Patents by Inventor Joerg Appenzeller
Joerg Appenzeller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20110263101Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.Type: ApplicationFiled: June 28, 2011Publication date: October 27, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
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Patent number: 8017934Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.Type: GrantFiled: August 4, 2010Date of Patent: September 13, 2011Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
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Publication number: 20110201163Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.Type: ApplicationFiled: March 7, 2011Publication date: August 18, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
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Publication number: 20110156133Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.Type: ApplicationFiled: March 7, 2011Publication date: June 30, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
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Patent number: 7955931Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.Type: GrantFiled: March 19, 2010Date of Patent: June 7, 2011Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
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Patent number: 7948050Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.Type: GrantFiled: January 11, 2007Date of Patent: May 24, 2011Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
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Patent number: 7897960Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.Type: GrantFiled: August 20, 2009Date of Patent: March 1, 2011Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
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Patent number: 7851783Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.Type: GrantFiled: June 30, 2008Date of Patent: December 14, 2010Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
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Publication number: 20100295025Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.Type: ApplicationFiled: August 4, 2010Publication date: November 25, 2010Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
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Patent number: 7786466Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.Type: GrantFiled: January 11, 2008Date of Patent: August 31, 2010Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
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Publication number: 20100173462Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.Type: ApplicationFiled: March 19, 2010Publication date: July 8, 2010Applicant: International Business Machines CorporationInventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
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Publication number: 20100001260Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.Type: ApplicationFiled: August 20, 2009Publication date: January 7, 2010Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
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Patent number: 7635856Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.Type: GrantFiled: August 7, 2007Date of Patent: December 22, 2009Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
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Publication number: 20090179193Abstract: Gate electrodes are formed on a semiconducting carbon nanotube, followed by deposition and patterning of a hole-inducing material layer and an electron inducing material layer on the carbon nanotube according to the pattern of a one dimensional circuit layout. Electrical isolation may be provided by cutting a portion of the carbon nanotube, forming a reverse biased junction of a hole-induced region and an electron-induced region of the carbon nanotube, or electrically biasing a region through a dielectric layer between two device regions of the carbon nanotube. The carbon nanotubes may be arranged such that hole-inducing material layer and electron-inducing material layer may be assigned to each carbon nanotube to form periodic structures such as a static random access memory (SRAM) array.Type: ApplicationFiled: January 11, 2008Publication date: July 16, 2009Inventors: Joerg Appenzeller, AJ Kleinosowski, Edward J. Nowak, Richard Q. Williams
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Publication number: 20090032803Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.Type: ApplicationFiled: June 30, 2008Publication date: February 5, 2009Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
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Patent number: 7482232Abstract: The method includes forming a 1-10000 nm thick SiO2, HfO2, Al2O3 and/or quartz gate dielectric on an Si back gate. An Al or Mo gate electrode is formed on the gate dielectric. An Al2O3 insulating layer is formed over the gate electrode. A C, Si, GaAs, InP, and/or InGaAs nanotube is formed on the insulating layer and gate dielectric. The nanotube has a central region on the insulating layer above the gate electrode and first and second ends on the gate dielectric. A source is formed on the first end and spaced from the central region and gate electrode by a first peripheral region. A drain is formed on the second end and spaced from the central region and gate electrode by a second peripheral region. The first and second peripheral regions are doped with Cl2, Br2, K, Na, or a molecule of polyethylenimine using wet deposition or evaporation.Type: GrantFiled: October 26, 2006Date of Patent: January 27, 2009Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin
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Publication number: 20080169503Abstract: A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.Type: ApplicationFiled: January 11, 2007Publication date: July 17, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Joerg Appenzeller, Supratik Guha, Emanuel Tutuc
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Publication number: 20080017899Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.Type: ApplicationFiled: August 7, 2007Publication date: January 24, 2008Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin Chan, Philip Collins, Richard Martel, Hon-Sum Wong
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Patent number: 7253065Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.Type: GrantFiled: October 1, 2004Date of Patent: August 7, 2007Assignee: International Business Machines CorporationInventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
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Publication number: 20070048908Abstract: A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.Type: ApplicationFiled: October 26, 2006Publication date: March 1, 2007Inventors: Joerg Appenzeller, Phaedon Avouris, Yu-Ming Lin