Patents by Inventor John D. Hopkins

John D. Hopkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11716848
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region, and an intermediate region between the first and second memory regions. The intermediate region has a first edge proximate the first memory region and has a second edge proximate the second memory region. Channel-material-pillars are arranged within the first and second memory regions. Conductive posts are arranged within the intermediate region. Doped-semiconductor-material is within the intermediate region and is configured as a substantially H-shaped structure having a first leg region along the first edge, a second leg region along the second edge, and a belt region adjacent the panel. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: August 1, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Jordan D. Greenlee
  • Patent number: 11706925
    Abstract: Device, systems, and structures include a stack of vertically-alternating tiers of materials arranged in one or more decks of tiers. A channel opening, in which a channel pillar may be formed, extends through the stack. The pillar includes a “shoulder portion” extending laterally into an “undercut portion” of the channel opening, which undercut portion is defined along at least a lower tier of at least one of the decks of the stack.
    Type: Grant
    Filed: November 7, 2022
    Date of Patent: July 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Nancy M. Lomeli, Justin B. Dorhout, Damir Fazil
  • Patent number: 11706918
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises laterally-spaced memory-block regions. Channel-material strings extend through the first tiers and the second tiers. Material of the first tiers is of different composition from material of the second tiers. Conducting material is formed in one of the first tiers. The conducting material comprises a seam in and longitudinally-along opposing sides of individual of the memory-block regions in the one first tier. The seam is penetrated with a fluid that forms intermediate material in the seam longitudinally-along the opposing sides of the individual memory-block regions in the one first tier and comprises a different composition from that of the conducting material. Other embodiments, including structure independent of method, are disclosed.
    Type: Grant
    Filed: July 1, 2020
    Date of Patent: July 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John D. Hopkins
  • Patent number: 11695056
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a conductor tier comprising conductor material on a substrate. A stack is formed comprising vertically-alternating first tiers and second tiers above the conductor tier. The stack comprises laterally-spaced memory-block regions having horizontally-elongated trenches there-between. Channel-material strings extend through the first tiers and the second tiers. Material of the first tiers is of different composition from that of the second tiers. A lowest of the first tiers is thicker than the first tiers there-above. The first-tier material is isotropically etched selectively relative to the second-tier material to form void-space in the first tiers. Conducting material is deposited into the trenches and into the void-space in the first tiers. The conducting material fills the void-space in the first tiers that are above the lowest first tier.
    Type: Grant
    Filed: August 18, 2021
    Date of Patent: July 4, 2023
    Assignee: Micron Technology, Inc.
    Inventor: John D. Hopkins
  • Publication number: 20230209831
    Abstract: A microelectronic device includes a source stack, a source contact vertically adjacent to the source stack, a semiconductor material vertically adjacent to the source contact, tiers of alternating conductive materials and dielectric materials vertically adjacent to the semiconductor dielectric material, a dielectric structure within a slot structure and extending through the tiers of the microelectronic device to the source contact of the microelectronic device, oxide cap structures laterally between the semiconductor material and the dielectric structure, and pillars extending through the tiers, the semiconductor material, and the source contact and into the source stack. Related electronic systems and methods are also disclosed.
    Type: Application
    Filed: April 11, 2022
    Publication date: June 29, 2023
    Inventors: John D. Hopkins, Alyssa N. Scarbrough, Jordan D. Greenlee, Nancy M. Lomeli
  • Publication number: 20230207011
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers directly above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple with conductor material of the conductor tier. A through-array-via (TAV) region comprises TAVs that individually extend through the insulative tiers and the conductive tiers into the conductor tier. Individual of the TAVs comprises an upper portion directly above and joined with a lower portion. The individual TAVs in a vertical cross-section comprises at least one external upper jog surface. The individual TAVs comprise at least one external lower jog surface in the conductor tier in the vertical cross-section and that is below the upper jog surface. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: January 25, 2022
    Publication date: June 29, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, John D. Hopkins
  • Publication number: 20230209810
    Abstract: Bit lines having high electrical conductivity and low mutual capacitance and related apparatuses, computing systems, and methods are disclosed. An apparatus includes an electrically insulating material and bit lines including copper in the electrically insulating material. The electrically insulating material defines air gaps between the bit lines. A method of manufacturing a memory device includes forming trenches in an electrically insulating material on or in circuitry of the memory device, forming a first electrically conductive material in the trenches, removing portions of the electrically insulating material to form air gaps between the trenches, recessing the first electrically conductive material, and replacing the first electrically conductive material that was removed with a second electrically conductive material. The second electrically conductive material is more electrically conductive than the first electrically conductive material. A memory device includes the apparatus.
    Type: Application
    Filed: October 12, 2022
    Publication date: June 29, 2023
    Inventors: Alyssa N. Scarbrough, David Ross Economy, John D. Hopkins, Jordan D. Greenlee, Mithun Kumar Ramasahayam
  • Publication number: 20230207631
    Abstract: A memory array comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. A ring is around individual of the channel-material strings in at least one of a lowest of the conductive tiers or a lowest of the insulative tiers. Individual of the rings have a top that is below all of the memory cells. Other embodiments are disclosed.
    Type: Application
    Filed: March 3, 2023
    Publication date: June 29, 2023
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Nancy M. Lomeli
  • Publication number: 20230207010
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers directly above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple to conductor material of the conductor tier. A through-array-via (TAV) region comprises TAVs that individually extend through a lowest of the conductive tiers. Insulative rings are in the lowest conductive tier in the TAV region. Individual of the insulative rings encircle individual of the TAVs. The insulative rings extend through the lowest conductive tier and into the conductor tier. Outer rings are in the lowest conductive tier that individually encircle one of the individual insulative rings that encircle the individual TAVs. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: January 25, 2022
    Publication date: June 29, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, M. Jared Barclay, John D. Hopkins
  • Publication number: 20230207458
    Abstract: Bit lines having high electrical conductivity and low mutual capacitance and related apparatuses, computing systems, and methods are disclosed. An apparatus includes bit lines including copper, a low-k dielectric material between the bit lines, and air gaps between the bit lines. The low-k dielectric material mechanically supports the bit lines. A method of manufacturing a memory device includes forming a first electrically conductive material in bit line trenches of an electrically insulating material, removing portions of the electrically insulating material between the bit line trenches, conformally forming a low-k dielectric material on the first electrically conductive material and remaining portions of the electrically insulating material, and forming a subconformal dielectric material to form air gaps between the bit line trenches.
    Type: Application
    Filed: October 12, 2022
    Publication date: June 29, 2023
    Inventors: Alyssa N. Scarbrough, David Ross Economy, Jay S. Brown, John D. Hopkins, Jordan D. Greenlee, Mithun Kumar Ramasahayam, Rita J. Klein
  • Publication number: 20230197627
    Abstract: An electronic device comprising a multideck structure including a base stack of materials and one or more stacks of materials on the base stack of materials, at least one high aspect ratio feature in an array region in the base stack of materials and in the one or more stacks of materials, and overlay marks including an optical contrast material in or on only an upper portion of the base stack of materials in an overlay mark region of the electronic device is disclosed. The overlay mark region is laterally adjacent to the array region and the overlay marks are adjacent to at least one additional high aspect ratio feature in the base stack of materials. Additional electronic devices and memory devices are disclosed.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 22, 2023
    Inventors: Rohit Kothari, Harsh Narendrakumar Jain, John D. Hopkins, Xiaosong Zhang
  • Patent number: 11683932
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises laterally-spaced memory-block regions that have horizontally-elongated trenches there-between. Channel openings extend through the first tiers and the second tiers in the memory-block regions. Channel material of channel-material strings is formed in the channel openings and the channel material is formed in the horizontally-elongated trenches. The channel material is removed from the horizontally-elongated trenches and the channel material of the channel-material strings is left in the channel openings. After removing the channel material from the horizontally-elongated trenches, intervening material is formed in the horizontally-elongated trenches laterally-between and longitudinally-along immediately-laterally-adjacent of the memory-block regions. Other embodiments, including structure independent of method, are disclosed.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: June 20, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Alyssa N. Scarbrough
  • Publication number: 20230171960
    Abstract: A memory array comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Dummy pillars extend through the insulative tiers and the conductive tiers. A lowest of the conductive tiers comprises conducting material and dummy-region material that is aside and of different composition from that of the conducting material. The channel-material strings extend through the conducting material of the lowest conductive tier. The dummy pillars extend through the dummy-region material of the lowest conductive tier. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: January 12, 2023
    Publication date: June 1, 2023
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Jordan D. Greenlee, Nancy M. Lomeli, Alyssa N. Scarbrough
  • Patent number: 11659708
    Abstract: A memory array comprises a conductor tier comprising upper conductor material directly above and directly electrically coupled to lower conductor material. The upper and lower conductor materials comprise different compositions relative one another. Laterally-spaced memory blocks individually comprising a vertical stack comprise alternating insulative tiers and conductive tiers, Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers and through the upper conductor material into the lower conductor material. The channel material of the channel-material strings is directly electrically coupled to the upper and lower conductor materials of the conductor tier. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: May 23, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Nancy M. Lomeli
  • Publication number: 20230154856
    Abstract: A microelectronic device comprises a stack structure comprising insulative levels vertically interleaved with conductive levels. The conductive levels individually comprise a first conductive structure, and a second conductive structure laterally neighboring the first conductive structure, the second conductive structure exhibiting a concentration of 3-phase tungsten varying with a vertical distance from a vertically neighboring insulative level. The microelectronic device further comprises slot structures vertically extending through the stack structure and dividing the stack structure into block structures, and strings of memory cells vertically extending through the stack structure, the first conductive structures between laterally neighboring strings of memory cells, the second conductive structures between the slot structures and strings of memory cells nearest the slot structures. Related memory devices, electronic systems, and methods are also described.
    Type: Application
    Filed: January 23, 2023
    Publication date: May 18, 2023
    Inventors: Jordan D. Greenlee, John D. Hopkins, Everett A. McTeer, Yiping Wang, Rajesh Balachandran, Rita J. Klein, Yongjun J. Hu
  • Publication number: 20230157024
    Abstract: A method that is part of a method of forming an elevationally-extending string of memory cells comprises forming an intervening structure that is elevationally between upper and lower stacks that respectively comprise alternating tiers comprising different composition materials. The intervening structure is formed to comprise an elevationally-extending-dopant-diffusion barrier and laterally-central material that is laterally inward of the dopant-diffusion barrier and has dopant therein. Some of the dopant is thermally diffused from the laterally-central material into upper-stack-channel material. The dopant-diffusion barrier during the thermally diffusing is used to cause more thermal diffusion of said dopant into the upper-stack-channel material than diffusion of said dopant, if any, into lower-stack-channel material. Other embodiments, including structure independent of method, are disclosed.
    Type: Application
    Filed: January 17, 2023
    Publication date: May 18, 2023
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, David Daycock
  • Publication number: 20230148107
    Abstract: A microelectronic device comprises pillar structures extending vertically through an isolation material, conductive lines electrically coupled to the pillar structures, contact structures between the pillar structures and the conductive lines, and interconnect structures between the conductive lines and the contact structures. The conductive lines comprise one or more of titanium, ruthenium, aluminum, and molybdenum. The interconnect structures comprise a material composition that is different than one or more of a material composition of the contact structures and a material composition of the conductive lines. Related memory devices, electronic systems, and methods are also described.
    Type: Application
    Filed: December 30, 2022
    Publication date: May 11, 2023
    Inventors: John D. Hopkins, Jordan D. Greenlee, Marko Milojevic
  • Patent number: 11641737
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises laterally-spaced memory-block regions. Simultaneously, (a), (b), and (c) are formed, where (a): horizontally-elongated trenches into the stack laterally-between immediately-laterally-adjacent of the memory-block regions; (b): channel openings into the stack laterally-between the horizontally-elongated trenches; and (c): through-array-via (TAV) openings into the stack in a stair-step region. Intervening material is formed in the horizontally-elongated trenches, a channel-material string in individual of the channel openings, and conductive material in the TAV openings. Other aspects, including structure independent of method, are disclosed.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: May 2, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, John D. Hopkins
  • Publication number: 20230116988
    Abstract: Some embodiments include a method of forming a conductive structure. A metal-containing conductive material is formed over a supporting substrate. A surface of the metal-containing conductive material is exposed to at least one radical form of hydrogen and to at least one oxidant. The exposure alters at least a portion of the metal-containing conductive material to thereby form at least a portion of the conductive structure. Some embodiments include a conductive structure which has a metal-containing conductive material with a first region adjacent to a second region. The first region has a greater concentration of one or both of fluorine and boron relative to the second region.
    Type: Application
    Filed: December 16, 2022
    Publication date: April 20, 2023
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Jordan D. Greenlee, Peng Xu
  • Patent number: 11631740
    Abstract: A memory array comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. A ring is around individual of the channel-material strings in at least one of a lowest of the conductive tiers or a lowest of the insulative tiers. Individual of the rings have a top that is below all of the memory cells. Other embodiments are disclosed.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: April 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Nancy M. Lomeli