Patents by Inventor John K. Zahurak

John K. Zahurak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8901700
    Abstract: Methods of pitch doubling of asymmetric features and semiconductor structures including the same are disclosed. In one embodiment, a single photolithography mask may be used to pitch double three features, for example, of a DRAM array. In one embodiment, two wordlines and a grounded gate over field may be pitch doubled. Semiconductor structures including such features are also disclosed.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: December 2, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Kunal R. Parekh, John K. Zahurak
  • Patent number: 8883604
    Abstract: An integrated circuit has a nonvolatile memory cell that includes a first electrode, a second electrode, and an ion conductive material there-between. At least one of the first and second electrodes has an electrochemically active surface received directly against the ion conductive material. The second electrode is elevationally outward of the first electrode. The first electrode extends laterally in a first direction and the ion conductive material extends in a second direction different from and intersecting the first direction. The first electrode is received directly against the ion conductive material only where the first and second directions intersect. Other embodiments, including method embodiments, are disclosed.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: November 11, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, John K. Zahurak
  • Patent number: 8866209
    Abstract: Semiconductor arrays including a plurality of access devices disposed on a buried conductive line and methods for forming the same are provided. The access devices each include a transistor having a source region and drain region spaced apart by a channel region of opposite dopant type and an access line associated with the transistor. The access line may be electrically coupled with one or more of the transistors and may be operably coupled to a voltage source. The access devices may be formed in an array on one or more conductive lines. A system may be formed by integrating the semiconductor devices with one or more memory semiconductor arrays or conventional logic devices, such as a complementary metal-oxide-semiconductor (CMOS) device.
    Type: Grant
    Filed: July 10, 2013
    Date of Patent: October 21, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 8859359
    Abstract: Floating body cell structures including an array of floating body cells disposed on a back gate and source regions and drain regions of the floating body cells spaced apart from the back gate. The floating body cells may each include a volume of semiconductive material having a channel region extending between pillars, which may be separated by a void, such as a U-shaped trench. The floating body cells of the array may be electrically coupled to another gate, which may be disposed on sidewalls of the volume of semiconductive material or within the void therein. Methods of forming the floating body cell devices are also disclosed.
    Type: Grant
    Filed: July 29, 2013
    Date of Patent: October 14, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak, Werner Juengling
  • Publication number: 20140302650
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Application
    Filed: June 20, 2014
    Publication date: October 9, 2014
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 8841715
    Abstract: Floating body cell structures including an array of floating body cells disposed on a back gate and source regions and drain regions of the floating body cells spaced apart from the back gate. The floating body cells may each include a volume of semiconductive material having a channel region extending between pillars, which may be separated by a void, such as a U-shaped trench. The floating body cells of the array may be electrically coupled to another gate, which may be disposed on sidewalls of the volume of semiconductive material or within the void therein. Methods of forming the floating body cell devices are also disclosed.
    Type: Grant
    Filed: July 29, 2013
    Date of Patent: September 23, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak, Werner Juengling
  • Publication number: 20140273358
    Abstract: A circuit structure includes a substrate having an array region and a peripheral region. The substrate in the array and peripheral regions includes insulator material over first semiconductor material, conductive material over the insulator material, and second semiconductor material over the conductive material. The array region includes vertical circuit devices which include the second semiconductor material. The peripheral region includes horizontal circuit devices which include the second semiconductor material. The horizontal circuit devices in the peripheral region individually have a floating body which includes the second semiconductor material. The conductive material in the peripheral region is under and electrically coupled to the second semiconductor material of the floating bodies. Conductive straps in the array region are under the vertical circuit devices.
    Type: Application
    Filed: May 27, 2014
    Publication date: September 18, 2014
    Applicant: Micron Technology, Inc.
    Inventors: John K. Zahurak, Sanh D. Tang, Lars P. Heineck, Martin C. Roberts, Wolfgang Mueller, Haitao Liu
  • Patent number: 8809145
    Abstract: Semiconductor arrays including a plurality of access devices disposed on a buried conductive line and methods for forming the same are provided. The access devices each include a transistor having a source region and drain region spaced apart by a channel region of opposite dopant type and an access line associated with the transistor. The access line may be electrically coupled with one or more of the transistors and may be operably coupled to a voltage source. The access devices may be formed in an array on one or more conductive lines. A system may be formed by integrating the semiconductor devices with one or more memory semiconductor arrays or conventional logic devices, such as a complementary metal-oxide-semiconductor (CMOS) device.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: August 19, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 8803214
    Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: August 12, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Publication number: 20140217352
    Abstract: Some embodiments include memory cells which have multiple programmable material structures between a pair of electrodes. One of the programmable material structures has a first edge, and another of the programmable material structures has a second edge that contacts the first edge. Some embodiments include methods of forming an array of memory cells. First programmable material segments are formed over bottom electrodes. The first programmable material segments extend along a first axis. Lines of second programmable material are formed over the first programmable material segments, and are formed to extend along a second axis that intersects the first axis. The second programmable material lines have lower surfaces that contact upper surfaces of the first programmable material segments. Top electrode lines are formed over the second programmable material lines.
    Type: Application
    Filed: April 11, 2014
    Publication date: August 7, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Jun Liu, John K. Zahurak
  • Publication number: 20140192604
    Abstract: Methods, devices, and systems associated with memory cell operation are described. One or more methods of operating a memory cell include charging a capacitor coupled to the memory cell to a particular voltage level and programming the memory cell from a first state to a second state by controlling discharge of the capacitor through a resistive switching element of the memory cell.
    Type: Application
    Filed: February 3, 2014
    Publication date: July 10, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Roy E. Meade, John K. Zahurak
  • Patent number: 8772848
    Abstract: A circuit structure includes a substrate having an array region and a peripheral region. The substrate in the array and peripheral regions includes insulator material over first semiconductor material, conductive material over the insulator material, and second semiconductor material over the conductive material. The array region includes vertical circuit devices which include the second semiconductor material. The peripheral region includes horizontal circuit devices which include the second semiconductor material. The horizontal circuit devices in the peripheral region individually have a floating body which includes the second semiconductor material. The conductive material in the peripheral region is under and electrically coupled to the second semiconductor material of the floating bodies. Conductive straps in the array region are under the vertical circuit devices.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: July 8, 2014
    Assignee: Micron Technology, Inc.
    Inventors: John K. Zahurak, Sanh D. Tang, Lars P. Heineck, Martin C. Roberts, Wolfgang Mueller, Haitao Liu
  • Patent number: 8759809
    Abstract: An integrated circuit has a nonvolatile memory cell that includes a first electrode, a second electrode, and an ion conductive material there-between. At least one of the first and second electrodes has an electrochemically active surface received directly against the ion conductive material. The second electrode is elevationally outward of the first electrode. The first electrode extends laterally in a first direction and the ion conductive material extends in a second direction different from and intersecting the first direction. The first electrode is received directly against the ion conductive material only where the first and second directions intersect. Other embodiments, including method embodiments, are disclosed.
    Type: Grant
    Filed: October 21, 2010
    Date of Patent: June 24, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, John K. Zahurak
  • Patent number: 8759895
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: June 24, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 8735862
    Abstract: Some embodiments include memory cells which have multiple programmable material structures between a pair of electrodes. One of the programmable material structures has a first edge, and another of the programmable material structures has a second edge that contacts the first edge. Some embodiments include methods of forming an array of memory cells. First programmable material segments are formed over bottom electrodes. The first programmable material segments extend along a first axis. Lines of second programmable material are formed over the first programmable material segments, and are formed to extend along a second axis that intersects the first axis. The second programmable material lines have lower surfaces that contact upper surfaces of the first programmable material segments. Top electrode lines are formed over the second programmable material lines.
    Type: Grant
    Filed: April 11, 2011
    Date of Patent: May 27, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, John K. Zahurak
  • Patent number: 8723252
    Abstract: A vertical semiconductor material mesa upstanding from a semiconductor base that forms a conductive channel between first and second doped regions. The first doped region is electrically coupled to one or more first silicide layers on the surface of the base. The second doped region is electrically coupled to one of a plurality of second silicide layers on the upper surface of the mesa. A gate conductor is provided on one or more sidewalls of the mesa.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: May 13, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej Sandhu, John K. Zahurak, Jay Parks
  • Publication number: 20140097499
    Abstract: Methods of pitch doubling of asymmetric features and semiconductor structures including the same are disclosed. In one embodiment, a single photolithography mask may be used to pitch double three features, for example, of a DRAM array. In one embodiment, two wordlines and a grounded gate over field may be pitch doubled. Semiconductor structures including such features are also disclosed.
    Type: Application
    Filed: December 13, 2013
    Publication date: April 10, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Kunal R. Parekh, John K. Zahurak
  • Patent number: 8665630
    Abstract: Methods, devices, and systems associated with memory cell operation are described. One or more methods of operating a memory cell include charging a capacitor coupled to the memory cell to a particular voltage level and programming the memory cell from a first state to a second state by controlling discharge of the capacitor through a resistive switching element of the memory cell.
    Type: Grant
    Filed: May 27, 2011
    Date of Patent: March 4, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Roy E. Meade, John K. Zahurak
  • Publication number: 20140057406
    Abstract: An integrated circuit has a nonvolatile memory cell that includes a first electrode, a second electrode, and an ion conductive material there-between. At least one of the first and second electrodes has an electrochemically active surface received directly against the ion conductive material. The second electrode is elevationally outward of the first electrode. The first electrode extends laterally in a first direction and the ion conductive material extends in a second direction different from and intersecting the first direction. The first electrode is received directly against the ion conductive material only where the first and second directions intersect. Other embodiments, including method embodiments, are disclosed.
    Type: Application
    Filed: October 30, 2013
    Publication date: February 27, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Jun Liu, John K. Zahurak
  • Patent number: 8643110
    Abstract: A silicon-on-insulator device has a localized biasing structure formed in the insulator layer of the SOI. The localized biasing structure includes a patterned conductor that provides a biasing signal to distinct regions of the silicon layer of the SOI. The conductor is recessed into the insulator layer to provide a substantially planar interface with the silicon layer. The conductor is connected to a bias voltage source. In an embodiment, a plurality of conductor is provided that respectively connected to a plurality of voltage sources. Thus, different regions of the silicon layer are biased by different bias signals.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: February 4, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Fernando Gonzalez, John K. Zahurak