Patents by Inventor John K. Zahurak

John K. Zahurak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230413559
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Application
    Filed: June 13, 2023
    Publication date: December 21, 2023
    Inventors: Sanh D. Tang, john K. Zahurak
  • Publication number: 20230269937
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Application
    Filed: February 13, 2023
    Publication date: August 24, 2023
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 11700730
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: July 11, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 11581324
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Grant
    Filed: March 9, 2020
    Date of Patent: February 14, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 11508734
    Abstract: Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: November 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Amirhasan Nourbakhsh, John K. Zahurak, Sanh D. Tang, Silvia Borsari, Hong Li
  • Publication number: 20210183887
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 17, 2021
    Inventors: Sanh D. Tang, John K. Zahurak
  • Publication number: 20210098463
    Abstract: Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: December 11, 2020
    Publication date: April 1, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Amirhasan Nourbakhsh, John K. Zahurak, Sanh D. Tang, Silvia Borsari, Hong Li
  • Patent number: 10886282
    Abstract: Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: January 5, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Amirhasan Nourbakhsh, John K. Zahurak, Sanh D. Tang, Silvia Borsari, Hong Li
  • Patent number: 10872903
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: December 22, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Publication number: 20200303391
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Application
    Filed: March 9, 2020
    Publication date: September 24, 2020
    Inventors: Sanh D. Tang, John K. Zahurak
  • Publication number: 20200235103
    Abstract: Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: March 26, 2020
    Publication date: July 23, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Amirhasan Nourbakhsh, John K. Zahurak, Sanh D. Tang, Silvia Borsari, Hong Li
  • Publication number: 20200119046
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Application
    Filed: December 16, 2019
    Publication date: April 16, 2020
    Inventors: Sanh D. Tang, John K. Zahurak
  • Publication number: 20200111796
    Abstract: Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: October 4, 2018
    Publication date: April 9, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Amirhasan Nourbakhsh, John K. Zahurak, Sanh D. Tang, Silvia Borsari, Hong Li
  • Patent number: 10615165
    Abstract: Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: October 4, 2018
    Date of Patent: April 7, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Amirhasan Nourbakhsh, John K. Zahurak, Sanh D. Tang, Silvia Borsari, Hong Li
  • Patent number: 10586802
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: March 10, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 10510769
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: December 17, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 10325926
    Abstract: Methods for fabricating semiconductor-metal-on-insulator (SMOI) structures include forming an acceptor wafer including an insulator material on a first semiconductor substrate, forming a donor wafer including a conductive material and an amorphous silicon material on a second semiconductor substrate, and bonding the amorphous silicon material of the donor wafer to the insulator material of the acceptor wafer. SMOI structures formed from such methods are also disclosed, as are semiconductor devices including such SMOI structures.
    Type: Grant
    Filed: March 20, 2017
    Date of Patent: June 18, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Ming Zhang, Andrew M. Bayless, John K. Zahurak
  • Publication number: 20190006387
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Application
    Filed: September 7, 2018
    Publication date: January 3, 2019
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 10090324
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Grant
    Filed: October 2, 2017
    Date of Patent: October 2, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 10069067
    Abstract: Some embodiments include methods of forming memory cells. A series of rails is formed to include bottom electrode contact material. Sacrificial material is patterned into a series of lines that cross the series of rails. A pattern of the series of lines is transferred into the bottom electrode contact material. At least a portion of the sacrificial material is subsequently replaced with top electrode material. Some embodiments include memory arrays that contain a second series of electrically conductive lines crossing a first series of electrically conductive lines. Memory cells are at locations where the electrically conductive lines of the second series overlap the electrically conductive lines of the first series. First and second memory cell materials are within the memory cell locations. The first memory cell material is configured as planar sheets and the second memory cell material is configured as upwardly-opening containers.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: September 4, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Scott E. Sills, John K. Zahurak