Patents by Inventor John J. Ellis-Monaghan

John J. Ellis-Monaghan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220181452
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with a high impedance semiconductor material between a substrate and transistor. The IC structure may include: a substrate, a high impedance semiconductor material on a portion of the substrate, and a transistor on a top surface of the high impedance semiconductor material. The transistor includes a semiconductor channel region horizontally between a first source/drain (S/D) region and a second S/D region. The high impedance semiconductor material is vertically between the transistor and the substrate; a first insulator region is on the substrate and horizontally adjacent the first S/D region; and a first doped well is on the substrate and horizontally adjacent the first insulator region. The first insulator region is horizontally between the first doped well and the transistor.
    Type: Application
    Filed: January 18, 2021
    Publication date: June 9, 2022
    Inventors: John J. Ellis-Monaghan, Anupam Dutta, Satyasuresh V. Choppalli, Venkata N.R. Vanukuru, Michel Abou-Khalil
  • Publication number: 20220181317
    Abstract: Semiconductor device structures with substrate biasing, methods of forming a semiconductor device structure with substrate biasing, and methods of operating a semiconductor device structure with substrate biasing. A substrate contact is coupled to a portion of a bulk semiconductor substrate in a device region. The substrate contact is configured to be biased with a negative bias voltage. A field-effect transistor includes a semiconductor body in the device region of the bulk semiconductor substrate. The semiconductor body is electrically isolated from the portion of the bulk semiconductor substrate.
    Type: Application
    Filed: December 7, 2020
    Publication date: June 9, 2022
    Inventors: Anthony K. Stamper, Michel J. Abou-Khalil, John J. Ellis-Monaghan, Randy Wolf, Alvin J. Joseph, Aaron Vallett
  • Publication number: 20220181361
    Abstract: Structures including multiple photodiodes and methods of fabricating a structure including multiple photodiodes. A substrate has a first trench extending to a first depth into the substrate and a second trench extending to a second depth into the substrate that is greater than the first depth. A first photodiode includes a first light-absorbing layer containing a first material positioned in the first trench. A second photodiode includes a second light-absorbing layer containing a second material positioned in the second trench. The first material and the second material each include germanium.
    Type: Application
    Filed: December 7, 2020
    Publication date: June 9, 2022
    Inventors: John J. Ellis-Monaghan, Steven M. Shank, Rajendran Krishnasamy, Ramsey Hazbun
  • Publication number: 20220181501
    Abstract: Disclosed is a structure including a semiconductor layer with a device area and, within the device area, a monocrystalline portion and polycrystalline portion(s) that extend through the monocrystalline portion. The structure includes an active device including a device component, which is in device area and which includes polycrystalline portion(s). For example, the device can be a field effect transistor (FET) (e.g., a simple FET or a multi-finger FET for a low noise amplifier or RF switch) with at least one source/drain region, which is in the device area and which includes at least one polycrystalline portion that extends through the monocrystalline portion. The embodiments can vary with regard to the type of structure (e.g., bulk or SOI), with regard to the type of device therein, and also with regard to the number, size, shape, location, orientation, etc. of the polycrystalline portion(s). Also disclosed is a method for forming the structure.
    Type: Application
    Filed: December 8, 2020
    Publication date: June 9, 2022
    Applicant: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Siva P. Adusumilli, John J. Ellis-Monaghan, Steven M. Shank, Yves T. Ngu, Michael J. Zierak
  • Publication number: 20220165676
    Abstract: The disclosure provides a method to authenticate an integrated circuit (IC) structure. The method may include forming a first authentication film (AF) material within the IC structure. A composition of the first AF material is different from an adjacent material within the IC structure. The method includes converting the first AF material into a void within the IC structure. Additionally, the method includes creating an authentication map of the IC structure to include a location of the void in the IC structure for authentication of the IC structure.
    Type: Application
    Filed: November 20, 2020
    Publication date: May 26, 2022
    Inventors: Vibhor Jain, Sunil K. Singh, Johnatan A. Kantarovsky, Siva P. Adusumilli, Sebastian T. Ventrone, John J. Ellis-Monaghan, Yves T. Ngu
  • Patent number: 11322639
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an avalanche photodiode and methods of manufacture. The structure includes: a substrate material having a trench with sidewalls and a bottom composed of the substrate material; a first semiconductor material lining the sidewalls and the bottom of the trench; a photosensitive semiconductor material provided on the first semiconductor material; and a third semiconductor material provided on the photosensitive semiconductor material.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: May 3, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Mark D. Levy, Siva P. Adusumilli, John J. Ellis-Monaghan, Vibhor Jain, Ramsey Hazbun, Pernell Dongmo, Cameron E. Luce, Steven M. Shank, Rajendran Krishnasamy
  • Patent number: 11322357
    Abstract: Structures including electrical isolation and methods of forming a structure including electrical isolation. A first polycrystalline layer is located in a substrate, and a second polycrystalline layer is positioned between the first polycrystalline layer and a top surface of the substrate. The substrate includes a first portion of the single-crystal semiconductor material that is positioned between the second polycrystalline layer and the top surface of the substrate. The substrate includes a second portion of the single-crystal semiconductor material that is positioned between the first polycrystalline layer and the second polycrystalline layer. The first polycrystalline layer has a thickness. The second polycrystalline layer has a portion with a thickness that is greater than the thickness of the first polycrystalline layer.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: May 3, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva P. Adusumilli, Anthony K. Stamper, Michel J. Abou-Khalil, John J. Ellis-Monaghan, Bojidha Babu
  • Patent number: 11316064
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one fin including substrate material, the at least one fin including sidewalls and a top surface; a trench on opposing sides of the at least one fin; a first semiconductor material lining the sidewalls and the top surface of the at least one fin, and a bottom surface of the trench; a photosensitive semiconductor material on the first semiconductor material and at least partially filling the trench; and a third semiconductor material on the photosensitive semiconductor material.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: April 26, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Siva P. Adusumilli, John J. Ellis-Monaghan, Mark D. Levy, Vibhor Jain, Andre Sturm
  • Patent number: 11316045
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertical field effect transistors (FETS) and methods of manufacture. The structure includes: a substrate material; at least one vertically oriented gate structure extending into the substrate material and composed of a gate dielectric material and conductive gate material; and vertically oriented source/drain regions extending into the substrate material and composed of conductive dopant material and a silicide on the source/drain regions.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: April 26, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Anthony K. Stamper, Aaron L. Vallett, Steven M. Shank, John J. Ellis-Monaghan
  • Patent number: 11315825
    Abstract: Structures including electrical isolation and methods associated with forming such structures. A semiconductor layer has a top surface, a polycrystalline region, and a single-crystal region between the polycrystalline region and the top surface. An isolation band is located beneath the single-crystal region. The isolation band contains a first concentration of an n-type dopant and a second concentration of a p-type dopant, and a net difference between the first concentration and the second concentration is within a range of about five percent to about fifteen percent.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: April 26, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Michel J. Abou-Khalil, Aaron Vallett, Steven M. Shank, Bojidha Babu, John J. Ellis-Monaghan, Anthony K. Stamper
  • Publication number: 20220122968
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich isolation region and methods of manufacture. The structure includes: a first heterojunction bipolar transistor; a second heterojunction bipolar transistor; and a trap rich isolation region embedded within a substrate underneath both the first heterojunction bipolar transistor and the second heterojunction bipolar transistor.
    Type: Application
    Filed: October 20, 2020
    Publication date: April 21, 2022
    Inventors: Vibhor JAIN, John J. ELLIS-MONAGHAN, Anthony K. STAMPER, Steven M. SHANK, John J. PEKARIK
  • Publication number: 20220123107
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.
    Type: Application
    Filed: October 20, 2020
    Publication date: April 21, 2022
    Inventors: Vibhor JAIN, Anthony K. STAMPER, John J. ELLIS-MONAGHAN, Steven M. SHANK, Rajendran KRISHNASAMY
  • Publication number: 20220115549
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodiode with an integrated, light focusing elements and methods of manufacture. The structure includes: a trench photodiode comprising a domed structure; and a doped material on the domed structure, the doped material having a concave underside surface.
    Type: Application
    Filed: October 8, 2020
    Publication date: April 14, 2022
    Inventors: Rajendran KRISHNASAMY, Steven M. SHANK, John J. ELLIS-MONAGHAN, Ramsey HAZBUN
  • Patent number: 11296190
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors with back gate contact and buried high resistivity layer and methods of manufacture. The structure includes: a handle wafer comprising a single crystalline semiconductor region; an insulator layer over the single crystalline semiconductor region; a semiconductor layer over the insulator layer; a high resistivity layer in the handle wafer, separated from the insulator layer by the single crystalline semiconductor region; and a device on the semiconductor layer.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: April 5, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Anthony K. Stamper, Steven M. Shank, John J. Ellis-Monaghan, John J. Pekarik
  • Publication number: 20220093731
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor on insulator substrate with cavity structures and methods of manufacture. The structure includes: a bulk substrate with at least one rectilinear cavity structure; an insulator material sealing the at least one rectilinear cavity structure; and a buried insulator layer on the bulk substrate and over the at least one rectilinear cavity structure.
    Type: Application
    Filed: September 22, 2020
    Publication date: March 24, 2022
    Inventors: Anthony K. STAMPER, Siva P. ADUSUMILLI, Bruce W. PORTH, John J. ELLIS-MONAGHAN
  • Patent number: 11282883
    Abstract: Structures including a photodiode and methods of fabricating such structures. A trench extends from a top surface of a substrate to a depth into the substrate. The photodiode includes an active layer positioned in the trench. Trench isolation regions, which are located in the substrate, are arranged to surround the trench. A portion of the substrate is positioned in a surrounding relationship about the active layer and between the active layer and the trench isolation regions.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: March 22, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: John J. Ellis-Monaghan, Steven M. Shank, Vibhor Jain, Anthony K. Stamper, John J. Pekarik
  • Patent number: 11276770
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to gate controlled transistors and methods of manufacture. The structure includes: an emitter region; a collector region; base regions on opposing sides of the emitter region and the collector region; and a gate structure composed of a body region and leg regions, the body region being located between the base regions on opposing sides of the emitter region and the collector region, and the leg regions isolating the base regions from both the emitter region and the collector region.
    Type: Grant
    Filed: November 5, 2019
    Date of Patent: March 15, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Mankyu Yang, Jagar Singh, Alexander Martin, John J. Ellis-Monaghan
  • Patent number: 11271077
    Abstract: Structures including electrical isolation and methods of forming a structure including electrical isolation. A semiconductor layer is formed over a semiconductor substrate and shallow trench isolation regions are formed in the semiconductor layer. The semiconductor layer includes single-crystal semiconductor material having an electrical resistivity that is greater than or equal to 1000 ohm-cm. The shallow trench isolation regions are arranged to surround a portion of the semiconductor layer to define an active device region. A polycrystalline layer is positioned in the semiconductor layer and extends laterally beneath the active device region and the shallow trench isolation regions that surround the active device region.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: March 8, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anthony K. Stamper, Vibhor Jain, John J. Pekarik, Steven M. Shank, John J. Ellis-Monaghan
  • Patent number: 11271079
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a wafer with crystalline silicon and trap rich polysilicon layer and methods of manufacture. The structure includes: semiconductor-on-insulator (SOI) wafer composed of a lower crystalline semiconductor layer, a polysilicon layer over the lower crystalline semiconductor layer, an upper crystalline semiconductor layer over the polysilicon layer, a buried insulator layer over the upper crystalline semiconductor layer, and a top crystalline semiconductor layer over the buried insulator layer.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: March 8, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Anthony K. Stamper, Steven M. Shank, John J. Pekarik, Vibhor Jain, John J. Ellis-Monaghan
  • Publication number: 20220068975
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a wafer with localized cavity structures and methods of manufacture. A structure includes a bulk substrate with localized semiconductor on insulator (SOI) regions and bulk device regions, the localized SOI regions includes multiple cavity structures and substrate material of the bulk substrate.
    Type: Application
    Filed: August 26, 2020
    Publication date: March 3, 2022
    Inventors: Siva P. ADUSUMILLI, Anthony K. STAMPER, Bruce W. PORTH, John J. ELLIS-MONAGHAN