Abstract: Memory device and formation method are provided. The memory device includes a substrate; a staircase structure on the substrate; a string driver structure over the staircase structure on a side opposite to the substrate; and a metal routing structure, between the string driver structure and the staircase structure along a vertical direction with respect to a lateral surface of the substrate. The staircase structure includes a plurality of word line tiers. The string driver structure includes a plurality of transistors to individually address the plurality of word line tiers. The string driver structure and the metal routing structure are vertically aligned with the staircase structure based on a lateral central region of the staircase structure.

Abstract: A semiconductor device includes a first substrate having a first side for forming memory cells and an opposing second side, a doped region formed in the first side of the first substrate, a first connection structure formed over the second side of the first substrate and coupled to the doped region through a first VIA, and a transistor formed in a first side of a second substrate and coupled to the first connection structure. The first VIA extends from the second side of the first substrate to the doped region. The memory cells include a plurality of word lines formed over the first side of the first substrate, a plurality of insulating layers disposed between the plurality of word lines, and a common source structure coupled to and extending from the doped region, and further extending through the plurality of word lines and the plurality of the insulating layers.

Abstract: A 3D-NAND memory includes a transistor formed in a first side of a periphery circuit substrate, a memory cell stack formed over a first side of a cell array substrate, and a first connection structure formed over an opposing second side of the cell array substrate. The memory cell stack includes a doped region formed in the first side of the cell array substrate and coupled to the first connection structure through a first VIA, a common source structure that extends from the doped region toward the first side of the periphery circuit substrate, and a second connection structure that is positioned over and coupled to the common source structure. The first side of the cell array substrate and the first side of the periphery circuit substrate are aligned facing each other so that the transistor is coupled to the second connection structure.

Abstract: A memory device includes a memory array, a circuit structure, a bonding structure between the memory array and the circuit structure, and a shielding structure between the memory array and the circuit structure and surrounding the bonding structure. The bonding structure includes a first bonding pattern and a second bonding pattern. The circuit structure is electrically connected with the memory array through the bonding structure. The shielding structure includes a third bonding pattern and a fourth bonding pattern. The first bonding pattern is in contact with the second bonding pattern at a first interface between the first bonding pattern and the second bonding pattern. The third bonding pattern is in contact with the fourth bonding pattern at a second interface between the third bonding pattern and the fourth bonding pattern.

Abstract: A semiconductor device is provided. The semiconductor device includes a first substrate that has a first side for forming memory cells and a second side that is opposite to the first side. The semiconductor device also includes a doped region and a first connection structure. The doped region is formed in the first side of the first substrate and is electrically coupled to at least a source terminal of a transistor (e.g., a source terminal of an end transistor of multiple transistors that are connected in series). The first connection structure is formed over the second side of the first substrate and coupled to the doped region through a first VIA. The first VIA extends from the second side of the first substrate to the doped region.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate having a first side and a second side opposite to the first side. The 3D memory device also includes a memory stack including interleaved conductive layers and dielectric layers at the first side of the substrate. The 3D memory device also includes a plurality of channel structures each extending vertically through the memory stack. The 3D memory device also includes a first insulating structure extending vertically through the memory stack and extending laterally to separate the plurality of channel structures into a plurality of blocks. The 3D memory device further includes a first doped region in the substrate and in contact with the first insulating structure. The 3D memory device further includes a first contact extending vertically from the second side of the substrate to be in contact with the first doped region.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate having a first side and a second side opposite to the first side. The 3D memory device also includes a memory stack including interleaved conductive layers and dielectric layers at the first side of the substrate. The 3D memory device also includes a plurality of channel structures each extending vertically through the memory stack. The 3D memory device also includes a slit structure extending vertically through the memory stack and extending laterally to separate the plurality of channel structures into a plurality of blocks. The 3D memory device further includes a first doped region in the substrate and in contact with the slit structure. The 3D memory device further includes an insulating structure extending vertically from the second side of the substrate to the first doped region.

Abstract: A non-volatile memory device includes a first substrate, a second substrate, a memory array, a circuit structure, a bonding structure, and a shielding structure. A second front side of the second substrate faces a first front side of the first substrate. The memory array is disposed on the first substrate and disposed at the first front side of the first substrate. The circuit structure is disposed on the second substrate and disposed at the second front side of the second substrate. The bonding structure is disposed between the memory array and the circuit structure. The circuit structure is electrically connected with the memory array through the bonding structure. The shielding structure is disposed between the memory array and the circuit structure and surrounds the bonding structure. The shielding structure is electrically connected to a voltage source.

Abstract: A non-volatile memory device includes a plurality of memory blocks and a dummy block configured to form a pool capacitor for suppressing power noise. The dummy block includes a substrate, a conductor region in the substrate, and an alternating dummy layer stack on the conductor region. The alternating dummy layer stack includes multiple conductive layers and multiple dielectric layers alternately laminated on one another.

Abstract: A non-volatile memory device includes a plurality of memory blocks grouped into pages, page buffer regions corresponding to the pages of the plurality of memory blocks; and a peripheral circuit region for supporting operations of the pages of the plurality of memory blocks. The peripheral circuit region comprises a plurality of pool capacitors. At least one of the memory blocks is a dummy block. The dummy block is configured to form a supplementary pool capacitor for suppressing power noise.

Abstract: A non-volatile memory device includes a plurality of memory blocks grouped into pages, page buffer regions corresponding to the pages of the plurality of memory blocks; and a peripheral circuit region for supporting operations of the pages of the plurality of memory blocks. The peripheral circuit region comprises a plurality of pool capacitors. At least one of the memory blocks is a dummy block. The dummy block is configured to form a supplementary pool capacitor for suppressing power noise.

Abstract: A non-volatile memory device includes a first substrate, a second substrate, a memory array, a circuit structure, a bonding structure, and a shielding structure. A second front side of the second substrate faces a first front side of the first substrate. The memory array is disposed on the first substrate and disposed at the first front side of the first substrate. The circuit structure is disposed on the second substrate and disposed at the second front side of the second substrate. The bonding structure is disposed between the memory array and the circuit structure. The circuit structure is electrically connected with the memory array through the bonding structure. The shielding structure is disposed between the memory array and the circuit structure and surrounds the bonding structure. The shielding structure is electrically connected to a voltage source.

Abstract: A semiconductor device is provided. The semiconductor device includes a first substrate that has a first side for forming memory cells and a second side that is opposite to the first side. The semiconductor device also includes a doped region and a first connection structure. The doped region is formed in the first side of the first substrate and is electrically coupled to at least a source terminal of a transistor (e.g., a source terminal of an end transistor of multiple transistors that are connected in series). The first connection structure is formed over the second side of the first substrate and coupled to the doped region through a first VIA. The first VIA extends from the second side of the first substrate to the doped region.

Abstract: A nonvolatile memory device includes: a plurality of word lines that are stacked; a vertical channel region suitable for forming a cell string along with the word lines; and a voltage supplier suitable for supplying a plurality of biases required for a program operation on the word lines, where a negative bias is applied to neighboring word lines disposed adjacent to a selected word line at an end of a pulsing section of a program voltage which is applied to the selected word line.

Abstract: A nonvolatile memory device includes: a plurality of word lines that are stacked; a vertical channel region suitable for forming a cell string along with the word lines; and a voltage supplier suitable for supplying a plurality of biases required for a program operation on the word lines, where a negative bias is applied to neighboring word lines disposed adjacent to a selected word line at an end of a pulsing section of a program voltage which is applied to the selected word line.

Abstract: A nonvolatile memory device includes: a plurality of word lines that are stacked; a vertical channel region suitable for forming a cell string along with the word lines; and a voltage supplier suitable for supplying a plurality of biases required for a program operation on the word lines, where a negative bias is applied to neighboring word lines disposed adjacent to a selected word line at an end of a pulsing section of a program voltage which is applied to the selected word line.

Abstract: A nonvolatile memory device includes: a plurality of word lines that are stacked; a pillar structure that penetrates through the word lines in a vertical direction; and a voltage supplier suitable for supplying a plurality of biases that are required according to an operation mode, to the word lines and the pillar structure. The pillar structure includes: a vertical channel region disposed in a core; and a laser diode structure disposed between the word lines and the vertical channel region to surround a periphery of the vertical channel region.

Abstract: A nonvolatile memory device includes: a plurality of word lines that are stacked; a pillar structure that penetrates through the word lines in a vertical direction; and a voltage supplier suitable for supplying a plurality of biases that are required according to an operation mode, to the word lines and the pillar structure. The pillar structure includes: a vertical channel region disposed in a core; and a laser diode structure disposed between the word lines and the vertical channel region to surround a periphery of the vertical channel region.

Abstract: A nonvolatile memory device includes: a plurality of word lines that are stacked; a vertical channel region suitable for forming a cell string along with the word lines; and a voltage supplier suitable for supplying a plurality of biases required for a program operation on the word lines, where a negative bias is applied to neighboring word lines disposed adjacent to a selected word line at an end of a pulsing section of a program voltage which is applied to the selected word line.

Abstract: Nonvolatile memory devices are provided and methods of manufacturing such devices. In the method, conductive layers and insulating layers are alternatingly stacked on a substrate. A first sub-active bar is formed which penetrates a first subset of the conductive layers and a first subset of the insulating layers. The first sub-active bar is electrically connected with the substrate. A second sub-active bar is formed which penetrates a second subset of the conductive layers and a second subset of the insulating layers. The second sub-active bar is electrically connected to the first sub-active bar. A width of a bottom portion of the second sub-active bar is less than a width of a top portion of the second sub-active bar.