Patents by Inventor John J. Ellis-Monaghan

John J. Ellis-Monaghan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11949034
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodetector and methods of manufacture. The structure includes: a photodetector; and a semiconductor material on the photodetector, the semiconductor material comprising a first dopant type, a second dopant type and intrinsic semiconductor material separating the first dopant type from the second dopant type.
    Type: Grant
    Filed: June 24, 2022
    Date of Patent: April 2, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: John J. Ellis-Monaghan, Rajendran Krishnasamy, Siva P. Adusumilli, Ramsey Hazbun
  • Publication number: 20240063315
    Abstract: A photodetector structure includes a first semiconductor material layer over a doped well in a substrate. The photodetector structure includes an air gap vertically between the first semiconductor material layer and a first portion of the doped well. The photodetector structure includes an insulative collar on the first portion of the doped well and laterally surrounding the air gap. The photodetector structure may include a second semiconductor material layer on the first portion of the doped well and laterally surrounded by the insulative collar. The photodetector structure may include a third semiconductor layer over the first semiconductor layer.
    Type: Application
    Filed: August 19, 2022
    Publication date: February 22, 2024
    Inventors: Siva P. Adusumilli, Ramsey Hazbun, John J. Ellis-Monaghan, Rajendran Krishnasamy
  • Publication number: 20230417695
    Abstract: Disclosed is a semiconductor structure with a photodiode including: a well region with a first-type conductivity in a substrate, a trench in the well region, and multiple conformal semiconductor layers in the trench. The semiconductor layers include a first semiconductor layer, which is, for example, an intrinsic semiconductor layer and lines the trench, and a second semiconductor layer, which has a second-type conductivity and which is on the first semiconductor layer within (but not filling) the trench and which also extends outside the trench onto a dielectric layer. An additional dielectric layer extends over and caps a cavity that is at least partially within the trench such that surfaces of the second semiconductor layer are exposed within the cavity. Fluid inlet/outlet ports extend to the cavity and contacts extend to the well region and to the second semiconductor layer. Also disclosed are methods for forming and using the semiconductor structure.
    Type: Application
    Filed: June 22, 2022
    Publication date: December 28, 2023
    Inventors: Siva P. Adusumilli, Mark D. Levy, Ramsey M. Hazbun, John J. Ellis-Monaghan
  • Publication number: 20230420596
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodetector and methods of manufacture. The structure includes: a photodetector; and a semiconductor material on the photodetector, the semiconductor material comprising a first dopant type, a second dopant type and intrinsic semiconductor material separating the first dopant type from the second dopant type.
    Type: Application
    Filed: June 24, 2022
    Publication date: December 28, 2023
    Inventors: John J. ELLIS-MONAGHAN, Rajendran KRISHNASAMY, Siva P. ADUSUMILLI, Ramsey HAZBUN
  • Publication number: 20230402453
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich isolation region and methods of manufacture. The structure includes: a first heterojunction bipolar transistor; a second heterojunction bipolar transistor; and a trap rich isolation region embedded within a substrate underneath both the first heterojunction bipolar transistor and the second heterojunction bipolar transistor.
    Type: Application
    Filed: August 8, 2023
    Publication date: December 14, 2023
    Inventors: Vibhor JAIN, John J. ELLIS-MONAGHAN, Anthony K. STAMPER, Steven M. SHANK, John J. PEKARIK
  • Publication number: 20230387333
    Abstract: A photodetector structure includes a first semiconductor material layer on a first portion of a doped well in a substrate. The photodetector structure includes a second semiconductor layer over the first semiconductor layer. The first and second semiconductor material layers may include an undoped semiconductor material. The photodetector structure includes an insulative collar laterally surrounding the first and second semiconductor material layers. The insulative collar may include a varying horizontal thickness. The photodetector structure includes a doped semiconductor material having an opposite doping polarity relative to the doped well, and positioned over the second semiconductor material layer and the insulating collar.
    Type: Application
    Filed: May 24, 2022
    Publication date: November 30, 2023
    Inventors: Siva P. Adusumilli, John J. Ellis-Monaghan, Rajendran Krishnasamy, Ramsey Hazbun
  • Patent number: 11791334
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich isolation region and methods of manufacture. The structure includes: a first heterojunction bipolar transistor; a second heterojunction bipolar transistor; and a trap rich isolation region embedded within a substrate underneath both the first heterojunction bipolar transistor and the second heterojunction bipolar transistor.
    Type: Grant
    Filed: October 20, 2020
    Date of Patent: October 17, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, John J. Ellis-Monaghan, Anthony K. Stamper, Steven M. Shank, John J. Pekarik
  • Publication number: 20230317869
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and methods of manufacture. The structure includes: a top terminal; an intrinsic material in contact with the top terminal; and a bottom terminal in contact with the intrinsic material, the bottom terminal including a P semiconductor material and a fully depleted N semiconductor material.
    Type: Application
    Filed: March 30, 2022
    Publication date: October 5, 2023
    Inventors: Rajendran Krishnasamy, John J. Ellis-Monaghan, Siva P. Adusumilli, Ramsey Hazbun, Steven M. Shank
  • Patent number: 11777043
    Abstract: A substrate is formed to include a substrate base and a substrate extension. A photodiode contacts the substrate base. The substrate extension is adjacent the photodiode. An additional device contacts the substrate extension. A sidewall spacer contacts the photodiode and the substrate extension. The additional device includes conductive elements within the substrate extension adjacent the sidewall spacer.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: October 3, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ramsey M. Hazbun, John J. Ellis-Monaghan, Rajendran Krishnasamy, Siva P. Adusumilli
  • Publication number: 20230299132
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.
    Type: Application
    Filed: May 26, 2023
    Publication date: September 21, 2023
    Inventors: Vibhor JAIN, Anthony K. STAMPER, John J. ELLIS-MONAGHAN, Steven M. SHANK, Rajendran KRISHNASAMY
  • Patent number: 11740418
    Abstract: Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: August 29, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Nicholas A. Polomoff, John J. Ellis-Monaghan, Frank G. Kuechenmeister, Jae Kyu Cho, Michal Rakowski
  • Patent number: 11721719
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.
    Type: Grant
    Filed: October 20, 2020
    Date of Patent: August 8, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Anthony K. Stamper, John J. Ellis-Monaghan, Steven M. Shank, Rajendran Krishnasamy
  • Patent number: 11664470
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodiode with an integrated, light focusing elements and methods of manufacture. The structure includes: a trench photodiode comprising a domed structure; and a doped material on the domed structure, the doped material having a concave underside surface.
    Type: Grant
    Filed: July 13, 2022
    Date of Patent: May 30, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Rajendran Krishnasamy, Steven M. Shank, John J. Ellis-Monaghan, Ramsey Hazbun
  • Patent number: 11658177
    Abstract: Semiconductor device structures with substrate biasing, methods of forming a semiconductor device structure with substrate biasing, and methods of operating a semiconductor device structure with substrate biasing. A substrate contact is coupled to a portion of a bulk semiconductor substrate in a device region. The substrate contact is configured to be biased with a negative bias voltage. A field-effect transistor includes a semiconductor body in the device region of the bulk semiconductor substrate. The semiconductor body is electrically isolated from the portion of the bulk semiconductor substrate.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: May 23, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anthony K. Stamper, Michel J. Abou-Khalil, John J. Ellis-Monaghan, Randy Wolf, Alvin J. Joseph, Aaron Vallett
  • Patent number: 11639895
    Abstract: A “lab on a chip” includes an optofluidic sensor and components to analyze signals from the optofluidic sensor. The optofluidic sensor includes a substrate, a channel at least partially defined by a portion of a layer of first material on the substrate, input and output fluid reservoirs in fluid communication with the channel, at least a first radiation source coupled to the substrate adapted to generate radiation in a direction toward the channel, and at least one photodiode positioned adjacent and below the channel.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: May 2, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Vibhor Jain, Steven M. Shank, Anthony K. Stamper, John J. Ellis-Monaghan, John J. Pekarik, Yusheng Bian
  • Patent number: 11637068
    Abstract: Processing forms an integrated circuit structure having first and second layers on opposite sides of an insulator, and an interconnect structure extending through the insulator between the first layer and the second layer. The interconnect structure is formed in an opening extending through the insulator between the first layer and the second layer and has an electrical conductor in the opening extending between the first layer and the second layer and a thermally conductive electrical insulator liner along sidewalls of the opening extending between the first layer and the second layer. The electrical conductor is positioned to conduct electrical signals between the first layer and the second layer, and the thermally conductive electrical insulator liner is positioned to transfer heat between the first layer and the second layer.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: April 25, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anthony K. Stamper, Vibhor Jain, Steven M. Shank, John J. Ellis-Monaghan, John J. Pekarik
  • Patent number: 11611002
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: a spiral fin structure comprising semiconductor substrate material and dielectric material; a photosensitive semiconductor material over sidewalls and a top surface of the spiral fin structure, the photosensitive semiconductor material positioned to capture laterally emitted incident light; a doped semiconductor material above the photosensitive semiconductor material; and contacts electrically contacting the semiconductor substrate material and the doped semiconductor material from a top surface thereof.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: March 21, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Mark D. Levy, Edward W. Kiewra, Siva P. Adusumilli, John J. Ellis-Monaghan
  • Patent number: 11581450
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one vertical pillar feature within a trench; a photosensitive semiconductor material extending laterally from sidewalls of the at least one vertical pillar feature; and a contact electrically connecting to the photosensitive semiconductor material.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: February 14, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Mark D. Levy, Siva P. Adusumilli, Vibhor Jain, John J. Ellis-Monaghan
  • Patent number: 11569405
    Abstract: Structures including a photodetector and methods of fabricating such structures. The photodetector is positioned over the top surface of the substrate. The photodetector includes a portion of a semiconductor layer comprised of a semiconductor alloy, a p-type doped region in the portion of the semiconductor layer, and an n-type doped region in the portion of the semiconductor layer. The p-type doped region and the n-type doped region converge along a p-n junction. The portion of the semiconductor layer has a first side and a second side opposite from the first side. The semiconductor alloy has a composition that is laterally graded from the first side to the second side of the portion of the semiconductor layer.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: January 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Steven M. Shank, Vibhor Jain, Anthony K. Stamper, John J. Ellis-Monaghan, John J. Pekarik
  • Patent number: 11545577
    Abstract: Disclosed is a structure including a semiconductor layer with a device area and, within the device area, a monocrystalline portion and polycrystalline portion(s) that extend through the monocrystalline portion. The structure includes an active device including a device component, which is in device area and which includes polycrystalline portion(s). For example, the device can be a field effect transistor (FET) (e.g., a simple FET or a multi-finger FET for a low noise amplifier or RF switch) with at least one source/drain region, which is in the device area and which includes at least one polycrystalline portion that extends through the monocrystalline portion. The embodiments can vary with regard to the type of structure (e.g., bulk or SOI), with regard to the type of device therein, and also with regard to the number, size, shape, location, orientation, etc. of the polycrystalline portion(s). Also disclosed is a method for forming the structure.
    Type: Grant
    Filed: December 8, 2020
    Date of Patent: January 3, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva P. Adusumilli, John J. Ellis-Monaghan, Steven M. Shank, Yves T. Ngu, Michael J. Zierak