Abstract: A transfer system 7 for carrying a wafer W into/out of a process chamber 4 is provided in a box 10 defining a load-lock chamber 3. The box 10 is divided into a first chamber 11 and a second chamber 12. A transfer arm 21 for carrying the wafer W is provided in the first chamber 11. A linearly moving system 14 for linearly moving the transfer arm 21 is provided in the second chamber 12. The internal pressure in the first chamber is set to be higher than the internal pressure in the second chamber.

Abstract: A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS.

Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages. For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point.

Abstract: An internally meshing planetary gear device which comprises an internal gear having a circular arc tooth form and an outer gear of a planetary gear having an epitrochoid tooth form, the internal gear comprises pins, both ends of which are supported, and rolling bearings inserted onto the pins, and the rolling bearings have outer races meshing with the outer gear.

Abstract: The magnetron plasma processing apparatus includes a vacuum chamber in which a semiconductor wafer is accommodated. In the chamber, a pair of electrodes are provided to face each other, and the wafer is placed on one electrode. Between a pair of the electrodes, a vertical electric field is formed, and a horizontal magnetic field is formed by the dipole ring magnet to cross perpendicularly to the electric field. The magnetic field has a gradient of the magnetic field intensity such that the intensity is high on the upstream side and is low on the downstream side in the electron-drift direction. Further, the magnetic field is formed such that the intensity is made uniform over a large area including the end portion of the wafer on the upstream side in the electron-drift direction and a region right outside it.

Abstract: Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism provided on a side portion of the chamber body, a supporting portion supported by a lift mechanism for up-and-down motion, a valve plate supported by the supporting portion and movable between a closed position such as to close the aperture of the chamber body and an open position such that the valve plate is separated from the aperture to leave the aperture open as the supporting portion is moved up and down by the lift mechanism, and a separating mechanism for allowing the valve plate to move to a position ahead of the aperture so that the valve plate is separated from the aperture.

Abstract: An eccentric orbiting type planetary gear device includes a bearing which requires no pre-load adjustment. The planetary gear device is small in the number of components when compared with the conventional device, and is improved in performance and in assembling efficiency. In manufacturing an eccentric orbiting type planetary gear device in which a supporting block (31) is made up of a supporting member (32) having a plurality of pillar-like portions (32a), and a disk (33), the supporting member and the disk being fastened to each other with fastening members (35) with an external gear (21) between the supporting member and the disk in such a manner the external gear is engaged with an internal gear; the supporting member and the disk are abutted against each other through end faces thereof, and are fastened to each other to form the supporting block, and bearing rolling surfaces (32b) and (33a) corresponding to inner races are formed in the supporting member and the disk at a predetermined interval.

Abstract: The invention relates to an eccentric orbiting type planetary gear device which requires no pre-load adjustment for the bearing, and is small in the number of components when compared with the conventional device, and is improved in performance and in assembling efficiency, and a method of manufacturing the device.

Abstract: A pellet for fabricating a metal matrix composite is made of a mixture of a matrix member of a metal powder and at least one reinforcement selected from whiskers, short fibers and suitable particles, the reinforcement being uniformly distributed in a matrix of the metal powder and said mixture being kept in a shape with a binder, wherein said pellet has a surface layer of dried and rigid portion of said mixture which is rigid enough to keep its shape under an external pressure applied thereto. The pellet is formed from a flat cake of the mixture separated from a slurry consisting of a solution medium and the mixture dispersed therein uniformly. Alternatively, the pellet is formed from the mixture in a dried condition with a granulation binder diluted with a solution medium.

Abstract: An incubator comprises an incubating chamber for accommodating an infant, and air supply means for supplying conditioned air into the incubating chamber. The air supply means comprises a dry passage and a wet passage which are partitioned from each other by a partition wall. The dry passage and the wet passage communicate by means of a first opening and a second opening, respectively, with the incubating chamber. The wet passage communicates by means of a connecting passage having an opening formed in a wall of the dry passage extending along the direction of air flow through the dry passage with the dry passage. A water tank containing water for humidifying air is provided in the connecting passage. A restricting means is provided at least for the first opening to regulate the flow rate of air that flows through the first opening.