Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate stack formed over a semiconductor substrate, a source/drain contact structure laterally adjacent to the gate stack, and a gate spacer formed between the gate stack and the source/drain contact structure. The semiconductor device structure also includes a first insulating capping feature covering the upper surface of the gate stack, a second insulating capping feature covering the upper surface of the source/drain contact structure, and an insulating layer covering the upper surfaces of the first insulating capping feature and the second insulating capping feature. The second insulating capping feature includes a material that is different from the material of the first insulating capping feature. The semiconductor device structure also includes a via structure passing through the insulating layer and the first insulating capping feature and electrically connected to the gate stack.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes an insulating layer over a substrate, a gate stack formed in the insulating layer, and an insulating capping layer formed in the insulating layer to cover the gate stack. The semiconductor device structure also includes a source/drain contact structure adjacent to the gate stack. The source/drain contact structure has a sidewall that is in direct contact with a sidewall of the insulating capping layer, and an upper surface that is substantially level with an upper surface of the insulating capping layer and an upper surface of the insulating layer. In addition, the semiconductor device structure includes a first via structure above and electrically connected to the gate stack and a second via structure above and electrically connected to the source/drain contact structure.

Abstract: A semiconductor device includes a substrate, a first gate structure and a second gate structure over the substrate, a first hard mask on a top surface of the first gate structure, a second hard mask on the second gate structure and a third hard mask disposed between the first gate structure and the second gate structure and disposed between the first hard mask and the second hard mask. A bottom surface of the third hard mask is substantially flush with a bottom surface of the first gate structure.

Abstract: A semiconductor device includes a source/drain region, a source/drain silicide layer formed on the source/drain region, and a first contact disposed over the source/drain silicide layer. The first contact includes a first metal layer, an upper surface of the first metal layer is at least covered by a silicide layer, and the silicide layer includes a same metal element as the first metal layer.

Abstract: Field effect transistor and manufacturing method thereof are disclosed. Field effect transistor includes a substrate, a fin, spacers, a gate structure, a hard mask pattern, an insulating layer, and a gate contact. The fin protrudes from the substrate and extends in a first direction. The spacers run in parallel over the fin and extending in a second direction perpendicular to the first direction. The gate structure extends between the spacers and covers the fin. The hard mask pattern covers the gate structure and extends in between the spacers. The insulating layer is disposed over the substrate and covers the hard mask pattern, the gate structure and the spacers. The gate contact penetrates the insulating layer and physically contacts the gate structure. A bottom surface of the gate contact is coplanar with top surfaces of the spacers and the hard mask pattern.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate stack over a substrate and an insulating capping layer over the gate stack. The semiconductor device structure also includes a source/drain contact structure adjacent to the gate stack and having an upper surface that is substantially level with the upper surface of the insulating capping layer. The semiconductor device structure also includes a first via structure passing through the insulating capping layer and electrically connected to the gate stack, and a second via structure above and electrically connected to the source/drain contact structure. The first via structure and the second via structure have different vertical heights.

Abstract: In one example, a method includes performing a first etching process to pattern a dielectric layer and expose a contact etch stop layer, performing a second etching process to remove the etch stop layer and expose a top surface of an underlying feature, performing a third etching process to laterally recess the etch stop layer, and depositing a conductive material over the underlying feature to create a conductive feature in direct contact with the underlying feature.

Abstract: Semiconductor devices are provided, and includes a substrate, a first gate structure and a second gate structure over the substrate, a first hard mask on the first gate structure and a second hard mask on the second gate structure and a third hard mask. The third hard mask is disposed in a dielectric layer between the first gate structure and the second gate structure and disposed between the first hard mask and the second hard mask.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate stack formed over a semiconductor substrate, a source/drain contact structure adjacent to the gate stack, and a gate spacer formed between the gate stack and the source/drain contact structure. The semiconductor device structure also includes a first insulating capping feature covering an upper surface of the gate stack, a second insulating capping feature covering an upper surface of the source/drain contact structure, and an insulating layer covering the upper surfaces of the first insulating capping feature and the second insulating capping feature. The second insulating capping feature includes a material that is different from a material of the first insulating capping feature. The semiconductor device structure also includes a via structure passing through the insulating layer and the first insulating capping feature and electrically connected to the gate stack.

Abstract: A source/drain region is disposed in a substrate. A gate structure is disposed over the substrate. A gate spacer is disposed on a sidewall of the gate structure. The gate spacer and the gate structure have substantially similar heights. A via is disposed over and electrically coupled to: the source/drain region or the gate structure. A mask layer is disposed over the gate spacer. The mask layer has a greater dielectric constant than the gate spacer. A first side of the mask layer is disposed adjacent to the via. A dielectric layer is disposed on a second side of the mask layer, wherein the mask layer is disposed between the dielectric layer and the via.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate stack formed over a semiconductor substrate, a source/drain contact structure laterally adjacent to the gate stack, and a gate spacer formed between the gate stack and the source/drain contact structure. The semiconductor device structure also includes a first insulating capping feature covering the upper surface of the gate stack, a second insulating capping feature covering the upper surface of the source/drain contact structure, and an insulating layer covering the upper surfaces of the first insulating capping feature and the second insulating capping feature. The second insulating capping feature includes a material that is different from the material of the first insulating capping feature. The semiconductor device structure also includes a via structure passing through the insulating layer and the first insulating capping feature and electrically connected to the gate stack.

Abstract: A method for forming a FinFET device structure is provided. The method for forming a FinFET device structure includes forming a fin structure over a substrate, and forming a source/drain (S/D) structure over the fin structure. The method for forming a FinFET device structure also includes forming an inter-layer dielectric (ILD) structure covering the S/D structure, and forming a gate structure over the fin structure and adjacent to the S/D structure. The method for forming a FinFET device structure further includes forming a first hard mask layer over the gate structure, and forming a second hard mask layer over the first hard mask layer. In addition, the method for forming a FinFET device structure includes etching the ILD structure to form an opening exposing the S/D structure. The opening and a recess in the second hard mask layer are formed simultaneously.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate stack over a substrate and an insulating capping layer over the gate stack. The semiconductor device structure also includes a source/drain contact structure adjacent to the gate stack and having an upper surface that is substantially level with the upper surface of the insulating capping layer. The semiconductor device structure also includes a first via structure passing through the insulating capping layer and electrically connected to the gate stack, and a second via structure above and electrically connected to the source/drain contact structure. The first via structure and the second via structure have different vertical heights.

Abstract: A FinFET device structure is provided. The FinFET device structure includes a fin structure formed over a substrate and a gate structure formed over the fin structure. The FinFET device structure also includes a contact formed over the fin structure and adjacent to the gate structure. The FinFET device structure further includes a first hard mask layer formed over the gate structure, and an upper portion of the first hard mask layer has an inverted-T shape. In addition, the FinFET device structure includes a second hard mask layer formed over the contact, and the second hard mask layer has a T shape.

Abstract: Semiconductor devices are provided, and includes a substrate, a first gate structure and a second gate structure over the substrate, a first hard mask on the first gate structure and a second hard mask on the second gate structure and a third hard mask. The third hard mask is disposed in a dielectric layer between the first gate structure and the second gate structure and disposed between the first hard mask and the second hard mask.

Abstract: Methods of fabricating an integrated circuit device are provided. The integrated circuit device includes a transistor formed on a substrate. The transistor includes a source region, a drain region, and a gate structure between the source region and the drain region. The integrated circuit device also includes a first dielectric layer over the transistor and a first via contact partially in the first dielectric layer and electrically connected to the source region. The integrated circuit device further includes a second via contact partially in the first dielectric layer and electrically connected to the gate structure. In addition, the upper portion of the first via contact and the upper portion of the second via contact protrude from the first dielectric layer.

Abstract: A method of forming a semiconductor device includes forming a fin over a substrate, forming a polysilicon gate structure over the fin, and replacing the polysilicon gate structure with a metal gate structure. Replacing of the polysilicon gate structure includes depositing a work function metal layer over the fin, performing a sublimation process on a non-fluorine based metal precursor to produce a gaseous non-fluorine based metal precursor, and depositing a substantially fluorine-free metal layer over the work function metal layer based on the gaseous non-fluorine based metal precursor. The substantially fluorine-free metal layer includes an amount of fluorine less than about 5 atomic percent.

Abstract: A method of forming a semiconductor device includes forming a fin over a substrate, forming a polysilicon gate structure over the fin, and replacing the polysilicon gate structure with a metal gate structure. Replacing of the polysilicon gate structure includes depositing a work function metal layer over the fin, performing a sublimation process on a non-fluorine based metal precursor to produce a gaseous non-fluorine based metal precursor, and depositing a substantially fluorine-free metal layer over the work function metal layer based on the gaseous non-fluorine based metal precursor. The substantially fluorine-free metal layer includes an amount of fluorine less than about 5 atomic percent.

Abstract: In a method of manufacturing a semiconductor device, a first contact hole is formed in one or more dielectric layers disposed over a source/drain region or a gate electrode. An adhesive layer is formed in the first contact hole. A first metal layer is formed on the adhesive layer in the first contact hole. A silicide layer is formed on an upper surface of the first metal layer. The silicide layer includes a same metal element as the first metal layer.

Abstract: A semiconductor device includes a source/drain region, a source/drain silicide layer formed on the source/drain region, and a first contact disposed over the source/drain silicide layer. The first contact includes a first metal layer, an upper surface of the first metal layer is at least covered by a silicide layer, and the silicide layer includes a same metal element as the first metal layer.