Patents by Inventor Junichiro Kozaki

Junichiro Kozaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190196516
    Abstract: A valve device comprises an opening degree detection section and a control section. The control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body, in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.
    Type: Application
    Filed: April 13, 2018
    Publication date: June 27, 2019
    Inventor: Junichiro KOZAKI
  • Patent number: 10260559
    Abstract: A motor driving device comprises a first arithmetic section calculating a rotational speed and a magnetic pole electrical angle of a motor rotor, a current command setting section setting a d-axis current command and a q-axis current command in a rotating coordinate dq system based on a difference between the rotational speed and a target rotational speed, a driving command generating section generating a sinusoidal wave driving command based on the d-axis current command, the q-axis current command, the rotational speed and the magnetic pole electrical angle and a PWM signal generating section. When the rotational speed has a positive value indicating a positive rotational state, the current command setting section sets the q-axis current command of acceleration driving, and when the rotational speed has a negative value indicating a reverse rotational state, the current command setting section sets the q-axis current command of deceleration driving.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: April 16, 2019
    Assignee: SHIMADZU CORPORATION
    Inventor: Junichiro Kozaki
  • Publication number: 20190107110
    Abstract: A gas estimation device for estimating a flow rate and a gas type of gas to be vacuum-pumped by a vacuum pumping device including a vacuum pump and an automatic pressure control valve connected to a suction port of the vacuum pump, comprises: a correlation data storage section configured to store first correlation data containing correlation data regarding an opening degree control gain value of the automatic pressure control valve and correlation data regarding an effective exhaust velocity of the vacuum pumping device and second correlation data indicating a correlation among a flow rate, a gas type, and a motor current value in the vacuum pump; and a first estimation section configured to estimate the flow rate and the gas type of the gas to be vacuum-pumped by the vacuum pumping device based on at least the first correlation data and the second correlation data.
    Type: Application
    Filed: September 15, 2018
    Publication date: April 11, 2019
    Inventors: Junichiro KOZAKI, Masaya NAKAMURA
  • Publication number: 20190072131
    Abstract: A first arithmetic section calculates a current rotation component phase value and a current rotation component amplitude value. A second arithmetic section calculates a displacement rotation component phase value and a displacement rotation component amplitude value. A third arithmetic section calculates a ratio between the amplitude value of the current rotation frequency component and the amplitude value of the displacement rotation frequency component. Feedback control is performed such that the current rotation component phase value is equal to a value obtained by addition of a phase value of 180 degrees to the displacement rotation component phase value and that the amplitude value of the current rotation frequency component is equal to a product of the displacement rotation frequency component and the ratio.
    Type: Application
    Filed: August 4, 2018
    Publication date: March 7, 2019
    Inventor: Junichiro KOZAKI
  • Publication number: 20190063494
    Abstract: When a duration of current noise caused by a PWM control of each excitation amplifier is Td, a cycle of a PWM carrier signal is Tpwm, an on-duty upper limit of the PWM carrier signal under quiet environment without disturbance is Tonu, and an on-duty lower limit of the PWM carrier signal under the quiet environment without the disturbance is Tonl, the AD sampling period includes a first AD sampling period between a point after a lapse of the time Td after a start of the cycle Tpwm and a point after a lapse of a time (Tpwm?Tonu) from the start of the cycle Tpwm, and a second AD sampling period between a point after a lapse of a time (Tpwm?Tonl+Td) from the start of the cycle Tpwm and an end point of the cycle Tpwm.
    Type: Application
    Filed: August 25, 2017
    Publication date: February 28, 2019
    Inventor: Junichiro KOZAKI
  • Publication number: 20180238386
    Abstract: A magnetic bearing device comprises a radial magnetic bearing configured to magnetically levitate and support a rotor shaft in a radial direction; an axial magnetic bearing configured to magnetically levitate and support, in an axial direction, a rotor disc rotatable together with the rotor shaft; and an axial displacement sensor disposed on a surface of an electromagnet core of the axial magnetic bearing facing the rotor disc and configured to detect axial displacement of the rotor disc.
    Type: Application
    Filed: September 30, 2017
    Publication date: August 23, 2018
    Inventor: Junichiro KOZAKI
  • Publication number: 20180216665
    Abstract: A magnetic bearing control device is configured to detect, by a sensor, excitation current supplied from an excitation amplifier to a magnetic bearing configured to magnetically levitate a rotor, thereby generating a voltage equivalent signal for PWM control of the excitation amplifier based on a current setting signal based on a deviation of a rotor levitation position with respect to a target levitation position and an excitation current detection signal of the sensor. The voltage equivalent signal is generated based on the current setting signal and a current deviation signal as a difference between the current setting signal and the excitation current detection signal.
    Type: Application
    Filed: September 27, 2017
    Publication date: August 2, 2018
    Inventor: Junichiro KOZAKI
  • Publication number: 20180196449
    Abstract: A valve control device configured such that a pressure measurement value of a chamber, a target pressure value of the chamber, and an opening degree measurement value of the vacuum valve are input to the valve control device and configured to control an opening degree of the vacuum valve based on a deviation between the pressure measurement value and the target pressure value, comprises: a storage storing a correlation between the opening degree of the vacuum valve and a conductance of a system including the vacuum valve; and a correction gain setting section obtaining, based on the correlation, a change rate of the conductance in association with an opening degree change at the input opening degree measurement value, thereby setting an inverse of the change rate as a correction gain. The opening degree of the vacuum valve is controlled based on the deviation and the correction gain.
    Type: Application
    Filed: January 6, 2018
    Publication date: July 12, 2018
    Inventors: Nobuyuki HIRATA, Junichiro KOZAKI, Atsuo NAKATANI, Masaya NAKAMURA
  • Publication number: 20180195519
    Abstract: A vacuum valve attached to a vacuum pump configured to generate regenerative power to perform a stop operation upon blackout, comprises: a first power input section to which power is input from a commercial power source; a second power input section to which the regenerative power generated at the vacuum pump is input; and a valve source circuit to which the power input to each of the first and second power input sections is supplied. When the power from the commercial power source is supplied to the first power input section, the vacuum valve is operated by the supplied power, and when the power from the commercial power source is stopped, the vacuum valve is operated by the regenerative power.
    Type: Application
    Filed: January 6, 2018
    Publication date: July 12, 2018
    Inventors: Masaya NAKAMURA, Junichiro KOZAKI, Atsuo NAKATANI, Nobuyuki HIRATA
  • Publication number: 20180195518
    Abstract: A vacuum valve connected to a vacuum pump, comprises: a valve plate to be openably/closably driven; a drive section configured to openably/closably drive the valve plate; a signal input section to which a pump information signal indicating an operation state of the vacuum pump is input; and a valve control section configured to control operation of the valve plate based on the input pump information signal.
    Type: Application
    Filed: January 6, 2018
    Publication date: July 12, 2018
    Inventors: Masaya NAKAMURA, Junichiro KOZAKI, Atsuo NAKATANI, Nobuyuki HIRATA
  • Patent number: 10001130
    Abstract: A vacuum pump configured to exhaust gas includes an inductance gap sensor positioned oppositely near an end face of a rotational axis of a rotational body including a rotor; a plurality of individually formed recesses disposed at the end face facing the gap sensor at respectively different angular positions; and at least one ferromagnetic body disposed in at least one of the recesses. The ferromagnetic body has a Curie temperature approximately equal to an allowable temperature of the rotor. The gap sensor senses inductance changes associated with changes in magnetic permeability of the ferromagnetic body to detect a temperature of the rotor. One of the recesses where the ferromagnetic body is not disposed is a rotational number sensor target. Thus, a rotational number of the rotor is detected based on a change in inductance when the rotational number sensor target passes opposite the inductance sensor.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: June 19, 2018
    Assignee: SHIMADZU CORPORATION
    Inventor: Junichiro Kozaki
  • Publication number: 20180023719
    Abstract: A control device configured to control each of a vacuum pump and a vacuum valve provided on a side of a suction port of the vacuum pump, the control device comprises: a motor driver configured to drive a rotor driving motor of the vacuum pump; a valve plate driver configured to drive a valve plate driving motor of the vacuum valve; and a controller configured to control the motor driver and the valve plate driver.
    Type: Application
    Filed: June 12, 2017
    Publication date: January 25, 2018
    Inventors: Masaya NAKAMURA, Kiyonori HIROTA, Junichiro KOZAKI, Nobuyuki HIRATA, Atsuo NAKATANI
  • Publication number: 20170371330
    Abstract: A rotor life estimation device of a vacuum pump including a rotor rotatably driven by a motor and a rotor temperature detection section configured to detect a temperature of the rotor, comprises: an arithmetic section configured to calculate a strain equivalent corresponding to creep strain of the rotor based on a correlation between a creep strain speed equivalent and the temperature of the rotor and the temperature detected by the rotor temperature detection section; an estimation section configured to estimate a rotor life based on the calculated strain equivalent; and a providing section configured to provide information on the estimated rotor life.
    Type: Application
    Filed: June 12, 2017
    Publication date: December 28, 2017
    Inventor: Junichiro KOZAKI
  • Patent number: 9816514
    Abstract: A magnetic bearing device includes first and second radial electromagnets supporting a rotor shaft in a contactless manner in first and second radial directions. A controller controls each of a first excitation amplifier and a second excitation amplifier based on a result of demodulation by each of a first demodulation section and a second demodulation section. The phase of a second carrier signal differs by (?/2+?) radian from the phase of a first carrier signal. A first demodulation section samples a detection signal of a first current sensor at sampling timing shifted by a phase ? from timing at which a first carrier signal becomes a peak, and a second demodulation section samples the detection signal of a second current sensor at sampling timing shifted by a phase (??) from timing at which the second carrier signal becomes a peak.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: November 14, 2017
    Assignee: Shimadzu Corporation
    Inventor: Junichiro Kozaki
  • Publication number: 20170306967
    Abstract: A vacuum pump includes; a rotor, a stator, a motor, a heating section heating the pump base portion, a base temperature detection section detecting a temperature of the pump base portion, a rotor temperature detection section detecting a temperature equivalent as a physical amount equivalent to a temperature of the rotor, and a heating control section to control heating of the pump base portion by the heating section such that a detection value of the rotor temperature detection section falls within a predetermined target value range. A monitoring device comprises: an estimation section configured to estimate, based on multiple temperatures detected over time by the base temperature detection section, maintenance timing at which the temperature of the pump base portion reaches equal to or lower than a predetermined temperature; and an output section configured to output maintenance information based on the estimated maintenance timing.
    Type: Application
    Filed: January 18, 2017
    Publication date: October 26, 2017
    Inventor: Junichiro KOZAKI
  • Publication number: 20170268519
    Abstract: A magnetic bearing vacuum pump comprises: a first displacement signal generation section configured to amplify, by a resolution multiplying factor K of K>1, a displacement modulated wave signal modulated according to a displacement of the rotor from a predetermined position to generate a high-resolution displacement signal in a first displacement region including the predetermined position; a second displacement signal generation section configured to generate a low-resolution displacement signal in a larger second displacement region including the first displacement region; a selection section configured to select either one of the high-resolution displacement signal or the low-resolution displacement signal based on an unsteady-state response signal obtained by excluding a steady-state whirling displacement component from the high-resolution displacement signal or the low-resolution displacement signal; and a bearing control section configured to control the magnetic bearing based on the displacement sig
    Type: Application
    Filed: January 18, 2017
    Publication date: September 21, 2017
    Inventor: Junichiro KOZAKI
  • Publication number: 20170260999
    Abstract: A turbo-molecular pump includes a stator provided at a pump base portion, a rotor rotatably driven on the stator, a heating section configured to heat the pump base portion, abase temperature detection section configured to detect a temperature of the pump base portion, and a rotor temperature detection section configured to detect a temperature equivalent as a physical amount equivalent to a temperature of the rotor. A temperature control device of the turbo-molecular pump comprises: a heating control section configured to control heating of the pump base portion by the heating section based on a detection value of the rotor temperature detection section; and an informing section configured to inform a warning when a detection temperature of the base temperature detection section is equal to or lower than a predetermined threshold.
    Type: Application
    Filed: December 28, 2016
    Publication date: September 14, 2017
    Inventor: Junichiro KOZAKI
  • Publication number: 20170146016
    Abstract: A magnetic bearing device comprises a first carrier generation section generating a first carrier signal; a second carrier generation section generating a second carrier signal whose phase differs by (?/2+?) radian from the phase of the first carrier signal; a first demodulation section performing demodulation by sampling the first modulated signal at sampling timing shifted by a phase ? from timing at which the first carrier signal becomes a peak; a second demodulation section performing demodulation by sampling the second modulated signal at sampling timing shifted by a phase (??) from timing at which the second carrier signal becomes a peak; and a controller controlling current in each of the first radial electromagnet and the second radial electromagnet, based on a result of the demodulation by each of the first demodulation section and the second demodulation section.
    Type: Application
    Filed: February 3, 2017
    Publication date: May 25, 2017
    Inventor: Junichiro KOZAKI
  • Patent number: 9657774
    Abstract: A magnetic bearing device includes a first carrier generation section which generates a first carrier signal, and a second carrier generation section which generates a second carrier signal whose phase differs by (?/2+?) radian from the phase of the first carrier signal. In addition, the magnetic bearing device includes a first demodulation section which performs demodulation by sampling the first modulated signal at sampling timing shifted by a phase ? from timing at which the first carrier signal becomes a peak. A second demodulation section performs demodulation by sampling the second modulated signal at sampling timing shifted by a phase (??) from timing at which the second carrier signal becomes a peak. A controller controls current in each of the first radial electromagnet and the second radial electromagnet, based on a result of the demodulation by each of the first demodulation section and the second demodulation section.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: May 23, 2017
    Assignee: Shimadzu Corporation
    Inventor: Junichiro Kozaki
  • Publication number: 20170110930
    Abstract: A magnetic bearing device comprises: a magnetic bearing configured to magnetically levitate and support a rotor rotatably driven by a sensor-less motor; a detector configured to detect displacement from a levitation target position of the rotor to output a displacement signal; a signal processor configured to compensate, based on motor rotation information from a motor controller of the sensor-less motor, for the displacement signal to reduce a vibration component of electromagnetic force of the magnetic bearing; and a current controller configured to generate control current of the magnetic bearing based on the displacement signal having been processed in the signal processor.
    Type: Application
    Filed: August 11, 2016
    Publication date: April 20, 2017
    Inventor: Junichiro KOZAKI