Abstract: A method of manufacturing a mask includes dividing an upper surface of a template having a design pattern into a plurality of regions, the template being arranged over a polymer layer on a mask substrate, correcting a distorted region among the regions, pressing the polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and curing the mask pattern.

Abstract: Disclosed is a communication terminal for constructing a daisy chain communication network without distinction between an input connector and an output connector.

Abstract: Disclosed is a battery management unit. The battery management unit according to the present disclosure can prevent performance of an erroneous control algorithm by executing an infinite loop when an error occurs on a communication line.

Abstract: A method of manufacturing a semiconductor device includes irradiating a first photoresist layer via a light source, measuring a first exposure intensity of the first photoresist layer, irradiating a second photoresist layer via the light source, measuring a second exposure intensity of the second photoresist layer, subtracting the second exposure intensity from the first exposure intensity, and subsequent to the subtracting, exposing a third photoresist layer formed on a semiconductor substrate by using the light source, wherein an out-of-band (OoB) extreme ultraviolet (EUV) light eliminating layer is formed on the second photoresist layer.

Abstract: An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit.

Abstract: Provided is an apparatus for generating extreme ultraviolet light. The apparatus includes a collector mirror unit, a gas supply unit configured to supply a processing gas to the collector mirror unit, a gas supply nozzle arranged in at least one area of the collector mirror unit and configured to supply the processing gas to a surface of the collector mirror unit, and a controller configured to adjust a shape of a spray hole of the gas supply nozzle. The shape of the spray hole may be changed according to a control operation of the controller.

Abstract: Disclosed is a battery management unit for setting a communication identifier through the frequency of a start signal. The battery management unit according to the present invention analyzes the frequency of a received start signal. If the frequency of the start signal is a fundamental frequency, the battery management unit sets itself as a master unit. If the frequency of the start signal is not the fundamental frequency, the battery management unit sets itself as a slave unit. In addition, when outputting a start signal to another neighboring battery management unit, the battery management unit according to the present invention outputs the start signal by modulating the frequency of the start signal into a frequency produced by adding an additional frequency value to the frequency as received in the battery management unit.

Abstract: An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit.

Abstract: A method of manufacturing a semiconductor device includes irradiating a first photoresist layer via a light source, measuring a first exposure intensity of the first photoresist layer, irradiating a second photoresist layer via the light source, measuring a second exposure intensity of the second photoresist layer, subtracting the second exposure intensity from the first exposure intensity, and subsequent to the subtracting, exposing a third photoresist layer formed on a semiconductor substrate by using the light source, wherein an out-of-band (OoB) extreme ultraviolet (EUV) light eliminating layer is formed on the second photoresist layer.

Abstract: Provided is an apparatus for generating extreme ultraviolet light. The apparatus includes a collector mirror unit, a gas supply unit configured to supply a processing gas to the collector mirror unit, a gas supply nozzle arranged in at least one area of the collector mirror unit and configured to supply the processing gas to a surface of the collector mirror unit, and a controller configured to adjust a shape of a spray hole of the gas supply nozzle. The shape of the spray hole may be changed according to a control operation of the controller.

Abstract: A method of manufacturing a mask includes dividing an upper surface of a template having a design pattern into a plurality of regions, the template being arranged over a polymer layer on a mask substrate, correcting a distorted region among the regions, pressing the polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and curing the mask pattern.

Abstract: Disclosed is a battery management unit. The battery management unit according to the present disclosure can prevent performance of an erroneous control algorithm by executing an infinite loop when an error occurs on a communication line.

Abstract: A method of manufacturing a mask includes dividing an upper surface of a template having a design pattern into a plurality of regions, the template being arranged over a polymer layer on a mask substrate, correcting a distorted region among the regions, pressing the polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and curing the mask pattern.

Abstract: Disclosed is a battery pack system to supply current necessary to operate an external device, including a battery module including battery cells which can be charged and discharged, a temperature sensor, an auxiliary power unit to supply a charge and discharge pulse current to the battery module, and a controller to connect the auxiliary power unit to the battery module so that the charge and discharge pulse current is supplied to the battery module when a measured temperature (Tbat) of the battery module is less than a set temperature (Tcrit) based on information detected by the temperature sensor before the battery module is electrically connected to the external device and to interrupt the supply of the charge and discharge pulse current to the battery module when the temperature of the battery module becomes equal to or greater than the set temperature (Tcrit) and an operating method of the same.

Abstract: Disclosed is a communication terminal for constructing a daisy chain communication network without distinction between an input connector and an output connector.

Abstract: Disclosed is an apparatus for waking up a multi-BMS of a battery pack. The apparatus for waking up a multi-BMS of a battery pack according to the present disclosure transmits a wakeup signal outputted from a master BMS to N slave BMSs to wake up the N slave BMSs managing each battery module in the battery pack, and an isolator is connected on a series line used to the wakeup signal, and turns on by the wakeup signal outputted from the master BMS and enables N?1 transistors each connected on the series line to turn on. According to the present disclosure, the signal for waking up the plurality of slave BMSs may be transmitted by using a small number of isolators. Therefore, the BMS or the battery pack may reduce in costs.

Abstract: Disclosed are a terminating resistance generation device for differential input mode communication and a differential input mode communication device. The terminating resistance generation device for differential input mode communication according to the present invention includes: a first circuit unit including a first ground terminal and operating only when the first ground terminal is connected to a ground; a second circuit unit including a second ground terminal and operating only when the second ground terminal is connected to the ground; and a terminating resistance generating unit generating terminating resistance when one of the first ground terminal and the second ground terminal is not connected, and as a result, only one of the first circuit unit and the second circuit unit operates.

Abstract: A method of measuring an overlay of an object is provided. In the method, first information of a first structure may be obtained. A preliminary structure may be formed on the first structure. Second information of the preliminary structure may be obtained. The first information and the second information may be processed to obtain virtual information of a second structure that would be formed on the first structure if a process is performed on the preliminary structure. A virtual overlay between the first structure and the second structure may be measured using the virtual information.

Abstract: A method of fabricating a nanoimprint lithography template includes installing a reticle on a reticle stage of scanning lithography equipment having a light source, the reticle stage and a template stage, mounting a template substrate on the template stage, and scanning the template substrate with light from the light source in an exposure process in which the light passes through the reticle and impinges the template substrate at an oblique angle of incidence.

Abstract: Disclosed are a terminating resistance generation device for differential input mode communication and a differential input mode communication device. The terminating resistance generation device for differential input mode communication according to the present invention includes: a first circuit unit including a first ground terminal and operating only when the first ground terminal is connected to a ground; a second circuit unit including a second ground terminal and operating only when the second ground terminal is connected to the ground; and a terminating resistance generating unit generating terminating resistance when one of the first ground terminal and the second ground terminal is not connected, and as a result, only one of the first circuit unit and the second circuit unit operates.