Patents by Inventor Kam-Tou SIO

Kam-Tou SIO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230335545
    Abstract: A method (of manufacturing conductors for a semiconductor device) includes: forming active regions (ARs) in a first layer, the ARs extending in a first direction; forming a conductive layer over the first layer; forming first, second and third caps over the conductive layer, the caps extending in a second direction perpendicular to the first direction, and the caps having corresponding first, second and third sensitivities that are different from each other; removing portions of the conductive layer not under the first, second or third caps resulting in gate electrodes under the first caps and first and second drain/source (D/S) electrodes correspondingly under the second or third caps; and selectively removing portions of corresponding ones of the first D/S electrodes and the second D/S electrodes.
    Type: Application
    Filed: June 26, 2023
    Publication date: October 19, 2023
    Inventors: Kam-Tou SIO, Chih-Liang CHEN, Hui-Ting YANG, Shun Li CHEN, Ko-Bin KAO, Chih-Ming LAI, Ru-Gun LIU, Charles Chew-Yuen YOUNG
  • Patent number: 11769723
    Abstract: A monolithic three-dimensional (3D) integrated circuit (IC) device includes a lower tier including a lower tier cell and an upper tier arranged over the lower tier. The upper tier has a first upper tier cell and a second upper tier cell separated by a predetermined lateral space. A monolithic inter-tier via (MIV) extends from the lower tier through the predetermined lateral space, and the MIV has a first end electrically connected to the lower tier cell and a second end electrically connected to the first upper tier cell.
    Type: Grant
    Filed: April 22, 2021
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Wei Peng, Jiann-Tyng Tzeng, Kam-Tou Sio, Wei-Cheng Lin, Wei-An Lai
  • Patent number: 11769766
    Abstract: An integrated circuit structure includes: an integrated circuit structure includes: a first plurality of cell rows extending in a first direction, and a second plurality of cell rows extending in the first direction. Each of the first plurality of cell rows has a first row height and comprises a plurality of first cells disposed therein. Each of the second plurality of cell rows has a second row height different from the first row height and comprises a plurality of second cells disposed therein. The plurality of first cells comprises a first plurality of active regions each of which continuously extends across the plurality of first cells in the first direction. The plurality of second cells comprises a second plurality of active regions each of which continuously extends across the plurality of second cells in the first direction. At least one active region of the first and second pluralities of active regions has a width varying along the first direction.
    Type: Grant
    Filed: January 26, 2022
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng, Chung-Hsing Wang, Yi-Kan Cheng
  • Patent number: 11768991
    Abstract: A method of generating a layout diagram for an integrated circuit. The method includes arranging a plurality of cells in the layout diagram. The method further includes placing a plurality of cell pins over a plurality of selected via placement points in a first cell of the plurality of cells, wherein at least one cell pin of the plurality of cell pins extends along a routing track of a plurality of routing tracks across a boundary of the first cell and into a second cell of the plurality of cells abutting the first cell.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: September 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng
  • Publication number: 20230297755
    Abstract: Generating a circuit layout is provided. A circuit layout associated with a circuit is received. A parallel pattern recognition is performed on the circuit layout. Performing the parallel pattern recognition includes determining that there is a parallel pattern in the circuit layout. In response to determining that there is a parallel pattern in the circuit layout, a cell swap for a first cell associated with the parallel pattern with a second cell is performed. After the cell swap for the first cell, engineering change order routing is performed to connect the second cell in the circuit layout. An updated circuit layout having the second cell is provided.
    Type: Application
    Filed: May 30, 2023
    Publication date: September 21, 2023
    Inventors: Shih-Wei Peng, Kam-Tou Sio, Jiann-Tyng Tzeng
  • Patent number: 11765878
    Abstract: Devices and methods are described herein that obviate the need for a read assist circuit. In one example, a semiconductor device includes a source region and a drain region formed above a substrate. A buried insulator (BI) layer is formed beneath either the source region or the drain region. A first nano-sheet is formed (i) horizontally between the source region and the drain region and (ii) vertically above the BI layer. The BI layer reduces current flow through the first nano-sheet.
    Type: Grant
    Filed: December 16, 2021
    Date of Patent: September 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kam-Tou Sio, Yi-Hsun Chiu
  • Publication number: 20230282639
    Abstract: A method of forming an integrated circuit structure includes generating a first well layout pattern corresponding to fabricating a first well in the integrated circuit structure. The generating the first well layout pattern includes generating a first layout pattern having a first width, and corresponding to fabricating a first portion of the first well, and generating a second layout pattern having a second width and corresponding to fabricating a second portion of the first well. The method further includes generating a first implant layout pattern having a third width and corresponding to fabricating a first set of implants in the first portion of the first well, generating a second implant layout pattern having a fourth width and corresponding to fabricating a second set of implants in the second portion of the first well, and manufacturing the integrated circuit structure based on the above layout patterns.
    Type: Application
    Filed: May 15, 2023
    Publication date: September 7, 2023
    Inventors: Kam-Tou SIO, Chih-Liang CHEN, Charles Chew-Yuen YOUNG, Hui-Zhong ZHUANG, Jiann-Tyng TZENG, Yi-Hsun CHIU
  • Publication number: 20230275088
    Abstract: An integrated circuit structure includes a first transistor, a second transistor, a first conductive via, a second conductive via, and a connection line. The first transistor includes a first active region, a first gate electrode over the first active region; and a first channel in the first active region and under the first gate electrode. The second transistor includes a second active region, a second gate electrode over the second active region, and a second channel in the second active region and under the second gate electrode. The first conductive via is electrically connected to the first gate electrode. The second conductive via is electrically connected to the second gate electrode. The connection line electrically connects the first and second conductive vias. The first transistor and the first conductive via and the second transistor and the second conductive via are arranged mirror-symmetrically with respect to a symmetry plane.
    Type: Application
    Filed: May 4, 2023
    Publication date: August 31, 2023
    Inventors: WEI-LING CHANG, LEE-CHUNG LU, XIANGDONG CHEN, KAM-TOU SIO, HSIANG-CHI HUANG
  • Publication number: 20230275090
    Abstract: A semiconductor device includes a first cell in a first row, wherein the first row extends in a first direction, the first cell having a first cell height measured in a second direction perpendicular to the first direction. The semiconductor device further includes a second cell in the first row, wherein the second cell has a second cell height measured in the second direction, the second cell height is less than the first cell height. The second cell includes a first active region having a first width measured in the second direction, and a second active region having a second width measured in the second direction, wherein the second width is different from the first width.
    Type: Application
    Filed: June 10, 2022
    Publication date: August 31, 2023
    Inventors: Jiann-Tyng TZENG, Kam-Tou SIO, Shang-Wei FANG, Chun-Yen LIN, Sheng-Feng HUANG, Yi-Kan CHENG, Lee-Chung LU
  • Patent number: 11735517
    Abstract: A method including depositing a first dielectric layer over a first conductive line. The method further includes forming a first opening in the first dielectric layer. The method further includes filling the first opening with a first conductive material to define a second conductive line. The method further includes depositing a second dielectric layer over the first dielectric layer. The method further includes forming a second opening in the second dielectric layer. The method further includes filling the second opening with a second conductive material to define a third conductive line. The method further includes forming a supervia opening in the first dielectric layer and the second dielectric layer. The method further includes filling the supervia opening with a third conductive material to define a supervia, wherein the supervia directly connects to the first conductive line and the third conductive line.
    Type: Grant
    Filed: February 1, 2022
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kam-Tou Sio, Wei-Cheng Lin, Jiann-Tyng Tzeng
  • Publication number: 20230253403
    Abstract: An integrated circuit device includes: a first fin structure disposed on a substrate in a first direction; a second fin structure disposed on the substrate and aligned in the first direction; a third fin structure disposed on the substrate and aligned in the first direction; and a first conductive line aligned in a second direction arranged to wrap a first portion, a second portion, and a third portion of the first fin structure, the second fin structure and the third fin structure, respectively. Each of the first fin structure, the second fin structure and the third fin structure has a same type dopant. A first distance between the first fin structure and the second fin structure is different from a second distance between the second fin structure and the third fin structure.
    Type: Application
    Filed: April 18, 2023
    Publication date: August 10, 2023
    Inventors: KAM-TOU SIO, SHANG-WEI FANG, JIANN-TYNG TZENG, CHEW-YUEN YOUNG
  • Publication number: 20230247817
    Abstract: A method (of manufacturing fins for a semiconductor device) includes: forming semiconductor fins including ones thereof having a first cap with a first etch sensitivity (first capped fins) and second ones thereof having a second cap with a second etch sensitivity (second capped fins), the first and second etch sensitivities being different; and eliminating selected ones of the first capped fins and selected ones of the second capped fins.
    Type: Application
    Filed: March 27, 2023
    Publication date: August 3, 2023
    Inventors: Chih-Liang CHEN, Chih-Ming LAI, Charles Chew-Yuen YOUNG, Chin-Yuan TSENG, Jiann-Tyng TZENG, Kam-Tou SIO, Ru-Gun LIU, Wei-Liang LIN, L. C. CHOU
  • Publication number: 20230246016
    Abstract: A semiconductor structure is disclosed, including a first gate and a second gate aligned with the first gate, a first gate via, a second gate via, multiple conductive segments, and a first conductive line. The first gate via is disposed on the first gate and the second gate via is disposed on the second gate. The first and second gates are configured to be a terminal of a first logic circuit, which is coupled to a terminal of a second logic circuit. The first conductive line is coupled to the first gate through a first connection via and the first gate via and is electrically coupled to the second gate through a second connection via and the second gate via.
    Type: Application
    Filed: March 28, 2023
    Publication date: August 3, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kam-Tou SIO, Sang-Chi HUANG
  • Publication number: 20230245970
    Abstract: A method of fabricating an integrated circuit includes fabricating a set of transistors in a front-side of a substrate, fabricating a first set of vias in a back-side of the substrate, depositing a first set of conductive structures on the back-side on a first level, depositing a second set of conductive structures on the back-side on a second level thereby forming a set of power rails, fabricating a second set of vias in the back-side, and depositing a third set of conductive structures on the back-side on a third level. The first set of vias is electrically coupled to the set of transistors. The second set of vias is electrically coupled to the first and third set of conductive structures. A first structure of the first set of conductive structures is electrically coupled to a first via of the first set of vias.
    Type: Application
    Filed: April 10, 2023
    Publication date: August 3, 2023
    Inventors: Te-Hsin CHIU, Kam-Tou SIO, Shih-Wei PENG, Wei-Cheng LIN, Jiann-Tyng TZENG
  • Patent number: 11688730
    Abstract: A system that generates a layout diagram has a processor that implements a method, the method including: generating first and second conductor shapes; generating first, second and third cap shapes correspondingly over the first and second conductor shapes; arranging a corresponding one of the second conductor shapes to be interspersed between each pair of neighboring ones of the first conductor shapes; generating first cut patterns over selected portions of corresponding ones of the first cap shapes; and generating second cut patterns over selected portions of corresponding ones of the second cap shapes. In some circumstances, the first cut patterns are designated as selective for a first etch sensitivity corresponding to the first cap shapes; and the second cut patterns are designated as selective for a second etch sensitivity corresponding to the second cap shapes.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kam-Tou Sio, Chih-Liang Chen, Hui-Ting Yang, Shun Li Chen, Ko-Bin Kao, Chih-Ming Lai, Ru-Gun Liu, Charles Chew-Yuen Young
  • Patent number: 11682671
    Abstract: An integrated circuit structure includes a first transistor, a second transistor, a first conductive via, a second conductive via, and a connection line. The first transistor includes a first active region, a first gate electrode over the first active region; and a first channel in the first active region and under the first gate electrode. The second transistor includes a second active region, a second gate electrode over the second active region, and a second channel in the second active region and under the second gate electrode. The first conductive via is electrically connected to the first gate electrode. The second conductive via is electrically connected to the second gate electrode. The connection line electrically connects the first and second conductive vias. The first transistor and the first conductive via and the second transistor and the second conductive via are arranged mirror-symmetrically with respect to a symmetry plane.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: June 20, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wei-Ling Chang, Lee-Chung Lu, Xiangdong Chen, Kam-Tou Sio, Hsiang-Chi Huang
  • Publication number: 20230187434
    Abstract: A method is provided, including the following operations: arranging a first gate structure extending continuously above a first active region and a second active region of a substrate; arranging a first separation spacer disposed on the first gate structure to isolate an electronic signal transmitted through a first gate via and a second gate via that are disposed on the first gate structure, wherein the first gate via and the second gate via are arranged above the first active region and the second active region respectively; and arranging a first local interconnect between the first active region and the second active region, wherein the first local interconnect is electrically coupled to a first contact disposed on the first active region and a second contact disposed on the second active region.
    Type: Application
    Filed: February 10, 2023
    Publication date: June 15, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Charles Chew-Yuen YOUNG, Chih-Liang CHEN, Chih-Ming LAI, Jiann-Tyng TZENG, Shun-Li CHEN, Kam-Tou SIO, Shih-Wei PENG, Chun-Kuang CHEN, Ru-Gun LIU
  • Patent number: 11663389
    Abstract: Generating a circuit layout is provided. A circuit layout associated with a circuit is received. A parallel pattern recognition is performed on the circuit layout. Performing the parallel pattern recognition includes determining that there is a parallel pattern in the circuit layout. In response to determining that there is a parallel pattern in the circuit layout, a cell swap for a first cell associated with the parallel pattern with a second cell is performed. After the cell swap for the first cell, engineering change order routing is performed to connect the second cell in the circuit layout. An updated circuit layout having the second cell is provided.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: May 30, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Wei Peng, Kam-Tou Sio, Jiann-Tyng Tzeng
  • Patent number: 11658182
    Abstract: An integrated circuit device includes: a first fin structure disposed on a substrate in a first direction; a second fin structure disposed on the substrate and aligned in the first direction; a third fin structure disposed on the substrate and aligned in the first direction; and a first conductive line aligned in a second direction arranged to wrap a first portion, a second portion, and a third portion of the first fin structure, the second fin structure and the third fin structure, respectively. Each of the first fin structure, the second fin structure and the third fin structure has a same type dopant. A first distance between the first fin structure and the second fin structure is different from a second distance between the second fin structure and the third fin structure.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Kam-Tou Sio, Shang-Wei Fang, Jiann-Tyng Tzeng, Chew-Yuen Young
  • Publication number: 20230154846
    Abstract: A method of making a semiconductor structure includes defining a first recess in an insulation layer. The method further includes forming a protection layer along a sidewall of the first recess. The method further includes forming a first conductive line in the first recess and in direct contact with the protection layer. The method further includes depositing a first insulation material over the first conductive line. The method further includes defining a second recess in the first insulation material. The method further includes forming a second conductive line in the second recess. The method further includes forming a via extending from the second conductive line, wherein the via directly contacts a sidewall of the protection layer.
    Type: Application
    Filed: January 19, 2023
    Publication date: May 18, 2023
    Inventors: Te-Hsin CHIU, Wei-An LAI, Meng-Hung SHEN, Wei-Cheng LIN, Jiann-Tyng TZENG, Kam-Tou SIO