Abstract: A substrate treating apparatus includes a process chamber configured to perform plasma treatment, a substrate support in a lower portion of the process chamber and configured to support a substrate, a showerhead in an upper portion of the process chamber and configured to supply a process gas for the plasma treatment toward the substrate, and a baffle surrounding the substrate support. The substrate support functions as a first electrode for generating plasma, the showerhead and the baffle function as a second electrode for generating the plasma, the baffle has a variable height, and an area of the second electrode varies as a height of the baffle varies.

Abstract: According to one embodiment of the present invention, a method of decoding, by a user equipment, a downlink signal in a wireless communication system comprises the steps of: receiving a semi-persistent zero power-channel state information reference signal (SP ZP CSI-RS) resource configuration from a base station; and decoding a downlink signal according to the SP ZP CSI-RS resource configuration. The SP ZP CSI-RS resource configuration includes a plurality of SP ZP CSI-RS resources and information on whether or not each of a plurality of the SP ZP CSI-RS resources is used can be indicated or configured by the base station.

Abstract: The present invention relates to a method for transmitting and receiving channel state information in a wireless communication system. A method for transmitting channel state information (CSI) by a terminal via a plurality of physical uplink control channels (PUCCHs) in a wireless communication system may comprise the steps of: receiving, from a base station, configuration information related to a CSI report; transmitting first CSI information to the base station via a first PUCCH resource; and transmitting second CSI information to the base station via a second PUCCH resource.

Abstract: Disclosed are a method and apparatus for transmitting and receiving channel state information in a wireless communication system. The method for transmitting channel state information (CSI) according to an embodiment of the present disclosure, may comprise the steps of: receiving, from a base station, configuration information related to the CSI, wherein the configuration information includes information about a CSI-RS resource set; receiving a CSI-reference signal (CSI-RS) from the base station; and transmitting the CSI, to the base station, on the basis of the configuration information and the CSI-RS. The CSI-RS resource set may include M CSI-RS resource groups (M is a natural number), and the CSI may include N first CSI sets generated on the basis of a single CSI-RS resource in N mutually different CSI-RS resource groups (N?M, N is a natural number) from among the M CSI-RS resource groups.

Abstract: Disclosed are a method whereby user equipment receives a data signal in a wireless communication system, and devices which support same. According to one embodiment applicable to the present disclosure, on the basis of (i) configuration information related to dynamic bundling for a precoding resource block (PRB) and (ii) control information for scheduling a first physical downlink shared channel (PDSCH), both pieces of information being received from a base station, user equipment can receive a data signal via the first PDSCH on the basis of an assumption related to the first PDSCH.

Abstract: Disclosed are a method and device for transmitting/receiving sounding reference signals in a wireless communication system. A method for transmitting sounding reference signals (SRS) according to one embodiment of the present disclosure may comprise the steps of: receiving, from a base station, setting information related to slot setting; receiving, from the base station, downlink control information (DCI) for triggering transmission of an SRS for an SRS resource set; and transmitting the SRS to the base station in the SRS resource set. One or more SRS transmission symbols for transmission of the SRS are determined, and in the one or more SRS transmission symbols, downlink scheduling may not be performed in one or more symbols that have been set as flexible symbols by the setting information.

Abstract: The present disclosure provides a method for transmitting and receiving a downlink signal between a terminal and a base station in a wireless communication system and an apparatus for supporting same. According to an embodiment applicable to the present disclosure, when the terminal recognizes that a first physical downlink shared channel (PDSCH) and a second PDSCH are overlapped, the terminal may receive a downlink signal including the first PDSCH, under the assumption that a phase tracking reference signal (PT-RS) for the second PDSCH and the first PDSCH are overlapped.

Abstract: Disclosed herein are a method and a device for transmitting and receiving uplink data in a wireless communication system. According to the present disclosure, a UE may transmit to a base station information related to a capability of the UE and the information may include a subset including at least one transmit precoding matrix indicator (TPMI) supported by the UE. The UE may receive Downlink Control Information (DCI) for transmitting the uplink data from the base station and the DCI may include a TPMI used for the UE to transmit the uplink data. Thereafter, the UE may transmit to the base station the uplink data by using transmission power determined based on the TPMI and the transmission power may be determined according to whether the TPMI is included in the at least one TPMI.

Abstract: The present specification relates to a method for transmitting and receiving data by a base station in a wireless communication system. More specifically, a terminal receives configuration information for configuration of a control resource set (CORESET) from the base station. Thereafter, the terminal receives first downlink control information (DCI) and second DCI for generation of ACK/NACK by using a semi-static method on the basis of the configuration information. The terminal receives a first physical downlink shared channel (PDSCH) and a second PDSCH, and transmits first Ack/Nack for the first PDSCH and Ack/Nack for the second PDSCH, on a resource scheduled by the first DCI.

Abstract: Disclosed are a method for transmitting and receiving a phase tracking reference signal (PTRS) in a wireless communication system, and an apparatus therefor. Specifically, a method for receiving the PTRS by a user equipment (UE) in a wireless communication system comprises receiving PTRS related configuration information; receiving downlink control information (DCI), wherein a code point corresponding to one or more transmission configuration indication (TCI) states is indicated on the basis of an antenna port field of the DCI; and receiving the PTRS through an antenna port corresponding to a specific DMRS port among the DMRS ports, wherein a number of antenna ports for receiving the PTRS may be determined on the basis of at least one of the maximum values of the number of TCI states corresponding to the code point, the number of CDM groups containing the DMRS port, or the number of antenna ports for receiving the PTRS.

Abstract: A display device according to an embodiment includes a display, a first power module that outputs a first power, and a second power module that outputs a second power. The first power and the second power are supplied to the display. The first power module is configured to cut off the first power when an amount of input current exceeds an overload criterion, to identify whether the second power module is abnormal based on the second power, and to change the overload criterion from a first threshold current amount to a second threshold current amount that exceeds the first threshold current amount, in an abnormal state of the second power module.

Abstract: A semiconductor device may include a first semiconductor structure including a lower substrate; and a second semiconductor structure on and bonded to the first semiconductor structure through a bonding structure. The second semiconductor structure may include: a pattern structure; an upper insulating layer on the pattern structure; a stack structure including gate electrode layers and interlayer insulating layers alternately stacked between the first semiconductor structure and the pattern structure; channel structures that extend through the stack structure; separation structures that extend through the stack structure and separate the stack structure.

Abstract: A carbon-sulfur composite including a carbonized metal-organic framework (MOF); and a sulfur compound introduced to at least a part of an outside surface and an inside of the carbonized metal-organic framework, wherein the carbonized metal-organic framework has a specific surface area of 2500 m2/g to 4000 m2/g, and the carbonized metal-organic framework has a pore volume of 0.1 cc/g to 10 cc/g, and a method for preparing the same.

Abstract: Disclosed is a semiconductor device comprising a peripheral circuit structure on a first substrate, a cell array structure on the peripheral circuit structure, and a backside structure on the cell array structure. The cell array structure includes a stack structure including gate electrodes and interlayer dielectric layers that are alternately stacked, through plugs that extend in a first direction through the stack structure and each including a first surface adjacent to the backside structure and a second surface opposite to the first surface, a middle circuit structure between the stack structure and the peripheral circuit structure and connected to the peripheral circuit structure, and a connection plug connected to the middle circuit structure and the backside structure. The through plugs include a first through plug connected through the first surface to the backside structure, and a second through plug connected through the second surface to the middle circuit structure.

Abstract: An electroluminescent layer according to the present invention comprises a core-shell particle comprising a perovskite crystal core and a shell of a dielectric polymer, wherein a charge transfer pathway to the perovskite crystal core is formed by dielectric breakdown of the dielectric polymer. The electroluminescent layer according to the present invention can prevent the deterioration of perovskite crystals due to external moisture, oxygen, or the like since the perovskite crystal core is enclosed and protected by the dielectric polymer and can have improved charge transfer and injection efficiencies since charges are directly transferred and injected to the perovskite crystals through the charge transfer pathway formed by dielectric breakdown of the dielectric polymer.

Abstract: An integrated circuit device includes a semiconductor substrate, and a common source structure on the substrate. A vertical stack of memory cell gate electrodes is provided, which extends between the common source structure and the substrate. The vertical stack of memory cell gate electrodes includes a first erase control gate electrode, and a plurality of word lines extending between the first erase control gate electrode and the substrate. At least one channel structure is provided, which vertically penetrates through the vertical stack of memory cell gate electrodes. A source protrusion pattern is provided, which is electrically connected to the common source structure. The source protrusion pattern extends sufficiently through the vertical stack of memory cell gate electrodes that a portion of the source protrusion pattern extends opposite a sidewall of the first erase control gate electrode.

Abstract: A display device comprises a substrate including a display area having subpixels and a non-display area excluding the display area, an encapsulation layer that covers the subpixels, a first touch electrode line including a plurality of first touch sensing electrodes in a first direction on the encapsulation layer and spaced apart from each other in the first direction, a second touch electrode line in a same plane as the first touch electrode line and disposed in a second direction, a plurality of pads on one side of the substrate, a first touch routing wiring that connects some of the first touch electrode line and some pads among the plurality of pads and disposed between the plurality of first touch sensing electrodes in the second direction, and a second touch routing wiring that connects the second touch electrode line to some other pads among the plurality of pads.

Abstract: A three-dimensional semiconductor memory device includes a first substrate, a peripheral circuit structure on the first substrate, and a cell array structure on the peripheral circuit structure. The cell array structure includes a stacked structure including gate electrodes extending in a first direction, a source structure on the stacked structure, and a second substrate in contact with the source structure. The source structure includes a first source conductive pattern between the second substrate and the stacked structure and a second source conductive pattern on the first source conductive pattern. The second source conductive pattern includes a first source part between the first source conductive pattern and the second substrate, a source connection part passing through the second substrate and extending in the first direction, and a second source part on the second substrate and connected to the first source part through the source connection part.

Abstract: Systems and methods for document generation are provided. One aspect of the systems and methods includes identifying, by a style extractor, a document fragment comprising a first style element of a first style category; computing, by a style generator, a reward function based on a correlation value between the first style element and a second style element of a second style category different from the first style category, wherein the correlation value is based on correlations between style elements in a plurality of historical document fragments; selecting, by the style generator, the second style element based on the reward function; and generating, by a document generator, a modified document fragment that includes the first style element of the first style category and the second style element of the second style category.

Abstract: An electronic apparatus includes: a memory storing at least one instruction; and at least one processor configured to divide audio data into a plurality of periods to include overlapping regions, acquire an audio feature from each of the plurality of divided periods, identify a first audio source and a second audio source in each of the plurality of divided periods based on the audio feature, and acquire first audio data corresponding to the first audio source and second audio data corresponding to the second audio source from the audio data.