Abstract: A control device configured to control each of a vacuum pump and a vacuum valve provided on a side of a suction port of the vacuum pump, the control device comprises: a motor driver configured to drive a rotor driving motor of the vacuum pump; a valve plate driver configured to drive a valve plate driving motor of the vacuum valve; and a controller configured to control the motor driver and the valve plate driver.

Abstract: A rotor life estimation device of a vacuum pump including a rotor rotatably driven by a motor and a rotor temperature detection section configured to detect a temperature of the rotor, comprises: an arithmetic section configured to calculate a strain equivalent corresponding to creep strain of the rotor based on a correlation between a creep strain speed equivalent and the temperature of the rotor and the temperature detected by the rotor temperature detection section; an estimation section configured to estimate a rotor life based on the calculated strain equivalent; and a providing section configured to provide information on the estimated rotor life.

Abstract: A magnetic bearing device includes first and second radial electromagnets supporting a rotor shaft in a contactless manner in first and second radial directions. A controller controls each of a first excitation amplifier and a second excitation amplifier based on a result of demodulation by each of a first demodulation section and a second demodulation section. The phase of a second carrier signal differs by (?/2+?) radian from the phase of a first carrier signal. A first demodulation section samples a detection signal of a first current sensor at sampling timing shifted by a phase ? from timing at which a first carrier signal becomes a peak, and a second demodulation section samples the detection signal of a second current sensor at sampling timing shifted by a phase (??) from timing at which the second carrier signal becomes a peak.

Abstract: A vacuum pump includes; a rotor, a stator, a motor, a heating section heating the pump base portion, a base temperature detection section detecting a temperature of the pump base portion, a rotor temperature detection section detecting a temperature equivalent as a physical amount equivalent to a temperature of the rotor, and a heating control section to control heating of the pump base portion by the heating section such that a detection value of the rotor temperature detection section falls within a predetermined target value range. A monitoring device comprises: an estimation section configured to estimate, based on multiple temperatures detected over time by the base temperature detection section, maintenance timing at which the temperature of the pump base portion reaches equal to or lower than a predetermined temperature; and an output section configured to output maintenance information based on the estimated maintenance timing.

Abstract: A magnetic bearing vacuum pump comprises: a first displacement signal generation section configured to amplify, by a resolution multiplying factor K of K>1, a displacement modulated wave signal modulated according to a displacement of the rotor from a predetermined position to generate a high-resolution displacement signal in a first displacement region including the predetermined position; a second displacement signal generation section configured to generate a low-resolution displacement signal in a larger second displacement region including the first displacement region; a selection section configured to select either one of the high-resolution displacement signal or the low-resolution displacement signal based on an unsteady-state response signal obtained by excluding a steady-state whirling displacement component from the high-resolution displacement signal or the low-resolution displacement signal; and a bearing control section configured to control the magnetic bearing based on the displacement sig

Abstract: A turbo-molecular pump includes a stator provided at a pump base portion, a rotor rotatably driven on the stator, a heating section configured to heat the pump base portion, abase temperature detection section configured to detect a temperature of the pump base portion, and a rotor temperature detection section configured to detect a temperature equivalent as a physical amount equivalent to a temperature of the rotor. A temperature control device of the turbo-molecular pump comprises: a heating control section configured to control heating of the pump base portion by the heating section based on a detection value of the rotor temperature detection section; and an informing section configured to inform a warning when a detection temperature of the base temperature detection section is equal to or lower than a predetermined threshold.

Abstract: A magnetic bearing device comprises a first carrier generation section generating a first carrier signal; a second carrier generation section generating a second carrier signal whose phase differs by (?/2+?) radian from the phase of the first carrier signal; a first demodulation section performing demodulation by sampling the first modulated signal at sampling timing shifted by a phase ? from timing at which the first carrier signal becomes a peak; a second demodulation section performing demodulation by sampling the second modulated signal at sampling timing shifted by a phase (??) from timing at which the second carrier signal becomes a peak; and a controller controlling current in each of the first radial electromagnet and the second radial electromagnet, based on a result of the demodulation by each of the first demodulation section and the second demodulation section.

Abstract: A magnetic bearing device includes a first carrier generation section which generates a first carrier signal, and a second carrier generation section which generates a second carrier signal whose phase differs by (?/2+?) radian from the phase of the first carrier signal. In addition, the magnetic bearing device includes a first demodulation section which performs demodulation by sampling the first modulated signal at sampling timing shifted by a phase ? from timing at which the first carrier signal becomes a peak. A second demodulation section performs demodulation by sampling the second modulated signal at sampling timing shifted by a phase (??) from timing at which the second carrier signal becomes a peak. A controller controls current in each of the first radial electromagnet and the second radial electromagnet, based on a result of the demodulation by each of the first demodulation section and the second demodulation section.

Abstract: A magnetic bearing device comprises: a magnetic bearing configured to magnetically levitate and support a rotor rotatably driven by a sensor-less motor; a detector configured to detect displacement from a levitation target position of the rotor to output a displacement signal; a signal processor configured to compensate, based on motor rotation information from a motor controller of the sensor-less motor, for the displacement signal to reduce a vibration component of electromagnetic force of the magnetic bearing; and a current controller configured to generate control current of the magnetic bearing based on the displacement signal having been processed in the signal processor.

Abstract: A magnetic bearing device comprises a controller configured to obtain magnetic levitation information of the rotor shaft by AD sampling of current detection signals from the plurality of current sensors and a sum signal obtained by adding the pair of current detection signals relating to the pair of electromagnets, and perform PWM control of the excitation amplifiers based on the magnetic levitation information. The controller performs PWM control so that a length of one of an on-duty period and an off-duty period of the PWM carrier signal is always longer than a predetermined time period based on an attenuation characteristic of a spike noise produced in the electromagnetic current, and performs the AD sampling after the predetermined time period passes from starting timing of one of the on-duty period and the off-duty period.

Abstract: An estimating section detects a signal including counter electromotive voltage information of the motor, and estimating a magnetic pole electric angle and a rotational speed of the motor. A driving current controller repeats generation and cut-off of the driving current supplied from a power supply to the motor via the inverter circuit or regenerated from the motor to the power supply in a low-speed period between a stopped state and a predetermined rotational speed in an accelerating operation at a motor starting time or a decelerating operation at a motor stopping time. The estimating section detects the signal at the cut-off time so as to estimate the magnetic pole electric angle and the rotational speed in the low-speed period.

Abstract: A motor driving device comprises: an inverter having a plurality of switching elements for driving a motor; an arithmetic section for calculating a rotational speed and a magnetic pole electric angle of a motor rotor based on information about a motor phase voltage and information about a motor phase current; a delay correcting section for correcting a phase delay of the magnetic pole electric angle calculated by the arithmetic section so as to generate corrected magnetic pole electric angle; a driving command generating section for generating a sinusoidal wave driving command based on a difference between the rotational speed and a target rotational speed and the corrected magnetic pole electric angle; and a PWM signal generating section for generating a PWM control signal for controlling on/off of the plurality of switching elements based on the sinusoidal wave driving command.

Abstract: An electromagnet has a core with a pair of magnetic poles, a primary coil wound around the core, and a series circuit of a first auxiliary coil wound around the first magnetic pole of the core, a second auxiliary coil wound around the second magnetic pole of the core, and capacitors, and is connected in parallel to the primary coil and the series circuit. The first and the second magnetic poles are each divided into a plurality of split magnetic poles. The first auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in the plurality of split magnetic poles of the first magnetic pole so that the mutual inductance with the primary coil becomes zero. The second auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in a plurality of split magnetic poles of the second magnetic pole so that the mutual inductance with the primary coil becomes zero.

Abstract: A turbomolecular pump device includes: a turbomolecular pump main body; a power unit that drives the turbomolecular pump main body; and a water cooling unit that is provided between the turbomolecular pump main body and the power unit, wherein components provided in a casing of the power unit are classified into an intensive cooling required component that requires intensive cooling, a moderate cooling required component that requires moderate cooling, and a no cooling required component that requires substantially no cooling, the intensive cooling required component is mounted on a first high-conductivity substrate contacting to the water cooling unit, the moderate cooling required component is mounted on a second high heat-conductive substrate contacting to an inner surface of the casing, and the no cooling required component is mounted on a substrate arranged in a space between the first high heat-conductive substrate and the second high heat-conductive substrate.

Abstract: A predetermined timing is a timing at which the sampling timing is in a vicinity of a maximum peak position of the carrier wave signal and a timing at which the sampling timing is in a vicinity of a minimum peak position. The demodulation arithmetic section outputs, as the demodulation calculated result, a value d3 calculated with d3=(d1?d2)/2 when a data value of the digital signal sampled in the vicinity of the maximum peak position is denoted by d1 and a data value of the digital signal sampled in the vicinity of the minimum peak position is denoted by d2.

Abstract: A motor driving device comprises an inverter, a first arithmetic section, a driving command generating section and a PWM signal generating section. The first arithmetic section calculates a rotational speed and a magnetic pole electrical angle of a motor rotor based on information about a motor phase voltage and information about a motor phase current. The first arithmetic section includes a counter electromotive voltage arithmetic section, a converting section, a second arithmetic section, a third arithmetic section, and a fourth arithmetic section. The first arithmetic section outputs a sum of the magnetic pole phase error and the integrated value as the magnetic pole electrical angle.

Abstract: A magnetic levitation type vacuum pump includes an electromagnet magnetically levitating a rotor by a magnetic force, an electromagnet driving circuit supplying an electromagnet current including a magnetic levitation control current component and a carrier wave current component having a frequency band higher than the magnetic levitation control current component to the electromagnet coil, a levitated position detecting circuit detecting the carrier wave current component and generating a levitated position signal of the rotor, a magnetic levitation control circuit inputting a current command of the magnetic levitation control current component to the electromagnet driving circuit based on the levitated position signal. The electromagnet coil has a primary coil and a secondary coil connected in parallel with the primary coil.

Abstract: A magnetic bearing device comprises a first carrier generation section generating a first carrier signal; a second carrier generation section generating a second carrier signal whose phase differs by (?/2+?) radian from the phase of the first carrier signal; a first demodulation section performing demodulation by sampling the first modulated signal at sampling timing shifted by a phase ? from timing at which the first carrier signal becomes a peak; a second demodulation section performing demodulation by sampling the second modulated signal at sampling timing shifted by a phase (??) from timing at which the second carrier signal becomes a peak; and a controller controlling current in each of the first radial electromagnet and the second radial electromagnet, based on a result of the demodulation by each of the first demodulation section and the second demodulation section.

Abstract: An electromagnet has a core with a pair of magnetic poles, a primary coil wound around the core, and a series circuit of a first auxiliary coil wound around the first magnetic pole of the core, a second auxiliary coil wound around the second magnetic pole of the core, and capacitors, and is connected in parallel to the primary coil and the series circuit. The first and the second magnetic poles are each divided into a plurality of split magnetic poles. The first auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in the plurality of split magnetic poles of the first magnetic pole so that the mutual inductance with the primary coil becomes zero. The second auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in a plurality of split magnetic poles of the second magnetic pole so that the mutual inductance with the primary coil becomes zero.

Abstract: An estimating section detects a signal including counter electromotive voltage information of the motor, and estimating a magnetic pole electric angle and a rotational speed of the motor. A driving current controller repeats generation and cut-off of the driving current supplied from a power supply to the motor via the inverter circuit or regenerated from the motor to the power supply in a low-speed period between a stopped state and a predetermined rotational speed in an accelerating operation at a motor starting time or a decelerating operation at a motor stopping time. The estimating section detects the signal at the cut-off time so as to estimate the magnetic pole electric angle and the rotational speed in the low-speed period.