Patents by Inventor John J. Ellis-Monaghan

John J. Ellis-Monaghan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220029032
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: a spiral fin structure comprising semiconductor substrate material and dielectric material; a photosensitive semiconductor material over sidewalls and a top surface of the spiral fin structure, the photosensitive semiconductor material positioned to capture laterally emitted incident light; a doped semiconductor material above the photosensitive semiconductor material; and contacts electrically contacting the semiconductor substrate material and the doped semiconductor material from a top surface thereof.
    Type: Application
    Filed: July 22, 2020
    Publication date: January 27, 2022
    Inventors: Mark D. LEVY, Edward W. KIEWRA, Siva P. ADUSUMILLI, John J. ELLIS-MONAGHAN
  • Patent number: 11205701
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A gate structure is formed over a channel region of a substrate. A first source/drain region is positioned in the substrate adjacent to a first sidewall of the gate structure, a second source/drain region is positioned in the substrate adjacent to a second sidewall of the gate structure, and an extension region is positioned in the substrate. The extension region includes first and second sections that each overlap with the first source/drain region. The first and second sections of the extension region are spaced apart along a longitudinal axis of the gate structure. A portion of the channel region is positioned along the longitudinal axis of the gate structure between the first and second sections of the extension region.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: December 21, 2021
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Henry Aldridge, John J. Ellis-Monaghan, Michel J. Abou-Khalil
  • Publication number: 20210391425
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A gate structure is formed over a channel region of a substrate. A first source/drain region is positioned in the substrate adjacent to a first sidewall of the gate structure, a second source/drain region is positioned in the substrate adjacent to a second sidewall of the gate structure, and an extension region is positioned in the substrate. The extension region includes first and second sections that each overlap with the first source/drain region. The first and second sections of the extension region are spaced apart along a longitudinal axis of the gate structure. A portion of the channel region is positioned along the longitudinal axis of the gate structure between the first and second sections of the extension region.
    Type: Application
    Filed: June 11, 2020
    Publication date: December 16, 2021
    Inventors: Henry Aldridge, John J. Ellis-Monaghan, Michel J. Abou-Khalil
  • Publication number: 20210391489
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one vertical pillar feature within a trench; a photosensitive semiconductor material extending laterally from sidewalls of the at least one vertical pillar feature; and a contact electrically connecting to the photosensitive semiconductor material.
    Type: Application
    Filed: June 11, 2020
    Publication date: December 16, 2021
    Inventors: Mark D. LEVY, Siva P. ADUSUMILLI, Vibhor JAIN, John J. ELLIS-MONAGHAN
  • Publication number: 20210376159
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A shallow trench isolation region is formed in a semiconductor substrate. A trench is formed in the shallow trench isolation region, and a body region is formed in the trench of the shallow trench isolation region. The body region is comprised of a polycrystalline semiconductor material.
    Type: Application
    Filed: June 2, 2020
    Publication date: December 2, 2021
    Inventors: Michel J. Abou-Khalil, Steven M. Shank, Mark Levy, Rajendran Krishnasamy, John J. Ellis-Monaghan, Anthony K. Stamper
  • Publication number: 20210376180
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one fin including substrate material, the at least one fin including sidewalls and a top surface; a trench on opposing sides of the at least one fin; a first semiconductor material lining the sidewalls and the top surface of the at least one fin, and a bottom surface of the trench; a photosensitive semiconductor material on the first semiconductor material and at least partially filling the trench; and a third semiconductor material on the photosensitive semiconductor material.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Siva P. ADUSUMILLI, John J. ELLIS-MONAGHAN, Mark D. LEVY, Vibhor JAIN, Andre STURM
  • Publication number: 20210351306
    Abstract: A photodetector includes a photodetecting region in a semiconductor substrate, and a reflector extending at least partially along a sidewall of the photodetecting region in the semiconductor substrate. The reflector includes an air gap defined in the semiconductor substrate. The reflector allows use of thinner germanium for the photodetecting region. The air gap may have a variety of internal features to direct electromagnetic radiation towards the photodetecting region.
    Type: Application
    Filed: May 7, 2020
    Publication date: November 11, 2021
    Inventors: Siva P. Adusumilli, Mark D. Levy, Vibhor Jain, John J. Ellis-Monaghan
  • Patent number: 11171095
    Abstract: The present disclosure relates to an active x-ray attack prevention structure for secure integrated circuits. In particular, the present disclosure relates to a structure including a functional circuit, and at least one latchup sensitive diode circuit configured to induce a latchup condition in the functional circuit, placed in proximity of the functional circuit.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: November 9, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Ajay Raman, Sebastian T. Ventrone, John J. Ellis-Monaghan, Siva P. Adusumilli, Yves T. Ngu
  • Publication number: 20210335731
    Abstract: The present disclosure relates to an active x-ray attack prevention structure for secure integrated circuits. In particular, the present disclosure relates to a structure including a functional circuit, and at least one latchup sensitive diode circuit configured to induce a latchup condition in the functional circuit, placed in proximity of the functional circuit.
    Type: Application
    Filed: April 22, 2020
    Publication date: October 28, 2021
    Inventors: Vibhor JAIN, Ajay RAMAN, Sebastian T. VENTRONE, John J. ELLIS-MONAGHAN, Siva P. ADUSUMILLI, Yves T. NGU
  • Publication number: 20210336005
    Abstract: The disclosure provides a field effect transistor (FET) stack with methods to form the same. The FET stack includes a first transistor over a substrate. The first transistor includes a first active semiconductor material including a first channel region between a first set of source/drain terminals, and a first gate structure over the first channel region. The first gate structure includes a first gate insulator of a first thickness above the first channel region. A second transistor is over the substrate and horizontally separated from the first transistor. A second gate structure of the second transistor may include a second gate insulator of a second thickness above a second channel region, the second thickness being greater than the first thickness. A shared gate node may be coupled to each of the first gate structure and the second gate structure.
    Type: Application
    Filed: April 22, 2020
    Publication date: October 28, 2021
    Inventors: Steven M. Shank, Anthony K. Stamper, Vibhor Jain, John J. Ellis-Monaghan
  • Patent number: 11152520
    Abstract: A photodetector includes a photodetecting region in a semiconductor substrate, and a reflector extending at least partially along a sidewall of the photodetecting region in the semiconductor substrate. The reflector includes an air gap defined in the semiconductor substrate. The reflector allows use of thinner germanium for the photodetecting region. The air gap may have a variety of internal features to direct electromagnetic radiation towards the photodetecting region.
    Type: Grant
    Filed: May 7, 2020
    Date of Patent: October 19, 2021
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva P. Adusumilli, Mark D. Levy, Vibhor Jain, John J. Ellis-Monaghan
  • Publication number: 20210320217
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an avalanche photodiode and methods of manufacture. The structure includes: a substrate material having a trench with sidewalls and a bottom composed of the substrate material; a first semiconductor material lining the sidewalls and the bottom of the trench; a photosensitive semiconductor material provided on the first semiconductor material; and a third semiconductor material provided on the photosensitive semiconductor material.
    Type: Application
    Filed: April 9, 2020
    Publication date: October 14, 2021
    Inventors: Mark D. LEVY, Siva P. ADUSUMILLI, John J. ELLIS-MONAGHAN, Vibhor JAIN, Ramsey HAZBUN, Pernell DONGMO, Cameron E. LUCE, Steven M. SHANK, Rajendran KRISHNASAMY
  • Patent number: 11121097
    Abstract: The present disclosure relates to a metal layer for an active x-ray attack prevention device for securing integrated circuits. In particular, the present disclosure relates to a structure including a semiconductor material, one or more devices on a front side of the semiconductor material, a backside patterned metal layer under the one or more devices, located and structured to protect the one or more devices from an active intrusion, and at least one contact providing an electrical connection through the semiconductor material to a front side of the backside patterned metal layer. The backside patterned metal layer is between a wafer and one of the semiconductor material and an insulator layer.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: September 14, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Sebastian T. Ventrone, Siva P. Adusumilli, John J. Ellis-Monaghan, Ajay Raman
  • Publication number: 20210280672
    Abstract: Structures including electrical isolation and methods of forming a structure including electrical isolation. A semiconductor layer is formed over a semiconductor substrate and shallow trench isolation regions are formed in the semiconductor layer. The semiconductor layer includes single-crystal semiconductor material having an electrical resistivity that is greater than or equal to 1000 ohm-cm. The shallow trench isolation regions are arranged to surround a portion of the semiconductor layer to define an active device region. A polycrystalline layer is positioned in the semiconductor layer and extends laterally beneath the active device region and the shallow trench isolation regions that surround the active device region.
    Type: Application
    Filed: March 3, 2020
    Publication date: September 9, 2021
    Inventors: Anthony K. Stamper, Vibhor Jain, John J. Pekarik, Steven M. Shank, John J. Ellis-Monaghan
  • Publication number: 20210272812
    Abstract: Structures including electrical isolation and methods of forming a structure including electrical isolation. A first polycrystalline layer is located in a substrate, and a second polycrystalline layer is positioned between the first polycrystalline layer and a top surface of the substrate. The substrate includes a first portion of the single-crystal semiconductor material that is positioned between the second polycrystalline layer and the top surface of the substrate. The substrate includes a second portion of the single-crystal semiconductor material that is positioned between the first polycrystalline layer and the second polycrystalline layer. The first polycrystalline layer has a thickness. The second polycrystalline layer has a portion with a thickness that is greater than the thickness of the first polycrystalline layer.
    Type: Application
    Filed: March 2, 2020
    Publication date: September 2, 2021
    Inventors: Siva P. Adusumilli, Anthony K. Stamper, Michel J. Abou-Khalil, John J. Ellis-Monaghan, Bojidha Babu
  • Publication number: 20210217849
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors with back gate contact and buried high resistivity layer and methods of manufacture. The structure includes: a handle wafer comprising a single crystalline semiconductor region; an insulator layer over the single crystalline semiconductor region; a semiconductor layer over the insulator layer; a high resistivity layer in the handle wafer, separated from the insulator layer by the single crystalline semiconductor region; and a device on the semiconductor layer.
    Type: Application
    Filed: January 15, 2020
    Publication date: July 15, 2021
    Inventors: Vibhor JAIN, Anthony K. STAMPER, Steven M. SHANK, John J. ELLIS-MONAGHAN, John J. PEKARIK
  • Publication number: 20210217850
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a wafer with crystalline silicon and trap rich polysilicon layer and methods of manufacture. The structure includes: semiconductor-on-insulator (SOI) wafer composed of a lower crystalline semiconductor layer, a polysilicon layer over the lower crystalline semiconductor layer, an upper crystalline semiconductor layer over the polysilicon layer, a buried insulator layer over the upper crystalline semiconductor layer, and a top crystalline semiconductor layer over the buried insulator layer.
    Type: Application
    Filed: January 15, 2020
    Publication date: July 15, 2021
    Inventors: Anthony K. STAMPER, Steven M. SHANK, John J. PEKARIK, Vibhor JAIN, John J. ELLIS-MONAGHAN
  • Patent number: 11063140
    Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A first heterojunction bipolar transistor includes a first emitter, a first collector, and a first base layer having a portion positioned between the first emitter and the first collector. A second heterojunction bipolar transistor includes a second emitter, a second collector, and a second base layer having a portion positioned between the second emitter and the second collector. The first and second base layers each comprise silicon-germanium, the first base layer includes a first germanium profile, and the second base layer includes a second germanium profile that is identical to the first germanium profile.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: July 13, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: John J. Pekarik, Anthony K. Stamper, Vibhor Jain, Steven M. Shank, John J. Ellis-Monaghan, Herbert Ho, Qizhi Liu
  • Publication number: 20210183918
    Abstract: Structures including a photodiode and methods of fabricating such structures. A trench extends from a top surface of a substrate to a depth into the substrate. The photodiode includes an active layer positioned in the trench. Trench isolation regions, which are located in the substrate, are arranged to surround the trench. A portion of the substrate is positioned in a surrounding relationship about the active layer and between the active layer and the trench isolation regions.
    Type: Application
    Filed: December 13, 2019
    Publication date: June 17, 2021
    Inventors: John J. Ellis-Monaghan, Steven M. Shank, Vibhor Jain, Anthony K. Stamper, John J. Pekarik
  • Publication number: 20210159336
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertical field effect transistors (FETS) and methods of manufacture. The structure includes: a substrate material; at least one vertically oriented gate structure extending into the substrate material and composed of a gate dielectric material and conductive gate material; and vertically oriented source/drain regions extending into the substrate material and composed of conductive dopant material and a silicide on the source/drain regions.
    Type: Application
    Filed: November 22, 2019
    Publication date: May 27, 2021
    Inventors: Anthony K. STAMPER, Aaron L. VALLETT, Steven M. SHANK, John J. ELLIS-MONAGHAN