Patents by Inventor Kam-Tou SIO
Kam-Tou SIO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12278230Abstract: A method (of manufacturing conductors for a semiconductor device) includes: forming active regions (ARs) in a first layer, the ARs extending in a first direction; forming a conductive layer over the first layer; forming first, second and third caps over the conductive layer, the caps extending in a second direction perpendicular to the first direction, and the caps having corresponding first, second and third sensitivities that are different from each other; removing portions of the conductive layer not under the first, second or third caps resulting in gate electrodes under the first caps and first and second drain/source (D/S) electrodes correspondingly under the second or third caps; and selectively removing portions of corresponding ones of the first D/S electrodes and the second D/S electrodes.Type: GrantFiled: June 26, 2023Date of Patent: April 15, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kam-Tou Sio, Chih-Liang Chen, Hui-Ting Yang, Shun Li Chen, Ko-Bin Kao, Chih-Ming Lai, Ru-Gun Liu, Charles Chew-Yuen Young
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Patent number: 12261113Abstract: A semiconductor structure includes a first conductive line, a first conductive segment, a second conductive segment, and a third conductive segment. The first conductive segment is electrically coupled to the first conductive line. The second conductive segment is electrically coupled the first conductive segment. The second conductive segment is disposed between the first conductive segment and the third conductive segment. A top surface of the first conductive segment is aligned with a top surface of the second conductive segment in a same layer.Type: GrantFiled: December 12, 2022Date of Patent: March 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Meng-Hung Shen, Chih-Liang Chen, Charles Chew-Yuen Young, Jiann-Tyng Tzeng, Kam-Tou Sio, Wei-Cheng Lin
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Patent number: 12261115Abstract: A semiconductor device includes a first active region, disposed on a first side of a substrate, that extends along a first lateral direction. The semiconductor device includes a second active region, disposed on the first side, that extends along the first lateral direction. The first active region has a first conduction type and the second active region has a second conduction type opposite to the first conduction type. The semiconductor device includes a first interconnect structure, formed on a second side of the substrate opposite to the first side, that includes: a first portion extending along the first lateral direction and vertically disposed below the first active region; and a second portion extending along a second lateral direction. The first latera direction is perpendicular to the first lateral direction.Type: GrantFiled: May 7, 2021Date of Patent: March 25, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng
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Patent number: 12255203Abstract: A monolithic three dimensional integrated circuit is provided. The monolithic three dimensional integrated circuit includes a first cell layer having a first cell having a first active component of the monolithic three dimensional integrated circuit. A second layer having a second cell including a second active component. The second cell layer is formed vertically above the first cell layer. The first cell layer having the first active component and the second cell layer having the second active component are formed in a single die. The first cell has a smaller metal pitch than the second cell. A buried via electrically couples the first active component of the first cell of the first cell layer with the second active component of the second cell of the second cell layer.Type: GrantFiled: April 30, 2021Date of Patent: March 18, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng, Shih-Wei Peng
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Publication number: 20250063823Abstract: An integrated circuit includes a driver cell and at least one transmission cell. The driver cell includes a first active area and a second active area, and a first conductive line coupled to the first active area and the second active area on a back side of the integrated circuit. The at least one transmission cell having a second cell height includes a third active area and a fourth active area, a second conductive line coupled to the third active area and the fourth active area on the back side of the integrated circuit, and a conductor coupled to the third active area and the fourth active area. The integrated circuit further includes a third conductive line coupled between the first conductive line and the second conductive line on the back side to transmit a signal between the driver cell and the at least one transmission cell.Type: ApplicationFiled: November 4, 2024Publication date: February 20, 2025Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kam-Tou SIO, Jiann-Tyng TZENG
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Patent number: 12230624Abstract: An integrated circuit structure includes: an integrated circuit structure includes: a first plurality of cell rows extending in a first direction, and a second plurality of cell rows extending in the first direction. Each of the first plurality of cell rows has a first row height and comprises a plurality of first cells disposed therein. Each of the second plurality of cell rows has a second row height different from the first row height and comprises a plurality of second cells disposed therein. The plurality of first cells comprises a first plurality of active regions each of which continuously extends across the plurality of first cells in the first direction. The plurality of second cells comprises a second plurality of active regions each of which continuously extends across the plurality of second cells in the first direction. At least one active region of the first and second pluralities of active regions has a width varying along the first direction.Type: GrantFiled: August 10, 2023Date of Patent: February 18, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng, Chung-Hsing Wang, Yi-Kan Cheng
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Patent number: 12218050Abstract: A method for fabricating a semiconductor structure includes depositing a first insulation material over a substrate, wherein the substrate includes an active region. The method further includes etching the first insulation material to define a first recess extending along a first direction at a first level of the first insulation material. The method further includes depositing a second insulation material lining with a sidewall of the first recess. The method further includes depositing a first metal line in the first recess.Type: GrantFiled: June 22, 2022Date of Patent: February 4, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Te-Hsin Chiu, Wei-An Lai, Meng-Hung Shen, Wei-Cheng Lin, Jiann-Tyng Tzeng, Kam-Tou Sio
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Patent number: 12219748Abstract: Devices and methods are described herein that obviate the need for a read assist circuit. In one example, a semiconductor device includes a source region and a drain region formed above a substrate. A buried insulator (BI) layer is formed beneath either the source region or the drain region. A first nano-sheet is formed (i) horizontally between the source region and the drain region and (ii) vertically above the BI layer. The BI layer reduces current flow through the first nano-sheet.Type: GrantFiled: August 8, 2023Date of Patent: February 4, 2025Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Kam-Tou Sio, Yi-Hsun Chiu
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Publication number: 20250022801Abstract: An integrated circuit includes a first and second power rail extending in a first direction and being on a first level of a back-side of a substrate, a first and second active region and a first conductive line. The first power rail is configured to supply a first supply voltage. The second power rail is configured to supply a second supply voltage. The first and second active region extend in the first direction, and are on a second level of a front-side of the substrate opposite from the back-side. The first active region is overlapped by the first power rail. The second active region is overlapped by the second power rail. The first conductive line extends in the second direction, is on a third level of the back-side of the substrate, and overlaps the first and second active region.Type: ApplicationFiled: September 26, 2024Publication date: January 16, 2025Inventors: Te-Hsin CHIU, Kam-Tou SIO, Shih-Wei PENG, Wei-Cheng LIN, Jiann-Tyng TZENG
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Patent number: 12170277Abstract: An integrated circuit includes a driver cell and at least one transmission cell. The driver cell includes a first active area and a second active area, and a first conductive line coupled to the first active area and the second active area on a back side of the integrated circuit. The at least one transmission cell having a second cell height includes a third active area and a fourth active area, a second conductive line coupled to the third active area and the fourth active area on the back side of the integrated circuit, and a conductor coupled to the third active area and the fourth active area. The integrated circuit further includes a third conductive line coupled between the first conductive line and the second conductive line on the back side to transmit a signal between the driver cell and the at least one transmission cell.Type: GrantFiled: May 11, 2021Date of Patent: December 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng
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Publication number: 20240395793Abstract: An integrated circuit includes a driver cell and at least one transmission cell. The driver cell includes a first active area and a second active area, and a first conductive line coupled to the first active area and the second active area on a back side of the integrated circuit. The at least one transmission cell having a second cell height includes a third active area and a fourth active area, a second conductive line coupled to the third active area and the fourth active area on the back side of the integrated circuit, and a conductor coupled to the third active area and the fourth active area. The integrated circuit further includes a third conductive line coupled between the first conductive line and the second conductive line on the back side to transmit a signal between the driver cell and the at least one transmission cell.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kam-Tou SIO, Jiann-Tyng TZENG
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Publication number: 20240395819Abstract: A method includes placing, in a layout, a plurality of first cells each having a first NFET fin number. The first cells are swapped with a plurality of second cells each having a second NFET fin number less than the first NFET fin number. After swapping the first cells with the second cells, a timing critical path in the layout is identified. Some of the second cells in the identified timing critical path are swapped with a plurality of third cells each having a third NFET fin number greater than the second NFET fin number. After swapping some of the second cells in the identified timing critical path with the third cells, an integrated circuit is fabricated based on the layout.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kam-Tou SIO, Jiann-Tyng TZENG
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Publication number: 20240395717Abstract: A method for fabricating a semiconductor device includes forming a plurality of transistors on a first side of a substrate. The method further includes coupling the plurality of transistors by forming, on the first side, a plurality of first interconnect structures extending along either a first lateral direction or a second lateral direction. The first and second lateral directions are perpendicular to each other. The method further includes forming, on a second side of the substrate opposite to the first side, a plurality of third interconnect structures. At least one of the third interconnect structures comprises a first portion and a second portion that extend along the first and second lateral directions, respectively. The method further includes forming, on the second side, a plurality of power rail structures extending along the first lateral direction.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng
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Publication number: 20240387369Abstract: A method includes: disposing a first conductive segment; disposing a first conductive via above the first conductive segment; disposing a first conductive line above the first conductive via; and disposing a second conductive segment electrically coupled to the first conductive line through a third conductive segment, the first conductive segment, and the first conductive via.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Meng-Hung SHEN, Chih-Liang CHEN, Charles Chew-Yuen YOUNG, Jiann-Tyng TZENG, Kam-Tou SIO, Wei-Cheng LIN
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Publication number: 20240387361Abstract: An integrated circuit includes a first conductive line parallel to a top surface of the substrate; a second conductive line parallel to the top surface of the substrate; a third conductive line parallel to the top surface of the substrate; and a fourth conductive line parallel to the top surface of the substrate. The integrated circuit further includes a first supervia directly connected to the first conductive line and the third conductive line, wherein a first angle between a lower sidewall of a lower portion of the first supervia and the top surface of the substrate is different from a second angle between an upper sidewall of an upper portion of the first supervia and the top surface of the substrate. The integrated circuit further includes a second supervia directly connecting the second conductive line to the fourth conductive line.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Inventors: Kam-Tou SIO, Wei-Cheng LIN, Jiann-Tyng TZENG
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Patent number: 12148754Abstract: A method includes placing, in a layout, a plurality of first cells each having a first NFET fin number. The first cells are swapped with a plurality of second cells each having a second NFET fin number less than the first NFET fin number. After swapping the first cells with the second cells, a timing critical path in the layout is identified. Some of the second cells in the identified timing critical path are swapped with a plurality of third cells each having a third NFET fin number greater than the second NFET fin number. After swapping some of the second cells in the identified timing critical path with the third cells, an integrated circuit is fabricated based on the layout.Type: GrantFiled: November 28, 2022Date of Patent: November 19, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng
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Publication number: 20240379676Abstract: An integrated circuit device includes: a first fin structure disposed on a substrate in a first direction; a second fin structure disposed on the substrate and aligned in the first direction; a third fin structure disposed on the substrate and aligned in the first direction; and a first conductive line aligned in a second direction arranged to wrap a first portion, a second portion, and a third portion of the first fin structure, the second fin structure and the third fin structure, respectively. Each of the first fin structure, the second fin structure and the third fin structure has a same type dopant. A first distance between the first fin structure and the second fin structure is different from a second distance between the second fin structure and the third fin structure.Type: ApplicationFiled: July 25, 2024Publication date: November 14, 2024Inventors: KAM-TOU SIO, SHANG-WEI FANG, JIANN-TYNG TZENG, CHEW-YUEN YOUNG
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Publication number: 20240370626Abstract: Generating a circuit layout is provided. A circuit layout associated with a circuit is received. A parallel pattern recognition is performed on the circuit layout. Performing the parallel pattern recognition includes determining that there is a parallel pattern in the circuit layout. In response to determining that there is a parallel pattern in the circuit layout, a cell swap for a first cell associated with the parallel pattern with a second cell is performed. After the cell swap for the first cell, engineering change order routing is performed to connect the second cell in the circuit layout. An updated circuit layout having the second cell is provided.Type: ApplicationFiled: July 15, 2024Publication date: November 7, 2024Inventors: Shih-Wei Peng, Kam-Tou Sio, Jiann-Tyng Tzeng
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Patent number: 12132049Abstract: An integrated circuit device includes: a first fin structure disposed on a substrate in a first direction; a second fin structure disposed on the substrate and aligned in the first direction; a third fin structure disposed on the substrate and aligned in the first direction; and a first conductive line aligned in a second direction arranged to wrap a first portion, a second portion, and a third portion of the first fin structure, the second fin structure and the third fin structure, respectively. Each of the first fin structure, the second fin structure and the third fin structure has a same type dopant. A first distance between the first fin structure and the second fin structure is different from a second distance between the second fin structure and the third fin structure.Type: GrantFiled: April 18, 2023Date of Patent: October 29, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Kam-Tou Sio, Shang-Wei Fang, Jiann-Tyng Tzeng, Chew-Yuen Young
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Patent number: 12131998Abstract: A method of fabricating an integrated circuit includes fabricating a set of transistors in a front-side of a substrate, fabricating a first set of vias in a back-side of the substrate, depositing a first set of conductive structures on the back-side on a first level, depositing a second set of conductive structures on the back-side on a second level thereby forming a set of power rails, fabricating a second set of vias in the back-side, and depositing a third set of conductive structures on the back-side on a third level. The first set of vias is electrically coupled to the set of transistors. The second set of vias is electrically coupled to the first and third set of conductive structures. A first structure of the first set of conductive structures is electrically coupled to a first via of the first set of vias.Type: GrantFiled: April 10, 2023Date of Patent: October 29, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Te-Hsin Chiu, Kam-Tou Sio, Shih-Wei Peng, Wei-Cheng Lin, Jiann-Tyng Tzeng