Abstract: Disclosed is a structure wherein lower source/drain regions of vertical field effect transistors (VFETs) of memory cells in a memory array are aligned above and electrically connected to buried bitlines. Each cell includes a VFET with a lower source/drain region, an upper source/drain region and at least one channel region extending vertically between the source/drain regions. The lower source/drain region is above and immediately adjacent to a buried bitline, which has the same or a narrower width than the lower source/drain region and which includes a pair of bitline sections and a semiconductor region positioned laterally between the sections. The semiconductor region is made of a different semiconductor material than the lower source/drain region. Also disclosed is a method that ensures that bitlines of a desired critical dimension can be achieved and that allows for size scaling of the memory array with minimal bitline coupling.

Abstract: Field-effect transistor structures for a laterally-diffused metal-oxide-semiconductor (LDMOS) device and methods of forming a LDMOS device. First and second fins are formed on a substrate. A first well of a first conductivity type is arranged partially in the substrate and partially in the first fin. A second well of a second conductivity type is arranged partially in the substrate, partially in the first fin, and partially in the second fin. First and second source/drain regions of the second conductivity type are respectively formed within the first well in the first fin and within the second well in the second fin. Spaced-apart gate structures are formed that overlap with respective portions of the first fin. A doped region of the first conductivity type is arranged within the second well in the first fin between the first and second gate structures.

Abstract: Disclosed is a method of forming an integrated circuit (IC) structure with multiple non-planar transistors having different effective channel widths. In the method, sacrificial gates are removed from partially completed transistors, creating gate openings that expose sections of semiconductor fins between source/drain regions. Prior to forming replacement metal gates in the gate openings, additional process steps are performed so that, in the resulting IC structure, some transistors have different channel region heights and, thereby different effective channel widths, than others. These steps can include forming isolation regions in the bottoms of some gate openings. Additionally or alternatively, these steps can include filling some gate openings with a sacrificial material, recessing the sacrificial material to expose fin tops within those gate openings, either recessing the fin tops or forming isolation regions in the fin tops, and removing the sacrificial material.

Abstract: One illustrative DRAM structure disclosed herein includes a first memory cell pair, a second memory cell pair, a single diffusion break (SDB) isolation structure positioned between the first and second memory cell pairs, and a single first gate positioned between the first and second memory cell pairs and above the SDB isolation structure.

Abstract: A semiconductor structure includes a substrate. A gate structure is disposed over the substrate. The gate structure includes: a pair of gate spacers extending generally vertically from the substrate, gate metal disposed between the spacers, and a self-aligned contact (SAC) cap disposed over the gate metal to form a top of the gate structure. A resistor is disposed directly upon the SAC cap such that no additional layer is disposed between the resistor and SAC cap. The resistor is composed of a material suitable to provide a predetermined resistance to a current to be conducted therethrough. A pair of resistor contacts are electrically connected to the resistor and spaced to provide the predetermined resistance to the current.

Abstract: A semiconductor structure includes a substrate. A gate structure is disposed over the substrate. The gate structure includes: a pair of gate spacers extending generally vertically from the substrate, gate metal disposed between the spacers, and a self-aligned contact (SAC) cap disposed over the gate metal to form a top of the gate structure. A first capacitor plate is disposed directly upon the SAC cap such that no additional layer is disposed between the resistor and SAC cap. An insulator layer and a second capacitor plate are disposed on the first capacitor plate forming a MIM capacitor. A pair of capacitor plate contacts are electrically connected to the first capacitor plate and the second capacitor plate.

Abstract: A non-planar semiconductor structure includes a semiconductor substrate, multiple raised semiconductor structures coupled to the substrate, a drain well in each of the raised structures, and a drain in each drain well. The structure further includes an isolation region in each drain well adjacent the drain, each isolation region reaching to a top surface of the corresponding raised structure, and a conductive center gate on each raised structure, the conductive center gate covering a top surface, a front surface and a back surface thereof, and covering a portion of the isolation region opposite the drain. The isolation regions in the drain wells reaching to the raised structure top surface is a result of preserving the isolation region by covering it during fabrication with an HDP oxide to prevent partial removal.

Abstract: A non-planar lateral drift MOS device eliminates the need for a field plate extension, which reduces gate width. In one example, two sources and two comparatively small gates in a raised structure allow for two channels and a dual current with mirrored flows, each traveling into and downward through a center region of a connecting well that connects the substrate with the drain areas and shallow wells containing the source areas, the current then traveling in opposite directions within the substrate region of the connecting well toward the two drains. The source and drain areas may be separate raised structures or isolated areas of a continuous raised structure.

Abstract: A method of forming a single diffusion break includes etching rows of fins into a substrate of a structure from a patterned fin hardmask, the remaining fin hardmask being self-aligned with the fins. A first dielectric fill material is disposed and planarized over the structure to expose the fin hardmask. A photoresist layer is disposed over the structure. An isolation region is patterned across the fins to form first and second parallel fin arrays, wherein any remaining photoresist layer has self-aligned edges which are self-aligned with the isolation region. The self-aligned edges are trimmed to expose end portions of the fin hardmask. The exposed end portions are removed. The remaining photoresist layer is removed. A second dielectric fill material is disposed and planarized over the structure to form a base for a single diffusion break (SDB) in the isolation region.

Abstract: A method of forming a single diffusion break includes patterning a fin hardmask disposed over a substrate. First and second fin arrays separated by an isolation region are etched into the substrate from the patterned fin hardmask. Any remaining fin hardmask being self-aligned with the fins. A first dielectric fill material is disposed and planarized over the arrays to expose top surfaces of the remaining fin hardmask. A second dielectric strip is formed over the first dielectric fill material to cover the isolation region and end portions of the remaining fin hardmask. Any exposed portions of the remaining fin hardmask are anisotropically etched away. The end portions of the remaining fin hardmask form base extensions of a base for a single diffusion break (SDB) in the isolation region. The first dielectric fill material and second dielectric strip are etched to complete formation of the base for the single diffusion break.

Abstract: A non-planar semiconductor structure includes a semiconductor substrate, multiple raised semiconductor structures coupled to the substrate, a drain well in each of the raised structures, and a drain in each drain well. The structure further includes an isolation region in each drain well adjacent the drain, each isolation region reaching to a top surface of the corresponding raised structure, and a conductive center gate on each raised structure, the conductive center gate covering a top surface, a front surface and a back surface thereof, and covering a portion of the isolation region opposite the drain. The isolation regions in the drain wells reaching to the raised structure top surface is a result of preserving the isolation region by covering it during fabrication with an HDP oxide to prevent partial removal.

Abstract: An isolation region is formed in a semiconductor substrate to laterally define and electrically isolate a device region and first and second laterally adjacent well regions are formed in the device region. A gate structure is formed above the device region such that the first well region extends below an entirety of the gate structure and a well region interface formed between the first and second well regions is laterally offset from a drain-side edge of the gate structure. Source and drain regions are formed in the device region such that the source region extends laterally from a source-side edge of the gate structure and across a first portion of the first well region to a first inner edge of the isolation region and the drain region extends laterally from the drain-side edge and across a second portion of the first well region.

Abstract: A non-planar Schottky diode includes a semiconductor substrate of a first type, the first type including one of n-type and p-type. The structure further includes raised semiconductor structure(s) of a second type opposite the first type coupled to the substrate, isolation material surrounding a lower portion of the raised structure(s), a first well of the second type directly under the raised structure(s), a guard ring of the first type around an edge of a top portion of the first well, a conformal layer of silicide over a top portion of the raised structure(s) above the isolation material, and a common contact above the conformal layer of silicide. The non-planar Schottky diode can be fabricated with non-planar transistors, e.g., FinFETs.

Abstract: A non-planar Schottky diode includes a semiconductor substrate of a first type, the first type including one of n-type and p-type. The structure further includes raised semiconductor structure(s) of a second type opposite the first type coupled to the substrate, isolation material surrounding a lower portion of the raised structure(s), a first well of the second type directly under the raised structure(s), a guard ring of the first type around an edge of a top portion of the first well, a conformal layer of silicide over a top portion of the raised structure(s) above the isolation material, and a common contact above the conformal layer of silicide. The non-planar Schottky diode can be fabricated with non-planar transistors, e.g., FinFETs.

Abstract: A non-planar lateral drift MOS device eliminates the need for a field plate extension, which reduces gate width. In one example, two sources and two comparatively small gates in a raised structure allow for two channels and a dual current with mirrored flows, each traveling into and downward through a center region of a connecting well that connects the substrate with the drain areas and shallow wells containing the source areas, the current then traveling in opposite directions within the substrate region of the connecting well toward the two drains. The source and drain areas may be separate raised structures or isolated areas of a continuous raised structure.

Abstract: An isolation region is formed in a semiconductor substrate to laterally define and electrically isolate a device region and first and second laterally adjacent well regions are formed in the device region. A gate structure is formed above the device region such that the first well region extends below an entirety of the gate structure and a well region interface formed between the first and second well regions is laterally offset from a drain-side edge of the gate structure. Source and drain regions are formed in the device region such that the source region extends laterally from a source-side edge of the gate structure and across a first portion of the first well region to a first inner edge of the isolation region and the drain region extends laterally from the drain-side edge and across a second portion of the first well region.

Abstract: Embodiments of the present invention provide an improved decoupling capacitor structure. A contact region is disposed over a source/drain region of the decoupling capacitor structure. Each contact region is formed as a plurality of segments, wherein an inter-segment gap separates a segment of the plurality of segments from an adjacent segment of the plurality of segments. Embodiments may include multiple contact regions between two gate regions. Arrays of decoupling capacitors may arranged as an alternating “checkerboard” pattern of P-well and N-well structures, and may be oriented at a diagonal angle to a metallization layer to facilitate connections of multiple decoupling capacitors within the array.

Abstract: One illustrative device includes a source region and a drain region formed in a substrate, wherein the source/drain regions are doped with a first type of dopant material, a gate structure positioned above the substrate that is laterally positioned between the source region and the drain region and a drain-side well region positioned in the substrate under a portion, but not all, of the entire lateral width of the drain region, wherein the drain-side well region is also doped with the first type of dopant material. The device also includes a source-side well region positioned in the substrate under an entire width of the source region and under a portion, but not all, of the drain region and a part of the extension portion of the drain region is positioned under a portion of the gate structure.

Abstract: One illustrative device disclosed herein includes a plurality of source/drain regions positioned in an active region on opposite sides of a gate structure, each of the source/drain regions having a lateral width in a gate length direction of the transistor and a plurality of halo regions, wherein each of the halo regions is positioned under a portion, but not all, of the lateral width of one of the plurality of source/drain regions. A method disclosed herein includes forming a plurality of halo implant regions in an active region, wherein an outer edge of each of the halo implant regions is laterally spaced apart from an adjacent inner edge of an isolation region.

Abstract: One method disclosed herein includes performing at least one common process operation to form a plurality of first gate structures for each of a plurality of field effect transistors and a plurality of second gate structures above a region where a bipolar transistor will be formed and performing an ion implantation process and a heating process to form a continuous doped emitter region that extends under all of the second gate structures. A device disclosed herein includes a first plurality of field effect transistors with first gate structures, a bipolar transistor that has an emitter region and a plurality of second gate structures positioned above the emitter region, wherein the bipolar transistor comprises a continuous doped emitter region that extends laterally under all of the plurality of second gate structures.