Patents by Inventor Juan Boon Tan

Juan Boon Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12284924
    Abstract: According to various embodiments, there may be provided an interposer. The interposer including: a substrate; a dielectric layer disposed on the substrate; a via disposed entirely within the dielectric layer; a resistive film layer disposed to line the via; a metal interconnect disposed in the resistive layer lined via; and a plurality of metal lines disposed in the dielectric layer, the plurality of metal lines including a first metal line connected to the metal interconnect, a second metal line connected to the resistive film layer at a first point, and a third metal line connected to the resistive film layer at a second point.
    Type: Grant
    Filed: March 18, 2022
    Date of Patent: April 22, 2025
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lup San Leong, Juan Boon Tan, Benfu Lin, Yi Jiang
  • Publication number: 20250112149
    Abstract: A device includes an antifuse structure. The antifuse structure includes a first contact structure and a second contact structure in a first interlevel dielectric (ILD) layer, an opening arranged between the first contact structure and the second contact structure in the first ILD layer, and a dielectric capping layer lining at least sidewalls of the opening. A second ILD layer is arranged over the first ILD layer and in the opening. The second ILD layer lines the dielectric capping layer on at least the sidewalls of the opening. A third contact structure is arranged between the first contact structure and the second contact structure. The third contact structure includes a first portion in the opening.
    Type: Application
    Filed: October 1, 2023
    Publication date: April 3, 2025
    Inventors: SHU HUI LEE, JIANXUN SUN, JUAN BOON TAN
  • Patent number: 12159848
    Abstract: The disclosed subject matter relates generally to methods of forming a semiconductor device, such as a moisture sensor. More particularly, the present disclosure relates to a method of forming a sensor device and a bond pad in the same dielectric region. The present disclosure also relates to the semiconductor devices formed by the method disclosed herein.
    Type: Grant
    Filed: November 3, 2023
    Date of Patent: December 3, 2024
    Assignee: GLOBALFOUNDRIES Singapore Ptd. Ltd.
    Inventors: Ee Jan Khor, Juan Boon Tan, Ramasamy Chockalingam
  • Publication number: 20240365566
    Abstract: Structures for a resistive random-access memory element and methods of forming a structure for a resistive random-access memory element. The structure comprises an interlayer dielectric layer including a first trench having a sidewall and a second trench having a sidewall adjacent to the sidewall of the first trench. The structure further comprises a first layer on the sidewall of the first trench, a second layer inside the second trench, and a third layer on the sidewall of the second trench. The first layer comprises a first metal, the second layer comprises a second metal, and the third layer comprises a dielectric material. The third layer includes a portion positioned between the first layer and the second layer.
    Type: Application
    Filed: April 28, 2023
    Publication date: October 31, 2024
    Inventors: Kai Kang, Curtis Chun-I Hsieh, Jianxun Sun, Juan Boon Tan
  • Patent number: 12102020
    Abstract: A semiconductor memory device is provided. The memory device includes a first electrode, a resistive layer, and a second electrode. The resistive layer is arranged over the first electrode. The second electrode is arranged over the resistive layer. The second electrode includes a lower surface and an extension extending from under the lower surface. The extension is at least partially arranged within the resistive layer.
    Type: Grant
    Filed: January 4, 2022
    Date of Patent: September 24, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Jianxun Sun, Ramasamy Chockalingam, Juan Boon Tan
  • Patent number: 12094763
    Abstract: A device may include a first conductive element and an interlevel dielectric arranged over the first conductive element. The device may further include a dual damascene opening including a first end, a second end, and sidewalls extending between the first and second ends, the sidewalls extending through the interlevel dielectric. A metal-insulator-metal (MIM) stack may line the dual damascene opening. The MIM stack may include a first conductive liner lining the sidewalls and the second end of the dual damascene opening, an insulator layer lining the first conductive liner, and a second conductive liner lining the insulator layer. A first metal interconnect may be disposed in and filling the dual damascene opening lined with the MIM stack.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: September 17, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Kwang Sing Yew, Ramasamy Chockalingam, Juan Boon Tan
  • Publication number: 20240268241
    Abstract: Structures that include a layer stack for a resistive memory element and methods of forming a structure that includes a layer stack for a resistive memory element. The structure comprises a resistive memory element including a first electrode, a second electrode, and a switching layer disposed between the second electrode and the first electrode. The first electrode includes a first layer and a second layer between the first layer and the switching layer. The switching layer has a first thickness, and the second layer of the first electrode has a second thickness that is less than the first thickness of the switching layer.
    Type: Application
    Filed: February 6, 2023
    Publication date: August 8, 2024
    Inventors: Curtis Chun-I Hsieh, Kai Kang, Wanbing Yi, Yongshun Sun, Eng-Huat Toh, Juan Boon Tan
  • Patent number: 12034039
    Abstract: A capacitor structure for an integrated circuit (IC) and a related method of forming are disclosed. The capacitor structure includes three electrodes. A planar bottom electrode has a first insulator layer thereover. A middle electrode includes a conductive layer over the first insulator layer and a plurality of spaced conductive pillars contacting the conductive layer. A second insulator layer extends over and between the plurality of spaced conductive pillars and contacts the conductive layer. An upper electrode extends over the second insulator layer, and hence, over and between the plurality of spaced conductive pillars. A length of the upper electrode can be controlled, in part, by the number and dimensions of the conductive pillars to increase capacitance capabilities per area.
    Type: Grant
    Filed: October 18, 2021
    Date of Patent: July 9, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: EeJan Khor, Ramasamy Chockalingam, Juan Boon Tan
  • Publication number: 20240203873
    Abstract: An antifuse device has a first contact structure and a second contact structure in a substrate. The first contact structure has a first contact side adjoining a second contact side and forming a first contact corner having an acute angle. The second contact structure is spaced from and not electrically connected to the first contact structure. The antifuse device further includes a first dummy structure in the substrate, adjacent to the first contact structure. The first dummy structure has a first dummy side nearest to and spaced from the first contact side of the first contact structure.
    Type: Application
    Filed: December 14, 2022
    Publication date: June 20, 2024
    Inventors: SHU HUI LEE, JUAN BOON TAN, JIANXUN SUN, MYO AUNG MAUNG, HARI BALAN
  • Patent number: 12009326
    Abstract: Structures for a static random access memory bit cell and methods of forming a structure for a static random access memory bit cell. The structure includes a first field-effect transistor on a first substrate and a second field-effect transistor on a second substrate. The first field-effect transistor includes a first gate, and the second field-effect transistor includes a second gate. The structure further includes a first interconnect structure on the first substrate and a second interconnect structure on the second substrate. The first interconnect structure includes a first metal feature connected to the first gate, and the first metal feature has a first surface. The second interconnect structure includes a second metal feature connected to the second gate, and the second metal feature has a second surface that is connected to the first surface of the first metal feature.
    Type: Grant
    Filed: January 26, 2022
    Date of Patent: June 11, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Hari Balan, Juan Boon Tan, Ramasamy Chockalingam, Wanbing Yi
  • Patent number: 11978510
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices incorporating reference cells for achieving high sensing yield. The present disclosure provides a memory device including a main cell structure including a switching element arranged between a pair of conductors, and a reference cell structure electrically coupled to the main cell structure. The reference cell structure includes a switching element arranged between a pair of conductors, in which the switching element of the reference cell structure has a dimension that is different from a dimension of the switching element of the main cell structure.
    Type: Grant
    Filed: July 28, 2021
    Date of Patent: May 7, 2024
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Yi Jiang, Kai Kang, Juan Boon Tan
  • Publication number: 20240079319
    Abstract: An eFuse structure is provided, the structure comprising a first fuse link having a first side. The first fuse link having a first indentation on the first side, the first indentation having a non-linear profile. A first dummy structure may be laterally spaced from the first indentation of the first fuse link.
    Type: Application
    Filed: September 7, 2022
    Publication date: March 7, 2024
    Inventors: SHU HUI LEE, JUAN BOON TAN, JIANXUN SUN, HARI BALAN, MYO AUNG MAUNG
  • Publication number: 20240063154
    Abstract: The disclosed subject matter relates generally to methods of forming a semiconductor device, such as a moisture sensor. More particularly, the present disclosure relates to a method of forming a sensor device and a bond pad in the same dielectric region. The present disclosure also relates to the semiconductor devices formed by the method disclosed herein.
    Type: Application
    Filed: November 3, 2023
    Publication date: February 22, 2024
    Inventors: EE JAN KHOR, JUAN BOON TAN, RAMASAMY CHOCKALINGAM
  • Publication number: 20240049611
    Abstract: The disclosed subject matter relates generally to resistive memory devices and methods of forming the same. More particularly, the present disclosure relates to two terminal and three terminal resistive random-access (ReRAM) memory devices with a cavity arranged between electrodes.
    Type: Application
    Filed: August 4, 2022
    Publication date: February 8, 2024
    Inventors: CURTIS CHUN-I HSIEH, JUAN BOON TAN, WEI-HUI HSU, WANBING YI, KAI KANG
  • Publication number: 20240038653
    Abstract: A structure for a capacitor is provided. The structure includes a first metal electrode, such as a copper electrode, having at least one dielectric region, such as a dielectric, therein. A first dielectric layer is on the first metal electrode, and a second metal electrode is on the first dielectric layer. At least one via is on the second metal electrode. Each via is over the at least one dielectric region in the first metal electrode.
    Type: Application
    Filed: August 1, 2022
    Publication date: February 1, 2024
    Inventors: EeJan Khor, Ramasamy Chockalingam, Juan Boon Tan, Pannirselvam Somasuntharam
  • Patent number: 11855019
    Abstract: The disclosed subject matter relates generally to methods of forming a semiconductor device, such as a moisture sensor. A plurality of electrodes and a bond pad are formed in a dielectric region. A passivation layer is formed on each electrode in the plurality of electrodes and the bond pad. A barrier layer is formed on the passivation layer. A plurality of trenches are formed to extend through the barrier layer and into the dielectric region. Formation of the trenches simultaneously exposes an upper surface of the bond pad. A moisture sensitive dielectric layer is formed on the barrier layer. Formation of the moisture sensitive dielectric layer also fills the trenches to form a plurality of projections, each projection being formed between two electrodes in the plurality of electrodes.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: December 26, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Ee Jan Khor, Juan Boon Tan, Ramasamy Chockalingam
  • Patent number: 11856875
    Abstract: A memory device may be provided. The memory device may include a first electrode including a first side surface and a second side surface opposite to the first side surface; a passivation layer arranged laterally alongside the first side surface of the first electrode; a switching layer arranged laterally alongside the passivation layer; and a second electrode arranged along the switching layer.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: December 26, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Jianxun Sun, Juan Boon Tan, Eng Huat Toh
  • Publication number: 20230402365
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to capacitor structures and methods of manufacture. The structure includes: an airgap provided within a dielectric material; an insulator material across a top of the airgap and on a surface of the dielectric material; and a capacitor provided within the dielectric material and lined with the insulator material.
    Type: Application
    Filed: June 9, 2022
    Publication date: December 14, 2023
    Inventors: Chun-I Hsieh, Ee Jan Khor, Wei-Hui Hsu, Wanbing YI, Juan Boon Tan
  • Publication number: 20230402317
    Abstract: A structure includes a first air gap including a first opening defined in a first dielectric layer and a second dielectric layer over the first opening and closing an end portion of the first opening. A second air gap may be over at least a portion of the first air gap. The second air gap includes a second opening defined in the second dielectric layer and a third dielectric layer over the second opening and closing an end portion of the second opening. The second air gap has a pointed lower end portion. In another version, the structure includes a first air gap in a first dielectric layer, a second dielectric layer over the first air gap, and a discrete dielectric member positioned in the second dielectric layer and aligned over the first air gap.
    Type: Application
    Filed: June 9, 2022
    Publication date: December 14, 2023
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Juan Boon Tan
  • Patent number: 11832538
    Abstract: Structures for a resistive memory element and methods of forming a structure for a resistive memory element. A resistive memory element has a first electrode, a second electrode partially embedded in the first electrode, a third electrode, and a switching layer positioned between the first electrode and the third electrode. The second electrode includes a tip positioned in the first electrode adjacent to the switching layer and a sidewall that tapers to the tip.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: November 28, 2023
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Curtis Chun-I Hsieh, Juan Boon Tan, Calvin Lee