Patents by Inventor Joerg Appenzeller

Joerg Appenzeller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110263101
    Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.
    Type: Application
    Filed: June 28, 2011
    Publication date: October 27, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
  • Patent number: 8017934
    Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.
    Type: Grant
    Filed: August 4, 2010
    Date of Patent: September 13, 2011
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
  • Publication number: 20110201163
    Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.
    Type: Application
    Filed: March 7, 2011
    Publication date: August 18, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
  • Publication number: 20110156133
    Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.
    Type: Application
    Filed: March 7, 2011
    Publication date: June 30, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
  • Patent number: 7955931
    Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.
    Type: Grant
    Filed: March 19, 2010
    Date of Patent: June 7, 2011
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
  • Patent number: 7948050
    Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.
    Type: Grant
    Filed: January 11, 2007
    Date of Patent: May 24, 2011
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
  • Patent number: 7897960
    Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.
    Type: Grant
    Filed: August 20, 2009
    Date of Patent: March 1, 2011
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
  • Patent number: 7851783
    Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: December 14, 2010
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
  • Publication number: 20100295025
    Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.
    Type: Application
    Filed: August 4, 2010
    Publication date: November 25, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
  • Patent number: 7786466
    Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.
    Type: Grant
    Filed: January 11, 2008
    Date of Patent: August 31, 2010
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
  • Publication number: 20100173462
    Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.
    Type: Application
    Filed: March 19, 2010
    Publication date: July 8, 2010
    Applicant: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
  • Publication number: 20100001260
    Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.
    Type: Application
    Filed: August 20, 2009
    Publication date: January 7, 2010
    Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
  • Patent number: 7635856
    Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.
    Type: Grant
    Filed: August 7, 2007
    Date of Patent: December 22, 2009
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
  • Publication number: 20090179193
    Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.
    Type: Application
    Filed: January 11, 2008
    Publication date: July 16, 2009
    Inventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
  • Publication number: 20090032803
    Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.
    Type: Application
    Filed: June 30, 2008
    Publication date: February 5, 2009
    Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
  • Patent number: 7482232
    Abstract: The method includes forming a 1-10000 nm thick SiO2, HfO2, Al2O3 and/or quartz gate dielectric on an Si back gate. An Al or Mo gate electrode is formed on the gate dielectric. An Al2O3 insulating layer is formed over the gate electrode. A C, Si, GaAs, InP, and/or InGaAs nanotube is formed on the insulating layer and gate dielectric. The nanotube has a central region on the insulating layer above the gate electrode and first and second ends on the gate dielectric. A source is formed on the first end and spaced from the central region and gate electrode by a first peripheral region. A drain is formed on the second end and spaced from the central region and gate electrode by a second peripheral region. The first and second peripheral regions are doped with Cl2, Br2, K, Na, or a molecule of polyethylenimine using wet deposition or evaporation.
    Type: Grant
    Filed: October 26, 2006
    Date of Patent: January 27, 2009
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
  • Publication number: 20080169503
    Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.
    Type: Application
    Filed: January 11, 2007
    Publication date: July 17, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
  • Publication number: 20080017899
    Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.
    Type: Application
    Filed: August 7, 2007
    Publication date: January 24, 2008
    Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin Chan, Philip Collins, Richard Martel, Hon-Sum Wong
  • Patent number: 7253065
    Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.
    Type: Grant
    Filed: October 1, 2004
    Date of Patent: August 7, 2007
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
  • Publication number: 20070048908
    Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.
    Type: Application
    Filed: October 26, 2006
    Publication date: March 1, 2007
    Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin