Patents by Inventor Karthik Balakrishnan

Karthik Balakrishnan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180269204
    Abstract: An electrical device including a vertical transistor device connected to a vertical diode. The vertical diode connected transistor device including a vertically orientated channel. The vertical diode connected transistor device also includes a first diode source/drain region provided by an electrically conductive surface region of a substrate at a first end of the diode vertically orientated channel, and a second diode source/drain region present at a second end of the vertically orientated channel. The vertical diode also includes a diode gate structure in electrical contact with the first diode source/drain region.
    Type: Application
    Filed: December 4, 2017
    Publication date: September 20, 2018
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20180269197
    Abstract: An electric static discharge (ESD) diode pair is disclosed. The first diode of the device includes a first diode junction portion having vertically orientated and horizontally oriented portions of a first conductivity and a second diode junction portion of a second conductivity in direct contact with both of the vertically orientated and horizontally orientated portions of the first diode junction portion. The second diode of the device includes a first diode junction portion having vertically orientated and horizontally oriented portions of a second conductivity and a second diode junction portion having a first conductivity in direct contact with both of the vertically orientated and horizontally orientated portions of the first diode junction portion. A common electrical contact is in direct contact first diode junction portion for each of the first diode and the second diode.
    Type: Application
    Filed: March 20, 2017
    Publication date: September 20, 2018
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Alexander Reznicek, Jeng-Bang Yau
  • Publication number: 20180269205
    Abstract: An electrical device including a vertical transistor device connected to a vertical diode. The vertical diode connected transistor device including a vertically orientated channel. The vertical diode connected transistor device also includes a first diode source/drain region provided by an electrically conductive surface region of a substrate at a first end of the diode vertically orientated channel, and a second diode source/drain region present at a second end of the vertically orientated channel. The vertical diode also includes a diode gate structure in electrical contact with the first diode source/drain region.
    Type: Application
    Filed: February 28, 2018
    Publication date: September 20, 2018
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10079228
    Abstract: An electric static discharge (ESD) diode pair is disclosed. The first diode of the device includes a first diode junction portion having vertically orientated and horizontally oriented portions of a first conductivity and a second diode junction portion of a second conductivity in direct contact with both of the vertically orientated and horizontally orientated portions of the first diode junction portion. The second diode of the device includes a first diode junction portion having vertically orientated and horizontally oriented portions of a second conductivity and a second diode junction portion having a first conductivity in direct contact with both of the vertically orientated and horizontally orientated portions of the first diode junction portion. A common electrical contact is in direct contact first diode junction portion for each of the first diode and the second diode.
    Type: Grant
    Filed: March 20, 2017
    Date of Patent: September 18, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Alexander Reznicek, Jeng-Bang Yau
  • Patent number: 10079288
    Abstract: A method and structure is provided in which germanium or a germanium tin alloy can be used as a channel material in either planar or non-planar architectures, with a functional gate structure formed utilizing either a gate first or gate last process. After formation of the functional gate structure, and contact openings within a middle-of-the-line (MOL) dielectric material, a hydrogenated silicon layer is formed that includes hydrogenated crystalline silicon regions disposed over the germanium or a germanium tin alloy, and hydrogenated amorphous silicon regions disposed over dielectric material. The hydrogenated amorphous silicon regions can be removed selective to the hydrogenated crystalline silicon regions, and thereafter a contact structure is formed on the hydrogenated crystalline silicon regions.
    Type: Grant
    Filed: June 7, 2016
    Date of Patent: September 18, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Bahman Hekmatshoartabari, Alexander Reznicek
  • Publication number: 20180261630
    Abstract: A semiconductor structure including a multi-faceted epitaxial semiconductor structure within both a source region and a drain region and on exposed surfaces of a semiconductor fin is provided. The multi-faceted epitaxial semiconductor structure includes faceted epitaxial semiconductor material portions located on different portions of each vertical sidewall of the semiconductor fin and a topmost faceted epitaxial semiconductor material portion that is located on an exposed topmost horizontal surface of the semiconductor fin. The multi-faceted epitaxial semiconductor structure has increased surface area and thus an improvement in contact resistance can be obtained utilizing the same.
    Type: Application
    Filed: May 15, 2018
    Publication date: September 13, 2018
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10074720
    Abstract: After forming semiconductor fins including vertically oriented alternating first digital alloy sublayer portions comprised of SiGe and second digital alloy sublayer portions comprised of Si on sidewalls of a sacrificial fin located on a substrate, the sacrificial fin is removed, leaving the semiconductor fins protruding from a top surface of the substrate. The SiGe and Si digital alloy sublayer portions are formed using isotopically enriched Si and Ge source gases to minimize isotopic mass variation in the SiGe and Si digital alloy sublayer portions.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: September 11, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Stephen W. Bedell, Pouya Hashemi, Bahman Hekmatshoartabari, Alexander Reznicek
  • Patent number: 10069008
    Abstract: A semiconductor device including a fin structure present on a supporting substrate to provide a vertically orientated channel region. A first source/drain region having a first epitaxial material with a diamond shaped geometry is present at first end of the fin structure that is present on the supporting substrate. A second source/drain region having a second epitaxial material with said diamond shaped geometry that is present at the second end of the fin structure. A same geometry for the first and second epitaxial material of the first and second source/drain regions provides a symmetrical device.
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: September 4, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10070316
    Abstract: A mobile device includes a memory having at least one delegated administrator stored thereon, the delegated administrator is configured to apply a policy to the mobile device based on at least one permission a delegated administrator configured to apply a policy to the mobile device based on the at least one permission. The mobile device also includes at least one processor having a mobile device management (MDM) framework. The MDM framework receives the at least one permission from the device administrator, delegates the at least one permission to the delegated administrator, and enforces the policy on the mobile device.
    Type: Grant
    Filed: August 5, 2016
    Date of Patent: September 4, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sanjay Patil, Karthik Balakrishnan, Dushyant Vipradas
  • Publication number: 20180247873
    Abstract: In one example, a field effect transistor includes a pair of fins positioned in a spaced apart relation. Each of the fins includes germanium. Source and drain regions are formed on opposite ends of the pair of fins and include silicon. A gate is wrapped around the pair of fins, between the source and drain regions.
    Type: Application
    Filed: May 1, 2018
    Publication date: August 30, 2018
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10056379
    Abstract: A method for manufacturing a semiconductor device comprises forming a bottom source/drain region on a semiconductor substrate, forming a channel region extending vertically from the bottom source/drain region, growing a top source/drain region from an upper portion of the channel region, and growing a gate region from a lower portion of the channel region under the upper portion, wherein the gate region is on more than one side of the channel region.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: August 21, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Alexander Reznicek, Jeng-Bang Yau
  • Patent number: 10056254
    Abstract: A method forms first and second sets of fins. The first set includes a first stack of layer pairs where each layer pair contains a layer of Si having a first thickness and a layer of SiGe having a second thickness. The second set of fins includes a second stack of layer pairs where at least one layer pair contains a layer of Si having the first thickness and a layer of SiGe having a third thickness greater than the second thickness. The method further includes removing the layers of SiGe from the first stack leaving first stacked Si nanowires spaced apart by a first distance and from the second stack leaving second stacked Si nanowires spaced apart by a second distance corresponding to the third thickness. The method further includes forming a first dielectric layer on the first nanowires and a second, thicker dielectric layer on the second nanowires.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: August 21, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10056482
    Abstract: A method for fabricating a semiconductor structure is provided that includes the steps of: forming a structure including a substrate, a counter-doped layer on the substrate, and a heavily doped source contact layer on a side of the counter-doped layer opposite the substrate; and forming an oxide layer on a side of the heavily doped source contact layer opposite the counter-doped layer, wherein the oxide layer has a vertical dimension that is a difference between a length of a long channel thick oxide device and a length of a short channel non-thick oxide device.
    Type: Grant
    Filed: April 12, 2017
    Date of Patent: August 21, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20180233503
    Abstract: CMOS inverters including gate-all-around vertical transistors are fabricated without requiring center gate contacts, thereby allowing close positioning of the transistors. The gate contact and the drain contact of the transistors are shared. Wiring of inverter input, output and power supply lines is simplified.
    Type: Application
    Filed: November 28, 2017
    Publication date: August 16, 2018
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20180233502
    Abstract: A complementary metal oxide semiconductor (CMOS) vertical transistor structure with closely spaced p-type and n-type vertical field effect transistors (FETs) is provided. After forming a dielectric material portion contacting a proximal sidewall of a first semiconductor fin for formation of a p-type vertical FET and a proximal sidewall of a second semiconductor fin for formation of an n-type vertical FET, a first gate structure is formed contacting a distal sidewall of the first semiconductor fin, and a second gate structure is formed contacting a distal sidewall of the second semiconductor fin. Because no gate structures are formed between the first and second semiconductor fins, the p-type vertical FET is spaced from the n-type FET only by the dielectric material portion.
    Type: Application
    Filed: November 14, 2017
    Publication date: August 16, 2018
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20180233501
    Abstract: A complementary metal oxide semiconductor (CMOS) vertical transistor structure with closely spaced p-type and n-type vertical field effect transistors (FETs) is provided. After forming a dielectric material portion contacting a proximal sidewall of a first semiconductor fin for formation of a p-type vertical FET and a proximal sidewall of a second semiconductor fin for formation of an n-type vertical FET, a first gate structure is formed contacting a distal sidewall of the first semiconductor fin, and a second gate structure is formed contacting a distal sidewall of the second semiconductor fin. Because no gate structures are formed between the first and second semiconductor fins, the p-type vertical FET is spaced from the n-type FET only by the dielectric material portion.
    Type: Application
    Filed: February 16, 2017
    Publication date: August 16, 2018
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20180226415
    Abstract: After forming a first functional gate stack located on a first body region of a first semiconductor material portion located in a first region of a substrate and a second functional gate stack located on a second body region of a second semiconductor material portion located in a second region of the substrate, a ferroelectric gate interconnect structure is formed connecting the first functional gate stack and the second functional gate stack. The ferroelectric gate interconnect structure includes a U-shaped bottom electrode structure, a U-shaped ferroelectric material liner and a top electrode structure.
    Type: Application
    Filed: February 3, 2017
    Publication date: August 9, 2018
    Inventors: Takashi Ando, Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20180226416
    Abstract: After forming a first functional gate stack located on a first body region of a first semiconductor material portion located in a first region of a substrate and a second functional gate stack located on a second body region of a second semiconductor material portion located in a second region of the substrate, a ferroelectric gate interconnect structure is formed connecting the first functional gate stack and the second functional gate stack. The ferroelectric gate interconnect structure includes a U-shaped bottom electrode structure, a U-shaped ferroelectric material liner and a top electrode structure.
    Type: Application
    Filed: November 16, 2017
    Publication date: August 9, 2018
    Inventors: Takashi Ando, Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20180226417
    Abstract: After forming a first functional gate stack located on a first body region of a first semiconductor material portion located in a first region of a substrate and a second functional gate stack located on a second body region of a second semiconductor material portion located in a second region of the substrate, a ferroelectric gate interconnect structure is formed connecting the first functional gate stack and the second functional gate stack. The ferroelectric gate interconnect structure includes a U-shaped bottom electrode structure, a U-shaped ferroelectric material liner and a top electrode structure.
    Type: Application
    Filed: November 16, 2017
    Publication date: August 9, 2018
    Inventors: Takashi Ando, Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10043825
    Abstract: A method comprises forming shallow trenches in an intrinsic base semiconductor layer and forming a first base layer thereon; applying a first mask to the layer; etching the first base layer; forming a second base layer on the intrinsic base semiconductor layer adjacent the first base layer; removing the first mask; applying a second mask to the base layers; simultaneously etching the layers to produce extrinsic bases of reduced cross dimensions, a length of the second extrinsic base layer being different from a length of the first extrinsic base layer; disposing spacers on the extrinsic bases; etching around the bases leaving the intrinsic base semiconductor layer under the bases and spacers; implanting ions into sides of the intrinsic base semiconductor layer under the extrinsic bases to form emitter/collector junctions; depositing semiconductor material adjacent to the junctions and the trenches; and removing the applied second mask.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: August 7, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek