Abstract: A plasma processing apparatus includes a processing chamber in which a sample is subjected to plasma processing, a first radio frequency power supply that supplies radio frequency power for generating plasma, a sample stage on which the sample is mounted, and a second radio frequency power supply that supplies radio frequency power to the sample stage, the plasma processing apparatus further includes a DC power supply that applies a DC voltage, that is changed according to a periodically repeated waveform, to the sample stage, and the waveform of one cycle has a period in which amplitude changes by a predetermined amount or more during a predetermined time. Accordingly, charged particles on a wafer surface are removed, a trench shape with high verticality can be obtained, and damage to a film that is not to be etched inside a trench can be reduced.

Abstract: Image processing is performed in view of the difference between the chroma component and the brightness component in an image, with a relatively smaller amount of data processed during the image processing. A frequency decomposing unit 110 performs frequency decomposition directly on Bayer image signals from an imaging element 3. With this, a high frequency component representing color information and a low frequency component representing brightness information are obtained. A filter coefficient obtaining unit 131 of a correction processing unit 130 obtains filter coefficients and the filter coefficients for the high frequency component are different from those for the low frequency component. A filtering processing unit performs a filtering process on subimages based on the filter coefficients obtained by the filter coefficient obtaining unit 131 in such a manner that processing details of the filtering process for the high frequency component are different from those for the low frequency component.

Abstract: An imaging device is provided with the following: a trial shading-correction unit that performs trial shading correction on image data for each of a plurality of types of light source on the basis of correction information stored in a correction-information storage unit for each light-source type; a correction-information selection unit (whereby the results of the shading correction performed by the trial shading-correction unit for each light-source type are compared to each other and correction information corresponding to an appropriate shading-correction result is selected from among the correction information stored by the correction-information storage unit per light-source type; and a shading correction unit that performs color-shading correction on the image data on the basis of the correction information selected by the correction-information selection unit.

Abstract: An etching method for anisotropically etching a Cu film on a substrate surface includes providing a substrate having a Cu film on a surface thereof in a chamber and supplying an organic compound into the chamber while setting the inside of the chamber to a vacuum state and irradiating an oxygen gas cluster ion beam to the Cu film. The etching method further includes oxidizing Cu or the Cu film to a copper oxide by oxygen gas cluster ions in the oxygen gas cluster ion beam and anisotropically etching the Cu film by reacting the copper oxide and the organic compound.

Abstract: A facilities controlling device includes a file acquiring portion that acquires a screen file from a storing portion and acquires a corresponding image file, display script file and processing script file from the storing portion, a data processing portion that acquires, from a device, device data corresponding to data identifying information in the screen file acquired by the file acquiring portion, and performs data processing on the acquired device data based on a processing script in the processing script file corresponding to the device data obtained by the file acquiring portion, and a display processing portion that displays, in a screen, the device data produced by the data processing portion and a symbol of the image file acquired by the file acquiring portion, based on the display script in the display script file acquired by the file acquiring portion.

Abstract: An imaging device is provided with the following: a trial shading-correction unit that performs trial shading correction on image data for each of a plurality of types of light source on the basis of correction information stored in a correction-information storage unit for each light-source type; a correction-information selection unit (whereby the results of the shading correction performed by the trial shading-correction unit for each light-source type are compared to each other and correction information corresponding to an appropriate shading-correction result is selected from among the correction information stored by the correction-information storage unit per light-source type; and a shading correction unit that performs color-shading correction on the image data on the basis of the correction information selected by the correction-information selection unit.

Abstract: Image processing is performed in view of the difference between the chroma component and the brightness component in an image, with a relatively smaller amount of data processed during the image processing. A frequency decomposing unit 110 performs frequency decomposition directly on Bayer image signals from an imaging element 3. With this, a high frequency component representing color information and a low frequency component representing brightness information are obtained. A filter coefficient obtaining unit 131 of a correction processing unit 130 obtains filter coefficients and the filter coefficients for the high frequency component are different from those for the low frequency component. A filtering processing unit performs a filtering process on subimages based on the filter coefficients obtained by the filter coefficient obtaining unit 131 in such a manner that processing details of the filtering process for the high frequency component are different from those for the low frequency component.

Abstract: Provided is a planarization method capable of reliably planarizing a metal film formed before an MTJ element of an MRAM is formed. An MTJ element is formed by a sequence of processes including: forming a Cu film to be embedded in a SiO2 film in a wafer W; irradiating an oxygen GCIB to a surface of the Cu film to planarize the Cu film; forming a Ta film; forming a Ru film or a Ta film; irradiating the oxygen GCIB to the Ta film, the Ru film or the Ta film to planarize the Ta film, the Ru film or the Ta film; forming a PtMn film; irradiating the oxygen GCIB to a surface of the PtMn film to planarize the PtMn film; forming a CoFe thin film and a Ru thin film; and forming a CoFeB thin film, a MgO thin film and a CoFeB thin film in that order.

Abstract: To improve the stability of numerical calculation for finding a continuous phase of a pair of signal sequences, provided is a signal processing device (10) wherein a spline calculation unit (13) approximates a pair of signal sequences acquired by a signal acquisition unit (11) by spline functions, and an unwrapping processing unit (18) performs phase unwrapping using polynomials. The phase unwrapping is performed according to a procedure where a polynomial-sequence calculation unit (15) calculates a polynomial sequence by applying a Euclidean algorithm to the polynomials of the spline functions, a sign counting unit (17) checks the number of changes of the sign of a numerical sequence formed by arranging the values of the polynomial sequence in each subinterval where the phase is found, and an unwrapping processing unit (18) determines an indefinite portion that is an integral multiple of ? on the basis of the number of changes.

Abstract: A cluster beam generating method that generates a cluster beam includes steps of mixing a gas source material and a liquid source material in a mixer; supplying a cluster beam including clusters originating from the gas source material and clusters originating from the liquid source material that are mixed in the mixer from a nozzle; and adjusting a temperature of the nozzle using a temperature adjusting portion that adjusts a temperature of the nozzle, thereby controlling a ratio of the clusters originating from the gas source material and the clusters originating from the liquid source material in the cluster beam.

Abstract: An evaluation indicator is calculated to determine whether or not servicing is required, from data for evaluation for a valve that is subject to servicing. An ID of the valve is recorded in a recording area AR1. A pre-servicing evaluation indicator for the valve is recorded in a recording area AR2. A post-servicing evaluation indicator for the valve is recorded in a recording area AR3. If only a pre-servicing evaluation indicator are recorded corresponding to the valve, then a status wherein the service has not been completed is presented together with the evaluation results that are indicated by these pre-servicing evaluation indicators, where if both a pre-servicing evaluation indicator and a post-servicing evaluation indicator are recorded, then a status that service has been completed is presented together with the evaluation results showing the pre-servicing evaluation indicator and the post-servicing evaluation indicator.

Abstract: A valve-to-be-serviced selecting device is provided with: a simple identification executing portion identifying a service-candidate valve by a method that is relatively non-labor-intensive (a relatively low-cost method), a fine identification executing portion identifying a service-candidate valve by a method that is relatively labor-intensive (a relatively high-cost method), and a valve-to-be-serviced determination processing portion. The valve-to-be-serviced determination processing portion performs the simple identification by the simple identification executing portion for valves 1-1 through 1-n (N valves), and then performs fine identification, through the fine identification executing portion service-candidate valves identified by the simple identification (M valves), to determine those valves to be subjected to servicing from among the valves 1-1 through 1-n.

Abstract: A facilities controlling device includes a file acquiring portion that acquires a screen file from a storing portion and acquires a corresponding image file, display script file and processing script file from the storing portion, a data processing portion that acquires, from a device, device data corresponding to data identifying information in the screen file acquired by the file acquiring portion, and performs data processing on the acquired device data based on a processing script in the processing script file corresponding to the device data obtained by the file acquiring portion, and a display processing portion that displays, in a screen, the device data produced by the data processing portion and a symbol of the image file acquired by the file acquiring portion, based on the display script in the display script file acquired by the file acquiring portion.

Abstract: An imaging element includes: a plurality of color filters arranged in a Bayer array; photoelectric conversion elements provided for the respective color filters; a signal adder circuit which carries out additions in each of the unit grids, by (i) adding up signals outputted from two photoelectric conversion elements corresponding to different colors of two color filters out of four color filters, and (ii) adding up signals outputted from two photoelectric conversion elements corresponding to remaining two color filters; and an A/D converter. The imaging element outputs: (i) a first digital image signal where signals of one color out of Ye (yellow) and Cy (cyan), and signals of G, are alternately placed; and (ii) a second digital image signal where signals of an other color out of Ye and Cy, which is different from the one color, and signals of Mg (magenta), are alternately placed.

Abstract: A detergent composition containing: (a) a nonionic surfactant containing a polyoxyalkylene alkyl ether of which alkylene oxide moiety has an average number of moles of from 4 to 8; (b) an anionic surfactant, excluding a fatty acid and a salt thereof; and (c) a clay mineral represented by the general formula (I): [Si8(MgaAlb)O20(OH)4]X?·MeX+??(I) wherein a, b and x satisfy 0<a?6, 0<b?4, and x=12?2a?3b, and Me is at least one member selected from Na, K, Li, Ca, Mg and NH4, wherein the clay mineral is contained in an amount of 3% by weight or more, wherein a weight ratio of the component (a) to the component (b), (a)/(b), exceeds 1 and is less than 5.

Abstract: A disclosed surface processing method includes a first processing step, wherein a gas cluster beam is generated from a source material that does not contain nitrogen, and irradiated to a member to be processed, and a second processing step, wherein a nitrogen gas cluster beam is generated and irradiated to the member to be processed.

Abstract: A cluster beam generating apparatus that generates a cluster beam includes a mixer that mixes a gas source material and a liquid source material; a nozzle that supplies a cluster beam including clusters originating from the gas source material and the liquid source material that are mixed in the mixer; and a temperature adjusting portion that adjusts a temperature of the nozzle, thereby controlling a ratio of the clusters originating from the gas source material and the clusters originating from the liquid source material in the cluster beam.

Abstract: A charged particle separation apparatus that separates ionized gas clusters is disclosed. The charged particle separation apparatus includes an electric field applying part including two electrodes across which electric voltage is applied in order to generate electric field between the two electrodes thereby deflecting a trajectory of the ionized gas cluster, the electrodes including one of an opening and a void; and a plate opening that allows the ionized gas cluster whose trajectory is deflected by the electric field applying part to go therethrough.

Abstract: An imaging element includes: a plurality of color filters arranged in a Bayer array; photoelectric conversion elements provided for the respective color filters; a signal adder circuit which carries out additions in each of the unit grids, by (i) adding up signals outputted from two photoelectric conversion elements corresponding to different colors of two color filters out of four color filters, and (ii) adding up signals outputted from two photoelectric conversion elements corresponding to remaining two color filters; and an A/D converter. The imaging element outputs: (i) a first digital image signal where signals of one color out of Ye (yellow) and Cy (cyan), and signals of G, are alternately placed; and (ii) a second digital image signal where signals of an other color out of Ye and Cy, which is different from the one color, and signals of Mg (magenta), are alternately placed.

Abstract: A charged particle separation apparatus that separates ionized gas clusters is disclosed. The charged particle separation apparatus includes an electric field applying part including two electrodes across which electric voltage is applied in order to generate electric field between the two electrodes thereby deflecting a trajectory of the ionized gas cluster, the electrodes including one of an opening and a void; and a plate opening that allows the ionized gas cluster whose trajectory is deflected by the electric field applying part to go therethrough.