Abstract: Reinforcement learning methods are applied to the multi-domain problem of developing photoresist models for advanced semiconductor technologies. In an iterative process, candidate photoresist models are selected or generated, with each model comprising an optical imaging model, one or more analytical chemistry or deformation kernels, and one or more photoresist development model terms. Model parameters to be calibrated in an iteration are selected. The candidate photoresist models are calibrated to best fit photoresist contours extracted from SEM images. Values for the calibration model parameters are determined and the most useful analytical kernels are kept in each model while the others are dropped. A genetic algorithm uses the best calibrated photoresist models from the prior iteration to develop candidate models for the next iteration. The process iterates until no further accuracies can be gained. A residual minimization model can be trained to correct for residual errors in the final model.

Abstract: A machine readable storage medium, a method and an apparatus. The method comprises selecting a candidate set of parameters from a plurality of available parameters comprising variables that affect an outcome of a lithography process; performing a set of optimizations wherein each optimization of the set of optimizations is subject to a plurality of objectives and tolerances and a set of constraints, wherein performance of said each optimization comprises: modifying values of at least a portion of the candidate set of parameters to derive a predicted outcome for said each optimization; and determining whether a difference between the predicted outcome and an intended outcome is within an error threshold; and if the difference exceeds the error threshold, perform a subsequent optimization, and otherwise generate an input file including modified values, corresponding to a last one of the set of optimizations, for the at least a portion of the candidate set of parameters.

Abstract: Images are accessed representing a status in a fabrication of a semiconductor chip corresponding to a particular stage in the fabrication. Distortion is removed from the images and actual features of the semiconductor chip are extracted from the images. Synthesized ideal features of the semiconductor chip associated with completion of the particular stage in the fabrication are determined from the one or more images.

Abstract: An improved random forest model is provided, which has been trained based on silicon data generated from tests of previously fabricated chips. An input is provided to the random forest model, the input including a feature set of a pattern within a particular chip layout, the feature set identifying geometric attributes of polygonal elements within the pattern. A result is generated by the random forest model based on the input, where the result identifies a predicted attribute of the pattern based on the silicon data, and the result is generated based at least in part on determining, within the random forest model, that geometric attributes of the pattern were included in the previously fabricated chips, where the previously fabricated chips have chip layouts are different from the particular chip layout.

Abstract: A method includes identifying a first geometric pattern that failed a design rule check, identifying a second geometric pattern that passed the design rule check, morphing the first geometric pattern based on the second geometric pattern to generate a morphed geometric pattern, wherein the morphed geometric pattern passes the design rule check, and replacing the first geometric pattern with the morphed geometric pattern.

Abstract: A search engine receives data describing reference geometry and generates a hash based on the reference geometry. A reference bloom filter is generated for the reference geometry based on the hash. The search engine performs a search to determine whether instances of the reference geometry are present in an integrated circuit (IC) layout. The search includes comparing the reference bloom filter with each one of a plurality of bloom filters corresponding to a plurality of subdomains of the IC layout. Based on results of the comparison, one or more subdomains of interest are identified and searched to determine whether the particular reference geometry is present in the subdomain.

Abstract: A method comprising identifying a set of target features for a plurality of data instances of an input data collection; determining feature values for the set of target features for the plurality of data instances; identifying a plurality of outlier data instances based on the determined feature values; identifying a plurality of noisy data instances from the outlier data instances based on feature values of the plurality of noisy data instances, wherein a noisy data instance is identified based on a determination that noise is present in noisy data instance; and providing an indication of the plurality of noisy data instances.

Abstract: Lithographic apparatuses suitable for complementary e-beam lithography (CEBL) are described. In an example, a method of forming a pattern for a semiconductor structure includes forming a pattern of parallel lines above a substrate. The method also includes aligning the substrate in an e-beam tool to provide the pattern of parallel lines parallel with a scan direction of the e-beam tool. The e-beam tool includes a column having a blanker aperture array (BAA) with a staggered pair of columns of openings along an array direction orthogonal to the scan direction. The method also includes forming a pattern of cuts or vias in or above the pattern of parallel lines to provide line breaks for the pattern of parallel lines by scanning the substrate along the scan direction. A cumulative current through the column has a non-zero and substantially uniform cumulative current value throughout the scanning.

Abstract: Upon use of an immersion tin plating solution, contaminants build in the solution, which cause the plating rate and the quality of the plated deposit to decrease. One primary contaminant, which builds in the plating solution upon use, is hydrogen sulfide, H2S. If a gas is bubbled or blown through the solution, contaminants, especially hydrogen sulfide, can be effectively removed from the solution and, as a result, the high plating rate and plate quality can be restored or maintained. In this regard, any gas can be used, however, it is preferable to use a gas that will not detrimentally interact with the solution, other than to strip out contaminants. Nitrogen is particularly preferred for this purpose because it is efficient at stripping out contaminants, including hydrogen sulfide, but does not induce the oxidation of the tin ions from their divalent state to the tetravalent state, which is detrimental.

Abstract: A thermoresponsive polyester comprising units derived from an amide functional diol compound having a first amide group having a nitrogen atom and a carbonyl group; a second amide group tethered directly or indirectly through an organic group at the carbonyl group of the first amide group; and two organic groups terminated with a hydroxyl group attached to the nitrogen atom of the first amide group. The thermoresponsive polyesters exhibit a lower critical solution temperature at which they undergo a thermally induced reversible hydrophobicity change. This hydrophobicity change may involve the formation of coacervates of the thermoresponsive polyesters which can then coalesce into a precipitated polymer rich phase.

Abstract: In one embodiment, a neurostimulation lead for stimulating neural tissue of a patient, comprises: a lead body of insulative material; a plurality of electrodes; a plurality of terminals; a plurality of conductors, wherein the plurality of electrodes are electrically coupled to the plurality of terminals through the plurality of conductors; wherein the plurality of conductors are disposed in a helical manner in a repeating pattern of groups of conductors separated by gaps along a substantial length of the lead body, each gap being larger than an inter-conductor pitch within the groups of conductors; wherein the insulative material is a compliant material permitting elongation of the lead at low stretching forces and the insulative material of the lead body is fused through a substantial volume of the lead body and along a substantial length of the lead body.

Abstract: Photoresponsive polymers that comprise a unit derived from an amide functional diol compound that includes a coumarin group are provided. Advantageously, the photoresponsive groups of the photoresponsive polymers may be used to control the viscosity of the photoresponsive polymer. The photoresponsize polymers may also include units derived from amide functional diol compounds with include a fatty acid chain or a polyethylene glycol chain. The photoresponsive polymers may be used for 3d printing. When an adhesive group is added to a photoresponsive polymer they may be used as an adhesive. Adhesive groups include catechol groups.

Abstract: A thermoresponsive polyester comprising units derived from an amide functional diol compound having a first amide group having a nitrogen atom and a carbonyl group; a second amide group tethered directly or indirectly through an organic group at the carbonyl group of the first amide group; and two organic groups terminated with a hydroxyl group attached to the nitrogen atom of the first amide group. The thermoresponsive polyesters exhibit a lower critical solution temperature at which they undergo a thermally induced reversible hydrophobicity change. This hydrophobicity change may involve the formation of coacervates of the thermoresponsive polyesters which can then coalesce into a precipitated polymer rich phase.

Abstract: In one embodiment, a method of fabrication of a stimulation lead for electrical stimulation of tissue of a patient, the method comprises: providing a substrate of non-conductive material for a stimulation portion of the stimulation lead; processing the substrate to create a plurality of recessed features into a surface of the substrate, wherein the plurality of recessed features comprise a plurality of paths for electrical traces and a plurality of surfaces for electrodes with each of the surfaces being connected to one of the traces; providing first conductive material over the surface of the substrate; subjecting the surface of the substrate to mechanical processing to remove conductive material from portions of the substrate disposed above the plurality of recessed features, wherein each respective connected electrode and trace is electrically isolated from the other electrodes and traces after the mechanical processing; electrically plating second conductive material over the first conductive material; pr

Abstract: In one embodiment, a paddle-style lead for implantation in the epidural space through an insertion tool, the paddle-style lead comprises: a paddle structure that comprises: (i) a frame of rigid material, the frame comprising a spring member adapted to bias the frame to assume a first width and a first length, the frame being adapted to elongate to assume a second width and a second length under application of a compressive force; and (ii) elastic material disposed across an interior surface area defined the frame, wherein a plurality of electrodes and a plurality of electrical traces are provided on the elastic material, wherein the plurality of electrical traces are electrically coupled to a plurality of lead conductors and the plurality of electrodes; wherein the plurality of electrical traces comprises a plurality of alternating curves that elongate when the elastic material is stretched.

Abstract: A control system for electronically controlling engine speed and PTO clutch mechanism engagement of a grounds maintenance vehicle such as a lawn mower. In one embodiment, an electronic controller (electronic control unit or ECU) may receive operator inputs from a speed setting switch and an on/off PTO clutch engagement switch. The ECU may take these inputs and make intelligent decisions as to when to engage/disengage the clutch mechanism and may change engine speed automatically prior to, during, and/or after clutch mechanism engagement/disengagement. In one or more of these speed setting switch positions, the switch may set a speed of the engine to a first speed when the clutch mechanism is disengaged, and a second speed (different than the first speed) when the clutch mechanism is engaged.

Abstract: Defective artifact removal is described in photolithography masks corrected for optical proximity. In one example a method is described in which partitions are identified in a mask design for independent optimization. The partitions are grouped and ordering into stages. The first stage is processed. Geometries are extracted from the periphery of the first stage partitions. The extracted geometries are added to the peripheries of second stage partitions. Then the second stage partitions are processed.

Abstract: A control system for electronically controlling engine speed and PTO clutch mechanism engagement of a grounds maintenance vehicle such as a lawn mower. In one embodiment, an electronic controller (electronic control unit or ECU) may receive operator inputs from a speed setting switch and an on/off PTO clutch engagement switch. The ECU may take these inputs and make intelligent decisions as to when to engage/disengage the clutch mechanism and may change engine speed automatically prior to, during, and/or after clutch mechanism engagement/disengagement. In one or more of these speed setting switch positions, the switch may set a speed of the engine to a first speed when the clutch mechanism is disengaged, and a second speed (different than the first speed) when the clutch mechanism is engaged.

Abstract: In one embodiment, a method of fabrication of a stimulation lead comprising a plurality of segmented electrodes for stimulation of tissue of a patient, the method comprises: providing an elongated, substantially cylindrical substrate, the substrate comprising a plurality of recesses defined in an outer surface of the substrate; coating the substrate with conductive material; patterning conductive material on the substrate to form a plurality of electrode surfaces for at least the plurality of segmented electrodes and a plurality of traces connected to the plurality of electrode surfaces, wherein each electrode surface and its corresponding trace are defined in the recesses on the outer surface of the substrate and are electrically isolated from other electrode surfaces and traces; providing insulative material over at least the plurality of traces; and electrically coupling the plurality of traces to conductive wires of a lead body.

Abstract: In one embodiment, a stimulation lead for applying electrical pulses to tissue of a patient, the stimulation lead comprises: a plurality of electrodes on a first end of the lead body; a plurality of terminals on a second end of the lead body; a lead body comprising a flex film component disposed within insulative material, wherein (i) the flex film component comprises a plurality of electrical traces, (ii) the plurality of electrical traces electrically couple the plurality of electrodes with the plurality of terminals, and (iii) the flex film component comprises a plurality of bends along a substantial length of the lead body; wherein the stimulation lead is adapted to elastically elongate under application of stretching forces to the lead body without disconnection of the electrical connections between the plurality of electrodes and the plurality of terminals through the electrical traces of the flex film component.