Patents by Inventor Junichi Katane
Junichi Katane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9824854Abstract: Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).Type: GrantFiled: December 24, 2014Date of Patent: November 21, 2017Assignee: Hitachi High-Technologies CorporationInventors: Yusuke Ominami, Junichi Katane, Shinsuke Kawanishi, Sukehiro Ito
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Publication number: 20160329188Abstract: Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).Type: ApplicationFiled: December 24, 2014Publication date: November 10, 2016Inventors: Yusuke OMINAMI, Junichi KATANE, Shinsuke KAWANISHI, Sukehiro ITO
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Patent number: 8692195Abstract: The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image.Type: GrantFiled: October 2, 2012Date of Patent: April 8, 2014Assignee: Hitachi High-Technologies CorporationInventors: Sukehiro Ito, Junichi Katane
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Patent number: 8294097Abstract: The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image.Type: GrantFiled: January 20, 2010Date of Patent: October 23, 2012Assignee: Hitachi High-Technologies CorporationInventors: Junichi Katane, Sukehiro Ito
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Patent number: 8143573Abstract: A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.Type: GrantFiled: June 24, 2009Date of Patent: March 27, 2012Assignee: Hitachi High-Technologies CorporationInventors: Sukehiro Ito, Junichi Katane, Shigeru Kawamata, Shinichi Tomita
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Publication number: 20110291010Abstract: The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image.Type: ApplicationFiled: January 20, 2010Publication date: December 1, 2011Inventors: Junichi Katane, Sukehiro Ito
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Patent number: 8026491Abstract: A charged particle beam apparatus facilitating adjusting a beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a first processing step for measuring the sensitivity of the aligner and a second processing step for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus determines the aligner set values, using the aligner sensitivity measured in the first processing step and the amount of deviation detected in the second processing step, such that the primary charged particle beam passes through the center of the objective aperture and controls the aligner using the aligner set values.Type: GrantFiled: March 8, 2007Date of Patent: September 27, 2011Assignee: Hitachi High-Technologies CorporationInventors: Takeshi Ogashiwa, Mitsugu Sato, Atsushi Takane, Toshihide Agemura, Yuusuke Narita, Takeharu Shichiji, Shinichi Tomita, Sukehiro Ito, Junichi Katane
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Patent number: 7755045Abstract: In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.Type: GrantFiled: June 26, 2007Date of Patent: July 13, 2010Assignee: Hitachi High-Technologies CorporationInventors: Michio Hatano, Sukehiro Ito, Shinichi Tomita, Junichi Katane
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Publication number: 20100090109Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.Type: ApplicationFiled: March 31, 2009Publication date: April 15, 2010Inventors: Michio HATANO, Sukehiro Ito, Shinichi Tomita, Junichi Katane
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Publication number: 20090322973Abstract: A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.Type: ApplicationFiled: June 24, 2009Publication date: December 31, 2009Inventors: Sukehiro ITO, Junichi KATANE, Shigeru KAWAMATA, Shinichi TOMITA
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Patent number: 7557346Abstract: A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.Type: GrantFiled: March 13, 2007Date of Patent: July 7, 2009Assignees: Hitachi High-Technologies Corporation, Hitachi High-Tech Science SystemsInventors: Junichi Katane, Sukehiro Ito
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Patent number: 7511271Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.Type: GrantFiled: September 21, 2005Date of Patent: March 31, 2009Assignee: Hitachi Science Systems, Ltd.Inventors: Michio Hatano, Sukehiro Ito, Shinichi Tomita, Junichi Katane
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Publication number: 20080073534Abstract: A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.Type: ApplicationFiled: March 13, 2007Publication date: March 27, 2008Inventors: Junichi Katane, Sukehiro Ito
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Publication number: 20080035843Abstract: In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.Type: ApplicationFiled: June 26, 2007Publication date: February 14, 2008Inventors: Michio Hatano, Sukehiro Ito, Shinichi Tomita, Junichi Katane
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Publication number: 20070284542Abstract: A charged particle beam apparatus facilitating adjusting the beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a processing step (1) for measuring the sensitivity of the aligner and a processing step (2) for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus has means for determining the aligner set values, using the aligner sensitivity measured in the processing step (1) and the amount of deviation detected in the processing step (2), such that the primary charged particle beam passes through the center of the objective aperture and controlling the aligner using the aligner set values.Type: ApplicationFiled: March 8, 2007Publication date: December 13, 2007Inventors: Takeshi Ogashiwa, Mitsugu Sato, Atsushi Takane, Toshihide Agemura, Yuusuke Narita, Takeharu Shichiji, Shinichi Tomita, Sukehiro Ito, Junichi Katane
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Patent number: 7154089Abstract: A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.Type: GrantFiled: December 8, 2004Date of Patent: December 26, 2006Assignees: Hitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.Inventors: Junichi Katane, Sukehiro Ito
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Publication number: 20060186337Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.Type: ApplicationFiled: September 21, 2005Publication date: August 24, 2006Inventors: Michio Hatano, Sukehiro Ito, Shinichi Tomita, Junichi Katane
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Publication number: 20050127294Abstract: A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.Type: ApplicationFiled: December 8, 2004Publication date: June 16, 2005Inventors: Junichi Katane, Sukehiro Ito
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Patent number: D687475Type: GrantFiled: September 12, 2012Date of Patent: August 6, 2013Assignee: Hitachi High-Technologies CorporationInventors: Mitsuru Oonuma, Akira Omachi, Junichi Katane, Mitsuo Akatsu, Hiroyuki Komuro, Tomoyasu Hirashima