Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

Abstract: The object of the present invention is to provide an EL panel that fully attains the intrinsic light-emitting property and that sustains stable light-emitting property. The EL panel 10 in a preferred embodiment of the present invention has a substrate 2, an EL element 4, a passivation film 5 formed on an upper surface of the EL element 4, a protective layer 6 covering the EL element 4, and a seal plate 8, in this order. The protective layer 6 contains an optical cation-curing type resin and an acid-trapping agent.

Abstract: In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

Abstract: A drive stage, for driving a sample or a probe, capable of ensuring a movable range of a movable portion as a counterweight and always effectively canceling an inertial force to suppress vibration of a supporting member leading to vibration of the sample or the probe includes a counter drive element for moving the probe or a sample holding table and a movable portion movable in a direction in which the inertial force generated during movement of the probe or the sample holding table. The movable portion surrounds the counter drive element outside the counter drive element.

Abstract: An imprint method for imprinting an imprint pattern of a mold onto a pattern formation material on a substrate so as to realize a high throughput includes the steps of bringing the imprint pattern and the pattern formation material into contact with each other; applying a first pressure between the mold and the substrate to increase a contact area between the imprint pattern and the pattern formation material; and adjusting a positional relationship between the mold and the substrate at a second pressure lower than the first pressure.

Abstract: A method for manufacturing a semiconductor device is provided, in which the lengths of a wiring trench and a via hole in a depth direction are easily controlled. A component having a first insulating film is prepared on a substrate, and a layer is disposed on the above-described first insulating film. A mold having a pattern is imprinted on the above-described layer so as to form a second insulating film having a wiring trench and a first via, the pattern corresponding to the wiring trench and the first via. Thereafter, the above-described first insulating film is etched by using the above-described second insulating film as a mask so as to form a second via, which is connected to the first via, in the first insulating film.

Abstract: In order to provide a mold and an imprint apparatus which permit adjustment of a depth of an imprint pattern after the imprint pattern is formed, the mold is constituted by a mold substrate including a first material and a surface layer, constituting a projection of the mold and including a second material, for forming a pattern on the photocurable resin material. The first material is more etchable than the second material. The first material and the second material have optical transmittances capable of curing the photocurable resin material with respect to at least a part of wavelength range of ultraviolet light.

Abstract: In order to alleviate or suppress curing of a photocurable resin material in an area in which the curing of the photocurable resin material is not intended, exposure of the photocurable resin material to light is suppressed through a non-pattern portion at which a light-blocking member is provided by means of a mold having an imprint pattern portion and the non-pattern portion or is suppressed by disposing a light-blocking member so as not to irradiate the photocurable resin material with light not via the mold.

Abstract: An imprint apparatus for imprinting a pattern formed on a mold in a resin material formed on a substrate with accuracy is constituted by a light source for irradiating the resin material with light for curing the resin material; a measuring device for measuring a physical value which reflects a state of the resin material resulting from the irradiation of light from the light source; and a controller for controlling a spatial positional relationship between the mold and the substrate or an amount of light from the light source on the basis of information obtained from the measuring device.

Abstract: A panel comprises a substrate; a sealing plate opposing the substrate; a light-emitting device provided on a face opposing the sealing plate in the substrate; a plurality of spacers provided between the substrate and sealing plate so as to be in contact therewith and arranged about the light-emitting device; and a sealant layer, arranged between the substrate and sealing plate so as to bond the substrate and seating plate to each other, including the light-emitting device and spacers therewithin.

Abstract: An apparatus capable of effecting size correction is constituted by a mold 2000 having a first surface 1050 at which an imprinting pattern is formed and a second surface 1055 located opposite from said first surface in a direction of thickness of said mold, and a size adjusting member 2010, disposed at said second surface or between said first surface and said second surface, for deforming the imprinting pattern in an in-plane direction of the first surface.

Abstract: A pattern forming method for forming a pattern includes: preparing a mold 104 provided with a first surface including a pattern area 1000, a second surface located opposite from the first surface, and an alignment mark 2070 provided at a position at which the alignment mark 2070 is away from the second surface and is close to the first surface; contacting the pattern area 1000 of the mold 104 with the coating material disposed on a substrate 5000; obtaining information about positions of the mold 104 and the substrate 5000 by using the alignment mark 2070 and a mark 5300 provided to the substrate 5000 in a state in which the coating material is disposed on the substrate 5000 at a portion where the alignment mark 2070 and the substrate 5000 are opposite to each other; and effecting alignment of the substrate 5000 with the mold 104 with high accuracy on the basis of the information.

Abstract: An imprint apparatus includes a first holding portion 1000 for holding a mold; a second holding portion 1040 for holding a member to be processed; and a support portion 1050 for partially supporting the member to be processed at a position opposite to the mold held by said first holding portion. The mold and the support portion determines a pressurizing axis for pressurizing the member to be processed. The support portion and the second holding portion are movable relative to each other, independently of said first holding portion, in a direction parallel to the pressurizing axis so that said support portion is moved apart from the member to be processed.

Abstract: A pattern transfer apparatus is constituted by a first mold holding portion for holding a first mold for forming a pattern inside a peripheral area of a member and a second mold holding portion for holding a second mold for forming a pattern in the peripheral area of the member.

Abstract: An optical element is formed by using a plurality of pillar-shaped members arranged periodically and a pair of support members arranged perpendicularly relative to the direction of arrangement of the pillar-shaped members so as to sandwich the pillar-shaped members. The optical element showing a periodic structure of periodic distribution of refractive index. An optical characteristic of the optical element is modulated by applying force to the optical element in a direction perpendicular to the direction of arrangement of the pillar-shaped members and changing the diameter of the pillar-shaped members.

Abstract: The preferable method of manufacturing the EL panel comprises a panel precursor formation step of forming a panel precursor comprising a substrate, a sealing plate disposed facing the substrate, an EL device (EL device portion) provided on a surface of the substrate facing the sealing plate, and a sealant comprising a curable adhesive composition filled between the substrate and the sealing plate; a first curing step of irradiating the sealant with light so as to partially cure the curable adhesive composition; and a second curing step of heating the sealant after the irradiation with the light so as to further cure the curable adhesive composition.

Abstract: An optical element is formed by using a plurality of pillar-shaped members arranged periodically and a pair of support members arranged perpendicularly relative to the direction of arrangement of the pillar-shaped members so as to sandwich the pillar-shaped members. The optical element showing a periodic structure of periodic distribution of refractive index. An optical characteristic of the optical element is modulated by applying force to the optical element in a direction perpendicular to the direction of arrangement of the pillar-shaped members and changing the diameter of the pillar-shaped members.

Abstract: An optical element comprising a periodic structure in which a refractive index is distributed periodically and a deforming portion, which mechanically deforms by an external action, wherein the deforming portion is integrally arranged with the periodic structure along the periodic direction of the periodic structure, and is constructed so as to change the periodicity of the periodic structure by deforming in the periodic direction of the periodic structure. A periodicity of the periodic structure (photonic band structure) in which the refractive index changes periodically can be controlled with a simple configuration.

Abstract: An optical deflector comprises a photonic crystal section, a light lead-in means for leading in light having a specific wavelength to the photonic crystal section and an external force application means for deforming the photonic crystal section by way of mechanical external force and changing the angle of refraction of the light led in by the light lead-in means in the photonic crystal section. Such an optical deflector has a compact configuration and operates at high speed.

Abstract: An optical element comprising a periodic structure in which refractive index is distributed periodicly and a deforming portion which mechanically deforms by external action, wherein the deforming portion is integrally arranged with the periodic structure along the periodic direction of the periodic structure, and is so constructed as to change the periodicity of the periodic structure by deforming in the periodic direction of the periodic structure. A periodicity of the periodic structure (photonic band structure) in which the refractive index changes periodically can be controlled with a simple configuration.