Abstract: A bilayer dielectric structure for substantially reducing or eliminating metal contaminants formed during subsequent polysilicon deposition is provided. The bilayer dielectric structure includes an upper surface region that is rich in chlorine located atop a bottom surface region. The upper surface region that is rich in chlorine removes metal contaminates that are present atop the structure during subsequent formation of a polysilicon layer. A method of forming the bilayer structure is also provided.

Abstract: A bilayer dielectric structure for substantially reducing or eliminating metal contaminants formed during subsequent polysilicon deposition is provided. The bilayer dielectric structure includes an upper surface region that is rich in chlorine located atop a bottom surface region. The upper surface region that is rich in chlorine removes metal contaminates that are present atop the structure during subsequent formation of a polysilicon layer. A method of forming the bilayer structure is also provided.

Abstract: A device for mounting a data transmission apparatus to a rotating, tapered and instrumented shaft is provided. This device permits attachment without interfering with shaft rotation or the accuracy of data output, and prevents both radial and axial slippage of the data transmission apparatus. The mounting device consists of a sleeve assembly which is attached to the shaft with clamps that are situated at some distance removed from the instrumented area of the shaft. The data transmission device is secured to the sleeve such that the entire assembly rotates with the shaft. Shim adjustments between sleeve sections assure that a minimum compressive load is transferred to the instrumented area of the shaft and a rubber lining is affixed to a large portion of the interior surface of the sleeve to absorb vibration.

Abstract: A bearing take-up apparatus includes a rigid base having spaced upstanding walls between which a bearing housing having recesses in its upper surface is slidably received. A threaded screw having anchoring means rigidly secured on its ends and nuts intermediate its ends is lowered onto upper surfaces of the end walls with the nuts positioned to be received within the recesses while the anchoring means overhang the end walls. A cover is lowered over the screw and connecting means are provided for releasably connecting the cover to the end walls.

Abstract: A bearing assembly retainer ring has pockets for holding cylindrical rollers in arcuately spaced relationship about a central axis of the retainer ring. Each pocket has two end faces that are spaced axially of the retainer ring and two side faces that are spaced laterally of the axial spacing between the two end faces. The pocket extends radially through inner and outer peripheral edges of the retainer ring to receive a roller therein having a diameter which is greater than the radial span of the pocket end faces so that the roller extends beyond the inner and outer peripheral edges of the retainer ring. The axial spacing between the pocket end faces is slightly greater than the axial length of the roller to provide restricted clearances between the ends of the roller and the end faces of the pocket when the roller is centered within the pocket. Chamfers are provided on the end faces of the pockets at the inner and outer peripheral edges thereof.