Abstract: A DRAM cell capacitor is provided, having HSG (hemispherical grain) silicon disposed on a selected portion of a storage node. The capacitor resembles a solid cylindrical configuration having a top portion, a side wall, and a top edge portion sloped downward from the top portion to the side wall. HSG silicon is disposed only on the top portion and the side wall, but not on the sloped top edge portion.

Abstract: An exposure apparatus includes a frame member with a first stage having a substrate disposed thereon provided in a lower portion of the frame member. A leveling mechanism is provided for adjusting an orientation of the first stage. The exposure apparatus further includes a second stage positioned over the first stage and fixed to the frame member. A reticle is positioned on the second stage. An exposure area limiting mechanism is provided in the exposure apparatus and positioned over the second stage. The exposure area limiting mechanism defines an opening through which light is capable of passing during exposure for limiting an exposure area of the second stage. The exposure apparatus also includes an illumination system to irradiate light to the exposure area limiting means.

Abstract: A stage apparatus having a rotary table and a method of operating the same are provided. The stage apparatus includes a base, a stage which is rectilinearly movable on the upper surface of the base, and a rotary table which is rotatable on the stage and on which a workpiece is to be placed. Therefore, a larger workpiece can be effectively manufactured using the stage apparatus.

Abstract: A DRAM cell capacitor is provided wherein a capacitor bottom electrode has an HSG (Hemi-Spherical Grain) layer formed thereon so as to increase capacitance of the capacitor. In the DRAM cell capacitor, the capacitor bottom electrode has an angled shape at a top edge thereof, and the HSG silicon layer is not formed on the top edge of the capacitor bottom electrode. A method for manufacturing the DRAM cell capacitor comprises etching an upper portion of the conductive layer using the photoresist pattern as a mask, and at the same time forming a polymer on both sidewalls of the photoresist pattern to etch the upper portion thereof and thereby to make a top edge of the conductive layer be angled. The method further comprises etching a remaining portion of the conductive layer sing a combination of the photoresist pattern and the polymer as a mask until an upper surface of the interlayer insulating layer is exposed, to thereby form the capacitor bottom electrode.

Abstract: A vacuum chuck according to the present invention includes a base plate having an outer wall formed in a predetermined height around the base plate. In addition, at least one inner wall, having the same height as the outer wall, is formed on the base plate so as to divide the space surrounded by the outer wall into a plurality of compartments. A plurality of vacuum holes are provided in the respective compartments and connected to a vacuum source. By using the vacuum chuck according to the present invention, variously sized parts can be fixed to the vacuum chuck by making the compartments of the vacuum chuck in various sizes.

Abstract: An improved liquid crystal display device which has a clear contrast and satisfactorily good manufacturing processes, includes a plurality of first electrodes which are placed in a predetermined pattern and determine multiple pixel area and a plurality of second electrodes which are provided to be opposingly placed apart in a predetermined interval therewith; a liquid crystal layer to be filled tip between the electrodes: one or more insulation layers are provided in the liquid crystal layer, for forming multiple liquid crystal layers; columns for fixing the location of the insulation layers in the liquid crystal layer; and a protective insulation layer for protecting the electrodes. In the liquid crystal display device, the columns are made of black-colored materials for absorbing external light and are composed of multiple unit columns sequentially disposed up and down, with the insulation layer inserted therebetween.